CN204966468U - Depression bar, washing basket of flowers and belt cleaning device - Google Patents
Depression bar, washing basket of flowers and belt cleaning device Download PDFInfo
- Publication number
- CN204966468U CN204966468U CN201520695191.8U CN201520695191U CN204966468U CN 204966468 U CN204966468 U CN 204966468U CN 201520695191 U CN201520695191 U CN 201520695191U CN 204966468 U CN204966468 U CN 204966468U
- Authority
- CN
- China
- Prior art keywords
- cross
- cross beam
- strut
- cleaning
- basket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 88
- 238000005406 washing Methods 0.000 title claims abstract description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 97
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 97
- 239000010703 silicon Substances 0.000 claims abstract description 97
- 238000002955 isolation Methods 0.000 claims abstract description 43
- 230000007246 mechanism Effects 0.000 claims abstract description 38
- 230000000670 limiting effect Effects 0.000 claims abstract description 13
- 239000010432 diamond Substances 0.000 claims description 12
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 claims 1
- 239000003513 alkali Substances 0.000 abstract description 11
- 235000008216 herbs Nutrition 0.000 abstract description 4
- 210000002268 wool Anatomy 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 238000006073 displacement reaction Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 59
- 238000000034 method Methods 0.000 description 11
- 239000000243 solution Substances 0.000 description 10
- 229910003460 diamond Inorganic materials 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 210000004209 hair Anatomy 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
Abstract
The utility model relates to a solar cell technical field discloses a depression bar, a washing basket of flowers and a belt cleaning device. Wherein, the depression bar includes: limit structure for be connected, carry on spacingly with the top edge to wasing the internal silicon chip that bears of colored rim with the cooperation of the washing flower rim body, install in a plurality of isolation mechanisms of limit structure, as limit structure and wash the cooperation of the flower rim body when being connected, each isolation mechanism is in and washs between the space of spending internal adjacent two of rim to be used for bearing the silicon chip, in order to keep apart the silicon chip that bears in two adjacent spaces. Above -mentioned depression bar not only has the limiting displacement who prevents the silicon chip and float away from the framework top, still has to keep apart the effect of wasing the silicon chip that flower rim bore in personally experiencing sth. Part of the body, can avoid the silicon chip to produce the adhesion when alkali cleaning, making herbs into wool and washing.
Description
Technical Field
The utility model relates to a solar cell technical field, in particular to depression bar, a washing basket of flowers and a belt cleaning device.
Background
At present, a cell taking a silicon wafer as a main body is a mainstream product in the field of solar cells, and the alkali etching, texturing and cleaning processes of the silicon wafer are the most basic manufacturing processes in the whole crystalline silicon cell manufacturing process and are the basis for well-made crystalline silicon cells.
The cleaning flower basket is an indispensable carrier in the technological processes of silicon wafer alkali etching, texturing and cleaning, and the types of the commonly used cleaning flower basket at present mainly comprise a clamping groove type and a point contact type. As shown in fig. 1, the frame of the slot-type cleaning flower basket mainly comprises the following structures: a side plate 11, a clamping groove 13 and a bottom support 12; as shown in fig. 2, the frame of the point contact type cleaning flower basket mainly comprises the following structures: side plate 21, saw teeth 23, bottom support 22. Because the silicon chip is flat plate-shaped, the edge positions of two ends of the silicon chip are generally isolated and fixed only by the clamping grooves 13 or the saw teeth 23 in the cleaning basket in the prior art, and therefore, the middle part of the silicon chip is easy to adhere under the action of the surface tension of water in the solution, so that the problems of alkaline corrosion, uneven contact between the silicon chip and a chemical solution in the texturing process, unclean cleaning of the adhered part of the silicon chip in the cleaning process, residual chemical solution and the like are easily caused.
The press rod (e.g., the press rod 14 in fig. 1 or the press rod 24 in fig. 2) is a member disposed at the top of the basket body to prevent silicon wafers from floating from the top of the basket body. As shown in fig. 1 and 2, in the process of using the cleaning basket for the alkali etching, texturing and cleaning processes of the silicon wafer, the end portion of the pressure lever can be clamped into the groove formed in the two side plates of the cleaning basket frame, so that the pressure lever is installed between the two side plates of the cleaning basket frame to prevent the silicon wafer from floating out of the upper portion of the cleaning basket. The existing pressure bar has single function and can only solve the floating problem of the silicon wafer in the processes of alkali corrosion, texturing and cleaning; because the existing pressure lever has a simple structure, if the existing pressure lever structure is adjusted to enable the pressure lever to be multifunctional, the problem that the middle parts of silicon wafers are easy to adhere in the existing flower basket cleaning process is solved, and the method for well optimizing the existing flower basket cleaning structure is provided.
SUMMERY OF THE UTILITY MODEL
The utility model provides a depression bar, washing basket of flowers and belt cleaning device, wherein, the depression bar not only can prevent that the silicon chip from floating away from washing basket of flowers upper portion, can also be used for keeping apart the silicon chip that bears in the washing basket of flowers framework to avoid the silicon chip to produce the adhesion when washing with alkaline, making herbs into wool and wasing.
In order to achieve the above purpose, the utility model provides the following technical scheme:
a strut, comprising:
the limiting structure is used for being matched and connected with the cleaning basket body so as to limit the upper edge of the silicon wafer loaded in the cleaning basket body;
install in limit structure's a plurality of isolation mechanisms, when limit structure and washing basket of flowers framework cooperation are connected, each isolation mechanism is in washing basket of flowers framework, and is located between two adjacent spaces that are used for bearing the weight of the silicon chip, with the silicon chip that bears in two adjacent spaces of isolation.
The pressure lever can be matched with a frame body of the cleaning flower basket for use, and can prevent the silicon wafer from floating out of the upper part of the frame body of the cleaning flower basket through the limiting effect of the limiting structure on the upper edge of the silicon wafer; meanwhile, the pressure lever is also provided with an isolation mechanism, when the limiting structure is arranged in the frame body, each isolation mechanism is positioned between two adjacent spaces for bearing silicon wafers in the cleaning flower basket frame body, therefore, each isolation mechanism can play an isolation role on the silicon wafers borne in the two adjacent spaces, and therefore, the silicon wafers in each two adjacent spaces can be isolated through the isolation mechanisms.
Therefore, the pressure lever has the function of isolating and cleaning the silicon wafers loaded in the flower basket frame body, and can avoid the silicon wafers from being adhered during alkali washing, texturing and cleaning.
Preferably, the limiting structure comprises a cross beam and two mounting structures which are respectively mounted at two ends of the cross beam and are respectively matched and connected with two opposite side plates in the cleaning basket frame body; when the cross beam is matched and connected with the two side plates of the cleaning flower basket frame body through the two mounting structures, the cross beam is perpendicular to the side plates.
Preferably, the isolation mechanism comprises a main rod, one end of which is mounted on the cross beam and is perpendicular to the cross beam.
Preferably, the main rods of the plurality of isolation mechanisms are parallel to each other and are mounted to the cross beam in an array along the extending direction of the cross beam.
Preferably, the main rods are fixedly mounted to the cross beam, and the distance between every two adjacent main rods along the extending direction of the cross beam is equal.
Preferably, the main lever is movably mounted to the cross member in an extending direction of the cross member.
Preferably, the isolation mechanism further comprises two support rods connected with the other end of the main rod and perpendicular to the cross beam, and the two support rods are matched with the main rod to form a Y-shaped arrangement.
Preferably, the isolation mechanism further comprises a branch rod connected with the other end of the main rod and perpendicular to the cross beam, and the branch rod and the main rod are matched to form a T-shaped arrangement.
Preferably, the mounting structure comprises a protrusion which is matched with a groove arranged on a side plate of the cleaning flower basket frame in a clamping mode.
Preferably, the mounting structure comprises a mounting rod mounted on the cross beam and protrusions arranged at two ends of the mounting rod and used for being in clamping fit with grooves formed in side plates of the cleaning basket frame body; the mounting rods of the two mounting structures are matched with the cross beam to form an I-shaped arrangement.
Preferably, the cross-section of the main rod is circular, square or diamond.
Preferably, when the cross section of the main rod is square, one diagonal line of the square cross section is arranged parallel to the cross beam; or when the cross section of the main rod is rhombic, one diagonal line of the rhombic cross section is parallel to the cross beam.
Preferably, the cross section of the strut is circular, square or diamond.
Preferably, when the cross section of the strut is square, one diagonal of the square cross section is arranged parallel to the cross beam; or when the cross section of the strut is a diamond, one diagonal line of the diamond-shaped cross section is parallel to the cross beam.
A cleaning flower basket comprises a cleaning flower basket frame body and a pressure rod in any technical scheme, wherein the pressure rod is connected with the cleaning flower basket frame body in a matched mode.
A cleaning device comprises the flower basket in the technical scheme.
The utility model provides a depression bar not only can prevent that the silicon chip from floating away from wasing basket of flowers upper portion, can also be used for keeping apart the silicon chip that bears in the washing basket of flowers framework to avoid the silicon chip to produce the adhesion when alkaline cleaning, making herbs into wool and wasing. The utility model provides a wash basket of flowers, not only can keep apart the edge of silicon chip through draw-in groove or sawtooth structure among the washing basket of flowers frame structure, the isolator that can also be equipped with through the depression bar keeps apart the middle part of silicon chip, therefore, it is fine to the isolation effect between the silicon chip, thereby utilize this washing basket of flowers to wash with alkaline the silicon chip, can not produce the silicon chip adhesion when making herbs into wool and wasing, can make silicon chip and chemical solution evenly contact, improve the off-the-shelf appearance of silicon chip and solar cell's performance.
Drawings
FIG. 1 is a schematic structural view of a clamping groove type cleaning flower basket in the prior art;
FIG. 2 is a schematic structural view of a point contact type cleaning flower basket in the prior art;
fig. 3 is a schematic structural diagram of a compression bar according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of another compression bar according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of another compression bar according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of another compression bar according to an embodiment of the present invention;
fig. 7 is a schematic structural view of a cleaning flower basket according to an embodiment of the present invention;
fig. 8 is a schematic structural view of another cleaning flower basket according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Please refer to fig. 3 to 8.
As shown in fig. 3-8, an embodiment of the present invention provides a pressure lever, including:
the limiting structure is used for being matched and connected with the cleaning flower basket frame body so as to limit the upper edge of the silicon wafer loaded in the cleaning flower basket;
install in limit structure's a plurality of isolation mechanism 5, when limit structure and washing basket of flowers framework cooperation are connected, each isolation mechanism 5 is in washing the basket of flowers framework, and is located between two adjacent spaces that are used for bearing the weight of the silicon chip, with the silicon chip that bears in two adjacent spaces of isolation.
The pressure lever can be arranged on a frame body of the cleaning flower basket and can limit the upper edge of the silicon wafer through a limiting structure so as to prevent the silicon wafer from floating out of the upper part of the frame body of the cleaning flower basket; meanwhile, the pressure lever is also provided with an isolation mechanism 5, when the limiting structure is arranged on the cleaning basket frame body, each isolation mechanism 5 is positioned between two adjacent spaces for bearing silicon wafers in the cleaning basket frame body, therefore, each isolation mechanism 5 can play an isolation role on the silicon wafers borne in the two adjacent spaces, and therefore, the silicon wafers in each two adjacent spaces can be isolated through the isolation mechanisms 5.
Therefore, the pressure lever not only has a limiting function and prevents the silicon chip from floating out from the upper part of the frame body of the cleaning flower basket; the cleaning device also has the function of isolating and cleaning the silicon wafers carried in the flower basket body, and can avoid the silicon wafers from being adhered during alkali washing, texturing and cleaning.
As shown in fig. 3 to 8, in a specific embodiment, the limiting structure may include a cross beam (e.g., the cross beam 31 in fig. 3 and 4, or the cross beam 32 in fig. 5 and 6) and mounting structures 4 mounted at two ends of the cross beam and used for being connected with two opposite side plates in the frame of the washing flower basket in a matching manner; when the cross beam is connected with the two side plates of the cleaning flower basket frame body through the mounting structures 4 at the two ends in a matching manner, the cross beam is perpendicular to the side plates. As shown in fig. 7 and 8, when the conventional cleaning basket body is used for bearing silicon wafers, each silicon wafer is placed in a silicon wafer bearing space of the cleaning basket body in parallel with a side plate (e.g. the side plate 11 in fig. 7 or the side plate 21 in fig. 8), and after the mounting structures 4 at two ends of the cross beam are matched and connected with two side plates (e.g. the side plate 11 in fig. 7 or the side plate 21 in fig. 8) of the cleaning basket body, the cross beam is arranged perpendicular to the side plates, i.e. the cross beam is arranged perpendicular to the surface of each silicon wafer, so that the cross beam at the upper part of the cleaning basket body can limit the upper edge of each silicon wafer. In addition, the cross beam with the rod-shaped structure can reduce the blocking effect on the solution as much as possible, so that when the pressure rod is matched with the cleaning flower basket frame body for use, the solution can be conveniently and circularly exchanged inside and outside the cleaning flower basket when the silicon wafer is subjected to alkali washing, texturing and cleaning, the silicon wafer is more uniformly contacted with the solution, and the alkali corrosion and the texturing of the silicon wafer are more uniform and the silicon wafer is cleaner.
On the basis of the above embodiment, in a specific embodiment, the mounting structures 4 at both ends of the cross beam 31 may include the following two embodiments:
first, as shown in fig. 3 and 4, the mounting structures 4 at the two ends of the cross beam 31 may be protrusions which are directly snap-fitted with grooves formed on the side plates of the frame body of the washing flower basket. As shown in fig. 8, in the cleaning basket body, a groove may be provided on the side plate 21, and protrusions at two ends of the cross beam 31 may be directly engaged with the groove to realize the engagement connection between the cross beam 31 and the cleaning basket body.
Secondly, as shown in fig. 5 and 6, each mounting structure 4 may include a mounting rod 41 mounted on the cross beam 32 and protrusions 42 disposed at two ends of the mounting rod 41 and used for being snap-fitted into grooves formed on side plates of the frame body of the washing flower basket; preferably, as shown in fig. 5 and 6, two mounting bars 41 at both ends of the cross member 32 are provided in an i-shape in cooperation with the cross member 32. As shown in fig. 7, in the cleaning basket body, a groove may be provided at an upper folded edge of the side plate 11, and the protrusions 42 at two ends of the mounting rod 41 may be engaged with the groove to realize the engagement connection between the cross beam 32 and the cleaning basket body.
Of course, the specific structure of the mounting structure 4 is not limited to the above-mentioned embodiment, and the matching connection manner with the side plate is not limited to clamping, and particularly, it is preferable to facilitate the mounting and dismounting of the beam structure on the cleaning basket body. And, with the utility model discloses the structure of the washing basket of flowers framework that the cooperation is connected is also not limited to the structure in above-mentioned embodiment and the drawing, for example, the washing basket of flowers framework in figure 7 can not have the draw-in groove structure, and the washing basket of flowers in figure 8 also can not have the sawtooth structure, and the silicon chip in the washing basket of flowers can be kept apart through the isolator on the depression bar completely.
As shown in fig. 3 to 6, in addition to the above embodiments, in a specific embodiment, the isolation mechanism 5 may include a main rod 51 having one end mounted to a cross beam (such as the cross beam 31 in fig. 3 and 4, or the cross beam 32 in fig. 5 and 6) and disposed perpendicular to the cross beam. The rod-shaped structure can penetrate between two adjacent silicon wafers to enable the middle parts of the plate-shaped silicon wafers to be isolated, so that the main rod 51 is used for isolating the silicon wafers, and the middle parts of the silicon wafers can be effectively prevented from being adhered.
As shown in fig. 3 to 6, in addition to the above embodiments, in a specific embodiment, the main rods 51 of the plurality of isolation mechanisms 5 are arranged in parallel with each other and along the extending direction of the beam (e.g., the beam 31 in fig. 3 and 4, or the beam 32 in fig. 5 and 6). As shown in fig. 1 and 2, in the cleaning flower basket frame body in the prior art, a plurality of spaces for bearing silicon wafers are included in a direction perpendicular to a side plate (such as the side plate 11 in fig. 7 or the side plate 21 in fig. 8), the silicon wafers borne in the cleaning flower basket frame body are arranged one by one in the direction perpendicular to the side plate, and each silicon wafer is arranged in parallel to the side plate; therefore, when the mounting structures 4 at both ends of the beam are mounted to the side plates, the main bar 51 of each isolation mechanism 5 can be inserted between a pair of adjacent silicon wafers, i.e., each pair of adjacent silicon wafers can be isolated by one isolation mechanism 5. In order to ensure that the isolating mechanisms 5 are arranged between every two adjacent silicon wafers, the number of the isolating mechanisms 5 is at least equal to the number of spaces for bearing the silicon wafers in the cleaning flower basket frame body reduced by one.
As shown in fig. 3 to 6, on the basis of the above embodiments, in a preferred embodiment, there are two mounting manners of one end of the main rod 51 on the cross beam (such as the cross beam 31 in fig. 3 and 4, or the cross beam 32 in fig. 5 and 6), specifically:
in a first mode, the main rods 51 may be fixedly installed on the cross beam, and the distance between every two adjacent main rods 51 along the extending direction of the cross beam is equal. The fixed mounting of one end of the main rod 51 to the cross beam can be achieved by welding, threaded connection, riveting or integral injection molding.
In the second mode, the main lever 51 is movably attached to the cross member in the extending direction of the cross member. The movable mounting of one end of the main lever 51 to the cross member may be achieved by a sliding connection or a rolling connection. The mobile jib 51 can remove along the extending direction of crossbeam, and this is convenient for adjust the interval between the mobile jib 51 according to the different thickness of the silicon chip that is washd, makes its applicable silicon chip in keeping apart different specifications, thereby can enlarge the utility model provides a range of use of depression bar.
In addition to the above two embodiments, in a preferred embodiment, as shown in fig. 3 and 5, the isolation mechanism 5 may further include two struts 52 connected to the other end of the main rod 51 and disposed perpendicular to the cross beam (e.g., the cross beam 31 in fig. 3, or the cross beam 32 in fig. 5), and the two struts 52 may be disposed in a Y-shape in cooperation with the main rod 51. The isolation mechanism 5 composed of the main rod 51 and the two support rods 52 which are arranged in a Y shape is matched, so that the isolation effect between the sheet-shaped silicon wafers is better. Similarly, as shown in fig. 4 and 6, the isolation mechanism 5 may also include only one strut 52, and the strut 52 may be in a T-shape with the main rod 51. In the above embodiment, the number of the struts 52 of the isolation mechanism 5 and the shape of the struts 52 cooperating with the main rod 51 are set so as to isolate the adjacent portions of the sheet-like silicon wafer from each other, so that the number of the struts 52 of the isolation mechanism 5 and the shape of the struts 52 cooperating with the main rod 51 are not limited, the number of the struts 52 of the isolation mechanism 5 may be plural, and the shape of the struts 52 cooperating with the main rod 51 may be other shapes.
3-8, in a preferred embodiment, the cross-section of the main rod 51 may be circular, square or diamond-shaped; and/or the struts 52 may be circular, square, or diamond shaped in cross-section. Of course, the cross-section of the stem 51 and the stem 52 is not limited to the above shape, and may be other shapes, and it is preferable that the stem 51 and the stem 52 are as small as possible and the contact area between the stem 51 and the stem 52 and the silicon wafer is as small as possible in principle.
As shown in fig. 3-8, more preferably,
when the cross section of the main rod 51 is square, one diagonal line of the square in the cross section of the main rod 51 is arranged parallel to the cross beam; or, when the cross section of the main rod 51 is a diamond shape, one diagonal line of the diamond shape in the cross section of the main rod 51 is arranged parallel to the cross beam; and/or the presence of a gas in the gas,
when the cross section of the strut 52 is square, one diagonal line of the square in the cross section of the strut 52 is arranged parallel to the cross beam; alternatively, when the cross-section of the strut 52 is a diamond shape, one diagonal of the diamond shape in the cross-section of the strut 52 is disposed parallel to the cross-beam.
As shown in fig. 7 and 8, when a silicon wafer is loaded on a cleaning basket body, the silicon wafer is placed in a space for loading the silicon wafer in parallel with a side plate (e.g., the side plate 11 in fig. 7 or the side plate 21 in fig. 8), and as shown in fig. 3 to 6, the main rods 51 and the support rods 52 of the isolation mechanism 5 are arranged in parallel with the side plate, so that when the cross section of the main rods 51 and/or the support rods 52 is square or diamond-shaped, and the diagonal line of the square or the diagonal line of the diamond is arranged perpendicular to the side plate, the silicon wafer is only in contact with the edge of the main rods 51 and/or the edge of the support rods 52, i.e., the silicon wafer is only in line contact with the isolation mechanism 5; compared with surface contact, the line contact can ensure that a larger contact area exists between the silicon wafer and the solution, so that the silicon wafer is more uniformly and sufficiently contacted with the solution, and the alkali corrosion texturing of the silicon wafer is more uniform and the silicon wafer is cleaner.
Of course, in the above embodiments of the present invention, the number of silicon wafers that can be isolated by the pressing rod is not limited, and may be from several to several hundred, and the length of the beam and the number of the isolation mechanism may be specifically designed according to the number of silicon wafers that can be loaded in the cleaning basket of flowers, so as to realize the matching between the pressing rod structure and the number of silicon wafers loaded in the cleaning basket of flowers.
The embodiment of the utility model provides a still provide a wash basket of flowers, should wash the basket of flowers including washing the depression bar that provides in basket of flowers framework and the above-mentioned arbitrary embodiment, the depression bar that provides in the above-mentioned arbitrary embodiment can be connected with washing the basket of flowers framework cooperation. The embodiment of the utility model provides a wash basket of flowers can make the alkali corrosion system fine hair of silicon chip more even, silicon chip abluent cleaner.
The embodiment of the utility model provides a still provide a belt cleaning device, this belt cleaning device includes the washing basket of flowers in the above-mentioned embodiment.
Of course, the embodiment of the utility model provides a wash basket of flowers and belt cleaning device not only can be used for the cleaning process of silicon chip, also can be used as carrier and device in other lamellar article cleaning processes respectively.
It will be apparent to those skilled in the art that various changes and modifications may be made to the embodiments of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (17)
1. A strut, comprising:
the limiting structure is used for being matched and connected with the cleaning basket body so as to limit the upper edge of the silicon wafer loaded in the cleaning basket body;
install in limit structure's a plurality of isolation mechanisms, when limit structure and washing basket of flowers framework cooperation are connected, each isolation mechanism is in washing basket of flowers framework, and is located between two adjacent spaces that are used for bearing the weight of the silicon chip, with the silicon chip that bears in two adjacent spaces of isolation.
2. The strut of claim 1, wherein the limiting structure comprises a cross beam and two mounting structures respectively mounted at two ends of the cross beam and respectively connected with two opposite side plates of the cleaning basket frame in a matching manner; when the cross beam is connected with the two side plates of the cleaning flower basket frame body in a matched mode through the two mounting structures, the cross beam is perpendicular to the side plates.
3. The strut of claim 2, wherein said isolation mechanism includes a main rod having one end mounted to said cross member and disposed perpendicular to said cross member.
4. A plunger according to claim 3 wherein the primary rods of the plurality of spacer mechanisms are mounted to the cross-beam parallel to each other and aligned in the direction of extension of the cross-beam.
5. The strut of claim 4, wherein the primary rods are fixedly mounted to the cross beam, and the distance between every two adjacent primary rods along the extension direction of the cross beam is equal.
6. Strut according to claim 4, characterized in that the main rod is mounted to the cross beam movably in the extension direction of the cross beam.
7. A compression bar as claimed in any one of claims 2 to 6, wherein said isolation means further comprises two struts connected to the other end of said main bar and arranged perpendicular to said cross member, said struts cooperating with said main bar in a Y-shaped arrangement.
8. A compression bar according to any one of claims 2 to 6, wherein the isolation mechanism further comprises a strut connected to the other end of the primary bar and arranged perpendicular to the cross member, the strut and the primary bar cooperating to form a T-shaped arrangement.
9. The strut of claim 1, wherein the mounting structure comprises a projection for snap-fit engagement with a recess provided in a side panel of the wash basket body.
10. The pressure lever according to claim 1, wherein the mounting structure comprises mounting rods mounted at two ends of the cross beam and protrusions arranged at two ends of the mounting rods and used for being in clamping fit with grooves formed in side plates of the cleaning basket body; the mounting rods of the two mounting structures are matched with the cross beam to form an I-shaped arrangement.
11. A compression bar as claimed in any one of claims 3 to 6, wherein the cross-section of the primary bar is circular, square or diamond.
12. The strut of claim 11,
when the cross section of the main rod is square, one diagonal line of the square cross section is arranged in parallel to the cross beam; or,
when the cross section of the main rod is rhombic, one diagonal line of the rhombic cross section is parallel to the cross beam.
13. The strut of claim 7, wherein said strut has a circular, square or diamond cross-section.
14. The strut of claim 8, wherein said strut has a circular, square or diamond cross-section.
15. Strut according to claim 13 or 14,
when the cross section of the supporting rod is square, one diagonal line of the square cross section is arranged in parallel to the cross beam; or,
when the cross section of the supporting rod is rhombic, one diagonal line of the rhombic cross section is parallel to the cross beam.
16. A cleaning flower basket, characterized by comprising a cleaning flower basket frame body and a pressure rod according to any one of claims 1-15, wherein the pressure rod is connected with the cleaning flower basket frame body in a matching way.
17. A cleaning device comprising the cleaning basket according to claim 16.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520695191.8U CN204966468U (en) | 2015-09-09 | 2015-09-09 | Depression bar, washing basket of flowers and belt cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520695191.8U CN204966468U (en) | 2015-09-09 | 2015-09-09 | Depression bar, washing basket of flowers and belt cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204966468U true CN204966468U (en) | 2016-01-13 |
Family
ID=55061516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520695191.8U Active CN204966468U (en) | 2015-09-09 | 2015-09-09 | Depression bar, washing basket of flowers and belt cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204966468U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109887874A (en) * | 2019-03-27 | 2019-06-14 | 通威太阳能（成都）有限公司 | A kind of anti-drift basket device for solar battery etching device |
| CN111785669A (en) * | 2020-07-15 | 2020-10-16 | 北京北方华创微电子装备有限公司 | Substrate bearing device and cleaning equipment |
| CN116581063A (en) * | 2023-05-29 | 2023-08-11 | 宁夏中欣晶圆半导体科技有限公司 | Silicon wafer etching tool and silicon wafer etching method |
| CN117096075A (en) * | 2023-10-18 | 2023-11-21 | 长春市元尚欣信息科技有限公司 | Silicon wafer loader capable of preventing silicon wafer adhesion |
-
2015
- 2015-09-09 CN CN201520695191.8U patent/CN204966468U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109887874A (en) * | 2019-03-27 | 2019-06-14 | 通威太阳能（成都）有限公司 | A kind of anti-drift basket device for solar battery etching device |
| CN111785669A (en) * | 2020-07-15 | 2020-10-16 | 北京北方华创微电子装备有限公司 | Substrate bearing device and cleaning equipment |
| CN111785669B (en) * | 2020-07-15 | 2023-08-18 | 北京北方华创微电子装备有限公司 | Substrate bearing device and cleaning equipment |
| CN116581063A (en) * | 2023-05-29 | 2023-08-11 | 宁夏中欣晶圆半导体科技有限公司 | Silicon wafer etching tool and silicon wafer etching method |
| CN117096075A (en) * | 2023-10-18 | 2023-11-21 | 长春市元尚欣信息科技有限公司 | Silicon wafer loader capable of preventing silicon wafer adhesion |
| CN117096075B (en) * | 2023-10-18 | 2024-07-23 | 浙江中科尚弘离子装备工程有限公司 | Silicon wafer loader capable of preventing silicon wafer adhesion |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204966468U (en) | Depression bar, washing basket of flowers and belt cleaning device | |
| CN204927319U (en) | Wash basket of flowers and belt cleaning device | |
| CN205219081U (en) | Coil stock strorage device | |
| ES2600102T3 (en) | Apparatus for the manufacture of tiles | |
| CN210266459U (en) | Intelligent home system sensor installation mechanism | |
| CN203292161U (en) | Sapphire piece cleaning support | |
| CN211265433U (en) | Special basket of flowers device of silicon chip | |
| CN209929278U (en) | Silicon wafer flower basket | |
| CN210040159U (en) | Graphite frame for bearing silicon wafer | |
| CN208909361U (en) | A kind of supporter | |
| CN204497206U (en) | A kind of Novel quartz boat frame | |
| CN203332636U (en) | Movable type spinning cake support | |
| CN202905677U (en) | Gaily decorated basket used for crystalline silicon solar cells | |
| CN205223664U (en) | Novel fire control is with drying frame | |
| CN214378361U (en) | Make herbs into wool and wash basket of flowers suitable for ultra-thin battery of HJT | |
| CN219233376U (en) | Vertical plasma cleaning machine | |
| CN204769667U (en) | Wash crystal with putting utensil | |
| CN212527416U (en) | Combined clamp for industrial processing | |
| CN220155508U (en) | Placement rack for wafer electrophoresis | |
| CN203674185U (en) | Graphite frame apparatus carrying silicon chips | |
| CN220557969U (en) | Adjustable basket for dish washer | |
| CN110616588B (en) | Forming die for papermaking | |
| CN202192067U (en) | Washing basket | |
| CN217570073U (en) | Cleaning frame for cleaning plastic package glass plate | |
| CN212209435U (en) | Device for relieving impact force of carrier silicon wafer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200417 Address after: Langfang City, Hebei province Guangyang road 065001 North Zone Patentee after: ENN SCIENCE & TECHNOLOGY DEVELOPMENT Co.,Ltd. Address before: The 065001 Hebei economic and Technological Development Zone of Langfang Huaxiang No. 106 Patentee before: ENN SOLAR ENERGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |