CN107433244A - Electromagnetic diaphragm type droplet preparation facilities on demand - Google Patents
Electromagnetic diaphragm type droplet preparation facilities on demand Download PDFInfo
- Publication number
- CN107433244A CN107433244A CN201710775844.7A CN201710775844A CN107433244A CN 107433244 A CN107433244 A CN 107433244A CN 201710775844 A CN201710775844 A CN 201710775844A CN 107433244 A CN107433244 A CN 107433244A
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- China
- Prior art keywords
- diaphragm
- driving
- chamber
- demand
- liquid
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
A kind of electromagnetic diaphragm type droplet preparation facilities on demand, is related to a kind of micro-spray device.Liquid metal solution is filled up in the cavity above diaphragm (fusing point is 19 DEG C), liquid metal is under stationary magnetic field and the periodically variable function of current, and caused periodically variable electromagnetic force forces the fluid in cavity periodically to fragment into drop at nozzle above diaphragm.The micro-spray device of the above method is realized, it is machined with adjacent diaphragm drive device and solution to be driven in main cavity；Electromagnetic force driving motion of membrane suffered by liquid metal.Provided with permanent magnet, drive device, diaphragm, liquid storage cylinder, signal source, power amplifier, the upper cover plate for connecting catheter and lower cover with nozzle.Driving chamber is fixed between permanent magnet, and electrode is placed in inside driving chamber, ensures balanced current distribution；The variable a variety of driving electric signals of signal are produced by signal source and power amplifier.
Description
Technical field
The present invention relates to a kind of micro-spray device, more particularly to electromagnetic diaphragm type droplet preparation facilities and method on demand.
Background technology
Microelectronic device package and semiconductor chip manufacture are two piths in microelectronic engineering.With electronic seal
The development of dress technology, Electronic Encapsulating Technology are more and more to producing the controllable micro-injection technical need of size.Micro- liquid spraying technique
Be widely used in the technologies such as chip package, 3D printing, the technology by it is a kind of it is controllable on demand in a manner of liquid metal is carried out it is accurate
Distribution, it is a kind of very promising new increasing material manufacturing of accurate write-through to realize that the mechanically or electrically device between component connects
Technology.
At present, the micro-spray device of need based jet pattern mainly has piezoelectric type driving, the driving of air pressure diaphragm type, and electromagnetism drives
It is dynamic.Chinese patent CN200610138558.1 discloses a kind of barometric pulse-type droplet and drives preparation system on demand, the device system
Standby droplet frequency is relatively low.Chinese patent CN103212516A discloses a kind of Ampere force drive-type micro-spray device, and this method is only suitable
Preparation for conducting metal solution droplets.Chinese patent CN103203294A discloses a kind of electromagnetic micro jet device, this method
Prepared by the droplet for being difficult to non-conductive liquid, significantly limit the quick application and development of the technology.
The content of the invention
It is an object of the invention to provide suitable for a kind of water, metallic solution etc. be conductive or prepared by non-conductive droplet electromagnetic membrane
Chip micro-spray device.
A kind of electromagnetic diaphragm type of present invention droplet ejection device on demand, including permanent magnet, liquid storage cylinder, signal source, power are put
Big device, driving chamber, spray chamber, diaphragm, conduit and the lower cover with nozzle；
Driving chamber relative two sides A, B are provided with copper electrode, are provided with permanent magnet, side outside relative both sides C, D in addition
A, B, C, D are surrounding, and the lower surface of driving chamber is provided with opening and is used to configure diaphragm, and driving inside cavity is full of liquid metal；Copper
Electrode and liquid metal contacts, two copper electrodes are connected by wire with power amplifier, and power amplifier is connected with signal source；
The upper surface of spray chamber is provided with opening and is used to configure diaphragm, and spray chamber is provided with throttle orifice and connected by conduit and liquid storage cylinder
Connect；The lower surface of spray chamber is using the lower cover end-blocking with nozzle；The upper surface opening of spray chamber and the lower surface of driving chamber are opened
Mouth is relative, and centre is opened and sealed using diaphragm circle；In spray chamber and liquid storage cylinder is to be sprayed conductive or non-conductive
Liquid, such as water, metal salt solution etc..The position of liquid storage cylinder is higher than spray chamber.
Driving inside cavity is full of liquid metal, and liquid metal uses mercury or GaIn alloys (for liquid under normal temperature).
The variable a variety of driving electric signals of signal are produced by signal source and power amplifier, by permanent magnet in driving chamber
The front-back of body produces stationary magnetic field.
Compared with prior art, the working principle and beneficial effect of electromagnetic diaphragm type of the invention droplet ejection device on demand
It is as follows：
Permanent magnet is used to produce magnetic field, is provided with electrode inside driving chamber, electrode is contacted well with liquid metal solution, passed through
Signal source and power amplifier produce the variable a variety of driving electric signals of signal, and driving electric signal both ends are placed in electrode both ends,
Variable force solenoid is produced under magnetic fields in driving chamber, driving diaphragm is deformed, the diaphragm extruding injection cavity being deformed
Internal fluid, periodicity jet and drop is fragmented at nozzle.
The technique effect of the present invention is embodied in：The present invention is using stainless steel diaphragm as direct drive part, diaphragm top
The Ampere force that liquid metal is subject to causes liquid injection inside cavity pressure to become big, forces a fluid through nozzle as driving source
Form periodicity droplet.During micro-injection, by adjusting the size of electric current, worked so as to adjust to answer caused by diaphragm deformation
Cavity changes, so as to realize the accurate control to liquid micro-dimension.The experimental rig that this invention greatly simplifies, is greatly improved
Micro-injection efficiency.On the basis of this normal temperature injection apparatus, increase temperature control system and inert gas protection system, can be achieved
Injection to high temperature fluid.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 is drive device decomposition texture schematic diagram of the embodiment of the present invention.
Fig. 3 is injection apparatus decomposition texture schematic diagram of the embodiment of the present invention.
Fig. 4 is band nozzle lower cover plate structure schematic diagram of the embodiment of the present invention.
Fig. 5 is principle schematic of the embodiment of the present invention.
Conduit 1, liquid storage cylinder 2, drive device 3, bolt fixing hole 4, spray chamber 5, the lower cover 6 with nozzle, throttle orifice
7, wire connection hole 8, copper electrode 9, driving chamber 10, signal source 11, power amplifier 12, injection apparatus seal groove 13, diaphragm 14,
Injection apparatus and liquid storage cylinder connecting hole 15, the lower cover seal groove 16 with nozzle, nozzle 17.
Embodiment
With reference to embodiment, the present invention will be further described, but the present invention is not limited to following examples.
Embodiment 1
Droplet preparation facilities, the Ampere force that diaphragm top liquid metal is subject to are used as driving to a kind of electromagnetic diaphragm type on demand
Source, apply Ampere force to diaphragm, diaphragm is deformed, and is caused liquid injection inside cavity pressure to become big, is forced a fluid through spray
Mouth forms periodicity droplet.
Referring to Fig. 1-3, the embodiment of the present invention is provided with conduit 1, liquid storage cylinder 2, drive device 3, bolt fixing hole 4, spray chamber
5, the lower cover 6 with nozzle, throttle orifice 7, wire connection hole 8, copper electrode 9, driving chamber 10, signal source 11, power amplifier
12, injection apparatus seal groove 13, diaphragm 14, injection apparatus and liquid storage cylinder connecting hole 15, the lower cover seal groove 16 with nozzle,
Nozzle 17.
Stationary magnetic field is produced by loading permanent magnet outside drive device 3, copper electrode 9, letter are placed in the inside of drive device 3
Variable electrical signal caused by number source 11 and power amplifier 12, its both positive and negative polarity are connected with copper electrode 9.The inside of driving chamber 10 is full of liquid
State metal, driving chamber 10 are bolted hole 4 with diaphragm 14 and are assembled together.Spray chamber 5 and liquid storage cylinder 2 are made by conduit 1
Link together, spray chamber 5 is assembled with the lower cover 6 with nozzle by injection apparatus fixing hole 19.In use, size and side
Driving chamber 10 is flowed through to variable electric current, in stationary magnetic field, the metal liquid in the body of driving chamber 10 is acted on by electromagnetic force,
Pressure, the diaphragm nozzle that liquid to be driven passes through lower cover 6 inside the effect driving spray chamber of pressure are produced above diaphragm
Middle generation molten drop.
Signal source, power amplifier, copper electrode, the composition drive device 3 such as driving chamber and injection apparatus pilot hole.Injection dress
Put seal groove, diaphragm, injection apparatus and liquid storage cylinder pilot hole, injection apparatus and liquid storage cylinder connecting hole, injection apparatus fixing hole etc.
Form injection apparatus.In the preparation process on demand of droplet, arbitrary signal can be produced by signal source 11 and power amplifier 12
Impulse waveform, controllable and adjust the size of droplet, the present invention is applied to the micropreparation of droplet, is also applied for and particle
Preparation.
Claims (5)
1. a kind of electromagnetic diaphragm type droplet preparation facilities on demand, it is characterised in that including permanent magnet, liquid storage cylinder, signal source, power
Amplifier, driving chamber, spray chamber, diaphragm, conduit and the lower cover with nozzle；
Driving chamber relative two sides A, B are provided with copper electrode, are provided with permanent magnet outside relative both sides C, D in addition, side A, B,
C, D is surrounding, and the lower surface of driving chamber is provided with opening and is used to configure diaphragm, and driving inside cavity is full of liquid metal；Copper electrode
With liquid metal contacts, two copper electrodes are connected by wire with power amplifier, and power amplifier is connected with signal source；
The upper surface of spray chamber is provided with opening and is used to configure diaphragm, and spray chamber is connected provided with throttle orifice by conduit with liquid storage cylinder；
The lower surface of spray chamber is using the lower cover end-blocking with nozzle；The lower surface opening phase of the upper surface opening of spray chamber and driving chamber
Right, centre is opened and sealed using diaphragm circle；In spray chamber and liquid storage cylinder is conductive or non-conductive liquid to be sprayed.
2. according to a kind of droplet preparation facilities on demand of electromagnetic diaphragm type described in claim 1, it is characterised in that liquid metal is adopted
With mercury or GaIn alloys.
3. according to a kind of droplet preparation facilities on demand of electromagnetic diaphragm type described in claim 1, it is characterised in that the position of liquid storage cylinder
Put and be higher than spray chamber.
A kind of 4. method of work of electromagnetic diaphragm type described in claim 1 droplet preparation facilities on demand, it is characterised in that permanent magnetism
Iron is used to produce magnetic field, is provided with electrode inside driving chamber, electrode contacts with liquid metal solution, passes through signal source and power amplification
Device produces the variable a variety of driving electric signals of signal, and driving electric signal both ends are placed in electrode both ends, the driving chamber under magnetic fields
Interior generation variable force solenoid, driving diaphragm are deformed, the fluid for the diaphragm extruding injection inside cavity being deformed, in nozzle
Place's periodicity jet simultaneously fragments into drop.
5. according to the method for claim 4, it is characterised in that during micro-injection, by adjusting the size of electric current, so as to adjust
Section answers injection cavity change caused by diaphragm deformation, so as to realize the accurate control to liquid micro-dimension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710775844.7A CN107433244A (en) | 2017-08-31 | 2017-08-31 | Electromagnetic diaphragm type droplet preparation facilities on demand |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710775844.7A CN107433244A (en) | 2017-08-31 | 2017-08-31 | Electromagnetic diaphragm type droplet preparation facilities on demand |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107433244A true CN107433244A (en) | 2017-12-05 |
Family
ID=60460087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710775844.7A Pending CN107433244A (en) | 2017-08-31 | 2017-08-31 | Electromagnetic diaphragm type droplet preparation facilities on demand |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107433244A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108031848A (en) * | 2017-12-10 | 2018-05-15 | 北京工业大学 | A kind of device that droplet is prepared based on magnetic fluid exciting technology jet breakup |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19831335A1 (en) * | 1998-07-13 | 2000-02-10 | Michael Angermann | Appts to produce micro droplets of molten conductive metals uses a magneto-hydrodynamic pump with modulation to give a clean and controlled droplet ejection |
| CN1307001C (en) * | 2000-06-15 | 2007-03-28 | 穆萨·霍马迪 | High-performance system for parallel and selective dispensing of micro-droplets |
| CN103212516A (en) * | 2013-04-28 | 2013-07-24 | 厦门大学 | Ampere force driving micro spraying device |
| CN104399620A (en) * | 2014-09-30 | 2015-03-11 | 陕西启源科技发展有限责任公司 | Pneumatic diaphragm type solder ball droplet spraying device |
-
2017
- 2017-08-31 CN CN201710775844.7A patent/CN107433244A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19831335A1 (en) * | 1998-07-13 | 2000-02-10 | Michael Angermann | Appts to produce micro droplets of molten conductive metals uses a magneto-hydrodynamic pump with modulation to give a clean and controlled droplet ejection |
| CN1307001C (en) * | 2000-06-15 | 2007-03-28 | 穆萨·霍马迪 | High-performance system for parallel and selective dispensing of micro-droplets |
| CN103212516A (en) * | 2013-04-28 | 2013-07-24 | 厦门大学 | Ampere force driving micro spraying device |
| CN104399620A (en) * | 2014-09-30 | 2015-03-11 | 陕西启源科技发展有限责任公司 | Pneumatic diaphragm type solder ball droplet spraying device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108031848A (en) * | 2017-12-10 | 2018-05-15 | 北京工业大学 | A kind of device that droplet is prepared based on magnetic fluid exciting technology jet breakup |
| CN108031848B (en) * | 2017-12-10 | 2020-05-08 | 北京工业大学 | Device for preparing droplets by jet fracture based on magnetofluid excitation technology and method for preparing droplets by device |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20171205 |
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