CN102781157B - Planar jet flow plasma generating device - Google Patents
Planar jet flow plasma generating device Download PDFInfo
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- CN102781157B CN102781157B CN201210245290.7A CN201210245290A CN102781157B CN 102781157 B CN102781157 B CN 102781157B CN 201210245290 A CN201210245290 A CN 201210245290A CN 102781157 B CN102781157 B CN 102781157B
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Abstract
The invention discloses a planar jet flow plasma generating device, mainly to solve the problems that an existing planar jet flow plasma generating device is poor in plasma stability, high in temperature, small in area and uneven in density and velocity distribution. The whole device comprises a plasma generating chamber (2), a power supply device (3) and a pressure adjusting device (5), wherein the left side and the right side of the plasma generating chamber (2) are respectively connected with a diversion device (1) and a plasma jet flow chamber (4); an air inlet end of the diversion device (1) and an air outlet end of the plasma jet flow chamber (4) are connected with the pressure adjusting device (5); an electrode through hole and an observation window for applying an orthogonal electromagnetic two-dimensional field are formed on the plasma jet flow chamber (4); and the power supply device (3) is used for supplying power for the plasma generating chamber (2). With the adoption of the device, the plasma duration time is prolonged, the temperature of the plasma is reduced, the area of the even plasma is expanded, and the device can be used for researching the influence of an electromagnetic field on the jet flow plasma.
Description
Technical field
The invention belongs to gas discharge plasma field, particularly plane jet plasma generating device, can be used for producing larger area Uniform jet plasma, the impact of quantitative study electromagnetism two dimensional field article on plasma fluid.
Background technology
The impact of research electromagnetism two dimensional field article on plasma fluid is the basis that space vehicle is loaded into research work, and true experiment needs a kind of plasma generating device that can produce the controlled and Two dimensional Distribution of large area density for a long time and at the uniform velocity flow uniformly.The device that existing ground produces plasma mainly contains shock tube, plasma jet and glow plasma fluidic device, and these devices exist the following shortcoming being difficult to overcome respectively:
1, the TRANSIENT HIGH TEMPERATURE that shock tube utilizes High Voltage difference to produce produces plasma, and the duration is extremely short, stability extreme difference, is difficult to control.
2, the plasma temperature of plasma jet generation is high, and plasma density and distribution are difficult to control, and have high temperature ablation to additional electrodes, and also have metal ion in plasma, causes electromagnetism to weaken experimental error.
3, the plasma of the plasma generation of glow discharge generation, although can the work of long period, electron density can regulate continuously, also comparatively stable, but the plasma produced is substantially all long arc shape turbulent plasma, density Two dimensional Distribution area is little and uneven, cannot the impact of quantitative study electromagnetism two dimensional field article on plasma fluid.
Summary of the invention
The object of the invention is to the deficiency for above-mentioned prior art, a kind of plane jet plasma generating device is provided, to extend the duration, reduce temperature, expand the area of homogeneous plasma.
For achieving the above object, the present invention includes: plasma generation cavity 2, supply unit 3 and barometric control unit 5, supply unit 3 provides power supply for plasma generation cavity 2, it is characterized in that: the left side of plasma generation cavity 2 and right side are connected to guiding device 1 and plasma jet cavity 4; The inlet end of guiding device 1 and the outlet side of plasma jet cavity 4 are connected with barometric control unit 5, and plasma jet cavity 4 has electrode through hole and observation window, for applying orthogonal electromagnetism two dimensional field; Gas is filled with guiding device 1 from barometric control unit 5, flow in plasma generation cavity 2 after guiding device current stabilization, in plasma generation cavity, electric discharge produces plasma, flow in plasma jet cavity 4, then is flowed out by barometric control unit 5.
As preferably, described guiding device 1 comprises: needle-valve 101, first flange 102, baffle plate 103 and the first barometer 106; One end of needle-valve 101 is fixed on the left end of the first flange 102, and the other end is connected with barometric control unit 5; First barometer 106 is fixed on the lower end of the first flange 102, for measuring the air pressure of inflation; Baffle plate 103 is placed in the right-hand member groove of the first flange 102; First flange 102 is connected with plasma generation cavity 2 by knob.
As preferably, described plasma generation cavity 2 comprises: the second flange 206, cylinder electrode 201, tubular electrode 204 and three-flange 207; Second flange 206 and three-flange 207 are connected to cylinder electrode 201 symmetrical both sides through hole end; Cylinder electrode about 201 both sides are fixed with circular hollow lid 205 respectively, and are sealed by extruding first seal gasket 203; Tubular electrode 204 is inserted in cylinder electrode 201 by the centre bore of circular hollow lid 205, is coaxially fixed on the two ends up and down of cylinder electrode 201, and extrudes the second seal gasket 208 by nut and seal; Tubular electrode 204 is connected with supply unit 3 by wire; Three-flange 207 is connected with plasma jet cavity 4.
As preferably, described plasma jet cavity 4 comprises: the 4th flange 403, cuboid-type cavity 401 and trumpet type guiding gutter 404; 4th flange 403 is fixed on the left side of cuboid-type cavity 401; The typhon mouth of trumpet type guiding gutter 404 is fixed on the right side of cuboid-type cavity 401; The toy trumpet mouth of trumpet type guiding gutter 404 is fixed with extraction valve 405, and this extraction valve 405 is connected with barometric control unit 5; Described cuboid-type cavity 401 left and right sides has the first guiding gutter 408 and the second guiding gutter 409; The both sides, front and back of cuboid-type cavity 401 have observation window 402, and observation window 402 seals fixing, and outside applying magnetic field; The upside of cuboid-type cavity 401 has the first through hole 410 and the second through hole 411, and in these two through holes, electrode insertion applies electric field.
As preferably, described barometric control unit 5 comprises: the second barometer 501, aspiration pump 502 and gas tank 503; Gas tank 503 is connected with needle-valve 101, and aspiration pump 502 is connected with extraction valve 405; Second barometer 501 is fixed on the bleeding point of aspiration pump 502, for measuring air pressure of bleeding.
Compare existing ground plasma device, the present invention has the following advantages:
1, the present invention is owing to adopting guiding device, improves the stability of air-flow, forms uniform flow field.
2, the present invention produces cavity owing to adopting plasma, uses low pressure glow discharge principle, extends the plasma sustainable time, improve the repeatability of test.
3, the present invention is due to using plasma fluidic cavities, expands the area in the even velocity of flow district of plasma jet, can apply crossed electric and magnetic field by plasma, realize the research of the electromagnetism suppressing method of plasma.Below in conjunction with accompanying drawing, the invention will be further described:
Accompanying drawing explanation
Fig. 1 is the overall structure planing surface figure of jet plasma generation device of the present invention;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the plasma jet cavity body structure figure in the present invention.
Embodiment
See figures.1.and.2, plane jet plasma generating device of the present invention, comprise: guiding device 1, plasma generation cavity 2, supply unit 3, plasma jet cavity 4 and barometric control unit 5, this plasma generation cavity 2 is connected with guiding device 1, supply unit 3 and plasma jet cavity 4 respectively, this barometric control unit 5 is connected with guiding device 1 and plasma jet cavity 4 respectively, plasma jet cavity 4 has electrode through hole and observation window, for applying orthogonal electromagnetism two dimensional field; Gas is filled with guiding device 1 from barometric control unit 5, flow in plasma generation cavity 2 after guiding device current stabilization, in plasma generation cavity, electric discharge produces plasma, flow in plasma jet cavity 4, then is flowed out by barometric control unit 5.Wherein:
Guiding device 1, comprises needle-valve 101, first flange 102, baffle plate 103 and barometer 106; Needle-valve 101 one end is fixed on the first flange 102 left end, and baffle plate 103 is positioned in the right-hand member groove of the first flange 102, baffle plate 103 has evenly distributed manhole 107;
Plasma generation cavity 2, comprises cylinder electrode 201, circular cap 205, tubular electrode 204, second flange 206 and three-flange 207; The symmetrical both sides of cylinder electrode 201 have through hole, and the second flange 206 and three-flange 207 are respectively by being welded to connect at cylinder electrode 201 symmetrical both sides through hole end; Circular hollow lid 205 adopts tightening knob 202 to be fixed on cylinder electrode about 201 both sides, and is sealed by extruding first seal gasket 203; Cylinder electrode 201 ground connection; Tubular electrode 204 inserts in cylinder electrode 201 by the centre bore of circular hollow lid 205, and coaxially place with cylinder electrode 201, tubular electrode about 204 two ends adopt clamp nut and circular hollow lid 205 to fix, and are sealed by extruding second seal gasket 208;
Supply unit 3, comprises controllable AC power supply, output voltage range 0-500V, maximum power 1KW, output frequency 20KHz;
With reference to Fig. 3, plasma jet cavity 4, comprises the 4th flange 403, cuboid-type cavity 401 and trumpet type guiding gutter 404; The left and right sides of cuboid-type cavity 401 has the first guiding gutter 408 and the second guiding gutter 409, for stable plasma jet velocity, both sides, front and back have observation window 402, and it is fixing to carry out sealing by clamp nut, for observing plasma jet, the upside of cuboid-type cavity 401 has two through holes 410 and 411, electrode 412 is inserted with in first through hole 410 and the second through hole 411, this Electrode connection direct voltage source 413, apply electric field, simultaneously in the stationary magnetic field that the outer applying of observation window 402 is orthogonal with electric field; 4th flange 403 is by being welded to connect at cuboid-type cavity 401 left end, and the typhon mouth of trumpet type guiding gutter 404, by being welded to connect at cuboid-type cavity 401 right-hand member, toy trumpet mouth is fixed with extraction valve 405;
Barometric control unit 5, comprises barometer 501, aspiration pump 502 and gas tank 503; Barometer 501 by tubes connection on aspiration pump 502, for measuring the air pressure at extraction valve 405 place.
Structural relation between above-mentioned parts is as follows:
The other end of the needle-valve 101 of guiding device 1 is connected with barometric control unit 5, and the first flange 102 adopts tightening knob 105 to fix with the second flange 206 of plasma generation cavity 2, and is sealed by extruding the 3rd seal gasket 104; The tubular electrode 204 of plasma generation cavity 2 is connected with supply unit 3 by wire; The three-flange 207 that plasma produces cavity 2 adopts tightening knob 406 to be connected with the 4th flange 403 of plasma jet cavity 4, and is sealed by extruding the 4th seal gasket 407; The alternating-current voltage source of supply unit 3 is that plasma generation cavity 2 is powered, its one end connecting circular tube shape electrode 204, other end ground connection, and the plasma electron density produced by large young pathbreaker's plasma generation cavity 2 of regulating power source voltage is controlled 10
8cm
-3-10
12cm
-3between; The extraction valve 405 of plasma jet cavity 4 is connected with the aspiration pump 502 of barometric control unit 5; The gas tank 503 of barometric control unit 5 is connected to the needle-valve 101 of guiding device 1, the feed rate of metering pin valve 101 is carried out, for controlling the air pressure in plasma generation cavity 2 and the flow velocity in plasma jet cavity 4 by the numerical value observing the barometer 501 of barometric control unit 5 and the barometer 106 of guiding device 1.
Operation principle of the present invention is as follows:
First, tighten tightening knob 105, tightening knob 202 and tightening knob 406, close needle-valve 101; Then open aspiration pump 502, start to bleed, when barometer 501 is stabilized in 20Pa by the time, open needle-valve 101, in plasma generation cavity 2, be filled with inert gas or air, now air pressure starts to rise, continue to bleed, make in cavity, to be full of inert gas or air; When barometer 501 maintains 20Pa again, when barometer 106 maintains certain set point of 50-300Pa, opening power device 3, exports 500V alternating voltage; Voltage now between tubular electrode 204 outer wall and cylinder electrode 201 inwall raises rapidly, and form radial electric field, free electron a small amount of in gas is by this electric field acceleration, and collide with the atom in gas and molecule, the kinetic energy of self is passed to atom, molecule, it is made to ionize free electron and cation, thus electron density is increased, the increase of electron density also can increase the speed of electronics and ion compound simultaneously, finally, the generation speed of electronics and rate of disappearance reach balance, and electron density settles out.Now, the gas in plasma generation cavity 2 is ionized, and achieves glow discharge.Due to the draught head that guiding device 1 and plasma jet cavity 4 produce, the guide functions of baffle plate 103 and each device guiding gutter, form the stable and uniform flow field flowing to plasma jet cavity 4 from guiding device 1, simultaneously due to plasma generation cavity 2 and plasma jet cavity 4 internal gas pressure very low, electron mean free path is very long, electrons is diffused in whole plasma jet cavity 4 along with the flow field of stable and uniform, forms large area electron density and the uniform plasma flat jet of flow velocity.Then open direct voltage source 413, at observation window 402 outer applying orthogonal constant fixed-field, now just can carry out Electric and magnetic fields and the impact of jet plasma is tested.
Above example is only illustrate reference of the present invention, does not form any restriction to content of the present invention.
Claims (9)
1. a plane jet plasma generating device, comprise: plasma generation cavity (2), supply unit (3) and barometric control unit (5), supply unit (3) provides power supply for plasma generation cavity (2), it is characterized in that: the left side of plasma generation cavity (2) and right side are connected to guiding device (1) and plasma jet cavity (4); The inlet end of guiding device (1) and the outlet side of plasma jet cavity (4) are connected with barometric control unit (5), plasma jet cavity (4) has electrode through hole and observation window, for applying orthogonal electromagnetism two dimensional field; Gas is filled with guiding device (1) from barometric control unit (5), flow in plasma generation cavity (2) after guiding device current stabilization, in plasma generation cavity, electric discharge produces plasma, flow in plasma jet cavity (4), then flowed out by barometric control unit (5).
2. device according to claim 1, is characterized in that: guiding device (1) comprising: needle-valve (101), the first flange (102), baffle plate (103) and the first barometer (106);
One end of needle-valve (101) is fixed on the left end of the first flange (102), and the other end is connected with barometric control unit (5);
First barometer (106) is fixed on the lower end of the first flange (102), for measuring the air pressure of inflation;
Baffle plate (103) is placed in the right-hand member groove of the first flange (102);
First flange (102) is connected with plasma generation cavity (2) by knob.
3. device according to claim 2, is characterized in that baffle plate (103) having evenly distributed manhole (107), to make the uniform stream of inflow plasma generation cavity (2).
4. device according to claim 1, is characterized in that plasma generation cavity (2) comprising: the second flange (206), cylinder electrode (201), tubular electrode (204) and three-flange (207);
Second flange (206) and three-flange (207) are connected to cylinder electrode (201) symmetrical both sides through hole end;
Cylinder electrode (201) is fixed with circular hollow lid (205) in both sides up and down respectively, and is sealed by extruding first seal gasket (203);
Tubular electrode (204) inserts in cylinder electrode (201) by the centre bore of circular hollow lid (205), coaxially be fixed on the two ends up and down of cylinder electrode (201), and extrude the second seal gasket (208) by nut and seal;
Tubular electrode (204) is connected with supply unit (3) by wire;
Three-flange (207) is connected with plasma jet cavity (4).
5. device according to claim 2, it is characterized in that first flange (102) of guiding device (1) adopts tightening knob (105) to fix with second flange (206) of plasma generation cavity (2), and sealed by extruding the 3rd seal gasket (104).
6. device according to claim 1, is characterized in that plasma jet cavity (4) comprising: the 4th flange (403), cuboid-type cavity (401) and trumpet type guiding gutter (404);
4th flange (403) is fixed on the left side of cuboid-type cavity (401);
The typhon mouth of trumpet type guiding gutter (404) is fixed on the right side of cuboid-type cavity (401);
The toy trumpet mouth of trumpet type guiding gutter (404) is fixed with extraction valve (405), and this extraction valve (405) is connected with barometric control unit (5).
7. device according to claim 6, is characterized in that the left and right sides of cuboid-type cavity (401) has the first guiding gutter (408) and the second guiding gutter (409); The both sides, front and back of cuboid-type cavity (401) have observation window (402), and observation window (402) sealing is fixing, and outside applying magnetic field; The upside of cuboid-type cavity (401) has the first through hole (410) and the second through hole (411), and in these two through holes, electrode insertion applies electric field.
8. the device according to claim 4 or 6, it is characterized in that three-flange (207) is fixed by tightening knob (406) with the 4th flange (403), and sealed by extruding the 4th seal gasket (407).
9. device according to claim 1, is characterized in that barometric control unit (5) comprising: the second barometer (501), aspiration pump (502) and gas tank (503);
Gas tank (503) is connected with needle-valve (101), and aspiration pump (502) is connected with extraction valve (405);
Second barometer (501) is fixed on the bleeding point of aspiration pump (502), for measuring air pressure of bleeding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210245290.7A CN102781157B (en) | 2012-07-17 | 2012-07-17 | Planar jet flow plasma generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210245290.7A CN102781157B (en) | 2012-07-17 | 2012-07-17 | Planar jet flow plasma generating device |
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| Publication Number | Publication Date |
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| CN102781157A CN102781157A (en) | 2012-11-14 |
| CN102781157B true CN102781157B (en) | 2014-12-17 |
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| CN201210245290.7A Active CN102781157B (en) | 2012-07-17 | 2012-07-17 | Planar jet flow plasma generating device |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106231770A (en) * | 2016-09-09 | 2016-12-14 | 国网江苏省电力公司电力科学研究院 | A kind of working gas and the controlled plasma jet of ambient outside air occur and parameter diagnosis system |
| CN108551716A (en) * | 2018-07-06 | 2018-09-18 | 中国科学技术大学 | A kind of plasma generating apparatus |
| CN108770169B (en) * | 2018-07-23 | 2023-06-06 | 大连海事大学 | Atmospheric pressure unbalanced plasma jet device for introducing shielding gas |
| CN112853738B (en) * | 2021-01-05 | 2022-01-18 | 西南交通大学 | Plasma modification device based on electromagnetic field regulation and control |
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| US5539274A (en) * | 1993-09-07 | 1996-07-23 | Tokyo Electron Limited | Electron beam excited plasma system |
| CN101321889A (en) * | 2005-12-06 | 2008-12-10 | 新明和工业株式会社 | Sheet plasma film-forming device |
| CN102361531A (en) * | 2011-10-26 | 2012-02-22 | 西安电子科技大学 | Device and method for generating large-area, uniform and non-magnetized plasmas |
| CN102573257A (en) * | 2012-01-11 | 2012-07-11 | 西安电子科技大学 | Electron density control system of large-area uniform plasmas |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| EP1991037A1 (en) * | 2006-03-01 | 2008-11-12 | Shinmaywa Industries, Ltd. | Plasma gun and plasma gun film forming apparatus provided with same |
| FR2959906B1 (en) * | 2010-05-05 | 2012-05-04 | Pek 38 40 | METHOD AND DEVICE FOR GENERATING A NON-ISOTHERMIC PLASMA JET |
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2012
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5539274A (en) * | 1993-09-07 | 1996-07-23 | Tokyo Electron Limited | Electron beam excited plasma system |
| CN101321889A (en) * | 2005-12-06 | 2008-12-10 | 新明和工业株式会社 | Sheet plasma film-forming device |
| CN102361531A (en) * | 2011-10-26 | 2012-02-22 | 西安电子科技大学 | Device and method for generating large-area, uniform and non-magnetized plasmas |
| CN102573257A (en) * | 2012-01-11 | 2012-07-11 | 西安电子科技大学 | Electron density control system of large-area uniform plasmas |
Non-Patent Citations (1)
| Title |
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| On the Dynamics of the Plasma Entry and Guiding in a Straight Magnetized Filter of a Pulsed Vacuum Arc;Leandro Giuliani et al.;《TRANSACTIONS ON PLASMA SCIENCE》;20071230;第35卷(第6期);第1710-1716页 * |
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| CN102781157A (en) | 2012-11-14 |
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