CN110842209B - Device for preparing uniform metal particles through pressure difference regulation and electromagnetic disturbance - Google Patents
Device for preparing uniform metal particles through pressure difference regulation and electromagnetic disturbance Download PDFInfo
- Publication number
- CN110842209B CN110842209B CN201911344572.0A CN201911344572A CN110842209B CN 110842209 B CN110842209 B CN 110842209B CN 201911344572 A CN201911344572 A CN 201911344572A CN 110842209 B CN110842209 B CN 110842209B
- Authority
- CN
- China
- Prior art keywords
- tank
- pressure
- balling
- cavity
- melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
- B22F2009/0836—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid with electric or magnetic field or induction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
- B22F2009/0848—Melting process before atomisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
- B22F2009/0892—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid casting nozzle; controlling metal stream in or after the casting nozzle
Landscapes
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Abstract
A test device for preparing uniform metal particles by pressure difference regulation and electromagnetic disturbance relates to a micro-spraying device in a jet flow mode. The device provides high frequency, high quality fabrication suitable for micro solder balls (e.g., tin and its alloys) and other metal particles. The technical scheme is as follows: the device comprises an electromagnetic force generator, a pressure control system, a temperature control system and a balling system. The method belongs to a non-contact direct-drive continuous spraying uniform metal particle preparation technology. The high-frequency and high-quality preparation of uniform metal particles is realized by reasonably matching the differential pressure parameter and the pulse electromagnetic disturbance parameter (current frequency, current waveform, current amplitude and magnetic field intensity), and the method is simple and easy to implement.
Description
Technical Field
The invention relates to a device for high-frequency high-quality preparation of uniform metal particles (such as tin and tin alloy) based on pressure difference regulation and electromagnetic disturbance, belongs to a non-contact direct-drive continuous spraying uniform metal particle preparation technology implementation device, and is suitable for high-frequency high-quality preparation of metal particles or metal droplets.
Background
Microelectronic device packaging and semiconductor chip fabrication are two important parts in microelectronic engineering. Large scale integrated circuit packages all employ uniform metal particle (micro-ball) bonding to achieve both core-to-core and core-to-board signal transfer and mechanical connections. Continuous spray technology and drop-on-demand technology are two common ways of uniform metal particle preparation today. The continuous jet technology is based on the unstable principle of jet flow, the formation of micro-droplets is controlled by utilizing surface waves formed on the surface of a jet flow liquid column by micro-disturbance, and the frequency of preparing micro-solder balls by the method is higher. The drop-on-demand technique is to apply a periodic pulse driving force above a nozzle to realize that a pulse force generates a metal particle droplet on demand, and the method for preparing the micro-solder ball has the advantage of controllable frequency and size, but the droplet preparation frequency is low.
Chinese patent CN101745763A discloses a method for high frequency preparation of micro solder balls by continuous jet technology, which uses an electromagnetic vibrator to generate disturbance above a nozzle, and belongs to a contact type disturbance. Chinese patent CN103203294A discloses an electromagnetic droplet preparation device, which directly uses pulsating electromagnetic force as pulse driving force to realize periodic controllable low-frequency transition of metal droplets at a nozzle outlet according to requirements, wherein one pulse driving force corresponds to the formation of one metal droplet, and belongs to one of the drop-on-demand technologies.
Disclosure of Invention
The invention aims to provide a high-frequency high-quality preparation technology suitable for uniform metal particles (such as tin and an alloy thereof) and construct a preparation device based on the technology. The device is a novel device for preparing uniform metal particles (such as tin and tin alloy) based on pressure difference regulation and electromagnetic disturbance high-frequency high-quality. The device realizes the method for preparing uniform metal particles by a non-contact direct-drive continuous spraying technology.
In order to achieve the purpose, the invention adopts the following technical scheme:
a test device for preparing uniform metal particles by pressure difference regulation and electromagnetic disturbance is characterized by being provided with a temperature control and air control device, an electromagnetic force generating device and a balling device; the electromagnetic force generating device comprises a constant magnetic field (5) provided by a permanent magnet, a power amplifier (2), a signal generator (1), a stainless steel electrode plate (10), an injection cavity (7) and a melting cavity (4); the spraying cavity (7) is positioned right below the melting cavity (4), a connecting hole (6) is arranged between the spraying cavity and the melting cavity, two opposite side surfaces of the spraying cavity (7) are respectively provided with a stainless steel electrode plate (10), the two stainless steel electrode plates (10) are opposite in parallel, a constant magnetic field (5) provided by a permanent magnet is added between the two parallel opposite stainless steel electrode plates (10) in the spraying cavity (7), and the magnetic field direction of the constant magnetic field (5) is parallel to the stainless steel electrode plates (10); the outer sides of the melting cavity (4) and the injection cavity (7) are provided with a melting heating coil (8); the bottom of the melting cavity (4) is provided with a stainless steel plate (9) with a nozzle; the signal generator (1) is connected with the two stainless steel electrode plates (10) through the power amplifier (2); the opposite surfaces of the two stainless steel electrode plates 10 are in surface connection with the metal melt; the electromagnetic force generator (3) is composed of a constant magnetic field (5) provided by the permanent magnet, a spraying cavity (7), a melting cavity (4), a stainless steel electrode plate (10), a stainless steel plate (9) with a nozzle and a melting heating coil (8);
an axially vertical high-temperature peanut oil pipe (17) is arranged right below a nozzle in the electromagnetic force generator (3), a balling heating coil (18) is arranged around the high-temperature peanut oil pipe (17), and the balling heating coil (18) is used for heating peanut oil in the high-temperature peanut oil pipe (17); a low-temperature peanut oil pipe (19) which is coaxial and communicated and is provided with a balling heating coil (18) is not arranged below the high-temperature peanut oil pipe (17), and the pipe diameter of the low-temperature peanut oil pipe (19) is smaller than that of the high-temperature peanut oil pipe (17); a closed balling tank (25) is arranged from the nozzle of the stainless steel plate (9) with the nozzle to the outer side of the low-temperature peanut oil pipe (19), and the nozzle of the stainless steel plate (9) with the nozzle is communicated with the balling tank (25); a particle collecting switch (21) is arranged at the lower end of the low-temperature peanut oil pipe (19) outside the balling tank (25), a particle collecting container (22) is arranged right below the low-temperature peanut oil pipe (19) outside the balling tank (25), and an observation window (20) is arranged on the side surface of the balling tank (25); the vacuum pump (28) is connected with the balling tank (25), and the balling tank (25) is also provided with an oxygen content tester (24);
the first nitrogen tank (12) is connected with a first pressure stabilizing tank (13) through a first micro electric valve (11), and the first pressure stabilizing tank (13) is connected with a balling tank (25) through a first precise gas pressure stabilizing valve (14); the second nitrogen tank (29) is connected with a second pressure stabilizing tank (26) through a second micro electric valve (27), and the second pressure stabilizing tank (26) is connected with the right upper part of the melting cavity (4) through a second precise gas pressure stabilizing valve (23); meanwhile, a second pressure stabilizing tank (26) is connected with the balling tank (25) through a second precise gas pressure stabilizing valve (23) and a valve switch (16);
the melting heating coil (8) and the balling heating coil (18) are connected with a temperature control and air control device (15);
the first pressure stabilizing tank (13), the second pressure stabilizing tank (26) and the balling tank (25) are respectively provided with a pressure gauge, and the pressure gauges are connected with the temperature control and air control device (15);
the first micro electric valve (11) and the second micro electric valve (27) are connected with the temperature control and air control device (15).
The metal in the melting cavity (4) is melted under the action of the heating coil and fills the spraying cavity (7); the permanent magnets are arranged on two sides of the spraying cavity and used for generating a uniform magnetic field, stainless steel electrode plates are arranged in the spraying cavity in a direction perpendicular to the magnetic field, the stainless steel electrode plates are well contacted with the liquid metal solution, and pulse current is generated through a signal source and a power amplifier; when high-frequency pulse current flows through the liquid metal in the constant magnetic field in the jet cavity, high-frequency pulse disturbance is generated above the nozzle by taking the molten metal in the jet cavity as a carrier.
The temperature control and air control device (15) comprises a temperature control device part and an air control device part.
The high frequency pulse disturbance can be used as the disturbance for preparing uniform metal particles by a continuous spraying technology.
The method for preparing uniform metal particles based on pressure difference regulation and electromagnetic disturbance high-frequency and high-quality comprises the following steps:
(1) A metal block is filled in the melting cavity, and the oxygen content in the melting cavity, the electromagnetic force generating device and the balling cavity is lower than 300ppm through the air control device part in the temperature control and air control device (15);
(2) The pressure difference is generated between the liquid surface in the melting cavity and the outlet of the nozzle by adjusting an air control device in the temperature control and air control device (15), and the fluid in the melting cavity is jetted out through the nozzle to form a jet liquid column under the action of the pressure difference; meanwhile, high-frequency pulse current flows through the liquid metal in a constant magnetic field, and the required disturbance is obtained by adjusting disturbance parameters (current frequency, current waveform, current amplitude and magnetic field intensity); when the disturbance is transmitted to the jet flow liquid column, surface waves are generated, and the high-frequency fracture of the end of the jet flow liquid column is controlled through the surface waves, so that uniform metal particles are continuously formed.
The metal melting liquid in the spraying cavity (7) is full, and the metal melting liquid in the melting cavity (4) is communicated with the metal melting liquid in the spraying cavity (7) through the connecting hole (6).
Compared with the prior art, the invention has the following working principle and beneficial effects:
the driving method of this method belongs to the contactless direct driving type. The high-frequency electromagnetic force (belonging to volume force) is generated in the liquid metal in the spraying cavity above the nozzle, and the electromagnetic force directly acts on the liquid metal in the spraying cavity to generate precise and controllable high-frequency electromagnetic (force) disturbance which is transmitted to the end of a liquid column through the liquid column to form high-frequency jet flow transition of uniform metal microdroplets. Rather than as a driving force for the on-demand preparation of single metal droplets, which is a fundamental difference from chinese patent CN103203294 a. In this device, the electromagnetic disturbance force is directly controlled by the current waveform, current frequency and current amplitude when the magnetic field is constant. Because the controllability of the electrical parameters is good, accurate, stable and continuous. Therefore, compared with other disturbance modes at present, the controllability and stability of the electromagnetic force direct disturbance mode are better, the equipment is simpler and more feasible, and the large-scale production is easy to realize.
Drawings
Fig. 1 is a schematic view of an electromagnetic force generating system according to the present invention.
FIG. 2 is a schematic diagram of an apparatus for high-frequency preparation of uniform metal particles according to the present invention (differential pressure regulation and electromagnetic disturbance technology).
The device comprises a signal generator 1, a power amplifier 2, an electromagnetic force generator 3, a melting cavity 4, a constant magnetic field 5, a connecting hole 6, an injection cavity 7, a melting heating coil 8, a stainless steel plate with nozzle 9, a stainless steel electrode 10, a first micro electric valve 11, a first nitrogen tank 12, a first pressure stabilizing tank 13, a first precise gas pressure stabilizing valve 14, a temperature control and air control device 15, a valve switch 16, a high-temperature peanut oil pipe 17, a balling heating coil 18, a low-temperature peanut oil pipe 19, an observation window 20, a particle collecting switch 21, a particle collecting container 22, a second precise gas pressure stabilizing valve 23, an oxygen content tester 24, a balling tank 25, a second pressure stabilizing tank 26, a second micro electric valve 27, a vacuum pump 28 and a second nitrogen tank 29.
Detailed Description
The present invention will be further illustrated with reference to the following examples, but the present invention is not limited to the following examples.
Example 1
Referring to fig. 1 and 2, the embodiment of the present invention is provided with a signal generator 1, a power amplifier 2, an electromagnetic force generator 3, a melting chamber 4, a constant magnetic field 5, a connecting hole 6, an injection chamber 7, a melting heating coil 8, a stainless steel plate with a nozzle 9, a stainless steel electrode 10, a first micro electric valve 11, a first nitrogen tank 12, a first pressure stabilizing tank 13, a first precise gas pressure stabilizing valve 14, a temperature control and air control device 15, a valve switch 16, a high temperature peanut oil pipe 17, a balling heating coil 18, a low temperature peanut oil pipe 19, an observation window 20, a particle collection switch 21, a particle collection container 22, a second precise gas pressure stabilizing valve 23, an oxygen content tester 24, a balling tank 25, a second pressure stabilizing tank 26, a second micro electric valve 27, a vacuum pump 28, and a second nitrogen tank 29.
The temperature control and air control device 15 has a temperature control system and a pressure control system. The mutually parallel permanent magnets generate a constant magnetic field 5 inside the ejection chamber 7. Inside the spray cavity 7, parallel stainless steel electrode plates 10 are arranged perpendicular to the direction of the magnetic field, and the anode and the cathode of high-frequency current signals generated by the signal generator 1 and the power amplifier 2 are connected with the stainless steel electrode plates 10. The ejection chamber 7 is filled with a metal block at the initial timing. The valve switch 16 is opened to maintain the same pressure between the upper part of the melting chamber 4 and the inside of the balling tank 25, and the oxygen content inside the chamber is measured by the oxygen content analyzer 24 by repeating the evacuation by the vacuum pump 28 and the inflation by the first nitrogen tank 12 or the second nitrogen tank 29, so that the oxygen content (ppm) inside the entire sealed chamber is reduced to a specific value (300 ppm) or less. The melting heating coil 8 and the balling heating coil 18 are respectively connected with a temperature control and air control device 15, and metal is melted at a proper temperature by setting different temperature control parameters. After the metal in the melting chamber is melted, the metal enters and fills the injection chamber 7 through the connecting hole 6 between the melting chamber and the injection chamber.
When the metal melting temperature and the balling temperature are stabilized around the corresponding values. At this point the gas switch 16 is closed and the pressure differential between the nozzle outlet and the surface of the molten metal in the melting chamber is subsequently adjusted. Firstly, the air pressure at the outlet of the nozzle is adjusted, and the adjustment comprises coarse adjustment and fine adjustment. The coarse adjustment is to indirectly control the air pressure in the first pressure stabilizing tank 13 by controlling the on-off of the first micro electric valve 11 through the PLC in the temperature control and air control device 15, the adjustment process is to send a signal to close the first micro electric valve 11 when the air pressure signal obtained by the sensor is consistent with the signal set by the PLC, and the pressure value obtained in the first pressure stabilizing tank 13 is slightly larger than the set air pressure because the closing of the electromagnetic valve needs time. At this time, the difference between the air pressure in the first pressure stabilizing tank 13 and the air pressure required in the balling tank 25 is not large, and then the air in the first pressure stabilizing tank 13 slowly flows into the balling cavity through the first precise air pressure stabilizing valve 14, so that the purpose of precisely controlling the air pressure is achieved. The air pressure on the surface of the molten metal in the melting cavity obtains corresponding air pressure magnitude in the same way, and the air pressure magnitude comprises coarse adjustment and fine adjustment. The coarse adjustment is to indirectly control the air pressure in the second pressure stabilizing tank 26 by controlling the on-off of the second micro electric valve 27 through the PLC in the temperature control and air control device 15, the adjustment process is to send a signal to close the second micro electric valve 27 when the air pressure signal obtained by the sensor is consistent with the signal set by the PLC, and the pressure value obtained in the second pressure stabilizing tank 26 is slightly larger than the set air pressure because the closing of the electromagnetic valve needs time. At this time, the difference between the air pressure in the second surge tank 26 and the air pressure required in the melting cavity 4 is not large, and then the air in the second surge tank 26 slowly flows into the melting cavity 4 through the second precise air pressure stabilizing valve 23, so that the purpose of precisely controlling the air pressure is achieved.
The fluid in the injection chamber 7 is jetted through the nozzle to form a jet liquid column by adjusting the pressure difference between the inside of the forming ball 25 and the upper part of the molten metal in the melting chamber 4. And opening the signal generator 1 and the power amplifier 2, adjusting the signal generator, generating a pulsating electromagnetic force in the jetting cavity, transmitting the pulsating electromagnetic force to the jet flow liquid column as micro-disturbance to generate surface waves, and controlling the high-frequency fracture of the end of the jet flow liquid column through the surface waves to form uniform metal particle micro-droplets.
Droplets of uniform metal particles prepared by the electromagnetic jet perturbation technique will form uniform spherical metal particles by a subsequent spheronization apparatus. The specific process is as follows: peanut oil is used as a medium for liquid metal particle balling. When liquid metal particles are pelletized in the peanut oil medium, the medium needs to be divided into a high-temperature pelletizing area and a low-temperature pelletizing area. In the high temperature spheroidizing zone, the formed liquid metal particles are further spheroidized. Subsequently, the spheroidized particles are cooled in a low temperature spheroidizing zone to form spherical metal particles.
The particle collection switch 21 is turned on, and uniform metal particles prepared by pressure difference regulation and electromagnetic disturbance with high frequency and high quality are collected by the particle collection container 22.
Claims (2)
1. A method for preparing uniform metal particles by pressure difference regulation and electromagnetic disturbance is characterized in that a test device is provided with a temperature control and air control device, an electromagnetic force generation device and a balling device; the electromagnetic force generating device comprises a constant magnetic field (5) provided by a permanent magnet, a power amplifier (2), a signal generator (1), a stainless steel electrode plate (10), an injection cavity (7) and a melting cavity (4); the spraying cavity (7) is positioned right below the melting cavity (4), a connecting hole (6) is arranged between the spraying cavity and the melting cavity, two opposite side surfaces of the spraying cavity (7) are respectively provided with a stainless steel electrode plate (10), the two stainless steel electrode plates (10) are opposite in parallel, a constant magnetic field (5) provided by a permanent magnet is added between the two parallel opposite stainless steel electrode plates (10) in the spraying cavity (7), and the magnetic field direction of the constant magnetic field (5) is parallel to the stainless steel electrode plates (10); the outer sides of the melting cavity (4) and the spraying cavity (7) are provided with a melting heating coil (8); the bottom of the melting cavity (4) is a stainless steel plate (9) with a nozzle; the signal generator (1) is connected with the two stainless steel electrode plates (10) through the power amplifier (2); the opposite surfaces of the two stainless steel electrode plates (10) are in surface connection with the molten metal; the electromagnetic force generator (3) is composed of a constant magnetic field (5) provided by the permanent magnet, a spraying cavity (7), a melting cavity (4), a stainless steel electrode plate (10), a stainless steel plate (9) with a nozzle and a melting heating coil (8);
an axially vertical high-temperature peanut oil pipe (17) is arranged right below a nozzle in the electromagnetic force generator (3), a balling heating coil (18) is arranged around the high-temperature peanut oil pipe (17), and the balling heating coil (18) is used for heating peanut oil in the high-temperature peanut oil pipe (17); a low-temperature peanut oil pipe (19) which is provided with no balling heating coil (18) and is coaxial and communicated with the high-temperature peanut oil pipe (17) is arranged below the high-temperature peanut oil pipe (17), and the pipe diameter of the low-temperature peanut oil pipe (19) is smaller than that of the high-temperature peanut oil pipe (17); a closed balling tank (25) is arranged from the nozzle of the stainless steel plate (9) with the nozzle to the outer side of the low-temperature peanut oil pipe (19), and the nozzle of the stainless steel plate (9) with the nozzle is communicated with the balling tank (25); a particle collecting switch (21) is arranged at the lower end of the low-temperature peanut oil pipe (19) outside the balling tank (25), a particle collecting container (22) is arranged right below the low-temperature peanut oil pipe (19) outside the balling tank (25), and an observation window (20) is arranged on the side surface of the balling tank (25); the vacuum pump (28) is connected with the balling tank (25), and the balling tank (25) is also provided with an oxygen content tester (24);
the first nitrogen tank (12) is connected with a first pressure stabilizing tank (13) through a first micro electric valve (11), and the first pressure stabilizing tank (13) is connected with a balling tank (25) through a first precise gas pressure stabilizing valve (14); the second nitrogen tank (29) is connected with a second pressure stabilizing tank (26) through a second micro electric valve (27), and the second pressure stabilizing tank (26) is connected with the right upper part of the melting cavity (4) through a second precise gas pressure stabilizing valve (23); meanwhile, the second pressure stabilizing tank (26) is connected with the balling tank (25) through a second precise gas pressure stabilizing valve (23) and a valve switch (16);
the melting heating coil (8) and the balling heating coil (18) are connected with a temperature control and air control device (15);
the first pressure stabilizing tank (13), the second pressure stabilizing tank (26) and the balling tank (25) are respectively provided with a pressure gauge, and the pressure gauges are connected with the temperature control and air control device (15);
the first micro electric valve (11) and the second micro electric valve (27) are connected with the temperature control and air control device (15);
the temperature control and air control device (15) comprises a temperature control device part and an air control device part;
the metal in the melting cavity (4) is melted under the action of the heating coil and fills the spraying cavity (7); the permanent magnets are arranged on two sides of the spraying cavity and used for generating a uniform magnetic field, stainless steel electrode plates are arranged in the spraying cavity in a direction perpendicular to the magnetic field, the stainless steel electrode plates are well contacted with the liquid metal solution, and pulse current is generated through a signal source and a power amplifier; when high-frequency pulse current flows through liquid metal in a constant magnetic field in the injection cavity, high-frequency pulse disturbance is generated above the nozzle by taking molten metal in the injection cavity as a carrier;
the method specifically comprises the following steps:
1) Filling a metal block into the melting cavity, opening a valve switch (16) to keep the same pressure between the upper part of the melting cavity (4) and the inside of a balling tank (25), repeatedly vacuumizing by using a vacuum pump (28) and inflating by using a first nitrogen tank (12) or a second nitrogen tank (29), and combining a pneumatic control device part in a temperature control and pneumatic control device (15) to realize that the oxygen content in the melting cavity, an electromagnetic force generating device and the balling cavity is lower than 300ppm;
2) The pressure difference is generated between the liquid surface in the melting cavity and the nozzle outlet by adjusting an air control device in the temperature control and air control device (15), when the metal melting temperature and the balling temperature are stabilized near corresponding values, the air valve switch (16) is closed, and the air pressure difference between the nozzle outlet and the molten metal surface in the melting cavity is adjusted; adjusting the air pressure at the outlet of the nozzle, wherein the adjustment comprises coarse adjustment and fine adjustment; the pressure regulation on the surface of the molten metal in the melting cavity comprises coarse regulation and fine regulation; under the action of the pressure difference, the fluid in the melting cavity is jetted out through the nozzle to form a jet liquid column; meanwhile, high-frequency pulse current flows through the liquid metal in the constant magnetic field, and the required disturbance is obtained by adjusting disturbance parameters, wherein the disturbance parameters comprise current frequency, current waveform, current amplitude and magnetic field intensity; when the disturbance is transmitted to the jet flow liquid column, surface waves are generated, the high-frequency fracture of the end head of the jet flow liquid column is controlled through the surface waves, and uniform metal particles are continuously formed;
the air pressure at the outlet of the nozzle is roughly and finely adjusted, the roughly adjusting is to indirectly control the air pressure in the first pressure stabilizing tank (13) by controlling the on-off of the first micro electric valve (11) through the PLC in the temperature control and air control device (15), the PLC sends a signal to close the first micro electric valve (11) when the air pressure signal acquired by the sensor is consistent with the signal set by the PLC, the closing of the electromagnetic valve needs time, so the pressure value acquired in the first pressure stabilizing tank (13) is larger than the set air pressure, the difference between the air pressure in the first pressure stabilizing tank (13) and the air pressure required in the balling tank (25) is not large, and the air in the first pressure stabilizing tank (13) slowly flows into the balling cavity through the first precise air pressure stabilizing valve (14), thereby achieving the purpose of precisely controlling the air pressure;
the pressure on the surface of the molten metal in the melting cavity is roughly and finely adjusted, the rough adjustment is to indirectly control the pressure in the second pressure stabilizing tank (26) by controlling the on-off of a second micro electric valve (27) through a PLC in a temperature control and air control device (15), the PLC sends a signal to close the second micro electric valve (27) when a pressure signal acquired by a sensor is consistent with a signal set by the PLC, the closing of the electromagnetic valve needs time, so the pressure value acquired in the second pressure stabilizing tank (26) is larger than the set pressure value, the pressure in the second pressure stabilizing tank (26) is not larger than the pressure required in the melting cavity (4) at the moment, and then the gas in the second pressure stabilizing tank (26) slowly flows into the melting cavity (4) through a second precise gas pressure stabilizing valve (23), so that the purpose of precisely controlling the pressure is achieved.
2. A method according to claim 1, characterized in that the injection chamber (7) is filled with molten metal, and the molten metal of the melting chamber (4) is in molten communication with the molten metal of the injection chamber (7) via the connecting bore (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911344572.0A CN110842209B (en) | 2019-12-23 | 2019-12-23 | Device for preparing uniform metal particles through pressure difference regulation and electromagnetic disturbance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911344572.0A CN110842209B (en) | 2019-12-23 | 2019-12-23 | Device for preparing uniform metal particles through pressure difference regulation and electromagnetic disturbance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110842209A CN110842209A (en) | 2020-02-28 |
| CN110842209B true CN110842209B (en) | 2022-11-04 |
Family
ID=69610508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911344572.0A Active CN110842209B (en) | 2019-12-23 | 2019-12-23 | Device for preparing uniform metal particles through pressure difference regulation and electromagnetic disturbance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110842209B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113020607B (en) * | 2021-02-06 | 2024-03-12 | 北华航天工业学院 | Device for preparing micro solder balls for chip level packaging by electromagnetic disturbance and flow focusing |
| CN114850482B (en) * | 2022-04-28 | 2023-09-15 | 北华航天工业学院 | Device and method for preparing uniform solder balls with diameters below 100 microns under electrostatic effect |
| CN114850483B (en) * | 2022-04-28 | 2024-02-13 | 北华航天工业学院 | Device and method for rapidly and efficiently screening uniform solder balls |
| CN115178744B (en) * | 2022-07-13 | 2023-05-23 | 北华航天工业学院 | Device and method for efficiently preparing uniform solder balls with diameters of more than 1mm |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008163373A (en) * | 2006-12-27 | 2008-07-17 | Digital Powder Systems Inc | Method for manufacturing microball of active metal, and microball |
| CN103912352A (en) * | 2014-04-23 | 2014-07-09 | 吉林大学 | Ammonia flow rate fine control device of solid selective catalytic reduction (SSCR) system |
| CN107262730A (en) * | 2017-08-01 | 2017-10-20 | 北京有色金属研究总院 | The gas atomization preparation method and its equipment of a kind of superfine spherical metal powder |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100431746C (en) * | 2005-07-21 | 2008-11-12 | 北京有色金属研究总院 | Method and device for preparing precision welding ball |
| CN2808366Y (en) * | 2005-07-21 | 2006-08-23 | 北京有色金属研究总院 | Apparatus for preparing precise soldered ball |
| CN101138791A (en) * | 2007-10-16 | 2008-03-12 | 天津大学 | Even-sized particles producing device and method for preparing the same |
| JP5484766B2 (en) * | 2009-03-31 | 2014-05-07 | 国立大学法人東北大学 | Method and apparatus for producing conductive particles |
| CN103056375B (en) * | 2013-01-06 | 2015-03-04 | 西北工业大学 | Molten metal droplet forming device and method of utilizing same to form molten metal droplets |
| KR101668066B1 (en) * | 2014-12-17 | 2016-10-24 | 한국생산기술연구원 | Metal Powder Manufacturing Method And Manufacturing Apparatus Thereof |
| JP2017190516A (en) * | 2016-04-15 | 2017-10-19 | パナソニックＩｐマネジメント株式会社 | Method for producing metal particles and apparatus for producing the same |
| CN106001589B (en) * | 2016-07-19 | 2017-12-05 | 株洲科能新材料有限责任公司 | A kind of method that brittle metal microballoon is prepared based on metallic microspheres shaped device |
| CN108031848B (en) * | 2017-12-10 | 2020-05-08 | 北京工业大学 | Device for preparing droplets by jet fracture based on magnetofluid excitation technology and method for preparing droplets by device |
-
2019
- 2019-12-23 CN CN201911344572.0A patent/CN110842209B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008163373A (en) * | 2006-12-27 | 2008-07-17 | Digital Powder Systems Inc | Method for manufacturing microball of active metal, and microball |
| CN103912352A (en) * | 2014-04-23 | 2014-07-09 | 吉林大学 | Ammonia flow rate fine control device of solid selective catalytic reduction (SSCR) system |
| CN107262730A (en) * | 2017-08-01 | 2017-10-20 | 北京有色金属研究总院 | The gas atomization preparation method and its equipment of a kind of superfine spherical metal powder |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110842209A (en) | 2020-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110842209B (en) | Device for preparing uniform metal particles through pressure difference regulation and electromagnetic disturbance | |
| CN113020607B (en) | Device for preparing micro solder balls for chip level packaging by electromagnetic disturbance and flow focusing | |
| CN100431746C (en) | Method and device for preparing precision welding ball | |
| CN101140889B (en) | Automatic welding ball packaging metal ball embedding method and apparatus | |
| CN101279372B (en) | Method and device for preparing microparticles by splitting liquid drop using electric charge oscillation method | |
| CN101745763B (en) | High-efficiency preparation method of precise welded ball | |
| CN108838399B (en) | Uniform metal droplet angle-variable direction-control jetting device and large-dip-angle component printing method | |
| CN103008672A (en) | Method and device for efficiently preparing uniform spherical micro-particle through pulse small-hole multi-vibrating-rod injection process | |
| CN105271139A (en) | Method and device for preparing aluminum nitride powder through atomization | |
| CN217412451U (en) | Device for preparing uniform solder balls with size less than 100 micrometers under electrostatic effect | |
| CN103972117A (en) | Automatic flexible ball mounting device and method | |
| CN108031848B (en) | Device for preparing droplets by jet fracture based on magnetofluid excitation technology and method for preparing droplets by device | |
| CN110919017A (en) | Method and device for preparing spherical metal powder by hot wire assisted plasma arc | |
| CN101279371A (en) | Method and device for preparing micro-uniform grain using harmonic method | |
| CN2808366Y (en) | Apparatus for preparing precise soldered ball | |
| CN217412452U (en) | Device of homogeneous solder ball is filtered to high efficiency | |
| CN102009180B (en) | Method and device for ejecting and preparing homogeneous particles by pulsing lateral parts of holes | |
| CN114850482B (en) | Device and method for preparing uniform solder balls with diameters below 100 microns under electrostatic effect | |
| CN111438367A (en) | Impact type continuous metal powder preparation device | |
| CN107486348B (en) | A kind of on-demand droplet ejection device of push-pull joint | |
| CN210359259U (en) | Device for preparing metal spherical powder by ultrasonic wave | |
| CN114850483B (en) | Device and method for rapidly and efficiently screening uniform solder balls | |
| CN115625339A (en) | Device and method for preparing spherical powder by adopting radio frequency plasma | |
| Chao et al. | Experimental analysis of a pneumatic drop-on-demand (DOD) injection technology for 3D printing using a gallium-indium alloy | |
| JP2001064702A (en) | Prodution of fine spherical metal powder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20200228 Assignee: Dazhang Jiushu (Langfang) Technology Co.,Ltd. Assignor: Beijing University of Technology Contract record no.: X2023980040597 Denomination of invention: A device for preparing uniform metal particles through pressure difference regulation and electromagnetic disturbance Granted publication date: 20221104 License type: Common License Record date: 20230828 |