A kind of on-demand feed electrohydraulic dynamic micro-spray device
Technical field
This utility model relates to a kind of electrohydraulic dynamic micro-spray device, particularly relates to a kind of on-demand micro-spray of feed electrohydraulic dynamic
Device.
Background technology
Electrohydraulic dynamic micro-spray technology is a kind of new method manufacturing micro-nano mechanism and device, has low cost of manufacture, work
Skill process simple and flexible, without the advantage such as mask plate and photoetching, the spray printing that high viscosity solution can be realized, the most extensively answered
In micro-manufacture of micro electronmechanical, micro-mechanical component and drug material.In this technology, conductivity is more than 108The electrolysis of S/m
The surface of solution is usual more than 10 by applied-6The electric field charging of V/m level.When the electrostatic acted on liquid surface is made every effort to overcome
When taking the surface tension of described liquid, spray.Owing to the micro-spray process of electrohydraulic dynamic relates to multiple physics in many electric fields, flow field
Amount, the impact of technological parameter, it is difficult to realize the accurate control of the micro-spray of solution, the quickly application that significantly limit this technology is sent out
Exhibition.
Roger etc. ([1] JU Park, M Hardy, SJ Kang., et al.Nature Materials, 2007,6,
782-789) by applying high direct voltage voltage, and under certain liquid supply speed, jointly made by electric field force and surface tension
With producing continuous spray printing.But the frequency of this system is easily subject to the impact of liquid supply speed, and cannot realize the on-demand spray of drop
Print.Chinese patent 201210418177.4 introduces high-voltage pulse power source, utilizes AC field induction conducting solution to produce stable
Jet spray printing, overcomes conventional electro-hydraulic power Printing techniques and conducting solution can not be utilized to carry out having Order continuous micro-nano structure accurately to spray
Print the shortcoming made.But a major defect of this system is that controllability is low, continuous print spray printing can only be carried out, therefore can be only applied to
Simple drop manufacturing process.United States Patent (USP) US 5821951 uses high-voltage pulse power source to carry out the spray printing of discrete micro-nano drop,
Substantially achieve the control of drop ejection frequency, drop size, but affected micro-by factors such as space electric field, solution solvent volatilizations
Micro-nano structure spray printing precision needs to be improved further;Install additional in hollow nozzle conductor needle point be at present frequently with a kind of shower nozzle knot
Structure ([2] Lee S., Byun D., Jun D., et al.Sensors and Actuators a-Physical, 2008,141,
506-514), installing additional of conductor needle point reduces injection startup voltage, reduces drop size, executes alive frequency by regulation
And size, can control to spray injection frequency and the size of drop, but this control mode structure is complicated, to power source performance requirement
Height, and be still difficult to the free on off control of course of injection and realized spray printing on-demand, quantitative truly.
The electrohydraulic dynamic micro-spray device of on market or now scholar place research is mostly by changing high voltage control power supply
Frequency and size realize controlling injection, this control mode structure is complicated, high to high voltage power supply performance requirement, the most such as
Solution and realize the metered injection of solution and be badly in need of new breakthrough and improvement in this field needed for what supply accurate, on-demand.
Summary of the invention
This utility model provides a kind of on-demand quantitative micro-spray device of feed electrohydraulic dynamic, is ensureing the most controlled injection
While, solve again the problem how realizing need based jet.I.e. by utilizing a kind of accurate screw rod feed liquor on-demand, quantitative, high
Piezoelectricity field force inducing solution realizes the micro-spray device of stable injection, and the amount of the solution sprayed is no longer by the high voltage electric field applied
Determined, but the liquid inlet volume supplied by accurate screw rod is determined.
This utility model is provided with basal electrode, collects substrate, hollow nozzle, high voltage control power supply, pulse generator, insulation
Housing, insulated enclosure set, needle electrode, liquid storage cylinder, motor, accurate screw rod.
The minus earth of described high voltage control power supply, arranges a bypass, at the bottom of linker between high voltage control power supply and negative pole
Electrode;Described collection substrate is fixed on described basal electrode;Described high voltage control positive source connects one end of needle electrode,
Described needle electrode is fixedly installed on insulation shell by insulated enclosure set, and tip portion is through hollow nozzle, described
Hollow nozzle is fixed on described insulation shell;Described accurate screw rod is affixed with motor, and described motor fixedly mounts
On insulation shell, described liquid storage cylinder is fixing with insulation shell to be connected and communicates with accurate screw rod;The control of described pulse generator
End processed connects motor, and when pulse generator sends pulse signal, motor drives accurate screw rod to rotate, and solution is in institute
State and flow to described needle electrode syringe needle under the promotion of accurate screw rod.
Compared with the prior art, this utility model has substantive distinguishing features highlighted below with the most progressive:
During work, first adjust conductor probe according to solution properties and stretch out the length of nozzle, solution is injected liquid storage
Cylinder is carried out feed flow and is prepared.When, after described high voltage control electric power starting, high tension voltage acts on needle electrode, simultaneously pulse generation
Device sends signal function on motor 1, and described motor drives accurate screw rod to rotate, and solution is in the promotion of accurate screw rod
Under flow to described needle electrode syringe needle, electric charge from described needle electrode be injected into described solution formation electrostatic force, solution is quiet
Spray to substrate under the effect of electric power, form injection;Described pulse generator stops sending signal, and motor stops operating, essence
Close screw rod stops supply solution, after needle portion solution has sprayed completely, described high voltage control power-off, completes one since then
Secondary injection.
In this utility model, the amount of solution sprayed each time is no longer by changing the electric voltage frequency of needle electrode with big
Little realize, but drive accurate screw rod to rotate the amount of solution supplied to realize, i.e. by changing by changing motor
The pulse signal that pulse generator is sent changes the amount of solution sprayed each time, thus realizes on-demand and metered injection.
The most both avoided the complexity of the high performance requirements to high voltage power supply and control, the on-demand and quantitative spray of solution can have been realized again
Penetrate.The amount of solution sprayed each time can be obtained with motor rotating speed by accurate tooth shape of screw, and its computing formula is:In formula,Wherein W is inverse screw channel width
Degree, D is screw diameter, and N is screw speed, and n is fluid non-newtonian index, gzFor inverse screw channel barometric gradient.
Accompanying drawing explanation
Fig. 1 is described on-demand feed electrohydraulic dynamic quantitative micro-spray device entirety sectional view overview;
Detailed description of the invention
As it is shown in figure 1, this utility model be provided with basal electrode 1, collect substrate 2, hollow nozzle 3, high voltage control power supply 4,
Pulse generator 5, insulation shell 6, insulated enclosure set 7, needle electrode 8, liquid storage cylinder 9, motor 10, accurate screw rod 11.
The minus earth of described high voltage control power supply 4, arranges a bypass, linker between high voltage control power supply 4 and negative pole
Hearth electrode 1;Described collection substrate 2 is fixed on described basal electrode 1;Described high voltage control power supply 4 positive pole connects needle electrode 8
One end, described needle electrode 8 is fixedly installed on insulation shell 11 by insulated enclosure set 7, and tip portion is through sky
Heart shower nozzle 3, described hollow nozzle 3 is fixed on insulation shell 6;Described accurate screw rod 11 is affixed with motor 10, described step
Entering motor 10 to be fixedly installed on insulation shell 6, described liquid storage cylinder 9 is fixing with insulation shell 6 to be connected and communicates with accurate screw rod
11;The control end of described pulse generator 5 connects motor 10, when pulse generator 5 sends pulse signal, motor
10 drive accurate screw rod 11 to rotate, and solution flows to the syringe needle position of described needle electrode 8 under the promotion of described accurate screw rod 11.
During work, first adjust needle electrode 8 according to solution properties and stretch out the length of hollow nozzle 3, solution is injected storage
Fluid cylinder 9 is carried out feed flow and is prepared.After described high voltage control power supply 4 is opened, high tension voltage acts on needle electrode 8, same to seasonal pulse
Rushing generator 6 and send signal function on motor 10, described motor 10 drives accurate screw rod 11 to rotate, and solution is in essence
Flowing to the syringe needle position of described needle electrode 8 under the promotion of close screw rod 11, electric charge is injected into shape described solution from needle electrode 8
Becoming electrostatic force, solution sprays to substrate under the effect of electrostatic force, forms injection;Described pulse generator 6 stops sending signal, step
Entering motor 10 to stop operating, accurate screw rod 11 stops supplying solution to needle electrode 8, after needle portion solution sprays completely,
Described high voltage control power supply 4 is closed, and completes since then once to spray.
In this utility model, the amount of solution sprayed each time is no longer by changing the voltage frequency of high voltage control power supply 4
Rate and size realize, but the amount of solution driving accurate screw rod 11 rotation to be supplied by changing motor 10 realizes,
The pulse signal i.e. sent by changing pulse generator 6 changes the amount of solution sprayed each time, thus realizes on-demand
And metered injection.The most both avoided the complexity of the high performance requirements to high voltage power supply and control, solution can have been realized again
On-demand and metered injection.The amount of solution sprayed each time can be obtained with motor 10 rotating speed by accurate screw rod 11 profile of tooth, its
Computing formula is:In formula:Wherein
W is inverse screw channel width, and D is screw diameter, and N is screw speed, and n is fluid non-newtonian index, gzFor inverse screw channel barometric gradient.