CN201785494U - Turning plate mechanism for manufacturing silicon chip - Google Patents
Turning plate mechanism for manufacturing silicon chip Download PDFInfo
- Publication number
- CN201785494U CN201785494U CN2010205207509U CN201020520750U CN201785494U CN 201785494 U CN201785494 U CN 201785494U CN 2010205207509 U CN2010205207509 U CN 2010205207509U CN 201020520750 U CN201020520750 U CN 201020520750U CN 201785494 U CN201785494 U CN 201785494U
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- decorated basket
- gaily decorated
- silicon chip
- solution
- turning plate
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- Expired - Fee Related
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a silicon chip manufacturing mechanism, in particular to a turning plate mechanism for manufacturing silicon chips, which mainly solves the problems of the prior art that the concentration of solution in the turning plates and the concentration of solution among the turning plates are not uniformed since silicon chips are immersed in fine-hair making solution, the front ends of the turning plates are blocked by a polypropylene (PP) material and no good fluid circulation can be formed. The utility model also solves the technical problems that the contact areas between the silicon chips and the turning plates are excessively large since the turning plates and the silicon chips are blocked by the strip-type PP material, thereby affecting the contact of the silicon chips and the solution and changing the corrosion rate, defective chips can be easily produced and the like. The turning plate mechanism comprises a rectangular turning plate body (1), and is characterized in that the two sides of the turning plate body (1) are provided with a fixing device which can be fixed together with a silicon chip, the front end of the turning plate body is provided with a gas for solution flow, and the rear end of the turning plate body is provided with a circular hollow hole (2).
Description
Technical field
The utility model relates to a kind of making mechanism of silicon chip, especially relates to a kind of gaily decorated basket mechanism that is used to make silicon chip.
Background technology
Utilize low concentration alkali solution that crystalline silicon is had the anisotropic etch characteristic of different erosion rates on different crystal orientation, form the surface topography that pyramid gathers in the silicon chip surface corrosion.When light incides the inclined-plane of certain angle, light can reflex to the inclined-plane of another angle, forms secondary or repeatedly absorbs, thereby increase specific absorption.Chinese patent discloses on a kind of 12 inches silicon slice corrosion machines the dress silicon chip, and (Granted publication number: CN 201309966Y), it comprises following a few part: the gaily decorated basket main body of square with the gaily decorated basket; Be positioned at gaily decorated basket main body top and with the support of spending blue main body to join, be equipped with on the support and be used for preventing the blow out countercheck rod of the gaily decorated basket of silicon chip in the corrosion process; Wherein two opposite side of square are support by four cube bars respectively, and two and centre form with block concatenation respectively; Two opposite side in addition form by two cube bars with a block concatenation respectively; A support chip that is supported on the silicon chip below is respectively established at the middle part, four limits of square gaily decorated basket main body; Two sheets in the support chip are positioned at the mid point of that root cube bar of below, the inside, and two other sheet of support chip is positioned at the mid point of that following root cube bar, and the length of four support chips is 5m, area 25mm.The dress silicon chip gaily decorated basket on a kind of 12 inches silicon slice corrosion machines, be positioned on the support of gaily decorated basket top and be fixed with four countercheck rods, stretch to gaily decorated basket main body vertically, and respectively near the four edges of gaily decorated basket main body, the length of stretching out of countercheck rod is 50nun, and two the relative countercheck rod next doors on the support in four countercheck rods of institute's fixed are fixed with respectively and are used to hook the hook of spending blue main body square.But this gaily decorated basket is in the making herbs into wool process, and silicon chip is dipped in making herbs into wool solution in the gaily decorated basket, because gaily decorated basket front end intercepts for the PP material is arranged, can not form good fluid circulation, the interior strength of solution inequality of the gaily decorated basket not only, and concentration is also inhomogeneous between the gaily decorated basket.And be to be intercepted by bar shaped PP material between the gaily decorated basket and the silicon chip, contact surface is excessive between the silicon chip and the gaily decorated basket like this, influences contacting of silicon chip and solution, and its erosion rate is changed, and is easy to generate bad.
The utility model content
The utility model provides a kind of gaily decorated basket mechanism that is used to make silicon chip, it mainly is to solve the existing in prior technology silicon chip to be dipped in making herbs into wool solution in the gaily decorated basket, because gaily decorated basket front end intercepts for the PP material is arranged, can not form good fluid circulation, strength of solution inequality in the gaily decorated basket not only, the also uneven problem of concentration between the gaily decorated basket; It is to be intercepted by bar shaped PP material that the utility model has also solved between the gaily decorated basket and the silicon chip, and contact surface is excessive between the silicon chip and the gaily decorated basket like this, influences contacting of silicon chip and solution, and its erosion rate is changed, and is easy to generate the technical problem of bad grade.
Above-mentioned technical problem of the present utility model is mainly solved by following technical proposals:
The gaily decorated basket mechanism that is used to make silicon chip of the present utility model, the gaily decorated basket body that comprises rectangular build, the both sides of described gaily decorated basket body be provided with can with silicon chip fixed stationary installation, gaily decorated basket body front end is provided with the breach that can allow solution enter, gaily decorated basket body rear end has circular hollow hole.The front end hollow out of the gaily decorated basket is similar to the rear end, solution is effectively circulated inner the formation well of the gaily decorated basket.Gaily decorated basket body rear end also can have the hole of other shape, in order to guarantee the circulation of solution.Stationary installation is used for and silicon chip is fixed, thereby guarantees the corrosion of solution to silicon chip in the gaily decorated basket.
As preferably, the stationary installation of described gaily decorated basket body both sides all is the latch that two rows be arranged in parallel, and two row's latches are located at the middle part of gaily decorated basket body.In order to have reduced the contact area of the silicon chip and the gaily decorated basket, make the bar shaped in the gaily decorated basket into two point type contacts up and down at interval, utilize the less maximum contact area that has guaranteed silicon chip and solution of area occupied of latch, reduce silicon chip and gaily decorated basket contact position and produce bad phenomenon such as gaily decorated basket seal.
As preferably, described latch is that 20-30 is right, and the diameter of circular hollow hole is 50-70mm.Latch the best is 24 pairs, and diameter the best of circular hollow hole is 60mm.
Therefore, the utlity model has and to make solution form good effectively circulation in that the gaily decorated basket is inner, and guarantee the maximum contact area of silicon chip and solution, reduce bad phenomenon such as silicon chip and gaily decorated basket contact position generation gaily decorated basket seal, characteristics such as simple and reasonable for structure.
Description of drawings
Accompanying drawing 1 is a kind of structural representation of the present utility model;
Accompanying drawing 2 is left TV structure synoptic diagram of Fig. 1;
Accompanying drawing 3 is plan structure synoptic diagram of Fig. 1.
Component, position and numbering among the figure: gaily decorated basket body 1, circular hollow hole 2, latch 3.
Embodiment
Below by embodiment, and in conjunction with the accompanying drawings, the technical solution of the utility model is described in further detail.
Embodiment: the gaily decorated basket mechanism that is used to make silicon chip of this example, as Fig. 1, Fig. 2, Fig. 3, the gaily decorated basket body 1 of a rectangular build is arranged, gaily decorated basket body front end is provided with the breach that can allow solution enter, gaily decorated basket body rear end has circular hollow hole 2, and the diameter of circular hollow hole is 60mm.The both sides of gaily decorated basket body all are provided with two and arrange the middle part that latch 3, the two row's latches that be arranged in parallel are located at gaily decorated basket body 1, and latch is 24 pairs.
During use, silicon chip is connected to the both sides of gaily decorated basket body 1 by latch 3, the more whole gaily decorated basket is immersed in the solution, can carry out corrosion process silicon chip.
The above only is a specific embodiment of the utility model, but constitutional features of the present utility model is not limited thereto, any those skilled in the art is in field of the present utility model, and variation of being done or modification all are encompassed among the claim of the present utility model.
Claims (3)
1. gaily decorated basket mechanism that is used to make silicon chip, the gaily decorated basket body (1) that comprises rectangular build, the both sides that it is characterized in that described gaily decorated basket body (1) be provided with can with silicon chip fixed stationary installation, gaily decorated basket body front end is provided with the breach that can allow solution enter, gaily decorated basket body rear end has circular hollow hole (2).
2. the gaily decorated basket mechanism that is used to make silicon chip according to claim 1, the stationary installation that it is characterized in that described gaily decorated basket body (1) both sides all is the latch (3) that two rows be arranged in parallel, two row's latches are located at the middle part of gaily decorated basket body (1).
3. the gaily decorated basket mechanism that is used to make silicon chip according to claim 1 and 2 is characterized in that described latch (3) is right for 20-30, and the diameter of circular hollow hole (2) is 50-70mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205207509U CN201785494U (en) | 2010-09-08 | 2010-09-08 | Turning plate mechanism for manufacturing silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205207509U CN201785494U (en) | 2010-09-08 | 2010-09-08 | Turning plate mechanism for manufacturing silicon chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201785494U true CN201785494U (en) | 2011-04-06 |
Family
ID=43817468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205207509U Expired - Fee Related CN201785494U (en) | 2010-09-08 | 2010-09-08 | Turning plate mechanism for manufacturing silicon chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201785494U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105551952A (en) * | 2015-12-21 | 2016-05-04 | 上海提牛机电设备有限公司 | Chip deep groove corrosion device |
-
2010
- 2010-09-08 CN CN2010205207509U patent/CN201785494U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105551952A (en) * | 2015-12-21 | 2016-05-04 | 上海提牛机电设备有限公司 | Chip deep groove corrosion device |
| CN105551952B (en) * | 2015-12-21 | 2018-10-19 | 上海提牛机电设备有限公司 | Chip deep seated stain device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110406 Termination date: 20140908 |
|
| EXPY | Termination of patent right or utility model |