CN207743210U - A kind of silicon wafer cleaning basket - Google Patents

A kind of silicon wafer cleaning basket Download PDF

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Publication number
CN207743210U
CN207743210U CN201820127357.XU CN201820127357U CN207743210U CN 207743210 U CN207743210 U CN 207743210U CN 201820127357 U CN201820127357 U CN 201820127357U CN 207743210 U CN207743210 U CN 207743210U
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China
Prior art keywords
silicon chip
cross bar
protrusion
wafer cleaning
blocks
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CN201820127357.XU
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Chinese (zh)
Inventor
傅林坚
沈文杰
谷士斌
蔡蔚
侯洪涛
任明冲
周学谦
宋元恒
潘文博
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

The utility model is related to solar battery technologies, it is desirable to provide a kind of silicon wafer cleaning basket.The main body of this kind of silicon wafer cleaning basket is framework, and framework includes side plate, lower support structure, cross bar;Side plate has two pieces, and two blocks of side plates are oppositely arranged, and hole is provided on every block of side plate;Lower support structure is fixedly installed between two blocks of side plates, the feather edge for propping up silicon chip;There is detent projection, and equidistant parallel is distributed between the protrusion on cross bar on cross bar, cross bar is installed between two blocks of side plates, and protrusion is for being isolated silicon chip.Isolation effect of the utility model between silicon chip is good, when carrying out alkali cleaning, pickling, making herbs into wool and cleaning to silicon chip using the utility model, not will produce silicon chip adhesion.

Description

A kind of silicon wafer cleaning basket
Technical field
The utility model is about technical field of solar batteries, more particularly to a kind of silicon wafer cleaning basket.
Background technology
As the demand of global energy increasingly increases the exhaustion increasingly with traditional fossil energy, solar cell is in global energy Source supply side proportion is increasing.The battery based on silicon chip is the main product of area of solar cell at present, And the alkali corruption of silicon chip, making herbs into wool, cleaning are manufacture crafts the most basic in entire crystal silicon battery manufacturing process, are to carry out crystalline substance The basis of silion cell.
It is essential carrier during the corruption of silicon chip alkali, making herbs into wool, cleaning to clean the gaily decorated basket, currently used cleaning flower The type of basket includes mainly two kinds of card slot type and point contact type.As shown in Figure 1, the card slot type cleaning gaily decorated basket includes mainly following several portions Separation structure:Side plate 102, card slot 105, bottom support 104;As shown in Fig. 2, the point contact type cleaning gaily decorated basket includes mainly following several portions Separation structure:Side plate 202, cross bar 203, sawtooth 205, bottom support 204.
The above two gaily decorated basket in use, needs that silicon chip is inserted into adjacent card slot 105 or adjacent saw-tooth 205 respectively Between, it in card slot type cleans that the both sides of the edge position of silicon chip is isolated by card slot 105 in the gaily decorated basket and fix, cleaned in point contact type The both sides of the edge position of silicon chip is isolated by sawtooth 205 in the gaily decorated basket and is fixed.Since silicon chip is writing board shape, in order to maximize profit With silicon material silicon chip in solar cell manufacturing process increasingly sheet, and only isolate, fix the edges at two ends position of silicon chip If, silicon chip easily causes the adhesion of silicon chip due to being acted on by water surface tension in the solution or when leaving solution, from And it is easy to cause to clean at the adhesion of silicon chip during alkali is rotten, the making herbs into wool of silicon chip is uneven during making herbs into wool and cleaning process and not do Only and there is the problems such as solution residual, and then influence the pattern of finished product and the performance of device.
Utility model content
The main purpose of the utility model is to overcome deficiency in the prior art, provide a kind of can carry out alkali to silicon chip Wash, pickling, making herbs into wool and cleaning when, not will produce the silicon wafer cleaning basket of silicon chip adhesion.In order to solve the above technical problems, this practicality Novel solution is:
A kind of silicon wafer cleaning basket is provided, main body is framework, and for loading silicon chip, the framework includes side plate, bottom branch Support structure, cross bar;
Side plate has two pieces, and two blocks of side plates are oppositely arranged, and hole is provided on every block of side plate;Lower support structure is fixedly installed in Between two blocks of side plates, the feather edge for propping up silicon chip;
There is detent projection, and equidistant parallel is distributed between the protrusion on cross bar on the cross bar, protrusion is for being isolated silicon Piece;
At least provided with four cross bars between the side of two blocks of side plates, cross bar be respectively symmetrically fixedly mounted on two blocks of side plates it Between, the lateral edges for limiting silicon chip, and the protrusion on two cross bars for keeping both sides opposite is oppositely arranged;Every is mounted on two pieces Cross bar between side plate side, protrusion is all in vertical direction with 0 °~20 ° angles, and the protrusion of every cross bar is all mutually right It answers, silicon chip is enable to be put between the corresponding protrusion of all cross bars in both sides, silicon chip can form 0 °~20 ° angles after being put into side plate;
Detachably (dismounting mode is by manual operations, rotation angle or uses bullet for installation between the top of two blocks of side plates Property material, stretch fixed mode by being bent dismounting and connect with side plate) have an at least cross bar, the top for limiting silicon chip Edge.
As a further improvement, on the cross bar detent projection be diamond shape tooth, round tooth, square shaped teeth, oval tooth or Person's shark tooth, the i.e. cross-sectional shape of detent projection are diamond shape, circle, rectangular, oval or shark tooth form.
As a further improvement, when the cross section of detent projection is rectangular on the cross bar, rectangular diagonal line It is arranged perpendicular to silicon chip.
As a further improvement, when the cross section of detent projection is diamond shape on the cross bar, a diagonal line of diamond shape It is arranged perpendicular to silicon chip.
As a further improvement, four cross bars are installed between the side of two blocks of side plates.
As a further improvement, in the silicon wafer cleaning basket, the raised quantity of cross bar can be (four between 0~501 Quantity on a cross bar unanimously coordinates and could use).
Compared with prior art, the utility model has the beneficial effects that:
Isolation effect of the utility model between silicon chip is good, and alkali cleaning, pickling, system are carried out to silicon chip using the utility model When suede and cleaning, silicon chip adhesion not will produce.
Description of the drawings
Fig. 1 is the structural schematic diagram that a kind of card slot type cleans the gaily decorated basket in the prior art.
Fig. 2 is the structural schematic diagram that a kind of point contact type cleans the gaily decorated basket in the prior art.
Fig. 3 is the structural schematic diagram of the utility model.
Fig. 4 is the side structure schematic view of the utility model.
Fig. 5 is the side schematic cross-sectional view of the utility model.
Reference numeral in figure is:102 side plates;104 bottoms support;105 card slots;202 side plates;203 cross bars;205 sawtooth; 204 bottoms support;1 silicon chip;2 side plates;3 cross bars;4 lower support structures;5 protrusions.
Specific implementation mode
The utility model is described in further detail with specific implementation mode below in conjunction with the accompanying drawings:
Such as Fig. 3, Fig. 4, a kind of silicon wafer cleaning basket shown in fig. 5, main body is framework, and framework includes side plate 2, bottom support Structure 4, cross bar 3, for loading silicon chip 1.
Side plate 2 has two pieces, is oppositely arranged.Lower support structure 4 is fixedly installed between two blocks of side plates 2, for propping up silicon The feather edge of piece 1.Each side plate 2 is provided with hole, and in the frame stability and other functions for not influencing silicon wafer cleaning basket In the case of, the perforated area on side plate 2 can be arranged more larger as possible, can minimize resistance of the side plate 2 to solution in this way Gear acts on, to when carrying out alkali cleaning, making herbs into wool and cleaning to silicon chip 1 using the silicon wafer cleaning basket, be convenient for solution clear in silicon chip The cycle washed inside and outside the gaily decorated basket exchanges so that contact of the silicon chip 1 with solution is more uniform, and then ensures the alkali corruption of silicon chip 1, making herbs into wool more Add uniform, Wafer Cleaning more clean.
There is detent projection 5, and equidistant parallel is distributed between the protrusion 5 on cross bar 3 on cross bar 3, protrusion 5 is for being isolated silicon Piece 1.Raised 5 quantity of isolation can be between 0~501, and raised 5 quantity, which increase, can load the quantity of silicon chip 1 and accordingly increase;It is practical On, in the silicon wafer cleaning basket of the utility model, the specific number of protrusion 5 is not limited, specific number will basis The demands such as 5 quantity of protrusion needed between 1 quantity of silicon chip loaded and every two adjacent silicon chips 1 are actually needed and set. Detent projection 5 is diamond shape tooth, round tooth, square shaped teeth, oval tooth or shark tooth, the i.e. cross section of detent projection 5 on cross bar 3 Shape is diamond shape, circle, rectangular, oval or shark tooth form;Certainly, the cross section of protrusion 5 is not limited to above-mentioned shape, former It is then upper so that protrusion 5 to the greatest extent and the contacts area of silicon chip 1 it is small as possible be preferred.
Preferably, when the cross section of protrusion 5 is rectangular, in cross section, rectangular diagonal line is set perpendicular to silicon chip 1 It sets;Alternatively, when the cross section of protrusion 5 is diamond shape, in cross section, a diagonal line of diamond shape is arranged perpendicular to silicon chip 1.Due to Using above-mentioned silicon wafer cleaning basket load silicon chip 1 when, silicon chip 1 be inserted into protrusion 5 between, by protrusion 5 cross section in, side The diagonal line of the diagonal line of shape either diamond shape is arranged perpendicular to silicon chip 1, then the silicon chip 1 being inserted between protrusion 5 only can be with protrusion 5 A seamed edge contact, i.e., silicon chip 1 and protrusion 5 between be only line contact or point contact;Compared to face contact for, line contact and Point contact can ensure the contact area for having bigger between silicon chip 1 and solution, so that contact of the silicon chip 1 with solution is more equal It is even abundant, to ensure that the alkali corruption making herbs into wool of silicon chip 1 is more uniform, Wafer Cleaning more clean.
It is equipped with four cross bars 3 between the side of two blocks of side plates 2, is respectively symmetrically fixedly mounted between two blocks of side plates 2, is used for The lateral edges of silicon chip 1 are limited, and the protrusion 5 on two cross bars 3 for keeping both sides opposite is oppositely arranged;And every is mounted on two pieces of sides The Inter cross bar 3 of the side of plate 2, protrusion 5 can be formed in vertical direction with 0 °~20 ° angles, i.e. silicon chip 1 after being put into side plate 2 0 °~20 ° angles.
Protrusion 5 can be fixed on cross bar 3, and raised 5 shapes are completely the same, and both sides correspond to the position of the protrusion 5 on cross bar 3 It is completely corresponding;The angle of the homonymy position formation certain angle of the protrusion 5 on two cross bars 3 up and down, when silicon chip 1 is put into and side 2 self-assembling formation of plate, 0 °~20 ° angles.The effect of protrusion 5 is exactly the position of fixed thin slice, is exactly after thin slice is put into referring to Fig. 5 Design sketch, allow thin slice that can keep heeling condition.
An at least cross bar 3, the top sides for limiting silicon chip 1 are detachably installed between the top of two blocks of side plates 2 Edge.The manual operations of dismounting mode, rotation angle or using the material for having certain elasticity stretch fixed mode by being bent dismounting It is connect with side plate 2.
Using the utility model load silicon chip 1 when, by silicon chip 1 be inserted into protrusion 5 between after, the lateral edges of each silicon chip 1, Feather edge and top edge are by respectively by cross bar 3, the support limit of lower support structure 4 and top cross bar 3, and per adjacent two It can be isolated and fix by protrusion 5 between a silicon chip 1;Therefore, each silicon chip 1 can be reliably fixed and silicon chip 1 Between isolation effect it is fine.
Isolation and fixed card slot 105 can only be carried out in compared with the existing technology to the both sides of the edge position of silicon chip 1 (as schemed Shown in 1) or sawtooth 205 (as shown in Figure 2) structure, protrusion 5 can allow silicon chip 1, heeling condition is formed under self gravitation effect, This state is fixed by protrusion 5, so as to effectively avoid the adhesion of silicon chip 1, make the alkali corruption making herbs into wool of silicon chip 1 more uniformly, Wafer Cleaning it is more clean.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new Type is not limited to above example, can also there is many variations.Those skilled in the art can be from disclosed by the utility model All deformations for directly exporting or associating in content, are considered as the scope of protection of the utility model.

Claims (6)

1. a kind of silicon wafer cleaning basket, main body is framework, for loading silicon chip, which is characterized in that the framework includes side plate, bottom Portion's support construction, cross bar;
Side plate has two pieces, and two blocks of side plates are oppositely arranged, and hole is provided on every block of side plate;Lower support structure is fixedly installed in two pieces Between side plate, the feather edge for propping up silicon chip;
There is detent projection, and equidistant parallel is distributed between the protrusion on cross bar on the cross bar, protrusion is for being isolated silicon chip;
At least provided with four cross bars between the side of two blocks of side plates, cross bar is respectively symmetrically fixedly mounted between two blocks of side plates, is used In the lateral edges of limit silicon chip, and the protrusion on two cross bars for keeping both sides opposite is oppositely arranged;Every is mounted on two blocks of side plates Cross bar between side, protrusion is all in vertical direction with 0 °~20 ° angles, and the protrusion of every cross bar all corresponds, and makes Silicon chip can be put between the corresponding protrusion of all cross bars in both sides, and silicon chip can form 0 °~20 ° angles after being put into side plate;
An at least cross bar, the top edge for limiting silicon chip are detachably installed between the top of two blocks of side plates.
2. a kind of silicon wafer cleaning basket according to claim 1, which is characterized in that detent projection is diamond shape on the cross bar Tooth, round tooth, square shaped teeth, oval tooth or shark tooth, the i.e. cross-sectional shape of detent projection be diamond shape, circle, rectangular, ellipse Round or shark tooth form.
3. a kind of silicon wafer cleaning basket according to claim 2, which is characterized in that detent projection is transversal on the cross bar When face is rectangular, rectangular diagonal line is arranged perpendicular to silicon chip.
4. a kind of silicon wafer cleaning basket according to claim 2, which is characterized in that detent projection is transversal on the cross bar When face is diamond shape, a diagonal line of diamond shape is arranged perpendicular to silicon chip.
5. a kind of silicon wafer cleaning basket according to claim 1, which is characterized in that be equipped between the side of two blocks of side plates Four cross bars.
6. a kind of silicon wafer cleaning basket according to claim 5, which is characterized in that in the silicon wafer cleaning basket, cross bar Raised quantity can be between 0~501.
CN201820127357.XU 2018-01-25 2018-01-25 A kind of silicon wafer cleaning basket Active CN207743210U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820127357.XU CN207743210U (en) 2018-01-25 2018-01-25 A kind of silicon wafer cleaning basket

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Application Number Priority Date Filing Date Title
CN201820127357.XU CN207743210U (en) 2018-01-25 2018-01-25 A kind of silicon wafer cleaning basket

Publications (1)

Publication Number Publication Date
CN207743210U true CN207743210U (en) 2018-08-17

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Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113296350A (en) * 2021-05-10 2021-08-24 中国电子科技集团公司第十一研究所 Photoetching plate frame

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113296350A (en) * 2021-05-10 2021-08-24 中国电子科技集团公司第十一研究所 Photoetching plate frame

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