CN107413544B - A kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand - Google Patents
A kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand Download PDFInfo
- Publication number
- CN107413544B CN107413544B CN201710562246.1A CN201710562246A CN107413544B CN 107413544 B CN107413544 B CN 107413544B CN 201710562246 A CN201710562246 A CN 201710562246A CN 107413544 B CN107413544 B CN 107413544B
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- hole
- cover plate
- spray chamber
- cuboid
- electrode
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/16—Arrangements for supplying liquids or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/082—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to a condition of the discharged jet or spray, e.g. to jet shape, spray pattern or droplet size
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/085—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to flow or pressure of liquid or other fluent material to be discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/03—Discharge apparatus, e.g. electrostatic spray guns characterised by the use of gas, e.g. electrostatically assisted pneumatic spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/053—Arrangements for supplying power, e.g. charging power
- B05B5/0533—Electrodes specially adapted therefor; Arrangements of electrodes
Abstract
A kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand, is related to a kind of micro-spray device.The air pressure for being suitable for liquid metal (or conducting liquid) is provided and electromagnetism joint drives the porous experimental provision for preparing droplet.Equipped with electromagnet, mass flowmenter, liquid storage chamber, ceramic device, signal source, power amplifier, vacuum pump, argon tanks, connect catheter upper cover plate and with the lower cover plate of jet rose.Spray chamber is fixed between electromagnet, and ceramic structure is equipped with electrode and spray chamber, and the spray head that ceramic structure and upper and lower cover plates form is in subnormal ambient；Electrode is placed in inside cavity, and compresses conducting wire with nut, guarantees balanced current distribution；The variable a variety of driving electric signals of signal are generated by signal source and power amplifier.
Description
Technical field
The invention belongs to the more of micro-spray device technical field more particularly to liquid metal used for electronic packaging (GaIn alloy)
Field regulation droplet ejection.
Background technique
With the development of Electronic Encapsulating Technology, the Electronic Encapsulating Technology porous micro-injection technical need controllable to generation size
It is more and more.Micro- liquid spraying technique be widely used in chip fix, chip package.In encapsulation technology, porous micro-injection technology
It is remarkably improved leakage efficiency.This technology dividing with a kind of controllable mode mostly drop on demand while accurately liquid metal
Match, to realize that the mechanically or electrically device between component connects.
Currently, the micro-spray device of need based jet mode mainly has contact to drive (piezoelectric type, Pneumatic driving type etc.).In
State patent CN200610138558.1 discloses a kind of barometric pulse-type droplet and drives preparation system on demand, which prepares droplet
Frequency is lower and sprays for single hole, it is impossible to be used in porous injection.Chinese patent CN200910305515.1 discloses a kind of gas
Dynamic diaphragm formula microdrop spraying method and device, this method prepare the frequency of droplet and are 5HZ and spray for single hole.Chinese patent
CN201620228328.3 discloses a kind of on-demand feed electrohydraulic dynamic micro-spray device, and this method is difficult to realize the essence of the micro- spray of solution
Really control significantly limits the quick application and development of the technology.
Summary of the invention
The object of the present invention is to provide the contactless more regulations of one kind for being suitable for the porous need based jet of metal liquid are porous
A kind of micro-spray device for preparing molten drop can be realized and stablize accurate injection.
A kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand of the present invention, which is characterized in that
Equipped with electromagnet (15), mass flowmenter (3), liquid storage chamber (4), ceramic device (7), signal generator (13), power amplifier
(14), vacuum pump (22), protection gas tank (1), the upper cover plate (6) with cavity structure, the lower cover plate (12) with jet rose, four
Siphunculus (23), negative pressure cavity (24), gas cylinder (25).
Protection gas tank (1) is connected to by gas-guide tube, mass flowmenter (3) with liquid storage chamber (4), and liquid storage chamber (4) passes through drain
Pipe (5) is connected to the cavity of the upper cover plate (6) with cavity structure, and upper cover plate (6) is rectangular parallelepiped structure, is had time in cuboid
Chamber, an end face of rectangular parallelepiped structure is equipped with through-hole and connect with catheter (5), in a side of rectangular parallelepiped structure or lower surface
Between be equipped with small through hole (31), be equipped with small through hole (26) lower surface or side be close to fixed Combination have cuboid ceramic device (7),
The lower surface of cuboid ceramic device (7) is equipped with electrode putting hole (8) and spray chamber (9), and two electrode putting holes (8) pass through spray
Penetrate chamber (9) connection；Spray chamber (9) is equipped with the small through hole of straight-through upper surface, this spray chamber (9) small through hole and rectangular parallelepiped structure it is small
Through-hole is opposite and is connected to (upper and lower surfaces of cuboid ceramic device (7) are two opposite surfaces)；Cuboid ceramics
It is close to be fixed with the lower cover plate (12) with jet rose, position of the lower cover plate (12) in opposite spray chamber (9) in the lower surface of device (7)
Multiple hole nozzles are installed；The both ends of the surface of cuboid ceramic device (7) are respectively equipped with wire connection hole (11), each end face wire
Connecting hole (11) is connected to nearest electrode putting hole (8)；It is placed in electrode putting hole (8) electrode (17), electrode (17) is logical
It crosses conducting wire to connect with power amplifier (14), power amplifier (14) is connect with signal generator (13)；Cuboid ceramic device
(7) other two opposite outer surfaces are respectively equipped with electromagnet (15), and electromagnet (15) and electromagnet DC power supply (16) are even
It connects；Jet rose is connected to negative pressure cavity (24), negative pressure cavity (24) by four-way pipe (23) respectively with gas cylinder (25), vacuum pump
(22), gas vent connects.
Lower cover plate (12) is equipped with lower cover plate seal groove (20) packing seal in the side close to spray chamber (9) and is used for lower cover plate
(12) and the sealing of cuboid ceramic device (7).
Two electrodes are longitudinal bodies block structure, and parallel opposite two sides, respective area is all larger than the end face of spray chamber (9)
Area, spray chamber (9) are cuboid cavity structure.
Injection cavity be in subnormal ambient, and injection cavity one end is connected by catheter with liquid storage chamber, the other end with it is more
Hole nozzle is connected, and in subnormal ambient；Subnormal ambient is vacuumized by the inflation of argon tanks repeatedly and vacuum pump to be made at cavity
In negative pressure anaerobic state.The variable a variety of driving electric signals of signal are generated by signal source (signal generator) and power amplifier
(as generated controllable more drive waveform electric signals), the front-back by electromagnet in injection cavity generates stationary magnetic field.
Compared with prior art, it the working principle of the invention and has the beneficial effect that:
Electromagnet has a spray chamber and electrode for generating magnetic field inside ceramic device, it is intracavitary that electrode is in ceramics, electrode with
Metal liquid contact is good, generates the variable a variety of driving electric signals of signal by signal source and power amplifier, drives telecommunications
Number both ends are placed in electrode both ends.Nozzle inner metal liquid body generates pressure difference in subnormal ambient, in the work of pressure difference, surface tension
Under, metal liquid fills up nozzle；When the electric current for driving electric signal to generate flows through metal liquid, can be produced above jet rose
The periodical Ampere force in the raw liquid outlet direction towards injection cavity.
When jet size is smaller, nozzle interior resistance is larger, and independent electromagnetic force is difficult to the generation of cyclic drive drop.Negative
Under pressure effect, metal liquid fills up nozzle, and under the action of periodic electromagnetism power, the conductive fluid of spray nozzle front end obtains enough
Kinetic energy overcomes surface tension, and drop is fragmented at nozzle, ultimately forms liquid droplet metal, to guarantee that driving process is stablized, needs
Make always full of metal liquid in spray chamber body, therefore the air pressure in liquid storage chamber is controlled by mass flowmenter, forces driving
Inside cavity is full of liquid metal always, the final on-demand equivalent micro-injection for realizing liquid metal.
The present invention has following outstanding feature: (1) joint of the driving force of liquid metal from electromagnetic force and cavity negative pressure
Regulation, when overcoming independent electromagnetism power drive, driving force is smaller, it is difficult to realize under small nozzle bore, the periodicity of molten drop
Preparation.(2) this invention generates the electric current of random waveform in such a way that signal source and power amplifier combine, and is easy to drive
The waveform of power, size, action time directly control, and are suitable for the preparation such as conducting resinl, liquid metal, solder.(3) this is invented
Liquid metal is prepared using porous, greatly improves micro-injection efficiency.(4) present invention controls liquid storage chamber by mass flowmenter
Interior air pressure forces driving inside cavity to be full of liquid metal always, the final on-demand equivalent micro-injection for realizing liquid metal.
Detailed description of the invention
Fig. 1 be the embodiment of the present invention structural schematic diagram (upper cover plate 6 in Fig. 1, ceramic device 7 and lower cover plate 12 be in order to
It is convenient to draw, and will sequentially draw up and down anti-).
Fig. 2 is the decomposition texture schematic diagram of drive part of the embodiment of the present invention.
Fig. 3 is band jet rose lower visor portion separation structure of the embodiment of the present invention.
Fig. 4 is schematic illustration of the embodiment of the present invention.
Protect gas tank 1, gas-guide tube 2, mass flowmenter 3, liquid storage chamber 4, catheter 5, upper cover plate 6, ceramic device 7, electrode
Putting hole 8, spray chamber 9, ceramic member pilot hole 10, wire connection hole 11, the lower cover plate 12 with more empty nozzles, signal generator
13, power amplifier 14, electromagnet 15, electromagnet DC power supply 16, electrode 17, electrode hold-down apertures 18, lower cover plate pilot hole 19,
Lower cover plate seal groove 20, jet rose 21, vacuum pump 22, four-way pipe 23, negative pressure cavity 24, gas cylinder 25, small through hole 26.
Specific embodiment
The invention will be further described for aggregate embodiment below, but the present invention is not limited to following embodiments.
Embodiment 1
Referring to Fig. 1-3, the embodiment of the present invention is equipped with protection gas tank 1, gas-guide tube 2, mass flowmenter 3, liquid storage chamber 4, drain
Pipe 5, upper cover plate 6, ceramic device 7, electrode putting hole 8, spray chamber 9, ceramic member pilot hole 10, wire connection hole 11, with more
The lower cover plate 12 of empty nozzle, signal generator 13, power amplifier 14, electromagnet 15, electromagnet DC power supply 16, electrode 17,
Electrode hold-down apertures 18, lower cover plate pilot hole 19, lower cover plate seal groove 20, jet rose 21.
Upper cover plate 6, intermediate ceramic liquid storage chamber 7, the lower cover plate 12 with jet rose are installed together composition spray chamber
Body, ceramic device are in spray chamber 9 in uniform magnetic field between electromagnet 15, and signal source 13 and power amplifier 14 produce
Raw variable electrical signal, positive and negative anodes are connected with electrode.In use, flowing into 4 gas of storage cavity from mass flowmenter 3, force
Liquid metal in liquid storage chamber 4 is full of spray chamber 9.Vacuum cavity forces in jet rose 21 full of liquid metal, size and side
When flowing through spray chamber 9 to variable electric current, in stationary magnetic field, effect of the intracorporal metal liquid of spray chamber 9 by electromagnetic force,
Lower cover plate 12 by carrying jet rose generates periodically uniform molten drop simultaneously.
During the need based jet of metallic solution, arbitrary signal can produce by signal source 13 and power amplifier 14
Impulse waveform, size that is controllable and adjusting molten drop, the present invention are suitable for the micropreparation of liquid metal, are also applied for
The preparation of even particle.
Claims (3)
1. a kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand, which is characterized in that be equipped with electromagnetism
Iron (15), mass flowmenter (3), liquid storage chamber (4), ceramic device (7), signal generator (13), power amplifier (14), vacuum
Pump (22), protection gas tank (1), the upper cover plate (6) with cavity structure, the lower cover plate (12) with jet rose, four-way pipe (23),
Negative pressure cavity (24), gas cylinder (25)；
Protection gas tank (1) is connected to by gas-guide tube, mass flowmenter (3) with liquid storage chamber (4), and liquid storage chamber (4) passes through catheter (5)
It is connected to the cavity of the upper cover plate (6) with cavity structure, upper cover plate (6) is rectangular parallelepiped structure, has cavity in cuboid, rectangular
One end face of body structure is equipped with through-hole and connect with catheter (5), is equipped among a side of rectangular parallelepiped structure or lower surface
Small through hole (26), the lower surface or side for being equipped with small through hole (26), which are close to fixed Combination, cuboid ceramic device (7), cuboid
The lower surface of ceramic device (7) is equipped with electrode putting hole (8) and spray chamber (9), and two electrode putting holes (8) pass through spray chamber
(9) it is connected to；Spray chamber (9) is equipped with the small through hole of straight-through upper surface, the small through hole of this spray chamber (9) small through hole and rectangular parallelepiped structure
It relatively and is connected to, the upper and lower surfaces of cuboid ceramic device (7) are two opposite surfaces；Cuboid ceramic device
(7) lower surface is close to be fixed with the lower cover plate (12) with jet rose, and lower cover plate (12) is set in the position of opposite spray chamber (9)
There are multiple hole nozzles；The both ends of the surface of cuboid ceramic device (7) are respectively equipped with wire connection hole (11), each end face wire connection
Hole (11) is connected to nearest electrode putting hole (8)；It is placed in electrode putting hole (8) electrode (17), electrode (17) is by leading
Line is connect with power amplifier (14), and power amplifier (14) is connect with signal generator (13)；Cuboid ceramic device (7)
In addition two opposite outer surfaces are respectively equipped with electromagnet (15), and electromagnet (15) is connect with electromagnet DC power supply (16)；It is more
Hole nozzle is connected to negative pressure cavity (24), negative pressure cavity (24) by four-way pipe (23) respectively with gas cylinder (25), vacuum pump (22), exhaust
Hole connection.
2. a kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand described in accordance with the claim 1,
It is characterized in that, under lower cover plate (12) is used in the side close to spray chamber (9) equipped with lower cover plate seal groove (20) packing seal
The sealing of cover board (12) and cuboid ceramic device (7).
3. a kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand described in accordance with the claim 1,
It is characterized in that, two electrodes are longitudinal bodies block structure, parallel opposite two sides, respective area is all larger than spray chamber (9)
Face area, spray chamber (9) are cuboid cavity structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710562246.1A CN107413544B (en) | 2017-07-11 | 2017-07-11 | A kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710562246.1A CN107413544B (en) | 2017-07-11 | 2017-07-11 | A kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107413544A CN107413544A (en) | 2017-12-01 |
| CN107413544B true CN107413544B (en) | 2019-06-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710562246.1A Active CN107413544B (en) | 2017-07-11 | 2017-07-11 | A kind of device of the contactless porous preparation liquid metal droplet of more regulations of on-demand |
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| CN (1) | CN107413544B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115488463A (en) * | 2022-09-23 | 2022-12-20 | 蒙宝康 | Liquid metal jet welding equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19831335A1 (en) * | 1998-07-13 | 2000-02-10 | Michael Angermann | Appts to produce micro droplets of molten conductive metals uses a magneto-hydrodynamic pump with modulation to give a clean and controlled droplet ejection |
| CN103203294A (en) * | 2013-04-28 | 2013-07-17 | 厦门大学 | Electromagnetic micro jet device |
| CN103212516A (en) * | 2013-04-28 | 2013-07-24 | 厦门大学 | Ampere force driving micro spraying device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080061163A1 (en) * | 2006-08-28 | 2008-03-13 | Xerox Corporation | Device and system for dispensing fluids into the atmosphere |
-
2017
- 2017-07-11 CN CN201710562246.1A patent/CN107413544B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19831335A1 (en) * | 1998-07-13 | 2000-02-10 | Michael Angermann | Appts to produce micro droplets of molten conductive metals uses a magneto-hydrodynamic pump with modulation to give a clean and controlled droplet ejection |
| CN103203294A (en) * | 2013-04-28 | 2013-07-17 | 厦门大学 | Electromagnetic micro jet device |
| CN103212516A (en) * | 2013-04-28 | 2013-07-24 | 厦门大学 | Ampere force driving micro spraying device |
Non-Patent Citations (1)
| Title |
|---|
| 电磁力驱动焊料微喷射原理与实验研究;王永先;《中国优秀硕士学位论文全文数据库》;20090515;论文正文第17-27、34、47-49页 |
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| CN107413544A (en) | 2017-12-01 |
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Application publication date: 20171201 Assignee: Dazhang Jiushu (Langfang) Technology Co.,Ltd. Assignor: Beijing University of Technology Contract record no.: X2023980040597 Denomination of invention: A device for on-demand non-contact multi field controlled porous preparation of liquid metal droplets Granted publication date: 20190614 License type: Common License Record date: 20230828 |