CN208889629U - Wafer Cleaning is mostly used the gaily decorated basket - Google Patents
Wafer Cleaning is mostly used the gaily decorated basket Download PDFInfo
- Publication number
- CN208889629U CN208889629U CN201821609321.1U CN201821609321U CN208889629U CN 208889629 U CN208889629 U CN 208889629U CN 201821609321 U CN201821609321 U CN 201821609321U CN 208889629 U CN208889629 U CN 208889629U
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- China
- Prior art keywords
- snap
- gauge
- pieces
- rectangular frame
- gaily decorated
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- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model belongs to Wafer Cleaning equipment technical field, the gaily decorated basket is mostly used more particularly to a kind of Wafer Cleaning, it includes two pieces of side snap-gauges and two pieces of side connecting plates, two pieces of side snap-gauges and two pieces of side connecting plates are interconnected to a rectangular frame, the bottom of the rectangular frame is equipped with bottom snap-gauge, the bottom snap-gauge is parallel with side snap-gauge, and the bottom snap-gauge is located at the middle of rectangular frame；The side snap-gauge medial surface and bottom snap-gauge upper surface are uniformly provided with several card slots；It further includes one piece or two pieces movable snap-gauge, the active card board is in rectangular frame, and it is parallel with side snap-gauge, at least one side of the activity snap-gauge is equipped with several card slots, and the card slot of the activity snap-gauge side is corresponding with the card slot on the card slot and bottom snap-gauge on the snap-gauge of side.The multi-purpose gaily decorated basket of the utility model can be applicable in the silicon wafer of different size, reduce the quantity of the gaily decorated basket, reduce cost, and easy to use.
Description
Technical field
The utility model belongs to Wafer Cleaning equipment technical field, and in particular to a kind of multi-purpose gaily decorated basket of Wafer Cleaning.
Background technique
Silicon wafer must be cleaned strictly in semiconductor devices production.Micropollution also results in component failure.The purpose of cleaning
It is to remove surface contamination impurity, including organic matter and inorganic matter.These impurity some have with state of atom or ionic condition
In the form of a film or particle form is present in silicon chip surface.It will lead to various defects.Remove pollution method have physical cleaning and
Two kinds of chemical cleaning.The chemical treatment of diffusing procedure silicon wafer: silicon wafer to be processed is inserted in the card slot of silicon wafer cleaning basket, is first used
Chemicals processing, after be rinsed with water.As shown in figure 5, existing silicon wafer cleaning basket is mainly by side snap-gauge, side connecting plate and bottom card
Board group at square box structure, wherein several card slots is designed on side snap-gauge and bottom snap-gauge, for blocking silicon wafer.It is first when cleaning
It puts the silicon wafer of unified specification into corresponding card slot one by one, card slot is all piled, is then put into entire silicon wafer cleaning basket
Service sink carries out chemicals processing and washing.However just need to replace the silicon of corresponding specification when cleaning different size silicon wafer simultaneously
Piece cleans the gaily decorated basket, and the silicon wafer of every kind of specification all corresponds to a kind of gaily decorated basket of specification, and gaily decorated basket type is more, and quantity is more, and cost is also just high, makes
With also inconvenience.
Utility model content
In view of the above technical problems, the purpose of this utility model is to provide a kind of Wafer Cleanings to be mostly used the gaily decorated basket, this is practical
The novel multi-purpose gaily decorated basket can be applicable in the silicon wafer of different size, reduce the quantity of the gaily decorated basket, reduce cost, and easy to use.
To achieve the above object, technical solution adopted in the utility model is:
A kind of Wafer Cleaning is mostly used the gaily decorated basket, it includes two pieces of side snap-gauges and two pieces of side connecting plates, two pieces of side snap-gauges and
Two pieces of side connecting plates are interconnected to a rectangular frame, and the bottom of the rectangular frame is equipped with bottom snap-gauge, the bottom card
Plate is parallel with side snap-gauge, and the bottom snap-gauge is located at the middle of rectangular frame；Table on the side snap-gauge medial surface and bottom snap-gauge
Face is uniformly provided with several card slots；It is characterized by: it further includes one piece or two pieces movable snap-gauge, the active card board is rectangular
In shape frame, and it is parallel with side snap-gauge, and at least one side of the activity snap-gauge is equipped with several card slots, the activity snap-gauge
The card slot of side is corresponding with the card slot on the card slot and bottom snap-gauge on the snap-gauge of side.
Preferably, card has two pieces of movable snap-gauges being parallel to each other, described two pieces movable snap-gauges in the rectangular frame
It is located at the two sides of bottom snap-gauge.
Preferably, two sides of the activity snap-gauge are equipped with card slot.
Preferably, the bottom surface of the rectangular frame be equipped with muti-piece bottom support plate, the bottom support plate simultaneously with
Two pieces of side snap-gauges are fixedly connected, and are used to support bottom snap-gauge.
The utility model has the following beneficial effects:
(1) the multi-purpose gaily decorated basket of the utility model can be applicable in the silicon wafer of different size, reduce the quantity of the gaily decorated basket, reduce at
This, and it is easy to use.
(2) two sides of activity snap-gauge are equipped with card slot in the utility model, and such design does not just have to divide just in use
Reverse side, it is more convenient to use smoothly.
Detailed description of the invention
Fig. 1 is the schematic top plan view that Wafer Cleaning is mostly used the gaily decorated basket.
Fig. 2 be in Fig. 1 A-A to schematic cross-section.
Fig. 3 is the schematic top plan view of movable snap-gauge.
Fig. 4 is the side schematic view of movable snap-gauge.
Fig. 5 is silicon wafer cleaning basket (vertical view) schematic diagram in the prior art.
In figure: 1, side snap-gauge, 2, side connecting plate, 3, bottom snap-gauge, 4, card slot, 5, bottom support plate, 6, movable snap-gauge.
Specific embodiment
The utility model in order to better understand does the technical solution of the utility model below with reference to embodiment and attached drawing
Further instruction (as shown in Fig. 1,2,3,4,5).
A kind of multi-purpose gaily decorated basket of Wafer Cleaning, it includes two pieces of side snap-gauges 1 and two pieces of side connecting plates 2, two pieces of side snap-gauges 1
A rectangular frame (wherein two pieces of side snap-gauges 1 are parallel to each other), the rectangle frame are interconnected to two pieces of side connecting plates 2
The bottom of frame is equipped with bottom snap-gauge 3, and the bottom snap-gauge 3 is parallel with side snap-gauge 1 (vertical with side connecting plate 2), and the bottom snap-gauge 3 is located at
The middle of rectangular frame；1 medial surface of side snap-gauge and 3 upper surface of bottom snap-gauge are uniformly provided with several 4 (card slots of card slot
4 section be it is rectangular, several card slots 4 are arranged along the length direction of side snap-gauge 1 and bottom snap-gauge 3, and the card slot 4 on side snap-gauge 1
It is corresponded with the card slot 4 on bottom snap-gauge 3)；It further includes one piece or two pieces movable snap-gauge 6, and the activity snap-gauge 6 is stuck in rectangular
In shape frame, and it is parallel with side snap-gauge 1, and at least one side of the activity snap-gauge 6 is equipped with several card slots 4, the activity
The card slot 4 of 6 side of snap-gauge is corresponding with the card slot 4 on the card slot 4 and bottom snap-gauge 3 on side snap-gauge 1.Card in the rectangular frame
There are two pieces of movable snap-gauges 6 being parallel to each other, described two pieces movable snap-gauges 6 are located at the two sides of bottom snap-gauge 3.The activity snap-gauge
6 two sides are equipped with card slot 4.The bottom surface of the rectangular frame is equipped with muti-piece bottom support plate 5, the bottom support plate
5 are fixedly connected with two pieces of side snap-gauges 1 simultaneously, are used to support bottom snap-gauge 3.The muti-piece bottom support plate 5 is flat with side connecting plate 2
Row, and be evenly arranged.
Several card slots in above-mentioned component on each face constitute a rectangular sawtooth pattern.
Application method and principle:
(1) movable snap-gauge 6 is not placed, and Wafer Cleaning is mostly used silicon wafer (the silicon wafer position that the gaily decorated basket can be used to place maximum specification
Between two pieces of side snap-gauges 1 and bottom snap-gauge 3)；
(2) place one piece of movable snap-gauge 6, position can be put according to the card of movable snap-gauge 6, come place diameter greater than two/
One Wafer Cleaning is mostly used the silicon wafer of gaily decorated basket width (silicon wafer is located between 1, one piece of one piece of side snap-gauge movable snap-gauge and bottom snap-gauge 3)；
(3) two pieces of movable snap-gauges 6 are placed, position can be put according to the card of two pieces of movable snap-gauges 6, to place diameter less than silicon
Piece cleans the silicon wafer of multi-purpose gaily decorated basket width (silicon wafer is located between two pieces of movable snap-gauges 6 and bottom snap-gauge 3).
It is described above be only the utility model Application Example, certainly cannot with this come limit the utility model it
Interest field, therefore equivalence changes made according to the patent scope of the utility model, still belong to the protection scope of the utility model.
Claims (4)
1. a kind of Wafer Cleaning is mostly used the gaily decorated basket, it includes two pieces of side snap-gauges (1) and two pieces of side connecting plates (2), two pieces of side cards
Plate (1) and two pieces of side connecting plates (2) are interconnected to a rectangular frame, and the bottom of the rectangular frame is equipped with bottom snap-gauge
(3), the bottom snap-gauge (3) is parallel with side snap-gauge (1), and the bottom snap-gauge (3) is located at the middle of rectangular frame；The side card
Plate (1) medial surface and bottom snap-gauge (3) upper surface are uniformly provided with several card slots (4)；It is characterized by: it further includes one piece or two pieces
Movable snap-gauge (6), the activity snap-gauge (6) are stuck in rectangular frame, and parallel with side snap-gauge (1), the activity snap-gauge (6)
At least one side be equipped with several card slots (4), it is described activity snap-gauge (6) side card slot (4) and side snap-gauge (1) on card
Card slot (4) on slot (4) and bottom snap-gauge (3) is corresponding.
2. Wafer Cleaning according to claim 1 is mostly used the gaily decorated basket, it is characterised in that: card has two pieces in the rectangular frame
The movable snap-gauge (6) being parallel to each other, described two pieces movable snap-gauges (6) are located at the two sides of bottom snap-gauge (3).
3. Wafer Cleaning according to claim 1 is mostly used the gaily decorated basket, it is characterised in that: two sides of the activity snap-gauge (6)
Face is equipped with card slot (4).
4. Wafer Cleaning according to claim 1 is mostly used the gaily decorated basket, it is characterised in that: the bottom surface of the rectangular frame is equipped with
Muti-piece bottom support plate (5), the bottom support plate (5) are fixedly connected with two pieces of side snap-gauges (1) simultaneously, are used to support bottom snap-gauge
(3)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821609321.1U CN208889629U (en) | 2018-09-29 | 2018-09-29 | Wafer Cleaning is mostly used the gaily decorated basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821609321.1U CN208889629U (en) | 2018-09-29 | 2018-09-29 | Wafer Cleaning is mostly used the gaily decorated basket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208889629U true CN208889629U (en) | 2019-05-21 |
Family
ID=66514819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821609321.1U Expired - Fee Related CN208889629U (en) | 2018-09-29 | 2018-09-29 | Wafer Cleaning is mostly used the gaily decorated basket |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208889629U (en) |
-
2018
- 2018-09-29 CN CN201821609321.1U patent/CN208889629U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190521 Termination date: 20200929 |