CN107237752B - 干式真空泵装置和真空排气系统 - Google Patents

干式真空泵装置和真空排气系统 Download PDF

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Publication number
CN107237752B
CN107237752B CN201710586825.XA CN201710586825A CN107237752B CN 107237752 B CN107237752 B CN 107237752B CN 201710586825 A CN201710586825 A CN 201710586825A CN 107237752 B CN107237752 B CN 107237752B
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China
Prior art keywords
limit value
current limit
inverter
value
pump
Prior art date
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Active
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CN201710586825.XA
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English (en)
Chinese (zh)
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CN107237752A (zh
Inventor
岩崎弘一
中泽敏治
吉田真也
大山敦
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Ebara Corp
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Ebara Corp
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00—Rotary kinetic fluid motors or pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
CN201710586825.XA 2012-10-05 2013-09-30 干式真空泵装置和真空排气系统 Active CN107237752B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012222878A JP6050081B2 (ja) 2012-10-05 2012-10-05 ドライ真空ポンプ装置
JP2012-222878 2012-10-05
CN201310460434.5A CN103711697B (zh) 2012-10-05 2013-09-30 干式真空泵装置和在该干式真空泵所使用的控制装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201310460434.5A Division CN103711697B (zh) 2012-10-05 2013-09-30 干式真空泵装置和在该干式真空泵所使用的控制装置

Publications (2)

Publication Number Publication Date
CN107237752A CN107237752A (zh) 2017-10-10
CN107237752B true CN107237752B (zh) 2019-05-28

Family

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CN201710586825.XA Active CN107237752B (zh) 2012-10-05 2013-09-30 干式真空泵装置和真空排气系统
CN201310460434.5A Active CN103711697B (zh) 2012-10-05 2013-09-30 干式真空泵装置和在该干式真空泵所使用的控制装置

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CN201310460434.5A Active CN103711697B (zh) 2012-10-05 2013-09-30 干式真空泵装置和在该干式真空泵所使用的控制装置

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Country Link
JP (1) JP6050081B2 (enExample)
KR (1) KR101707267B1 (enExample)
CN (2) CN107237752B (enExample)
TW (1) TWI601881B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107524608B (zh) * 2016-06-22 2019-11-01 泓记精密股份有限公司 电动燃油泵浦
JP6944249B2 (ja) * 2017-01-27 2021-10-06 株式会社荏原製作所 給水装置
JP2018178846A (ja) * 2017-04-12 2018-11-15 株式会社荏原製作所 真空ポンプ装置の運転制御装置、及び運転制御方法
FI20175411A1 (fi) * 2017-05-08 2018-11-09 Lappeenrannan Teknillinen Yliopisto Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi
DE202018003585U1 (de) * 2018-08-01 2019-11-06 Leybold Gmbh Vakuumpumpe
CN111756296B (zh) * 2019-03-29 2022-06-17 安川电机（中国）有限公司 变频器及其输出电压的控制方法、真空系统的控制方法
KR102376859B1 (ko) * 2020-09-28 2022-03-22 주식회사 플랜 반도체 제조 설비의 배기 유체 처리 시스템 및 방법
WO2023079621A1 (ja) * 2021-11-04 2023-05-11 株式会社アルバック 真空ポンプ、真空ポンプの制御方法、真空ポンプ用電力変換装置、圧縮機用電力変換装置および圧縮機
GB2619964B (en) * 2022-06-24 2024-12-25 Edwards Ltd Method for detection of a bearing condition of a vacuum pump
CN115145201B (zh) * 2022-07-19 2023-03-28 长沙昌佳自动化设备有限公司 一种干式真空泵专用控制器
CN116641881B (zh) * 2023-04-25 2024-01-23 北京通嘉宏瑞科技有限公司 真空泵控制方法、装置、计算机设备和存储介质

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5963394A (ja) * 1982-10-04 1984-04-11 Tokuda Seisakusho Ltd 真空排気装置
JP2003172292A (ja) * 2001-12-04 2003-06-20 Shimadzu Corp ターボ分子ポンプ駆動用電源装置
JP2007262906A (ja) * 2006-03-27 2007-10-11 Nabtesco Corp ２段式真空ポンプ
CN101184921A (zh) * 2005-02-02 2008-05-21 爱德华兹有限公司 操作泵系统的方法
JP2011069293A (ja) * 2009-09-25 2011-04-07 Ebara Corp 真空ポンプシステム、及びその運転方法
JP2011226364A (ja) * 2010-04-19 2011-11-10 Ebara Corp ドライ真空ポンプ装置の冷却構造、及び冷却方法

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Publication number Priority date Publication date Assignee Title
JPH05202888A (ja) * 1992-01-29 1993-08-10 Hitachi Ltd ドライ真空ポンプの駆動制御方法とその装置並びにドライ真空ポンプ用電源装置
JPH06346892A (ja) * 1993-06-10 1994-12-20 Hitachi Ltd ドライ真空ポンプ装置
JPH11287195A (ja) * 1998-03-31 1999-10-19 Ebara Corp 可変速駆動ターボ形ポンプの特性制御装置
US6920946B2 (en) * 2001-09-27 2005-07-26 Kenneth D. Oglesby Inverted motor for drilling rocks, soils and man-made materials and for re-entry and cleanout of existing wellbores and pipes
JP2004197644A (ja) * 2002-12-18 2004-07-15 Toyota Industries Corp 真空ポンプの制御装置
JP2005083316A (ja) * 2003-09-10 2005-03-31 Boc Edwards Kk モータ制御システム及び該モータ制御システムを搭載した真空ポンプ
GB0508872D0 (en) * 2005-04-29 2005-06-08 Boc Group Plc Method of operating a pumping system
GB0520470D0 (en) * 2005-10-07 2005-11-16 Boc Group Plc Method of operating a pumping system
KR100654813B1 (ko) 2005-12-09 2006-12-08 삼성전자주식회사 Ｂｌｄｃ 모터의 속도제어 방법 및 냉장고의 냉장 또는냉동 속도 제어 방법
JP4425253B2 (ja) * 2006-08-30 2010-03-03 ダイキン工業株式会社 油圧ユニットおよび油圧ユニットにおけるモータの速度制御方法
JP5107013B2 (ja) 2007-12-13 2012-12-26 三菱重工業株式会社 インバータ一体型電動圧縮機
JP5424784B2 (ja) * 2009-08-28 2014-02-26 株式会社荏原製作所 ドライ真空ポンプ用電源装置、及びその運転方法
TWI491804B (zh) * 2010-04-19 2015-07-11 Ebara Corp 乾真空泵裝置及該乾真空泵裝置之冷卻方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5963394A (ja) * 1982-10-04 1984-04-11 Tokuda Seisakusho Ltd 真空排気装置
JP2003172292A (ja) * 2001-12-04 2003-06-20 Shimadzu Corp ターボ分子ポンプ駆動用電源装置
CN101184921A (zh) * 2005-02-02 2008-05-21 爱德华兹有限公司 操作泵系统的方法
JP2007262906A (ja) * 2006-03-27 2007-10-11 Nabtesco Corp ２段式真空ポンプ
JP2011069293A (ja) * 2009-09-25 2011-04-07 Ebara Corp 真空ポンプシステム、及びその運転方法
JP2011226364A (ja) * 2010-04-19 2011-11-10 Ebara Corp ドライ真空ポンプ装置の冷却構造、及び冷却方法

Also Published As

Publication number Publication date
TW201418578A (zh) 2014-05-16
KR101707267B1 (ko) 2017-02-15
JP2014074380A (ja) 2014-04-24
CN103711697B (zh) 2017-11-10
CN103711697A (zh) 2014-04-09
CN107237752A (zh) 2017-10-10
JP6050081B2 (ja) 2016-12-21
TWI601881B (zh) 2017-10-11
KR20140044734A (ko) 2014-04-15

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