CN107486348A - Droplet ejection device on demand is combined in a kind of push-and-pull - Google Patents
Droplet ejection device on demand is combined in a kind of push-and-pull Download PDFInfo
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- CN107486348A CN107486348A CN201710811410.8A CN201710811410A CN107486348A CN 107486348 A CN107486348 A CN 107486348A CN 201710811410 A CN201710811410 A CN 201710811410A CN 107486348 A CN107486348 A CN 107486348A
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- China
- Prior art keywords
- electromagnetic actuator
- electric field
- actuator device
- field force
- nozzle
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/03—Discharge apparatus, e.g. electrostatic spray guns characterised by the use of gas, e.g. electrostatically assisted pneumatic spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/053—Arrangements for supplying power, e.g. charging power
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Droplet ejection device on demand is combined in a kind of push-and-pull, belongs to micro-spray device technical field.Top is used as " pushing away " power using the electromagnetic force acted on molten chamber metal liquid, and bottom is used as " drawing " power using the electric field force acted on metallic particles, and closes the coordination control for realizing size, direction-agile in matching somebody with somebody for the two；Apply electromagnetic actuator device above the lower cover with nozzle, lower section applies electric field force driving device.Provided with air compressor, pressure-reducing valve, upper cover plate, liquid storage cylinder, choke block, electromagnetic actuator device, electrode, the lower cover with nozzle, electric field force driving device, electromagnetic actuator device power supply, electric signal output control device, electric field force driving device electricity consumption source, delivery hole, permanent magnet places position, spray chamber, and droplet passes through hole；By adjusting the size and time interval of electric signal between electric signal output control device and electromagnetic actuator device power supply and electric field force driving device, so as to realize the accurate control to liquid micro-dimension.
Description
Technical field
The present invention relates to a kind of micro-spray device, more particularly to " pushing away " " drawing " joint droplet ejection device and method, belong to
Micro-spray device technical field.
Background technology
Microelectronics equipment is all assembled by two parts of semiconductor chip and encapsulation, and both are common in mutually promoting
With development.Photolithography patterning and lithography etc. subtract material manufacturing technology and obtained in micro-electronic manufacturing and encapsulation technology extensively at present
Using, but current microelectronics Packaging is complicated and need vacuum with material manufacturing technology process is subtracted, while in corrosion process below
In easily pollute environment, while the use in micro-electronic manufacturing and encapsulation process to precious metal material is more and more.To improve
The utilization rate of precious metal material, avoid polluting environment, simplify device, propose what is grown up based on conventional ink-jet printing technique
Need based jet increases material technology, and the core of the technology is droplet ejection technology.Droplet ejection technology is with a kind of controllable side on demand
Formula is accurately distributed liquid metal, is a kind of very promising to realize that the mechanically or electrically device between component connects
The accurate new increases material manufacturing technology of write-through.
At present, the micro-spray device of need based jet pattern mainly has piezoelectric type driving, the driving of air pressure diaphragm type, and electromagnetism drives
It is dynamic.Chinese patent CN200610138558.1 discloses a kind of barometric pulse-type droplet and drives preparation system on demand, the device system
Standby droplet frequency is relatively low, and forces fluid to fragment into drop at jet hole by using the mode of " pushing away " power.Chinese patent
CN205890212U discloses a kind of equipment of on-demand electrostatic spraying, and this method utilizes the mode of " drawing " power to force metal droplet
Drop is fragmented at jet hole, driving force is single, it is difficult to realize the preparation of smaller droplet.Chinese patent CN103212516A is disclosed
A kind of Ampere force drive-type micro-spray device, this method utilize the mode of " pushing away " power to force metal droplet to be fragmented at jet hole
Drop, driving force are single, it is difficult to realize the preparation of smaller droplet.
The content of the invention
It is an object of the invention to provide one kind prepared suitable for metal droplet " pushing away " " drawing " joint droplet ejection device and
Method.
A kind of push-pull joint droplet ejection device, including air compressor (1), pressure-reducing valve (2), upper lid on demand of the present invention
Plate (3), liquid storage cylinder (4), choke block (5), electromagnetic actuator device (6), metal electrode (7), lower cover (8), electric field with nozzle
Force driving device (9), electromagnetic actuator device power supply (10), electric signal output control device (11), electric field force driving device are used
Power supply (12), spray chamber (15)；
Upper cover plate (3), liquid storage cylinder (4), choke block (5), electromagnetic actuator device (6), lower cover (8), electric field with nozzle
Force driving device (9) is installed together up and down successively；Upper cover plate (3) is provided with hole, and air compressor (1) is via pressure-reducing valve (2)
It is connected with the hole of upper cover plate (3), upper cover plate (3) is covered on liquid storage cylinder (4)；Pass through choke block (5) and electricity below liquid storage cylinder (4)
Magnetic drive unit (6) is installed together；The lower surface of electromagnetic actuator device (6) is the lower cover (8) with nozzle, with nozzle
It is electric field force driving device (9) below cover plate (8), electric field force driving device (9) is the metallic plate with droplet by hole (16),
Electric field force driving device (9) is parallel with the lower cover (8) with nozzle write between there is space；Electric field force driving device (9) and band
The lower cover (8) of nozzle is connected with electromagnetic actuator device with the two poles of the earth of power supply (10) respectively, and electromagnetic actuator device is with power supply (10)
It is connected with electric signal output control device (11)；
The centre of electromagnetic actuator device is spray chamber (15)；Electromagnetic actuator device relative two sides A, B are provided with metal electricity
Pole (7), two metal electrodes (7) extend into spray chamber (15)；It is provided with forever outside electromagnetic actuator device other relative two sides C, D
Magnet places position (14) permanent magnet, and side A, B, C, D are the surrounding of electromagnetic actuator device, and the upper end of electromagnetic actuator device is throttling
Plate (5), the upper end of electromagnetic actuator device are provided with delivery hole (13) so that spray chamber (15) delivery hole (13), choke block connection storage
Sap cavity；The lower surface of electromagnetic actuator device is the lower cover (8) with nozzle so that spray chamber (15) can pass through lower cover (8)
Nozzle be sprayed liquid；Two electrodes of two metal electrodes (7) respectively with electric field force driving device electricity consumption source (12) are connected；Electric field force
Drive device is connected with power supply (12) with electric signal output control device (11)；
Liquid metal or solion contact with two metal electrodes (7) in spray chamber；
Metal electrode (7) is copper electrode；Metal electrode (7), electromagnetic actuator device power supply, electromagnetic actuator device electricity consumption
Connection between source, electric signal output control device is connected using wire；
During micro-injection, by adjusting electric signal output control device, and then electromagnetic actuator device power supply is adjusted
The size of signal 1 and electric field force driving device electricity consumption source signal 2, signal interval between two power supplys are micro- to liquid so as to realize
The accurate control of size.
Compared with prior art, one kind of the invention " pushing away " " drawing " is combined the operation principle of droplet ejection device on demand and had
Beneficial effect is as follows：
Top is micro- using metal is acted on as " pushing away " power, bottom using the electromagnetic force acted on molten chamber metal liquid
Electric field force in drop is used as " drawing " power, and closes the coordination control for realizing size, direction-agile in matching somebody with somebody for the two.Realize above-mentioned
The micro-spray device of method, it applies electromagnetic actuator device above the lower cover with nozzle, and lower section applies electric field force driving dress
Put.
The technique effect of the present invention is embodied in：The present invention prepares slightly soluble drop using a kind of " pushing away " " drawing " joint driving, to spray
Micro- metal fluid in mouth first after-applied signal 1 (generation electromagnetic force) and signal 2 (generation electric field force) (as shown in figure 5 above).Nothing
When drive signal applies, meniscus (such as Fig. 5 (b)) is presented in nozzle in surface tension and liquid storage cylinder in the presence of air pressure.Work as electricity
When the controllable charged metal fluid of stream size and Orientation flows through stationary magnetic field, size and side will be produced in cavity liquid metal
To variable electromagnetic force, the electromagnetic force forces nozzle upper and lower port to produce servo-actuated variable pressure differential.The pressure of this servo-actuated change
Power difference overcomes metal fluid mass flowing nozzle (such as Fig. 5 (c)) in surface tension driving nozzle microchannel, and molten drop obtains speed by accelerating
Spend v.Subsequent electromagnetic force disappears, because the speed of metal drop is different with the speed of metal fluid in microchannel at nozzle ports,
Cause small constriction (such as Fig. 5 (d)) occurs at port.Apply pulsed electric field between nozzle and the metallic plate of lower section, spray
Molten drop at mouth port is caused surface tension to reduce, is entered one in the presence of electric field force and surface tension due to the aggregation of electric charge
Constriction (such as Fig. 5 (e)) occurs for step, molten drop is then fragmented into by way of drippage, the molten drop after cutout is being protected
Continue free-falling balling-up (such as Fig. 5 (f)) in atmosphere cavity.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 is electromagnetism force driving device decomposition texture schematic diagram of the embodiment of the present invention.
Fig. 3 is band nozzle lower cover plate structure schematic diagram of the embodiment of the present invention.
Fig. 4 is electric field force driving device decomposition texture schematic diagram of the embodiment of the present invention.
Fig. 5 is principle schematic of the embodiment of the present invention.
Embodiment
With reference to embodiment, the present invention will be further described, but the present invention is not limited to following examples.
Embodiment 1
A kind of " pushing away " " drawing " joint droplet ejection device, the lower cover top with nozzle uses and acts on molten chamber metal liquid
On electromagnetic force be used as " pushing away " power, lower cover bottom with nozzle is used as " drawing " using the electric field force acted on metallic particles
Power, and close the coordination control for realizing size, direction-agile in matching somebody with somebody for the two.
Referring to Fig. 1-4, the embodiment of the present invention is provided with air compressor 1, pressure-reducing valve 2, upper cover plate 3, liquid storage cylinder 4, choke block
5, electromagnetic actuator device 6, metal electrode 7, the lower cover 8 with nozzle, electric field force driving device 9, electromagnetic actuator device power supply
10, electric signal output control device 11, electric field force driving device electricity consumption source 12, delivery hole 13, permanent magnet placement position 14, spray chamber
15, droplet passes through hole 16, nozzle 17, the lower cover seal groove 18 with nozzle.
Position 14 is placed in permanent magnet and produces stationary magnetic field by loading permanent magnet, and permanent magnet is used to produce magnetic field, spray chamber
The metal electrode 7 at 15 both ends contacts with liquid metal solution, is controlled by electromagnetic actuator device with power supply 10 and electric signal output
Device 11 produces the variable a variety of driving electric signals of signal, and driving electric signal both ends are placed in the both ends of metal electrode 7, in magnetic fields
Variable force solenoid is produced in lower driving chamber, forces the metallic solution in spray chamber body to be flowed out at the lower cover 8 with nozzle, then
Electromagnetic actuator device power supply 10 is closed, by electric field force driving device 12 and electric signal output control device 10 with nozzle
Variable electric field power, in the presence of variable electric field power, the dissolved drip at nozzle are produced between lower cover and electric field force driving device
It is pulled off, the droplet formed after breaking is by dropping onto required position after 16.
The composition electromagnetism such as electromagnetic actuator device power supply, electric signal output control device signal source, copper electrode, spray chamber drives
Dynamic device.Electric field force driving device electricity consumption source, electric signal output control device signal source and grade composition electric field force driving device.
In the preparation process on demand of droplet, driven by adjusting electric signal output control device with electromagnetic actuator device power supply and electric field force
The size and time interval of electric signal between dynamic device, can control and adjust the size of droplet, the present invention is applied to droplet
Micropreparation, it is also applied for the preparation of single-size.
Claims (4)
- A kind of 1. push-pull joint droplet ejection device on demand, it is characterised in that including air compressor (1), pressure-reducing valve (2), on Cover plate (3), liquid storage cylinder (4), choke block (5), electromagnetic actuator device (6), metal electrode (7), the lower cover (8) with nozzle, electricity Field force drive device (9), electromagnetic actuator device power supply (10), electric signal output control device (11), electric field force driving device With power supply (12), spray chamber (15)；Upper cover plate (3), liquid storage cylinder (4), choke block (5), electromagnetic actuator device (6), the lower cover (8) with nozzle, electric field force drive Dynamic device (9) is installed together up and down successively；Upper cover plate (3) is provided with hole, air compressor (1) via pressure-reducing valve (2) with it is upper The hole connection of cover plate (3), upper cover plate (3) are covered on liquid storage cylinder (4)；Driven below liquid storage cylinder (4) by choke block (5) and electromagnetism Dynamic device (6) is installed together；The lower surface of electromagnetic actuator device (6) is the lower cover (8) with nozzle, the lower cover with nozzle (8) it is electric field force driving device (9) below, electric field force driving device (9) is the metallic plate with droplet by hole (16), electric field Force driving device (9) is parallel with the lower cover (8) with nozzle write between there is space；Electric field force driving device (9) and with nozzle Lower cover (8) be connected respectively with electromagnetic actuator device with the two poles of the earth of power supply (10), electromagnetic actuator device with power supply (10) with electricity Signal output control device (11) connects；The centre of electromagnetic actuator device is spray chamber (15)；Electromagnetic actuator device relative two sides A, B are provided with metal electrode (7), two metal electrodes (7) extend into spray chamber (15)；Permanent magnetism is provided with outside electromagnetic actuator device other relative two sides C, D Iron places position (14) permanent magnet, and side A, B, C, D are the surrounding of electromagnetic actuator device, and the upper end of electromagnetic actuator device is choke block (5), the upper end of electromagnetic actuator device is provided with delivery hole (13) so that spray chamber (15) delivery hole (13), choke block connection liquid storage Chamber；The lower surface of electromagnetic actuator device is the lower cover (8) with nozzle so that spray chamber (15) can pass through lower cover (8) Nozzle is sprayed liquid；Two electrodes of two metal electrodes (7) respectively with electric field force driving device electricity consumption source (12) are connected；Electric field force drives Dynamic device is connected with power supply (12) with electric signal output control device (11)；Liquid metal or solion contact with two metal electrodes (7) in spray chamber.
- 2. combine droplet ejection device on demand according to a kind of push-pull described in claim 1, it is characterised in that metal electrode (7) For copper electrode.
- 3. combine droplet ejection device on demand according to a kind of push-pull described in claim 1, it is characterised in that metal electrode (7), the connection between electromagnetic actuator device power supply, electromagnetic actuator device power supply, electric signal output control device is used and led Line connects.
- 4. combine droplet ejection device on demand according to a kind of push-pull described in claim 1, it is characterised in that in micro-injection mistake Cheng Zhong, by adjusting electric signal output control device, and then adjust electromagnetic actuator device power supply signal 1 and electric field force driving dress Put the size with power supply signal 2, signal interval between two power supplys, so as to realize the accurate control to liquid micro-dimension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710811410.8A CN107486348B (en) | 2017-09-11 | 2017-09-11 | A kind of on-demand droplet ejection device of push-pull joint |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710811410.8A CN107486348B (en) | 2017-09-11 | 2017-09-11 | A kind of on-demand droplet ejection device of push-pull joint |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107486348A true CN107486348A (en) | 2017-12-19 |
| CN107486348B CN107486348B (en) | 2019-06-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710811410.8A Active CN107486348B (en) | 2017-09-11 | 2017-09-11 | A kind of on-demand droplet ejection device of push-pull joint |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109530158A (en) * | 2018-11-23 | 2019-03-29 | 大连理工大学 | A kind of device and method of the micro high viscosity glue transfer of electric field driven |
| CN111545265A (en) * | 2020-04-16 | 2020-08-18 | 湘潭大学 | Hydraulic control system with ultrahigh precision and capability of improving reaction conversion rate |
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| RU2084293C1 (en) * | 1994-12-28 | 1997-07-20 | Виктор Викторович Марширов | Process of dispersion of metal on to plasma and liquid particles and gear for its realization |
| CN105530807A (en) * | 2013-07-29 | 2016-04-27 | 阿比尔技术公司 | Agricultural skin grafting |
| CN205701154U (en) * | 2016-03-23 | 2016-11-23 | 常州高凯精密机械有限公司 | A kind of on-demand feed electrohydraulic dynamic micro-spray device |
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2017
- 2017-09-11 CN CN201710811410.8A patent/CN107486348B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2084293C1 (en) * | 1994-12-28 | 1997-07-20 | Виктор Викторович Марширов | Process of dispersion of metal on to plasma and liquid particles and gear for its realization |
| CN105530807A (en) * | 2013-07-29 | 2016-04-27 | 阿比尔技术公司 | Agricultural skin grafting |
| CN205701154U (en) * | 2016-03-23 | 2016-11-23 | 常州高凯精密机械有限公司 | A kind of on-demand feed electrohydraulic dynamic micro-spray device |
Non-Patent Citations (1)
| Title |
|---|
| 王永先: "电磁力驱动焊料微喷射原理与实验研究", 《中国优秀硕士学位论文全文数据库》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109530158A (en) * | 2018-11-23 | 2019-03-29 | 大连理工大学 | A kind of device and method of the micro high viscosity glue transfer of electric field driven |
| CN111545265A (en) * | 2020-04-16 | 2020-08-18 | 湘潭大学 | Hydraulic control system with ultrahigh precision and capability of improving reaction conversion rate |
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| Publication number | Publication date |
|---|---|
| CN107486348B (en) | 2019-06-14 |
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Application publication date: 20171219 Assignee: Dazhang Jiushu (Langfang) Technology Co.,Ltd. Assignor: Beijing University of Technology Contract record no.: X2023980040597 Denomination of invention: A push pull combined on-demand micro droplet injection device Granted publication date: 20190614 License type: Common License Record date: 20230828 |