CN107858644A - 金属板、金属板的制造方法、和使用金属板制造蒸镀掩模的方法 - Google Patents
金属板、金属板的制造方法、和使用金属板制造蒸镀掩模的方法 Download PDFInfo
- Publication number
- CN107858644A CN107858644A CN201711267436.7A CN201711267436A CN107858644A CN 107858644 A CN107858644 A CN 107858644A CN 201711267436 A CN201711267436 A CN 201711267436A CN 107858644 A CN107858644 A CN 107858644A
- Authority
- CN
- China
- Prior art keywords
- metallic plate
- deposition mask
- sample
- face
- metal sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 title claims abstract description 253
- 238000000034 method Methods 0.000 title claims abstract description 100
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 64
- 238000005530 etching Methods 0.000 claims abstract description 51
- 239000002184 metal Substances 0.000 claims description 122
- 229910052751 metal Inorganic materials 0.000 claims description 122
- 239000000463 material Substances 0.000 claims description 58
- 239000000758 substrate Substances 0.000 claims description 58
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 239000000956 alloy Substances 0.000 claims description 9
- 229910001374 Invar Inorganic materials 0.000 claims description 8
- 238000000137 annealing Methods 0.000 abstract description 17
- 230000008020 evaporation Effects 0.000 description 37
- 238000001704 evaporation Methods 0.000 description 37
- 238000005096 rolling process Methods 0.000 description 28
- 239000011521 glass Substances 0.000 description 22
- 239000011368 organic material Substances 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 230000003628 erosive effect Effects 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000012216 screening Methods 0.000 description 4
- 238000010025 steaming Methods 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 235000013399 edible fruits Nutrition 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000009527 percussion Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 210000002027 skeletal muscle Anatomy 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
- B21B1/22—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/26—Methods of annealing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
- C23F1/04—Chemical milling
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/28—Acidic compositions for etching iron group metals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013-002924 | 2013-01-10 | ||
JP2013002924 | 2013-01-10 | ||
JP2013-153920 | 2013-07-24 | ||
JP2013153920A JP5382257B1 (ja) | 2013-01-10 | 2013-07-24 | 金属板、金属板の製造方法、および金属板を用いて蒸着マスクを製造する方法 |
CN201480003438.3A CN104838037B (zh) | 2013-01-10 | 2014-01-10 | 金属板、金属板的制造方法、和使用金属板制造蒸镀掩模的方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201480003438.3A Division CN104838037B (zh) | 2013-01-10 | 2014-01-10 | 金属板、金属板的制造方法、和使用金属板制造蒸镀掩模的方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN107858644A true CN107858644A (zh) | 2018-03-30 |
Family
ID=50036549
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911326369.0A Pending CN110938798A (zh) | 2013-01-10 | 2014-01-10 | 蒸镀掩模的制造方法 |
CN201711267429.7A Active CN108048793B (zh) | 2013-01-10 | 2014-01-10 | 金属板、金属板的制造方法、和使用金属板制造蒸镀掩模的方法 |
CN201711267436.7A Pending CN107858644A (zh) | 2013-01-10 | 2014-01-10 | 金属板、金属板的制造方法、和使用金属板制造蒸镀掩模的方法 |
CN201480003438.3A Active CN104838037B (zh) | 2013-01-10 | 2014-01-10 | 金属板、金属板的制造方法、和使用金属板制造蒸镀掩模的方法 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911326369.0A Pending CN110938798A (zh) | 2013-01-10 | 2014-01-10 | 蒸镀掩模的制造方法 |
CN201711267429.7A Active CN108048793B (zh) | 2013-01-10 | 2014-01-10 | 金属板、金属板的制造方法、和使用金属板制造蒸镀掩模的方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201480003438.3A Active CN104838037B (zh) | 2013-01-10 | 2014-01-10 | 金属板、金属板的制造方法、和使用金属板制造蒸镀掩模的方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5382257B1 (ja) |
KR (2) | KR101761494B1 (ja) |
CN (4) | CN110938798A (ja) |
WO (1) | WO2014109394A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111254386A (zh) * | 2020-03-26 | 2020-06-09 | 昆山国显光电有限公司 | 掩膜条及掩膜板 |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5455099B1 (ja) | 2013-09-13 | 2014-03-26 | 大日本印刷株式会社 | 金属板、金属板の製造方法、および金属板を用いてマスクを製造する方法 |
JP5516816B1 (ja) | 2013-10-15 | 2014-06-11 | 大日本印刷株式会社 | 金属板、金属板の製造方法、および金属板を用いて蒸着マスクを製造する方法 |
JP6698265B2 (ja) * | 2014-02-14 | 2020-05-27 | 大日本印刷株式会社 | 蒸着マスク装置の製造方法、基板付蒸着マスクおよび積層体 |
JP5641462B1 (ja) | 2014-05-13 | 2014-12-17 | 大日本印刷株式会社 | 金属板、金属板の製造方法、および金属板を用いてマスクを製造する方法 |
KR20180050766A (ko) | 2015-02-10 | 2018-05-15 | 다이니폰 인사츠 가부시키가이샤 | 증착 마스크의 제조 방법, 증착 마스크를 제작하기 위해 사용되는 금속판 및 그 제조 방법 |
KR101603200B1 (ko) * | 2015-04-24 | 2016-03-14 | 엘지이노텍 주식회사 | 금속기판 및 이를 이용한 증착용마스크 |
JP7075214B2 (ja) * | 2015-04-24 | 2022-05-25 | エルジー イノテック カンパニー リミテッド | 金属基板およびこれを用いた蒸着用マスク |
WO2017179719A1 (ja) * | 2016-04-14 | 2017-10-19 | 凸版印刷株式会社 | 蒸着マスク用基材、蒸着マスク用基材の製造方法、および、蒸着マスクの製造方法 |
KR102624714B1 (ko) | 2016-09-12 | 2024-01-12 | 삼성디스플레이 주식회사 | 마스크 및 이를 포함하는 마스크 조립체의 제조방법 |
US20190372002A1 (en) * | 2016-09-14 | 2019-12-05 | Sharp Kabushiki Kaisha | Manufacturing method for mask sheet, vapor deposition mask, and display panel |
WO2018061757A1 (ja) | 2016-09-29 | 2018-04-05 | 大日本印刷株式会社 | 蒸着マスク梱包体および蒸着マスク梱包方法 |
KR102424309B1 (ko) * | 2016-10-07 | 2022-07-25 | 다이니폰 인사츠 가부시키가이샤 | 증착 마스크의 제조 방법, 증착 마스크가 배치된 중간 제품 및 증착 마스크 |
WO2018092531A1 (ja) * | 2016-11-18 | 2018-05-24 | 大日本印刷株式会社 | 蒸着マスク |
JP7121918B2 (ja) * | 2016-12-14 | 2022-08-19 | 大日本印刷株式会社 | 蒸着マスク装置及び蒸着マスク装置の製造方法 |
JP6851820B2 (ja) * | 2016-12-28 | 2021-03-31 | マクセルホールディングス株式会社 | 蒸着用マスク並びにその設置方法及び製造方法 |
WO2018131474A1 (ja) * | 2017-01-10 | 2018-07-19 | 大日本印刷株式会社 | 蒸着マスク、蒸着マスク装置の製造方法および蒸着マスクの製造方法 |
EP4339322A3 (en) * | 2017-09-07 | 2024-06-12 | LG Innotek Co., Ltd. | Metallic material deposition mask for oled pixel deposition, and method for producing same |
JP7317816B2 (ja) * | 2018-06-08 | 2023-07-31 | 大日本印刷株式会社 | 金属板の巻回体、巻回体を備える梱包体、巻回体の梱包方法、巻回体の保管方法、巻回体の金属板を用いた蒸着マスクの製造方法及び金属板 |
WO2020012862A1 (ja) * | 2018-07-09 | 2020-01-16 | 大日本印刷株式会社 | 蒸着マスクの良否判定方法、蒸着マスクの製造方法、蒸着マスク装置の製造方法、蒸着マスクの選定方法および蒸着マスク |
CN112752860A (zh) * | 2018-09-27 | 2021-05-04 | 日铁化学材料株式会社 | 金属掩膜材料及其制造方法、金属掩膜 |
JP2019151936A (ja) * | 2019-06-11 | 2019-09-12 | 大日本印刷株式会社 | 蒸着マスク装置の製造方法、基板付蒸着マスクおよび積層体 |
WO2022092848A1 (ko) * | 2020-10-30 | 2022-05-05 | 에이피에스홀딩스 주식회사 | 증착 마스크 |
KR20220069397A (ko) * | 2020-11-20 | 2022-05-27 | 엘지이노텍 주식회사 | Oled 화소 증착을 위한 증착용 마스크 |
CN113005399A (zh) * | 2021-02-23 | 2021-06-22 | 合肥鑫晟光电科技有限公司 | 掩膜板的制作方法及掩膜板 |
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JPH1034237A (ja) * | 1996-07-30 | 1998-02-10 | Sumitomo Metal Ind Ltd | 平坦度に優れた冷間圧延ステンレス鋼板の製造方法 |
CN1578547A (zh) * | 2003-07-25 | 2005-02-09 | 大日本网目版制造株式会社 | 蒸镀用掩模及其制造方法 |
JP2006247721A (ja) * | 2005-03-11 | 2006-09-21 | Jfe Steel Kk | 凹凸状金属板挟圧用ロールを用いた金属板の形状矯正方法および形状矯正装置 |
CN1965420A (zh) * | 2004-12-09 | 2007-05-16 | 大日本印刷株式会社 | 金属掩模组件及其制造方法、金属带的安装方法以及拉力施加装置 |
CN200989993Y (zh) * | 2006-12-22 | 2007-12-12 | 上海集成电路研发中心有限公司 | 一种两次曝光用长掩模版 |
CN102691031A (zh) * | 2011-03-24 | 2012-09-26 | 三星移动显示器株式会社 | 沉积掩模 |
Family Cites Families (20)
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WO2014109394A1 (ja) | 2014-07-17 |
CN104838037A (zh) | 2015-08-12 |
CN104838037B (zh) | 2017-11-21 |
JP5382257B1 (ja) | 2014-01-08 |
KR102087056B9 (ko) | 2022-08-02 |
KR20150103655A (ko) | 2015-09-11 |
CN108048793B (zh) | 2020-11-03 |
CN108048793A (zh) | 2018-05-18 |
JP2014148740A (ja) | 2014-08-21 |
KR102087056B1 (ko) | 2020-03-10 |
KR101761494B1 (ko) | 2017-07-25 |
KR20170087533A (ko) | 2017-07-28 |
CN110938798A (zh) | 2020-03-31 |
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