CN1074945C - 薄膜的涂敷设备 - Google Patents

薄膜的涂敷设备 Download PDF

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Publication number
CN1074945C
CN1074945C CN96122838A CN96122838A CN1074945C CN 1074945 C CN1074945 C CN 1074945C CN 96122838 A CN96122838 A CN 96122838A CN 96122838 A CN96122838 A CN 96122838A CN 1074945 C CN1074945 C CN 1074945C
Authority
CN
China
Prior art keywords
locking member
coating device
bearing
sprocket wheel
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN96122838A
Other languages
English (en)
Chinese (zh)
Other versions
CN1154273A (zh
Inventor
T·沃特
H·凯斯勒
B·巴胡内克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Balzers und Leybold Deutschland Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers und Leybold Deutschland Holding AG filed Critical Balzers und Leybold Deutschland Holding AG
Publication of CN1154273A publication Critical patent/CN1154273A/zh
Application granted granted Critical
Publication of CN1074945C publication Critical patent/CN1074945C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0826Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being a web or sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/12Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being fed round the roller

Landscapes

  • Rolls And Other Rotary Bodies (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Aerials With Secondary Devices (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Spray Control Apparatus (AREA)
CN96122838A 1995-10-11 1996-10-10 薄膜的涂敷设备 Expired - Fee Related CN1074945C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19537781.8 1995-10-11
DE1995137781 DE19537781A1 (de) 1995-10-11 1995-10-11 Beschichtungsanlage für Folien

Publications (2)

Publication Number Publication Date
CN1154273A CN1154273A (zh) 1997-07-16
CN1074945C true CN1074945C (zh) 2001-11-21

Family

ID=7774534

Family Applications (1)

Application Number Title Priority Date Filing Date
CN96122838A Expired - Fee Related CN1074945C (zh) 1995-10-11 1996-10-10 薄膜的涂敷设备

Country Status (4)

Country Link
CN (1) CN1074945C (de)
DE (1) DE19537781A1 (de)
GB (1) GB2306172B (de)
IT (1) IT1284513B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19912707B4 (de) * 1999-03-20 2010-01-21 Applied Materials Gmbh & Co. Kg Behandlungsanlage für flache Substrate
CN107737697A (zh) * 2017-11-20 2018-02-27 丹阳市协昌合金有限公司 一种双面间隙连续预涂涂布机
CN109487228B (zh) * 2018-10-18 2023-02-21 芜湖研历光电科技有限公司 一种等离子体化学气相沉积设备的掩膜框架

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2264953A (en) * 1992-03-10 1993-09-15 Leybold Ag High-vacuum coating apparatus; ease of cleaning of pivotable mask unit
DE4304478A1 (de) * 1993-02-15 1994-08-18 Pagendarm Gmbh Auftragsvorrichtung
DE4334556A1 (de) * 1993-10-11 1995-04-13 Jagenberg Ag Vorrichtung zum Beschichten einer Materialbahn, insbesondere einer Papier- oder Kartonbahn

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3920575A1 (de) * 1989-06-23 1991-01-03 Agfa Gevaert Ag Vorrichtung und verfahren zum beseitigen von quer zur bahnlaufrichtung entstandenen verdickungen der beschichtung
GB9323033D0 (en) * 1993-11-09 1994-01-05 Gen Vacuum Equip Ltd Evaporator for vacuum web coating
GB9323034D0 (en) * 1993-11-09 1994-01-05 Gen Vacuum Equip Ltd Vacuum web coating

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2264953A (en) * 1992-03-10 1993-09-15 Leybold Ag High-vacuum coating apparatus; ease of cleaning of pivotable mask unit
DE4304478A1 (de) * 1993-02-15 1994-08-18 Pagendarm Gmbh Auftragsvorrichtung
DE4334556A1 (de) * 1993-10-11 1995-04-13 Jagenberg Ag Vorrichtung zum Beschichten einer Materialbahn, insbesondere einer Papier- oder Kartonbahn

Also Published As

Publication number Publication date
DE19537781A1 (de) 1997-04-17
GB9621277D0 (en) 1996-11-27
IT1284513B1 (it) 1998-05-21
GB2306172A (en) 1997-04-30
CN1154273A (zh) 1997-07-16
ITMI961872A1 (it) 1998-03-12
GB2306172B (en) 1999-03-17

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee