CN107478380B - 用于测量高压力的压电式压力传感器 - Google Patents
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Abstract
本发明涉及一种用于测量高压力的压电式压力传感器,其包括能插入测量孔中的壳体(1)和布置在传感器膜(5)和内部的壳体肩部(11a;11b)之间的压电式测量元件(4),该传感器膜在前侧布置于壳体(1)处。压电式测量元件(4)由唯一的晶体元件(6a;6b)构成,该晶体元件以其基面(13)和其相对的盖面(14)被张紧在传感器膜(5)的压力柱塞(9)与支承于壳体肩部(11a;11b)处的分接电极(8)之间,以及晶体元件(6a;6b)的将基面(13)与盖面(14)连接起来的侧面(7a;7b)大部分邻抵于布置在壳体(1)内的定位套(12a;12b)。
Description
技术领域
本发明涉及一种用于测量高压力的压电式压力传感器,该传感器包括可插入测量孔中的壳体和压电式测量元件,该压电式测量元件布置在设置在壳体前侧的传感器膜和内部壳体肩部之间。
背景技术
压电式压力传感器、例如用于在大功率内燃机的燃烧室内进行压力测量的压电式压力传感器遭受较高的温度负荷和压力负荷,其中,会出现范围高达1000巴的压力峰值。在此,重要的是,改善压力传感器的断裂安全性和密封性。
特别是应确保,即便压电式测量元件断裂,压力传感器的各部分也不会到达内燃机的燃烧室中并且在那里引起损坏,该压电式测量元件对于常见的压力传感器来说大多由盘状或者环形的晶体元件堆构成(参见例如DE3423711A1或者DE3838014A1)或者由多个直立的棒状晶体元件构成(例如参见AT504485B1)。
在这点上,在WO2009/015941A1中描述了一种压电式压力传感器,该压力传感器具有带有中心压力柱塞的传感器膜,该压力柱塞固定在压力托板处。多个棒状的压电式晶体元件为了横向的压电效应而被预张紧地布置在压力托板和内部壳体肩部之间。在压电式晶体元件由于过载而造成断裂时,压力托板的密封肩部在传感器壳体内部抵靠于密封座,以避免热气体通过压力传感器离开。不利的是压力传感器的相对复杂的结构及其较大的结构高度。
在这点上,由CH705469A1已知带有过载保护的压力传感器。传感器膜的作用在布置于管状弹簧中的压电式测量元件上的压力柱塞由环形的弹性膜区域围绕,其中,压力柱塞在轴向的压力作用时能沿膜柱塞的方向运动。沿轴向在弹性的膜区域后面、沿压力方向来看在间隙后面设有固定的止挡件或肩部,其中,膜在压力柱塞过载时能支承在止挡件上。因此,在过载时,膜柱塞沿测量元件的方向运动,其中,该路程通过止挡件来限制。
在测量元件中的晶体元件断裂时(例如在内燃机的燃烧室中进行压力测量时),在若干对负载变化或工作循环之后,所有布置在测量元件中的晶体元件断裂或粉碎,以使得中心膜部分不能散出热能。由此,传感器膜的薄的弹性部分也过热、变软以及在之后的工作循环之后产生孔洞和裂纹,因而,压力传感器也从内部被加载有燃烧压力。由此,弹性的膜区域在燃烧室压力降低时从传感器(节流作用)弯曲、来回弯曲、断裂并且到达燃烧室中。
发明内容
本发明的任务在于避免前述缺点并且提出一种压力传感器,该压力传感器适于在高温和压力峰值的范围达到1000巴的压力的情况下进行测量。此外,压力传感器也应在结构上简单、紧凑和牢固地构造。在测量元件断裂时,传感器膜的中心部分不会被压入到压力传感器中。
根据本发明,这通过如下来实现:压电式测量元件由唯一的晶体元件构成,该晶体元件以其基面和其相对的覆盖面被张紧在传感器膜的压力柱塞与支承于壳体肩部处的分接电极之间,且晶体元件的将基面与覆盖面连接起来的侧面大部分邻抵于布置在壳体内的定位套。即便唯一的晶体元件发生断裂,其各部分也被保持在位,以使得膜柱塞继续被支撑,并且基本上能保持传感器的机械特性和热特性。
较佳地,在此,定位套沿径向支承于压力传感器的壳体的内壁上处。
根据本发明的第一实施变型,该晶体元件构造成直角平行六面体形或棒形,并且其由部分表面(纵向面和横向面)组成的侧面至少大部分地邻抵于电隔离的定位套。在此变型中,利用横向的压电效应,其中,与压电式晶体元件的电气轴线正交地引入力。
根据本发明的第二实施变型,该晶体元件构造成盘状,并且其弯曲的、例如圆柱形的侧面至少大部分地邻抵于电隔离的定位套。在此变型中,利用纵向的压电效应,其中,与压电式晶体元件的电气轴线平行地引入力。
特别是,在将晶体元件构造成带有或不带有中心开口的平坦的圆盘时,产生如下优点:
●非常牢固的结构,即便晶体盘断裂,由于利用了纵向效应,因而传感器特性(敏感度)也仅无关紧要地发生改变。
●通过围绕的定位套、例如由合适的塑料材料构成的定位套,断片(在可能的过载之后)被保持在位,并且也支撑传感器膜的中心区域。即,膜的变形程度和膜的热连接基本上保持不变。
●通过采用仅一个晶体元件,内部壳体(双壳体应用)可实施成结构高度较小,即,测量元件内部的温度梯度可保持得较小。由此产生较小的内部应力和提高的传感器耐用性。
根据本发明,外壳由外部壳体和布置于其内的罐状内部壳体构成,其中,晶体元件布置在传感器膜和内部壳体的壳体肩部之间,该传感器膜在前侧布置于内部壳体处。
较佳地,晶体元件可由硅酸镓镧(例如,La3Ga5SiO14)、钽酸镓镧(例如,La3Ga5.5Ta0.5O14)、铌酸锂或由正磷酸镓构成。
附图说明
下面,根据实施例来进一步阐释本发明。附图中示出:
图1以部分剖视图示出根据本发明的压力传感器的第一实施变型;
图2以放大剖视图示出图1的压力传感器的细节A;
图3示出根据图1中的线III-III的压力传感器的剖视图;以及
图4以根据图2的剖视图示出根据本发明的压力传感器的第二实施变型。
功能相同的部件在各个实施变型中设有相同的附图标记。
具体实施方式
在图1-3中所示的压电式压力传感器具有可插入测量孔中的壳体1,该壳体在其内部接纳有压电式测量元件4,该测量元件4布置在传感器膜5和内部的壳体肩部11a之间,传感器膜5布置在壳体1的前侧或压力侧。传感器膜5基本上由中心压力柱塞9构成,该中心压力柱塞9由弹性的膜区域22围绕,并且在外部用罐状凸缘区域23封闭,该凸缘区域23与壳体1焊接起来,并且能接纳热保护元件24。
在本发明中,压电式测量元件4由唯一的晶体元件6a构成,该晶体元件6a的基面13和相对的覆盖面14被张紧在传感器膜5的压力柱塞9和支承于壳体肩部11a处的分接电极8之间。侧向的限制表面、即晶体元件6a的将基面13与覆盖面14连接起来的侧面7a大部分(在所示实施例中基本上以整个表面)邻抵于布置在壳体1中的定位套12a上。定位套12a沿径向支承于压力传感器的壳体1的内壁15a处。
即便晶体元件可能断裂(由于高压力峰值而触发),晶体元件的断片也被保持在位,以使得可以防止传感器膜5的较薄的膜区域22的变形和撕裂。
在图1-3中所示的实施变型中,晶体元件6a在应用横向的压电效应的情况下被构造成直角平行六面体形或棒形,其中,晶体元件6a的最大纵向延伸(方向)较佳地定向成与压力传感器的中心轴线正交。晶体元件6a的由纵向面和横向面组成的侧面7a基本上以整个表面邻抵于电隔离的定位套12a。
定位套12a具有中心区域16,该中心区域16具有用于晶体元件6a的较佳为矩形或正方形的凹槽17,用于至少部分地接纳分接电极8和/或压力柱塞9的圆环形区域18至少在一侧邻抵于该中心区域16。定位套12a的中心区域16和压力柱塞9或分接电极8之间的微小的轴向空出区域确保将力不受干扰地引入到压电式晶体元件6a中。
图4示出具有外部壳体2的压力传感器,该外部壳体2在形成环状间隙3的情况下接纳罐状的内部壳体10,其中,在压力侧布置于内部壳体10处的传感器膜5与内部壳体10的内罐底或内部壳体肩部11b之间,压电式测量元件4抵着内罐底被预张紧。该压电式测量元件4由唯一的晶体元件6a构成,该晶体元件6a在所示实施例中构造成盘状,并且以其柱形或圆柱形的侧面7b至少大部分地邻抵于电隔离的定位套12b处。
较佳地,平坦的盘状晶体元件6b的直径与厚度比为15:1到5:1,较佳地为12:1到8:1。
如在图2和图4中所示,分接电极8由邻抵于定位套12a、12b的盘状基体19构成,该基体19具有中心的信号引线20,其中,盘状基体19在垫有较佳为圆环形隔离元件21的情况下支承于壳体1的壳体肩部11a处(图2)或者支承于内部壳体10的内罐底或壳体肩部11b处(图4)。
Claims (12)
1.一种适用于测量高压力的压电式压力传感器,所述压力传感器包括能插入测量孔中的壳体(1)和压电式测量元件(4),所述压电式测量元件布置在传感器膜(5)和内部的壳体肩部(11a;11b)之间,所述传感器膜在前侧布置于所述壳体(1)处,所述压电式测量元件(4)由唯一的晶体元件(6a;6b)构成,其特征在于,所述晶体元件(6a;6b)以其基面(13)和其相对的覆盖面(14)被张紧在所述传感器膜(5)的压力柱塞(9)与支承于所述壳体肩部(11a;11b)处的分接电极(8)之间,以及所述晶体元件(6a;6b)的将所述基面(13)与所述覆盖面(14)连接起来的侧面(7a;7b)以整个表面邻抵于布置在所述壳体(1)内的定位套(12a;12b)。
2.如权利要求1所述的压电式压力传感器,其特征在于,所述定位套(12a;12b)支承于所述壳体(1)的内壁(15a;15b)处。
3.如权利要求1或2所述的压电式压力传感器,其特征在于,所述晶体元件(6a)被构造成直角平行六面体形或棒形,并且所述晶体元件的由部分表面组成的侧面(7a)以整个表面邻抵于电隔离的定位套(12a)。
4.如权利要求3所述的压电式压力传感器,其特征在于,所述定位套(12a)具有中心区域(16),所述中心区域带有用于所述晶体元件(6a)的为矩形或正方形的凹槽(17),用于接纳所述分接电极(8)和/或所述压力柱塞(9)的圆环形区域(18)至少在一侧邻抵于所述中心区域(16)。
5.如权利要求1或2所述的压电式压力传感器,其特征在于,所述晶体元件(6b)被构造成盘状,并且以其弯曲的侧面(7b)以整个表面邻抵于电隔离的定位套(12b)。
6.如权利要求5所述的压电式压力传感器,其特征在于,盘状晶体元件(6b)的直径与厚度比为15:1到5:1。
7.如权利要求6所述的压电式压力传感器,其特征在于,盘状晶体元件(6b)的直径与厚度比为12:1到8:1。
8.如权利要求1所述的压电式压力传感器,其特征在于,所述壳体(1)由外部壳体(2)和布置于所述外部壳体内的罐状内部壳体(10)构成,其中,所述晶体元件(6a;6b)布置在所述传感器膜(5)与所述内部壳体(10)的壳体肩部(11b)之间,所述传感器膜在前侧布置于所述内部壳体(10)处。
9.如权利要求8所述的压电式压力传感器,其特征在于,所述内部壳体(10)相对于所述外部壳体(2)具有环形间隙(3)。
10.如权利要求1所述的压电式压力传感器,其特征在于,所述分接电极(8)具有邻抵于所述定位套(12a;12b)的盘状基体(19),所述基体具有中心的信号引线(20),其中,盘状基体(19)在垫有隔离元件(21)的情况下支承于所述壳体肩部(11a;11b)处。
11.如权利要求10所述的压电式压力传感器,其特征在于,所述隔离元件(21)被构造为圆环形。
12.如权利要求1所述的压电式压力传感器,其特征在于,所述晶体元件(6a;6b)由硅酸镓镧、钽酸镓镧、铌酸锂构成或由正磷酸镓构成。
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CN114486052B (zh) * | 2022-02-18 | 2023-03-21 | 中国空气动力研究与发展中心超高速空气动力研究所 | 一种外壳绝缘型压电式压力传感器 |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3423711A1 (de) * | 1983-07-07 | 1985-01-17 | AVL Gesellschaft für Verbrennungskraftmaschinen und Messtechnik mbH, Prof. Dr.Dr.h.c. Hans List, Graz | Messwertaufnehmer zur messung heisser medien, sowie verfahren zu seiner montage |
CN1046039A (zh) * | 1989-03-30 | 1990-10-10 | 内燃发动机与测量技术有限公司Avl公司 | 压力传感器 |
WO2013147260A1 (ja) * | 2012-03-29 | 2013-10-03 | シチズンファインテックミヨタ株式会社 | 圧力検出装置、圧力検出装置付き内燃機関 |
JP2014070952A (ja) * | 2012-09-28 | 2014-04-21 | Citizen Finetech Miyota Co Ltd | 燃焼圧センサ |
CN104169702A (zh) * | 2012-03-16 | 2014-11-26 | 西铁城精技美优达株式会社 | 带有燃烧压力检测装置的内燃机以及燃烧压力检测装置 |
DE102013215860A1 (de) * | 2013-08-12 | 2015-02-12 | Robert Bosch Gmbh | Sensormodul für Druckmessglühstiftkerze |
WO2015147061A1 (ja) * | 2014-03-27 | 2015-10-01 | シチズンファインテックミヨタ株式会社 | 燃焼圧センサ及びその製造方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB404622A (en) | 1932-07-12 | 1934-01-12 | James Taylor | Improvements in or relating to pressure gauges |
US2894317A (en) * | 1954-06-07 | 1959-07-14 | Spence T Marks | Method for constructing a barium titanate blast velocity gauge |
AT269515B (de) * | 1967-02-20 | 1969-03-25 | H C Hans Dipl Ing Dr Dr List | Piezoelektrischer Meßwandler mit Beschleunigungskompensation |
AT276810B (de) * | 1967-06-14 | 1969-12-10 | List Hans | Piezoelektrischer Meßwandler |
CH587478A5 (zh) * | 1974-11-08 | 1977-04-29 | Kistler Instrumente Ag | |
US4604544A (en) * | 1983-10-17 | 1986-08-05 | Jeco Co., Ltd. | Piezoelectric pressure indicator |
JPS6454685A (en) | 1987-08-25 | 1989-03-02 | Ngk Spark Plug Co | Spark plug with pressure sensor |
AT389170B (de) | 1987-11-19 | 1989-10-25 | Avl Verbrennungskraft Messtech | Piezoelektrisches messelement |
NL9000802A (nl) | 1990-04-05 | 1991-11-01 | Texas Instruments Holland | Sensor voor het meten van de druk van een medium, in het bijzonder voor het meten van de wisselende druk in een dieselinspuitpomp. |
JP3123799B2 (ja) | 1991-12-24 | 2001-01-15 | 日本特殊陶業株式会社 | 圧力センサ |
DE102004054348A1 (de) | 2004-11-09 | 2006-05-11 | Hsb Selbstbausysteme Gmbh | Verfahren zur Herstellung eines Verbundglases und Verbundglas |
JP4903165B2 (ja) | 2005-02-24 | 2012-03-28 | キストラー ホールディング アクチエンゲゼルシャフト | 電気絶縁皮膜によって保持された圧電式力センサ用部品又は圧電式圧力センサ用部品 |
AT503816B1 (de) * | 2006-06-06 | 2008-01-15 | Piezocryst Advanced Sensorics | Piezoelektrischer sensor |
AT504485B1 (de) | 2006-11-22 | 2008-06-15 | Piezocryst Advanced Sensorics | Piezoelektrischer drucksensor |
AT505015B1 (de) | 2007-07-27 | 2008-10-15 | Piezocryst Advanced Sensorics | Drucksensor |
DE102009022539A1 (de) * | 2009-05-25 | 2010-12-02 | Robert Bosch Gmbh | Vorrichtung zur Erfassung eines Brennraumdrucks einer Brennkraftmaschine |
CH705469A1 (de) | 2011-09-07 | 2013-03-15 | Kistler Holding Ag | Drucksensor mit Überlastschutz. |
EP3124944B1 (de) * | 2015-07-31 | 2019-01-23 | Kistler Holding AG | Piezoelektrischer drucksensor |
DK3124943T3 (da) * | 2015-07-31 | 2021-08-30 | Kistler Holding Ag | Piezoelektrisk tryksensor og fremgangsmåde til fremstilling af den piezoelektriske tryksensor |
-
2016
- 2016-06-07 AT ATA50519/2016A patent/AT518650B1/de active
-
2017
- 2017-05-31 EP EP17173611.9A patent/EP3255401B1/de active Active
- 2017-06-06 CN CN201710418183.2A patent/CN107478380B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3423711A1 (de) * | 1983-07-07 | 1985-01-17 | AVL Gesellschaft für Verbrennungskraftmaschinen und Messtechnik mbH, Prof. Dr.Dr.h.c. Hans List, Graz | Messwertaufnehmer zur messung heisser medien, sowie verfahren zu seiner montage |
CN1046039A (zh) * | 1989-03-30 | 1990-10-10 | 内燃发动机与测量技术有限公司Avl公司 | 压力传感器 |
CN104169702A (zh) * | 2012-03-16 | 2014-11-26 | 西铁城精技美优达株式会社 | 带有燃烧压力检测装置的内燃机以及燃烧压力检测装置 |
WO2013147260A1 (ja) * | 2012-03-29 | 2013-10-03 | シチズンファインテックミヨタ株式会社 | 圧力検出装置、圧力検出装置付き内燃機関 |
JP2014070952A (ja) * | 2012-09-28 | 2014-04-21 | Citizen Finetech Miyota Co Ltd | 燃焼圧センサ |
DE102013215860A1 (de) * | 2013-08-12 | 2015-02-12 | Robert Bosch Gmbh | Sensormodul für Druckmessglühstiftkerze |
WO2015147061A1 (ja) * | 2014-03-27 | 2015-10-01 | シチズンファインテックミヨタ株式会社 | 燃焼圧センサ及びその製造方法 |
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