CN107326446B - Seed crystal cleaning box - Google Patents
Seed crystal cleaning box Download PDFInfo
- Publication number
- CN107326446B CN107326446B CN201710631524.4A CN201710631524A CN107326446B CN 107326446 B CN107326446 B CN 107326446B CN 201710631524 A CN201710631524 A CN 201710631524A CN 107326446 B CN107326446 B CN 107326446B
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- China
- Prior art keywords
- seed crystal
- baffle
- box
- mounting hole
- protruding
- Prior art date
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- 239000013078 crystal Substances 0.000 title claims abstract description 112
- 238000004140 cleaning Methods 0.000 title claims abstract description 57
- 238000005192 partition Methods 0.000 claims description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 4
- 230000000694 effects Effects 0.000 abstract description 8
- 239000002253 acid Substances 0.000 description 16
- 239000007788 liquid Substances 0.000 description 11
- 125000006850 spacer group Chemical group 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000005554 pickling Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/007—Apparatus for preparing, pre-treating the source material to be used for crystal growth
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a seed crystal washs box, includes the box body, the box body includes two relative first curb plates that set up and two relative second curb plates that set up, seed crystal washs box still includes the inside at least one baffle of box body, two the baffle mounting hole that the width of baffle matches is all seted up to first curb plate, the baffle mounting hole is used for placing the baffle, the baffle mounting hole highly is greater than the thickness of baffle, the baffle include a flat plate portion with at least one protruding group on the flat plate portion, every protruding group includes a plurality of bellying. According to the invention, the seed crystal is thoroughly cleaned, the condition that the surface of the seed crystal is uneven is avoided, and the cleaning effect of the seed crystal is improved.
Description
Technical Field
The invention relates to the technical field of silicon single crystal equipment, in particular to a seed crystal cleaning box.
Background
The monocrystalline-like crystal is a directional solidification technology adopting a monocrystalline seed crystal paved at the bottom, the preparation of the seed crystal is one of key factors of the monocrystalline-like technology, the seed crystal is required to be pure when paved in a crucible, the contact surface of the side part is required to be flat, obvious bulges and pits are not generated, and otherwise, the polycrystalline is easy to generate defects. The cleaning of the seed crystal is one of key links of seed crystal preparation, so the cleaning of the seed crystal becomes the key content of the monocrystal-like technology.
After the seed crystal is cut and processed, a large amount of impurity pollution exists on the surface, the seed crystal needs to be cleaned through an acid cleaning link, the seed crystal is neat in cutting and processing and generally does not generate bulges or pits, and the surface of the seed crystal is generally uneven due to the cleaning link.
In the prior art, seed crystal cleaning is generally performed by using a strong acid resistant loading box to clean in strong acid for a certain time. The seed crystal used in monocrystalline-like technology is typically a cubic structure approximately equal to the planar dimension of a polycrystalline silicon wafer. The seed crystals are typically placed in a horizontal stack in a conventional loadbox, or vertically. The seed crystal is placed horizontally or vertically in the loading box, one surface or multiple surfaces of the seed crystal can be in contact with the loading box, the contact surface of the seed crystal and the loading box is subjected to weak acid liquor cleaning degree, and the contact surface is not cleaned or is uneven after the seed crystal is cleaned.
Disclosure of Invention
In view of the above, a seed crystal cleaning box is provided for the problem of poor seed crystal cleaning effect in the prior art.
The utility model provides a seed crystal washs box, includes the box body, the box body includes two relative first curb plates that set up and two relative second curb plates that set up, seed crystal washs box still includes the inside at least one baffle of box body, two the baffle mounting hole that the width of baffle matches is all seted up to first curb plate, the baffle mounting hole is used for placing the baffle, the baffle mounting hole highly is greater than the thickness of baffle, the baffle include a flat plate portion with at least one protruding group on the flat plate portion, every protruding group includes a plurality of bellying.
According to the seed crystal cleaning box, a plurality of first diversion holes are formed between two adjacent baffle mounting holes on the first side plate, and the open pore area formed by the first diversion holes and the baffle mounting holes on each first side plate accounts for 60% -80% of the area of the first side plate.
The seed crystal cleaning box is characterized in that a plurality of second diversion holes are uniformly distributed on each second side plate.
The seed crystal cleaning box, wherein the aperture of the second diversion hole is 0.5-1 mm.
The seed crystal cleaning box comprises a first side plate, a second side plate and a seed crystal cleaning box body, wherein the area of an opening formed by a second diversion hole on each second side plate accounts for 10% -15% of the area of the second side plate.
Above-mentioned seed crystal cleaning box, wherein, protruding group sets up a plurality ofly, and for the array distribution, adjacent two protruding group's central point's interval is greater than the size of monoblock seed crystal.
The seed crystal cleaning box, wherein the size of the upper end face of each protruding part is smaller than that of the lower end face.
Above-mentioned seed crystal washs box, wherein, the both sides of baffle are equipped with the slider, two on the first curb plate respectively seted up with the spout that the slider matches.
Above-mentioned seed crystal washs box, wherein, the one end of spout is equipped with the stopper.
At least one baffle plate is arranged in the seed crystal cleaning box, a bulge group is arranged on the baffle plate, the bulge group comprises a plurality of bulge parts for supporting seed crystals, the seed crystals to be cleaned are placed on the bulge group, and the seed crystals and the seed crystal cleaning box are placed into a pickling tank for pickling. The loading box is provided with a plurality of layers of partition boards, so that the aim of batch cleaning can be fulfilled, and the cleaning efficiency is improved. The bulge is designed on the baffle plate, so that the seed crystal block can be horizontally placed, and only a small contact point exists on the bottom surface of the seed crystal, therefore, the lower surface of the seed crystal is basically and completely contacted with the cleaning liquid, dirt on the seed crystal is cleaned, the surface of the seed crystal is not uneven, and the cleaning effect of the seed crystal is improved.
Drawings
FIG. 1 is a schematic view showing the structure of a seed crystal cleaning cassette according to a first embodiment of the present invention;
FIG. 2 is a cross-sectional view of a seed crystal cleaning cassette in a first embodiment of the present invention;
FIG. 3 is a schematic view showing the structure of a separator according to a first embodiment of the present invention;
fig. 4 is a schematic structural view of a seed crystal cleaning cassette according to a second embodiment of the present invention.
Description of the main reference signs
Detailed Description
In order that the invention may be readily understood, a more complete description of the invention will be rendered by reference to the appended drawings. Embodiments of the invention are illustrated in the accompanying drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, this embodiment is provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "mounted" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1 to 3, a seed crystal cleaning cassette according to a first embodiment of the present invention includes a cassette body 10 and at least one partition 20 inside the cassette body 10. The box body 10 is made of acid and alkali resistant materials, such as polytetrafluoroethylene, stainless steel materials and the like. The box body 10 is square, and comprises two oppositely arranged first side plates 11, two oppositely arranged second side plates 12 and a bottom plate to form a box body with an open upper end. The box body is formed through an injection molding process.
At least one partition board mounting hole 111 matched with the width of the partition board 20 is formed in each of the two first side boards 11, and the partition board mounting holes 111 are used for fixing the partition board 20. The partition 20 includes a flat plate portion 21 and at least one protrusion group fixed to the flat plate portion 21, each of the protrusion groups including a plurality of protrusion portions 22. The height of the spacer mounting hole 111 is greater than the thickness of the spacer 20, that is, the height of the spacer mounting hole 111 is greater than the thickness of the flat plate portion 21 plus the boss portion 22, and the spacer mounting hole 111 is set to 10mm in this embodiment so that the spacer 20 can be moved into and out of the spacer mounting hole 111. The baffle 20 is used for placing seed crystals 30, each bulge group is provided with one seed crystal 30, the heights of the bulge parts 22 on the bulge groups are equal, and the massive seed crystals are ensured to be horizontally placed on the bulge parts of the baffle. The distance between two adjacent separators is larger than the thickness of the seed crystal, so that the seed crystal on the lower separator is prevented from being touched when the separators are overlapped, and the distance between the two separators 20 in the embodiment is set to be more than 50 mm. The number of the protruding groups on the partition 20 is determined according to the size of the seed crystal cleaning box and the number of the placed seed crystals, as in the present embodiment, 4 seed crystals may be placed on one partition 20, that is, 4 protruding groups distributed in array are provided on the partition, and the distance between the center points of two adjacent protruding groups is larger than the size of a single seed crystal, that is, when 4 seed crystals are placed on the partition, a certain gap is provided between each two seed crystals. Each projection group includes 4 projections 22 for supporting the seed crystal 30.
The size of the upper end surface of each protruding portion 22 is smaller than that of the lower end surface, and when the method is implemented, the protruding portions can be triangular conical, pyramidal or arc-shaped, so that the contact area between the protruding portions and the seed crystal is small. Preferably, through holes are formed in the protruding portions, so that liquid in the box body has better circulation.
A plurality of first diversion holes 112 are formed between two adjacent partition plate mounting holes 111 on the first side plate 11, and the plurality of first diversion holes 112 are uniformly arranged. The first diversion holes 112 on the two first side plates 11 are respectively opposite arranged and are positioned on the same horizontal plane.
When the seed crystal cleaning box is used, the bottom baffle 20, the first baffle layer and the baffle mounting holes 111 of the box body 10 are placed stably, then seed crystals 30 are placed on the protruding groups of the baffle 20, a seed crystal block 30 is placed on each protruding group, then a second baffle layer and seed crystals are placed, and the seed crystals are placed upwards in sequence. The invention does not require the number of the partition plates, and can be determined according to the height of the acid liquid tank of a user. The cleaning box containing the seed crystal blocks is placed in the acid liquid tank to soak and clean the seed crystal blocks. In order to achieve better cleaning effect, pure acid liquor is continuously added into the acid liquor tank to form a flowing flushing environment.
The seed crystal cleaning box containing the seed crystal is placed in the acid tank, and the acid flows into the box body 10 from the partition plate mounting hole 111 and the first guide hole 112, and the flowing acid continuously washes impurities on the seed crystal. The acid liquid flows in one direction in the seed crystal cleaning box through the diversion effect of the baffle plate mounting holes 111 and the first diversion holes 112 on the first side plate 11, so that the cleaning effect of the seed crystal is improved. The total porosity on each first side plate must not be too small to affect the fluidity of the acid. In specific implementation, the area of the opening on the first side plate is 60% -80% of that of the first side plate. Each of the first guide holes 112 is designed in a rectangular shape, densely arranged between the two partition mounting holes 111. It is understood that the shape of the first deflector hole 112 may be circular or elliptical, which is not limited herein.
Further, two sides of the partition board 20 are provided with sliding blocks 23, and two second side boards 12 are respectively provided with sliding grooves matched with the sliding blocks 23. When the partition board 20 is mounted on the box body 10, the sliding block 23 on the partition board 20 is aligned with the sliding groove on the second side board 12, the partition board 20 is pushed, and the partition board 20 is fixed in the box body 10 through the action of the sliding block 23 and the sliding groove. Further, one end of the chute is provided with a limiting block, and when the partition board is pushed into the box body, the limiting block is touched to limit the partition board to move.
The seed crystal cleaning box in the embodiment is provided with at least one baffle, the baffle is provided with a protruding group, the protruding group comprises a plurality of protruding parts for supporting seed crystals, the seed crystals to be cleaned are placed on the protruding group, and the seed crystals and the seed crystal cleaning box are placed in a pickling tank together for pickling. The loading box is provided with a plurality of layers of partition boards, so that the aim of batch cleaning can be fulfilled, and the cleaning efficiency is improved. The bulge is designed on the baffle plate, so that the seed crystal block can be horizontally placed, and only a small contact point exists on the bottom surface of the seed crystal, so that the lower surface of the seed crystal is basically and completely contacted with the cleaning liquid, dirt on the seed crystal is cleaned, and the surface of the seed crystal is not uneven. In addition, in the seed crystal cleaning box in the embodiment, the acid liquid flows out rapidly in one direction in the acid cleaning process through the design of the first diversion hole, so that the cleaning efficiency of the seed crystal is improved.
Referring to fig. 4, a seed crystal cleaning box according to a second embodiment of the present invention has substantially the same structure as the seed crystal cleaning box according to the first embodiment, except that a plurality of second diversion holes 121 are formed on both the second side plates 12. The second diversion hole 121 is mainly used for accelerating the exchange speed of the liquid in the seed crystal cleaning box and the external liquid and improving the cleaning speed of the seed crystal. In specific implementation, the aperture of the second diversion holes is 0.5-1 mm, the total open area of the second diversion holes 121 on each second side plate 12 accounts for 10% -15% of the area of the second side plate 12, so that the cleaning speed of the seed crystal can be improved, the flow direction of liquid can not be influenced, and the cleaning effect of the seed crystal is ensured.
The embodiment aims at the characteristics of the existing loading box, combines the requirement of seed crystal placement, designs a seed crystal loading box, solves the problem that the surface of the seed crystal is uneven due to the fact that the seed crystal is in surface contact with the loading box in a point contact mode, and solves the adverse effect on the seed crystal caused by the seed crystal cleaning process. The design of the second diversion hole can properly improve the internal and external liquid exchange speed of the seed crystal cleaning box so as to improve the cleaning speed of the seed crystal.
The foregoing examples merely illustrate embodiments of the invention and are described in more detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (5)
1. The utility model provides a seed crystal washs box, includes the box body, the box body includes two first curb plates that set up relatively and two second curb plates that set up relatively, its characterized in that, seed crystal washs box still includes at least one baffle of box body inside, two the baffle mounting hole that the width of baffle matches is all seted up to first curb plate, the baffle mounting hole is used for placing the baffle, the height of baffle mounting hole is greater than the thickness of baffle, the baffle include a dull and stereotyped portion with at least one protruding group on the dull and stereotyped portion, every protruding group includes a plurality of bellying, two adjacent on the first curb plate set up a plurality of first water conservancy diversion holes between the baffle mounting hole, every first water conservancy diversion hole on the first curb plate with the open area that the baffle mounting hole formed accounts for 60% -80% of first curb plate area, every set up evenly distributed a plurality of second water conservancy diversion holes on the second curb plate, every second water conservancy diversion hole on the second curb plate forms the protruding group, the protruding group of two adjacent size of two sets up for the protruding group of holes of protruding group, the size of protruding group is set up for the protruding group of two is the protruding center of the big hole.
2. The seed crystal cleaning cassette of claim 1, wherein the aperture of the second deflector hole is 0.5-1 mm.
3. The seed cleaning cartridge of claim 1, wherein a dimension of an upper end face of each of the protrusions is smaller than a dimension of a lower end face.
4. The seed crystal cleaning box according to claim 1, wherein sliding blocks are arranged on two sides of the partition plate, and sliding grooves matched with the sliding blocks are respectively formed in the two first side plates.
5. The seed crystal cleaning box of claim 4, wherein a stopper is provided at one end of the chute.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710631524.4A CN107326446B (en) | 2017-07-28 | 2017-07-28 | Seed crystal cleaning box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710631524.4A CN107326446B (en) | 2017-07-28 | 2017-07-28 | Seed crystal cleaning box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107326446A CN107326446A (en) | 2017-11-07 |
| CN107326446B true CN107326446B (en) | 2023-11-28 |
Family
ID=60226682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710631524.4A Active CN107326446B (en) | 2017-07-28 | 2017-07-28 | Seed crystal cleaning box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107326446B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6520191B1 (en) * | 1998-10-19 | 2003-02-18 | Memc Electronic Materials, Inc. | Carrier for cleaning silicon wafers |
| CN202830233U (en) * | 2012-08-12 | 2013-03-27 | 安阳市凤凰光伏科技有限公司 | Pseudo-single crystal seed crystal pickling flower basket |
| CN203842904U (en) * | 2014-04-11 | 2014-09-24 | 江苏协鑫硅材料科技发展有限公司 | Seed crystal cleaning flower basket |
| CN204724523U (en) * | 2015-06-10 | 2015-10-28 | 河北宁晋松宫半导体有限公司 | A kind of device cleaning seed crystal |
-
2017
- 2017-07-28 CN CN201710631524.4A patent/CN107326446B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6520191B1 (en) * | 1998-10-19 | 2003-02-18 | Memc Electronic Materials, Inc. | Carrier for cleaning silicon wafers |
| CN202830233U (en) * | 2012-08-12 | 2013-03-27 | 安阳市凤凰光伏科技有限公司 | Pseudo-single crystal seed crystal pickling flower basket |
| CN203842904U (en) * | 2014-04-11 | 2014-09-24 | 江苏协鑫硅材料科技发展有限公司 | Seed crystal cleaning flower basket |
| CN204724523U (en) * | 2015-06-10 | 2015-10-28 | 河北宁晋松宫半导体有限公司 | A kind of device cleaning seed crystal |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107326446A (en) | 2017-11-07 |
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| CB02 | Change of applicant information |
Address after: No. 1, Yingbin Avenue, Shangrao Economic and Technological Development Zone, Jiangxi Province 334100 Applicant after: Jingke Energy Co.,Ltd. Applicant after: ZHEJIANG JINKO SOLAR Co.,Ltd. Address before: 334100, No. 1, crystal Road, Shangrao Economic Development Zone, Jiangxi, China Applicant before: JINKO SOLAR Co.,Ltd. Applicant before: ZHEJIANG JINKO SOLAR Co.,Ltd. |
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