CN107614200B - 抛光垫和使用抛光垫的系统和方法 - Google Patents

抛光垫和使用抛光垫的系统和方法 Download PDF

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Publication number
CN107614200B
CN107614200B CN201680025995.4A CN201680025995A CN107614200B CN 107614200 B CN107614200 B CN 107614200B CN 201680025995 A CN201680025995 A CN 201680025995A CN 107614200 B CN107614200 B CN 107614200B
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China
Prior art keywords
polishing
major surface
substrate
polishing pad
pad
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CN201680025995.4A
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Chinese (zh)
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CN107614200A (zh
Inventor
保罗·S·勒格
琏·S·谭
布鲁斯·A·斯文特克
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of CN107614200A publication Critical patent/CN107614200A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CN201680025995.4A 2015-05-13 2016-05-11 抛光垫和使用抛光垫的系统和方法 Active CN107614200B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562161022P 2015-05-13 2015-05-13
US62/161,022 2015-05-13
PCT/US2016/031723 WO2016183126A1 (en) 2015-05-13 2016-05-11 Polishing pads and systems for and methods of using same

Publications (2)

Publication Number Publication Date
CN107614200A CN107614200A (zh) 2018-01-19
CN107614200B true CN107614200B (zh) 2020-05-08

Family

ID=57248396

Family Applications (1)

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CN201680025995.4A Active CN107614200B (zh) 2015-05-13 2016-05-11 抛光垫和使用抛光垫的系统和方法

Country Status (5)

Country Link
US (1) US10556316B2 (enExample)
JP (1) JP6789982B2 (enExample)
KR (1) KR20180008555A (enExample)
CN (1) CN107614200B (enExample)
WO (1) WO2016183126A1 (enExample)

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US10105812B2 (en) * 2014-07-17 2018-10-23 Applied Materials, Inc. Polishing pad configuration and polishing pad support
KR20180112004A (ko) * 2016-02-16 2018-10-11 쓰리엠 이노베이티브 프로퍼티즈 컴파니 폴리싱 시스템 및 그의 제조 방법 및 사용 방법
CN106319524A (zh) * 2016-08-27 2017-01-11 宁波市鄞州伴佰精密机械有限公司 不锈钢零件抛光液的制备方法
WO2019026021A1 (en) 2017-08-04 2019-02-07 3M Innovative Properties Company MICRO-REPLICATED POLISHING SURFACE WITH IMPROVED COPLANARITY
JP7273796B2 (ja) * 2017-08-25 2023-05-15 スリーエム イノベイティブ プロパティズ カンパニー 表面突起研磨パッド
CN109749630B (zh) * 2017-11-06 2021-05-25 蓝思科技（长沙）有限公司 一种微米级碳化硼粗磨液、其制备方法及其应用
WO2019164722A1 (en) 2018-02-20 2019-08-29 Engis Corporation Fixed abrasive three-dimensional lapping and polishing plate and methods of making and using the same
US20200009701A1 (en) * 2018-07-09 2020-01-09 Arizona Board Of Regents On Behalf Of The University Of Arizona Polishing protocol for zirconium diboride based ceramics to be implemented into optical systems
CN109015204B (zh) * 2018-08-29 2020-11-27 包头市利晨科技有限公司 一种适用于cr39树脂镜片的抛光方法
US11833638B2 (en) * 2020-03-25 2023-12-05 Rohm and Haas Electronic Materials Holding, Inc. CMP polishing pad with polishing elements on supports
CN111775071B (zh) * 2020-07-17 2022-03-15 大连理工大学 一种用于加工硬脆材料的抛光轮及其制备方法
CN112025469B (zh) * 2020-09-10 2022-06-10 西安奕斯伟材料科技有限公司 一种用于角抛光硅片样品的装置、设备及方法
CN114951840B (zh) * 2022-06-02 2023-04-28 西南交通大学 一种齿轮数控化学机械抛光装置及方法
CN115157111B (zh) * 2022-07-13 2024-03-15 安徽禾臣新材料有限公司 一种玻璃加工用抛光垫及其制备方法
CN117070191B (zh) * 2023-08-21 2024-08-09 深圳市昌鹏通工业材料设备有限公司 一种适用于塑胶型眼镜材料的研磨膏
CN117551424B (zh) * 2023-11-10 2025-07-25 燕山大学 一种油基热敏活性研磨液及微波辅助固结磨料研磨方法
CN119036213B (zh) * 2024-10-17 2025-09-09 天津大学 一种等速剪切抛光方法及抛光工具

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WO2015048011A1 (en) * 2013-09-25 2015-04-02 3M Innovative Properties Company Multi-layered polishing pads

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CN102686362A (zh) * 2009-12-30 2012-09-19 3M创新有限公司 包括分相共混聚合物的抛光垫及其制备和使用方法
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WO2015048011A1 (en) * 2013-09-25 2015-04-02 3M Innovative Properties Company Multi-layered polishing pads

Also Published As

Publication number Publication date
KR20180008555A (ko) 2018-01-24
US20180154497A1 (en) 2018-06-07
JP6789982B2 (ja) 2020-11-25
US10556316B2 (en) 2020-02-11
WO2016183126A1 (en) 2016-11-17
JP2018522743A (ja) 2018-08-16
CN107614200A (zh) 2018-01-19

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