CN107523804A - 用于膜轮廓调节的喷头帘式气体方法和系统 - Google Patents

用于膜轮廓调节的喷头帘式气体方法和系统 Download PDF

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Publication number
CN107523804A
CN107523804A CN201710462095.2A CN201710462095A CN107523804A CN 107523804 A CN107523804 A CN 107523804A CN 201710462095 A CN201710462095 A CN 201710462095A CN 107523804 A CN107523804 A CN 107523804A
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curtain gas
gas
chamber
substrate
curtain
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Chinese (zh)
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伊时塔克·卡里姆
阿德里安·拉瓦伊
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Lam Research Corp
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Lam Research Corp
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Priority to CN202211279875.0A priority Critical patent/CN115584490A/zh
Priority to CN202211279459.0A priority patent/CN115584489A/zh
Priority to CN202211279416.2A priority patent/CN115584488A/zh
Publication of CN107523804A publication Critical patent/CN107523804A/zh
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  • Chemical & Material Sciences (AREA)
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