CN107833838B - A kind of the high reliability packaging structure and its manufacturing method of air-tightness device - Google Patents
A kind of the high reliability packaging structure and its manufacturing method of air-tightness device Download PDFInfo
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- CN107833838B CN107833838B CN201711171313.3A CN201711171313A CN107833838B CN 107833838 B CN107833838 B CN 107833838B CN 201711171313 A CN201711171313 A CN 201711171313A CN 107833838 B CN107833838 B CN 107833838B
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- air
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- tight packaging
- packaging shell
- bonding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Abstract
The invention discloses a kind of high reliability packaging structures of air-tightness device, comprising: air-tight packaging shell, the air-tight packaging shell include cavity, around side wall and bottom surface；Chip in the cavity of the air-tight packaging shell is set；The chip bonding pad is electrically connected to the conductive bonding wire of the air-tight packaging shell bottom surface base pin；It is covered in the insulating coating on the conductive bonding wire surface, and air-tightness cover board of the air-tight packaging shell on side wall is set.
Description
Technical field
The present invention relates to integrated circuit air-tight packaging technical field more particularly to a kind of high reliability of air-tightness device
Encapsulating structure and its manufacturing method.
Background technique
Air-tight packaging be exactly using cavity made of airtight and waterproof material, by electronic device and the environment of surrounding every
It leaves, by eliminating the steam from encapsulation cavity in seal process, and prevents within the working life stage around device encapsulation
The intrusion of moisture makes device package obtain good long-term reliability, and air-tight packaging is the basis of high reliability packaging.
The encapsulation of microelectronic component can be divided into level Hermetic Package and non-tight dress from seal aspect.High-grade integrated circuit and
Discrete device generallys use level Hermetic Package, mostly uses metal, ceramics, glass-encapsulated cavity, inside is cavity structure, filled with high-purity
Nitrogen or other inert gases, also containing a small amount of other gases, naturally it is also possible to be vacuum, Vacuum Package is air-tight packaging
It is a kind of.Technical grade and business level device generally use plastic package process, and without cavity, chip is entirely wrapped up by polymer material
Firmly, belong to non-hermetically sealed encapsulation.
Generally, more than level Hermetic Package component reliability an order of magnitude higher than non-hermetically sealed encapsulation, level Hermetic Package member
Device generally presses multiple links such as military standard, the design of Aerospace Standard strict control, production, test, inspection, and crash rate is low, more
For highly reliable application field.Non-tight device, applies in general to that environmental condition is preferable, the less high civilian electricity of reliability requirement
Sub- product.
Level Hermetic Package device thermal diffusivity is good, and environmental suitability is stronger, army's grade and aerospace grade component nominal operation environment
Temperature can reach -55 DEG C~125 DEG C.Non-hermetically sealed packaging heat dissipation is poor, is divided into business level according to application field is unusual
And technical grade, business level nominal operation environment temperature are 0 DEG C~70 DEG C, technical grade nominal operation environment temperature is -40 DEG C~85
℃。
Level Hermetic Package main technological steps are usually to carry on the back golden chip and ceramic cartridge welding, bonding wire, capping.Chip welding with
Capping is all made of golden tin preformed soldering Au80Sn20 solder, which possesses that inoxidizability is strong, and creep resistance is good, wetting
Property good, the features such as strength of joint is high and good heat conductivity, be mainly used for optoelectronic packaging, high reliability level Hermetic Package, high-power
Electronic circuit level Hermetic Package and chip package etc..Bonding wire is using stability and the preferable gold thread welding of electric property, microwave
Device generally selects wedge bonding, and one end of chip bonding pad is connected to outside lead in such a way that heat is combined with pressure
The other end.
Level Hermetic Package is different with the non-tight plastic packaging packaging technology of industry and commercial use, fills among bonding wire without plastic packaging material
Protection, device is easy to cause bonding wire contact short circuit to be asked because of external environment movement under military project and aerospace high speed, high impact-resistant system
Topic.
Meanwhile the cavity inside of level Hermetic Package component still can contain a small amount of steam, Chinese military standard and army, the U.S.
Clearly limitation has all been done, it is specified that internal moisture diffusion cannot surpass with cavity inside moisture content of the standard to level Hermetic Package component
Cross 5000ppm.This is because moisture content height may cause some integrity problems, including internal chemical pollution, accelerate internal
Portion's corrosion of metal, the mainly destruction of the bonding region to lead and without passivation layer protection, may also lead to component insulating properties
It can decline or parameter is overproof.Relay function can be caused to fail under low temperature.Once caused more batches since internal moisture diffusion is exceeded
Component failure simultaneously leads to extremely serious system disaster.
Air-tightness component good, high reliablity because of thermal diffusivity, is widely used in military use product and field of aerospace.
But directly covered after traditional air-tight packaging device bonding wire, be applied to some high speed HI high impact class environment in when, can because
The influence of external environment and the bonding wire deforming contact for being easy to cause device inside, to cause product short-circuit.If after bonding wire
Increase by one of dispensing and sunken cord and protect technique, and gaseous volatilization can be generated at high temperature because of epoxy resin, device inside is caused to pollute,
It can also cause with steam chemistry and electrochemistry to react simultaneously, generate electrolyte, thus the further electrical property of influence product.
Therefore, conventional dispensing sunken cord technique protection bonding wire be also not appropriate for air-tight packaging device products.
Therefore, it is badly in need of a kind of novel air-tight packaging structure and at least is partially solved above-mentioned existing in the prior art ask
Topic.
Summary of the invention
Aiming at the problems existing in the prior art, according to one embodiment of present invention, a kind of air-tightness device is provided
High reliability packaging structure, comprising: air-tight packaging shell, the air-tight packaging shell include cavity, around side wall and bottom
Face；Chip in the cavity of the air-tight packaging shell is set；The chip bonding pad is electrically connected to the air-tightness envelope
The conductive bonding wire of tubulature shell bottom surface base pin；It is covered in the insulating coating on the conductive bonding wire surface, and is arranged described airtight
Property air-tightness cover board of the encapsulating package on the side wall.
In one embodiment of the invention, the exposed surface of the chip and air-tight packaging shell bottom surface is naked
Dew surface is covered with insulating coating.
In one embodiment of the invention, the chip by solder attachment to air-tight packaging shell bottom surface,
The air-tightness cover board is by solder attachment to air-tight packaging shell on side wall.
In one embodiment of the invention, the solder is golden tin solder.
In one embodiment of the invention, the material of the insulating coating is common dielectric silica, nitridation
Silicon or insulation organic matter.
According to another embodiment of the invention, a kind of manufacturer of the high reliability packaging structure of air-tightness device is provided
Method, comprising: air-tight packaging shell is provided；The welding chip in encapsulating package；Drawn using the conductive bonding wire containing insulating coating
Chip bonding pad is electrically connected to the pin on air-tight packaging shell by line bonding；And packaging body is covered.
In another embodiment of the present invention, the process conditions of the welding chip in encapsulating package include: to make
Use Au80Sn20 solder sheet as solder；Solder oxidation is prevented using the mixed gas of nitrogen or nitrogen hydrogen simultaneously；Welding temperature
Degree is not higher than 320 DEG C, and the highest temperature residence time is no more than 30 seconds；And vibration in 4 to 6 seconds is carried out when welding.
In another embodiment of the present invention, the process conditions of the wire bonding include: that bonding temperature is set as 140
DEG C to 160 DEG C；Bonding supersonic frequency is 150-220KHz, and the time is 20 to 40 milliseconds；And bonding pressure is 20 to 30 grams.
In another embodiment of the present invention, described is that parallel peak welds, laser melts to packaging body progress capping method
Weldering or vacuum back-flow weldering.
According to still another embodiment of the invention, a kind of manufacturer of the high reliability packaging structure of air-tightness device is provided
Method, comprising: air-tight packaging shell is provided；The welding chip in encapsulating package；Chip bonding pad is electrically connected by wire bonding
Pin onto air-tight packaging shell；Outside lead, chip drain surface, air-tight packaging shell bottom surface outer drain surface on shape
At insulating coating；And packaging body is covered.
In yet another embodiment of the present invention, the drain surface outside lead, chip, air-tight packaging shell bottom surface
Outer drain surface on formed insulating coating method include chemical vapor deposition or physical vapour deposition (PVD).
The present invention is in a kind of high reliability packaging structure of air-tightness device, by the bonding wire surface of air-tight packaging
One layer of insulating coating material is deposited, on the one hand solving device will not connect in systems because of bonding wire under high speed, HI high impact environment
It touches and is shorted undesirable defect；On the other hand it does not need to use a large amount of epoxy resin glue using conventional technique of sunkening cord again,
It avoids the volatilization of steam in the high temperature environment and leads to device contamination and electrochemical corrosion.
Detailed description of the invention
For the above and other advantages and features for each embodiment that the present invention is furture elucidated, will be presented with reference to attached drawing
The more specific description of various embodiments of the present invention.It is appreciated that these attached drawings only describe exemplary embodiments of the invention, therefore
It is not to be regarded as being restriction on its scope.In the accompanying drawings, in order to cheer and bright, identical or corresponding component will use identical or class
As mark indicate.
Fig. 1 shows a kind of high reliability packaging structure 100 of air-tightness device according to an embodiment of the invention
Diagrammatic cross-section.
Fig. 2 shows a kind of high reliability packaging structures 200 of air-tightness device according to another embodiment of the invention
Diagrammatic cross-section.
Fig. 3 A to Fig. 3 D shows the high reliability packaging for forming a kind of air-tightness device according to one embodiment of present invention
The process diagrammatic cross-section of structure 100.
Fig. 4 shows the high reliability packaging structure for forming a kind of air-tightness device according to one embodiment of present invention
100 flow chart.
Fig. 5 A to Fig. 5 E shows the high reliability packaging for forming a kind of air-tightness device according to one embodiment of present invention
The process diagrammatic cross-section of structure 200.
Fig. 6 shows the high reliability packaging structure for forming a kind of air-tightness device according to one embodiment of present invention
200 flow chart.
Specific embodiment
In the following description, with reference to each embodiment, present invention is described.However, those skilled in the art will recognize
Know can in the case where none or multiple specific details or with other replacements and/or addition method, material or component
Implement each embodiment together.In other situations, well known structure, material or operation are not shown or are not described in detail in order to avoid making this
The aspects of each embodiment of invention is obscure.Similarly, for purposes of explanation, specific quantity, material and configuration are elaborated, with
Comprehensive understanding to the embodiment of the present invention is just provided.However, the present invention can be implemented in the case where no specific detail.This
Outside, it should be understood that each embodiment shown in the accompanying drawings is illustrative expression and is not drawn necessarily to scale.
In the present specification, the reference of " one embodiment " or " embodiment " is meaned to combine embodiment description
A particular feature, structure, or characteristic is included at least one embodiment of the invention.Occur in everywhere in this specification short
Language " in one embodiment " is not necessarily all referring to the same embodiment.
It should be noted that the embodiment of the present invention is described processing step with particular order, however this is only
Facilitate and distinguish each step, and is not the sequencing for limiting each step, it in different embodiments of the invention, can be according to work
Skill is adjusted to adjust the sequencing of each step.
A kind of high reliability packaging structure of air-tightness device provided by the invention, passes through the bonding wire table in air-tight packaging
Face deposits one layer of insulating coating material, and on the one hand solving device in systems will not be because of bonding wire under high speed, HI high impact environment
It contacts and is shorted undesirable defect；On the other hand it does not need to use a large amount of epoxide-resin glue using conventional technique of sunkening cord again
Water avoids the volatilization of steam in the high temperature environment and leads to device contamination and electrochemical corrosion.
A kind of high reliability of air-tightness device according to an embodiment of the invention is described in detail below with reference to Fig. 1
Encapsulating structure.Fig. 1 shows a kind of high reliability packaging structure 100 of air-tightness device according to an embodiment of the invention
Diagrammatic cross-section.As shown in Figure 1, the high reliability packaging structure 100 of the air-tightness device further comprises air-tight packaging pipe
Shell 110；Chip 130；Conductive bonding wire 140 and air-tight packaging cover board 160.
Air-tight packaging shell 110 has the cavity 111 that can accommodate chip 130 and conductive bonding wire 140, surround side wall 112
And the bottom surface 113 with pin (not shown) and for carrying chip 130.
The material of air-tight packaging shell 110 can choose ceramics, metal, glass and silicon etc..
Chip 130 passes through golden soldering tablet 120 (general to use gold tin preformed soldering Au80Sn20 solder) bonding
To 113 corresponding region of the bottom surface of air-tight packaging shell 110.
Conductive bonding wire 140 is electrically connected the correspondence pin in chip bonding pad (not shown) to 110 bottom surface 113 of encapsulating package
(not shown), the surface of conductive bonding wire 140 are covered with insulating coating 141, insulating coating 141 play packaging body high speed,
Under HI high impact environment, the effect of short circuit will not occur after the mutual making contact of conductive bonding wire 140.It covers on the surface of conductive bonding wire 140
The insulating coating 141 of lid it is general by chemical plating, physically or chemically the techniques such as vapor deposition (PVD or CVD) are formed, other films
Deposition or formation process and coating manufacturing process can also be used as the insulating coating 141 of the surface covering of conductive bonding wire 140
Manufacturing process.The material of insulating coating 141 is common dielectric silica, silicon nitride or insulation organic matter.
Chip bonding pad is connected to the correspondence pin on 110 bottom surface 113 of encapsulating package, conductive welding wire one by conductive bonding wire 140
As be gold thread, be bonded to needed on pad heat, ultrasound it is synchronous with bonding force progress.Temperature is set as 140 DEG C to 160
DEG C, preferably 150 DEG C, supersonic frequency is generally 150-220KHz, and ultrasonic time is controlled in 20-40ms, and pressure is generally 20-
30g.With the layer gold on chip bonding pad intermetallic atom phase counterdiffusion occurs for gold thread, ensure that stable connection；Gold thread and envelope
The bonding technology of the correspondence pin of tubulature shell is similar.
Close property encapsulation cover plate 160 pass through golden soldering tablet 150 (with golden soldering tablet 120 is similar, general pre- using golden tin
Molding weld tabs Au80Sn20 solder) be bonded to air-tight packaging shell 110 circular side wall 112 top surface, formed well
Airtight envelope.Common capping mode is the weldering of parallel peak, laser fusion welding, vacuum back-flow weldering etc., air pressure inside after capping
It is below 101kPa, and elevated-temperature seal advantageously reduces internal moisture diffusion, because 300 degrees Celsius or more of capping high temperature is not only
It can make that steam excludes and moisture content at a temperature of this in atmosphere is very low well.
Fig. 2 shows a kind of high reliability packaging structures 200 of air-tightness device according to another embodiment of the invention
Diagrammatic cross-section.As shown in Fig. 2, the high reliability packaging structure 200 of the air-tightness device further comprises air-tight packaging
Shell 210；Chip 230；Conductive bonding wire 240 and air-tight packaging cover board 270.
With a kind of high reliability packaging structure 100 of air-tightness device shown in FIG. 1 the difference is that implementing shown in Fig. 2
Example air-tightness device high reliability packaging structure 200 insulating coating 250 in addition to be covered in conductive bonding wire 240 surface it
Outside, also it is covered in the exposed surface of the upper surface of chip 230,210 bottom surface 213 of air-tight packaging shell.In the present embodiment
Insulating coating, protection while may include to bonding wire, welding region, exposed weld pad, promoted device entirety unfailing performance.Absolutely
The material of edge coating 250 is common dielectric silica, silicon nitride or insulation organic matter.
Insulating coating 250 is similar with the insulating coating 141 in previous embodiment, and in packaging body high speed, HI high impact ring
Under border, play make the mutual making contact of conductive bonding wire 240 or with contact elsewhere after will not occur short circuit effect.This reality
The insulating coating 250 in example is applied generally to be formed by the techniques such as (PVD or CVD) that are physically or chemically vapor-deposited.
The high reliability packaging knot to form a kind of air-tightness device is described in detail below with reference to Fig. 3 A to Fig. 3 D and Fig. 4
The process of structure 100.Fig. 3 A to Fig. 3 D shows the high reliability for forming a kind of air-tightness device according to one embodiment of present invention
The process diagrammatic cross-section of encapsulating structure 100.Fig. 4 is shown forms a kind of air-tightness device according to one embodiment of present invention
The flow chart 400 of the high reliability packaging structure 100 of part.
Firstly, as shown in Figure 3A, providing air-tight packaging shell 110 in step 401.The material of air-tight packaging shell 110
Material can choose ceramics, metal, glass and/or silicon etc..Air-tight packaging shell 110 has and can accommodate chip and conductive bonding wire
Cavity 111, the bottom surface 113 around side wall 112 and with pin (not shown) and for carrying chip.
Next, in step 402, as shown in Figure 3B, welding chip 130 in encapsulating package.Chip 130 passes through golden soldering
Tablet 120 (general using gold tin preformed soldering Au80Sn20 solder) is bonded to the bottom surface of air-tight packaging shell 110
Corresponding region in 113.Chip 130 generally carries on the back golden chip, and encapsulating package is generally ceramic cartridge, carries on the back golden chip and ceramic tube
Shell welds.A kind of specific welding procedure is as follows: when carrier is placed on heating device surface, needing to wait until bed temperature
Stablize；Meanwhile it needing using nitrogen (N2) or nitrogen (N2)/hydrogen (H2) (90/10) it is mixed gas protected in carrier surface,
For preventing solder oxidation；Use Au80Sn20 solder sheet as solder, solder fusion temperature is 280 DEG C；When welding, it need to ensure
The maximum temperature of welding does not exceed 320 DEG C, and the maximum temperature lower residence time does not exceed 30 seconds；It is needed in solder melting process
It wants 5 seconds or so time to be shaken, to guarantee that solder sufficiently tiles therebetween, reduces voidage.
Next, as shown in Figure 3 C, using the conductive bonding wire 140 containing insulating coating 141, wire bonding in step 403
Pin of the electrical connection chip bonding pad to encapsulating package.
Insulating coating 141 is covered in the surface of conductive bonding wire 140, and insulating coating 141 is played in packaging body high speed, HI high impact
Under environment, short circuit will not occur after the mutual making contact of conductive bonding wire 140.The insulating coating of the surface covering of conductive bonding wire 140
141 pass through chemical plating, physically or chemically the techniques shape such as vapor deposition (PVD or CVD) generally before lead key closing process starts
At other films deposition or formation process and coating manufacturing process can also be used as the exhausted of the surface covering of conductive bonding wire 140
The manufacturing process of edge coating 141.
Conductive bonding wire 140 connects the correspondence pin on chip bonding pad to 110 bottom surface 113 of encapsulating package, and conductive bonding wire is general
For gold thread, it is bonded to and needs heat, ultrasound are synchronous with bonding force to carry out on pad.Temperature is set as 140 DEG C to 160 DEG C,
Preferably 150 DEG C, supersonic frequency is generally 150-220KHz, and ultrasonic time is controlled in 20-40ms, and pressure is generally 20-30g.
With the layer gold on chip bonding pad intermetallic atom phase counterdiffusion occurs for gold thread, ensure that stable connection；Gold thread and package tube
The bonding technology of the correspondence pin of shell is similar with the bonding technology of pad with gold thread.
Finally, as shown in Figure 3D, being covered to packaging body in step 404.In this step, by close property encapsulation cover plate
160 by golden soldering tablet 150 (it is similar with golden soldering tablet 120, it is general using golden tin preformed soldering Au80Sn20 alloy weldering
Material) be bonded to air-tight packaging shell 110 circular side wall 112 top surface, form good airtight envelope.Common envelope
Lid mode is the weldering of parallel peak, and laser fusion welding, vacuum back-flow weldering etc., air pressure inside is below 101kPa, and elevated-temperature seal after capping
Advantageously reduce internal moisture diffusion because 300 degrees Celsius or more of capping high temperature can not only make well steam exclude and
Moisture content at a temperature of this in atmosphere is very low.
Another embodiment of the invention forms a kind of process of the high reliability packaging structure 200 of air-tightness device, with
The process that above-mentioned first embodiment forms a kind of high reliability packaging structure 100 of air-tightness device is slightly different.
The high reliability packaging knot to form a kind of air-tightness device is described in detail below with reference to Fig. 5 A to Fig. 5 E and Fig. 6
The process of structure 200.Fig. 5 A to Fig. 5 E shows the high reliability for forming a kind of air-tightness device according to one embodiment of present invention
The process diagrammatic cross-section of encapsulating structure 200.Fig. 6 is shown forms a kind of air-tightness device according to one embodiment of present invention
The flow chart 600 of the high reliability packaging structure 200 of part.
Firstly, as shown in Figure 5A, providing air-tight packaging shell 210 in step 601.The material of air-tight packaging shell 210
Material can choose ceramics, metal, glass and silicon etc..Air-tight packaging shell 210 has and can accommodate chip and conductive bonding wire
Cavity 211, the bottom surface 213 around side wall 212 and with pin (not shown) and for carrying chip.
Next, in step 602, as shown in Figure 5 B, welding chip 230 in encapsulating package.Chip 230 passes through golden soldering
Tablet 220 (general using gold tin preformed soldering Au80Sn20 solder) is bonded to the bottom surface of air-tight packaging shell 210
Corresponding region in 213.Chip 230 generally carries on the back golden chip, and encapsulating package is generally ceramic cartridge, carries on the back golden chip and ceramic tube
Shell welds.A kind of specific welding procedure is as follows: when carrier is placed on heating device surface, needing to wait until bed temperature
Stablize；Meanwhile it needing using nitrogen (N2) or nitrogen (N2)/hydrogen (H2) (90/10) it is mixed gas protected in carrier surface,
For preventing solder oxidation；Use Au80Sn20 solder sheet as solder, solder fusion temperature is 280 DEG C；When welding, it need to ensure
The maximum temperature of welding does not exceed 320 DEG C, and the maximum temperature lower residence time does not exceed 30 seconds；It is needed in solder melting process
It wants 5 seconds or so time to be shaken, to guarantee that solder sufficiently tiles therebetween, reduces voidage.
Next, as shown in Figure 5 C, using conductive bonding wire 240, wire bonding electrical connection chip bonding pad is arrived in step 603
The pin of encapsulating package.
Conductive bonding wire 240 connects the correspondence pin on chip bonding pad to 210 bottom surface 213 of encapsulating package, conductive bonding wire 240 1
As be gold thread, be bonded to needed on pad heat, ultrasound it is synchronous with bonding force progress.Temperature is set as 140 DEG C to 160
DEG C, preferably 150 DEG C, supersonic frequency is generally 150-220KHz, and ultrasonic time is controlled in 20-40ms, and pressure is generally 20-
30g.With the layer gold on chip bonding pad intermetallic atom phase counterdiffusion occurs for gold thread, ensure that stable connection；Gold thread and envelope
The bonding technology of the correspondence pin of tubulature shell is similar with the bonding technology of pad with gold thread.
Next, as shown in Figure 5 D, deposition forms insulating coating 250 in step 604.Insulating coating 250 generally passes through object
Reason or the techniques such as chemical vapor deposition (PVD or CVD) are formed, uniform fold in the surface of conductive bonding wire 240, chip 230 it is upper
On the exposed surface of surface and 210 bottom surface 213 of air-tight packaging shell.The material of insulating coating 250 is common exhausted
The medium oxidizing silicon of edge, silicon nitride or insulation organic matter.
The effect of insulating coating 250 is under packaging body high speed, HI high impact environment, and playing touches conductive bonding wire 240 mutually
Hit contact or with contact elsewhere after short-circuit effect will not occur.Insulation is formed using the method in the present embodiment to apply
Layer, may include to bonding wire, welding region, and exposed weld pad is protected simultaneously, promote the unfailing performance of device entirety.
Finally, as shown in fig. 5e, being covered to packaging body in step 605.In this step, by close property encapsulation cover plate
270 by golden soldering tablet 260 (it is similar with golden soldering tablet 220, it is general using golden tin preformed soldering Au80Sn20 alloy weldering
Material) be bonded to air-tight packaging shell 210 circular side wall 212 top surface, form good airtight envelope.Common envelope
Lid mode is the weldering of parallel peak, and laser fusion welding, vacuum back-flow weldering etc., air pressure inside is below 101kPa, and elevated-temperature seal after capping
Advantageously reduce internal moisture diffusion because 300 degrees Celsius or more of capping high temperature can not only make well steam exclude and
Moisture content at a temperature of this in atmosphere is very low.
A kind of high reliability packaging structure of air-tightness device provided by the invention, passes through the bonding wire table in air-tight packaging
Face deposits one layer of insulating coating material, and on the one hand solving device in systems will not be because of bonding wire under high speed, HI high impact environment
It contacts and is shorted undesirable defect；On the other hand it does not need to use a large amount of epoxide-resin glue using conventional technique of sunkening cord again
Water avoids the volatilization of steam in the high temperature environment and leads to device contamination and electrochemical corrosion.
Although described above is various embodiments of the present invention, however, it is to be understood that they are intended only as example to present
, and without limitation.For those skilled in the relevant art it is readily apparent that various combinations, modification can be made to it
Without departing from the spirit and scope of the invention with change.Therefore, the width of the invention disclosed herein and range should not be upper
It states disclosed exemplary embodiment to be limited, and should be defined according only to the appended claims and its equivalent replacement.
Claims (10)
1. a kind of high reliability packaging structure of air-tightness device, comprising:
Air-tight packaging shell, the air-tight packaging shell include cavity, around side wall and bottom surface；
Chip in the cavity of the air-tight packaging shell is set；
The chip bonding pad is electrically connected to the conductive bonding wire of the air-tight packaging shell bottom surface base pin；
It is covered in the insulating coating on the conductive bonding wire surface, the material of the insulating coating is silicon oxide or silicon nitride, and
Air-tightness cover board of the air-tight packaging shell on side wall is set, and air-tightness cover board passes through golden soldering tablet key
The top surface around side wall of air-tight packaging shell is closed, bonding temperature is higher than 300 degrees Celsius.
2. the high reliability packaging structure of air-tightness device as described in claim 1, which is characterized in that the chip it is exposed
The exposed surface of surface and air-tight packaging shell bottom surface is covered with insulating coating.
3. the high reliability packaging structure of air-tightness device as described in claim 1, which is characterized in that the chip passes through weldering
Material is attached to air-tight packaging shell bottom surface, and the air-tightness cover board is surround by solder attachment to air-tight packaging shell
On side wall.
4. the high reliability packaging structure of air-tightness device as claimed in claim 3, which is characterized in that the solder is golden tin
Solder.
5. a kind of manufacturing method of the high reliability packaging structure of air-tightness device, comprising:
Air-tight packaging shell is provided；
The welding chip in encapsulating package；
The pipe being electrically connected to chip bonding pad using the conductive bonding wire wire bonding containing insulating coating on air-tight packaging shell
Foot, the material of the insulating coating are silicon oxide or silicon nitride；And
Packaging body is covered, cover board is bonded to the top surface around side wall of air-tight packaging shell by golden soldering tablet,
Wherein bonding temperature is higher than 300 degrees Celsius.
6. method as claimed in claim 5, which is characterized in that the process conditions packet of the welding chip in encapsulating package
It includes:
Use Au80Sn20 solder sheet as solder；
Solder oxidation is prevented using the mixed gas of nitrogen or nitrogen hydrogen simultaneously；
Welding temperature is not higher than 320 DEG C, and the highest temperature residence time is no more than 30 seconds；And
Vibration in 4 to 6 seconds is carried out when welding.
7. method as claimed in claim 5, which is characterized in that the process conditions of the wire bonding include:
Bonding temperature is set as 140 DEG C to 160 DEG C；
Bonding supersonic frequency is 150-220KHz, and the time is 20 to 40 milliseconds；And
Bonding pressure is 20 to 30 grams.
8. method as claimed in claim 5, which is characterized in that it is described to packaging body carry out capping method be parallel peak weldering,
Laser fusion welding or vacuum back-flow weldering.
9. a kind of manufacturing method of the high reliability packaging structure of air-tightness device, comprising:
Air-tight packaging shell is provided；
The welding chip in encapsulating package；
The pin being electrically connected to chip bonding pad by wire bonding on air-tight packaging shell；
Outside lead, chip drain surface, air-tight packaging shell bottom surface outer drain surface on form insulating coating, the insulation applies
The material of layer is silicon oxide or silicon nitride；And
Packaging body is covered, cover board is bonded to the top surface around side wall of air-tight packaging shell by golden soldering tablet,
Wherein bonding temperature is higher than 300 degrees Celsius.
10. method as claimed in claim 9, which is characterized in that the drain surface, air-tight packaging outside lead, chip
It includes chemical vapor deposition or physical vapour deposition (PVD) that the method for insulating coating is formed on the outer drain surface of shell bottom surface.
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| CN112938889B (en) * | 2021-02-01 | 2023-06-16 | 南京理工大学 | MEMS inertial sensor low-stress packaging structure and method based on graphical gold-tin soldering |
| CN112938888B (en) * | 2021-02-01 | 2023-06-16 | 南京理工大学 | MEMS sensor chip packaging structure and method with stress adjustment |
| CN113894460B (en) * | 2021-04-19 | 2023-04-18 | 江苏博睿光电股份有限公司 | Self-propagating brazing film and preparation method thereof |
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| CN106449542A (en) * | 2016-08-26 | 2017-02-22 | 深圳市五矿发光材料有限公司 | Package structure of semiconductor light-emitting chip with airtight window free of silica gel |
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| CN103224218B (en) * | 2013-04-12 | 2016-01-20 | 华中科技大学 | A kind of method for packing of MEMS |
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| CN1123469A (en) * | 1994-09-01 | 1996-05-29 | 株式会社日立制作所 | Semiconductor device |
| CN206022424U (en) * | 2016-08-24 | 2017-03-15 | 重庆鹰谷光电股份有限公司 | Empty envelope type paster type light emitting type |
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