CN107208258B - Process the manufacturing method of assisted tool and sputtered target material - Google Patents
Process the manufacturing method of assisted tool and sputtered target material Download PDFInfo
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- CN107208258B CN107208258B CN201580074869.3A CN201580074869A CN107208258B CN 107208258 B CN107208258 B CN 107208258B CN 201580074869 A CN201580074869 A CN 201580074869A CN 107208258 B CN107208258 B CN 107208258B
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- shaped ceramic
- processing
- assisted tool
- rubber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Abstract
Project of the present invention is to inhibit the generation of periphery surface damage or the rupture of cylinder-shaped ceramic.In order to solve the project, a kind of processing assisted tool of specific embodiment has rotary body.Rotary body is rotated with the rotation of cylinder-shaped ceramic.The length of the rotary axis direction of rotary body is 15mm or more, and the material of at least peripheral part of rotary body is 80 or more 125 resin or rubber hardness 80 or more 95 below rubber below of Rockwell hardness.
Description
Technical field
Revealed embodiment is related to processing the manufacturing method of assisted tool and sputtered target material.
Background technique
In the past, known, there is a kind of inside in cylinder-shaped target to configure magnetic field generation device, and make from inside
The target is cooling, and sputter is carried out while rotating, whereby in the sputtering unit for forming film on substrate.
Above-mentioned cylindrical shape target, such as attrition process is carried out to the cylinder-shaped ceramic as sintered body and is manufactured.It is specific and
Speech, such as rotate cylinder-shaped ceramic on one side, inner peripheral surface or outer peripheral surface are ground with grinding stone on one side, adjust the size of internal diameter or outer diameter
And manufacture cylinder-shaped target.
It is above-mentioned in the prior art, such as when carrying out attrition process to the inner peripheral surface of cylinder-shaped ceramic, the one of cylinder-shaped ceramic
End side keeps rotating by rotating mechanism.On the other hand, the another side of cylinder-shaped ceramic, the outer peripheral surface are auxiliary by processing
It helps tool rotatably to keep, inhibits the vibration because of cylinder-shaped ceramic caused by rotation whereby, and promote grinding precision and (such as join
Examine patent document 1).
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2014-148026 bulletin.
Summary of the invention
[the invention project to be solved]
However, in above-mentioned processing assisted tool, from the viewpoint of the generation of damage or rupture for inhibiting cylinder-shaped ceramic, still
There is the space further improved.
That is, since cylinder-shaped ceramic is the relatively low and crisp material of mechanical strength, so as above auxiliary to process
When tool being helped to keep outer peripheral surface, because of the contact with assisted tool is processed, the doubt that deeper damage or rupture are generated in outer peripheral surface is had.
The cylinder-shaped ceramic for so generating damage or rupture, is not used as sputtered target material, so having leads to sputter target
The problem of yield of material cylinder-shaped ceramic reduces.
A kind of specific implementation form is created in view of said circumstances, its purpose is to provide one kind can inhibit cylinder-shaped pottery
The processing assisted tool of the generation of damage or the rupture of porcelain and the manufacturing method of sputtered target material.
[to the means to solve the problem]
A kind of processing assisted tool of specific embodiment has the rotation with cylinder-shaped ceramic and the rotary body that rotates.This
Outside, the length of the rotary axis direction of the rotary body is 15mm or more, and the material of at least peripheral part of the rotary body is
80 or more 125 resin or rubber hardness 80 or more 95 below rubber below of Rockwell hardness (RockwellHardness).
[The effect of invention]
According to a kind of specific embodiment, the generation of damage or the rupture of cylinder-shaped ceramic can inhibit.
Detailed description of the invention
Fig. 1 is the sectional view for showing the configuration example of processing unit (plant) for the processing assisted tool for having first embodiment.
Fig. 2 is sectional view when watched near processing assisted tool shown in FIG. 1 from the length direction side of cylinder-shaped ceramic.
Fig. 3 is the expanded profile for showing processing assisted tool shown in FIG. 1.
Fig. 4 is the flow chart for showing the processing step of manufacture sputtered target material.
Fig. 5 is the expanded profile for showing the processing assisted tool of second embodiment.
Primary clustering symbol description
1 processing unit (plant)
10 cylinder-shaped ceramics
20 rotating mechanisms
30 vibration suppressing mechanisms
31,131 processing assisted tool
34,134 roller
35 support portions
36,136 core material
37,137 bearing
38,138 inner peripheral portion
39,139 peripheral part
40 grinding stones.
Specific embodiment
The manufacturer of the revealed processing assisted tool of present application and sputtered target material is described in detail below with reference to appended drawings
Method.In addition, the present invention is not limited to embodiments as shown below.
(first embodiment)
Fig. 1 is the sectional view for showing the configuration example of processing unit (plant) for the processing assisted tool for having first embodiment.In addition,
Fig. 2 is sectional view when watched near processing assisted tool shown in FIG. 1 from the length direction side of cylinder-shaped ceramic.
In addition, Fig. 1 is sectional view when showing the I-I line cutting off processing device with Fig. 2 for correct.In addition, in Fig. 2,
In order to be readily understood by description, it is specified that mutually orthogonal X-direction, Y direction and Z-direction, and using Z axis positive direction as
The three-dimensional orthogonal coordinate system diagram in direction vertically upward.
In addition, in Fig. 1, Fig. 2 and aftermentioned Fig. 3, Fig. 5, constituent element needed for only showing explanation omits one sometimes
As constituent element record.In addition, Fig. 1, Fig. 2 and Fig. 3, Fig. 5 are schematic diagram.
Processing unit (plant) 1 shown in FIG. 1 is to manufacture the device of sputtered target material to process the cylinder-shaped ceramic 10 of strip.
In addition, the target manufactured using processing unit (plant) 1, is installed in not shown sputtering unit in figure, be formed in film
Sputter in figure on not shown substrate.
As shown in Figure 1 and Figure 2, cylinder-shaped ceramic 10 is formed to have the tubular of hollow portion 11.In addition, cylinder-shaped ceramic 10
To be made via granulation step, forming step and sintering step.
Specifically, production contains the slurries of such as ceramic material powder and organic additive in granulation step, and lead to
It crosses and is carried out by spray drying treatment and makes granule for the slurries.CIP (Cold is carried out in forming step, such as to granule
Isostatic Pressing: cold isostatic pressing) it shapes and makes columnar formed body.Then in sintering step, in burning
Sintered shaped body in freezing of a furnace and make sintered body.
The sintered body so made becomes cylinder-shaped ceramic 10, which is rotated on one side by processing unit (plant) 1
Attrition process is carried out to inner peripheral surface 10a on one side.In addition, the production method of the cylinder-shaped ceramic 10 as sintered body is not limited to
Above-mentioned person can be any means.
Although that is, for example in above-mentioned forming step being shaped using CIP, but not limited to this, it is possible to use squeeze
Other forming gimmicks such as forming, injection molding or casting forming.
In addition, the ceramic raw material of cylinder-shaped ceramic 10, can exemplify IGZO (In2O3-Ga2O3-ZnO)、ITO(In2O3-
SnO2) and AZO (Al2O3- ZnO) etc., but it is not limited to these.That is, cylinder-shaped ceramic 10, for example, can containing In, Zn, Al,
One or more of Ga, Zr, Ti, Sn, Mg and Si.
The cylinder-shaped ceramic 10 so made is applied to processing assisted tool and cylinder-shaped ceramic 10 since overall length is longer
The power of contact portion is bigger, is more preferably 750mm or more so ought overall length be for example 500mm or more, especially preferably 1000mm
When above, it can suitably be applicable in aftermentioned processing assisted tool.It but can also be not use to add up to the cylinder-shaped ceramic 10 of 500mm to overall length
Work assisted tool.
As shown in Figure 1, processing unit (plant) 1 has rotating mechanism 20 and vibration suppressing mechanism 30.Rotating mechanism 20 keeps cylinder
One end 10c of shape ceramics 10, and rotate cylinder-shaped ceramic 10.
Specifically, rotating mechanism 20 has body part 21, rotating part 22 and retaining hook 23.In body part 21, hold
Receive the driving source (not shown) for making motor etc. of the rotation driving of rotating part 22.
Rotating part 22 is connected to the output shaft of above-mentioned driving source, and when rotary force is transmitted from driving source, around rotation
Axis A rotation.Retaining hook 23 is connected to rotating part 22, and is configured with the peripheral side of multiple one end 10c in cylinder-shaped ceramic 10,
To keep cylinder-shaped ceramic 10.
Specifically, for example retaining hook 23 be 3 (seeing 1 in Fig. 1 less), and centered on rotary shaft A mutually across
120 degree of interval and configure.In addition, 3 retaining hooks 23, being respectively structured as when X-direction viewing can be in cylinder-shaped ceramic 10
Radially independently move.
Thus, for example first when X-direction is watched, being protected by 3 when with retaining hook 23 to keep cylinder-shaped ceramic 10
The space that tenaculum 23 is kept is redefined for bigger compared with the outer diameter of cylinder-shaped ceramic 10.Then by one end of cylinder-shaped ceramic 10
After 10c is installed in the space kept by 3 retaining hooks 23, keep 3 retaining hooks 23 mobile toward radially inner side respectively.
Retaining hook 23 is then connected to both constant-pressures the outer peripheral surface 10b of cylinder-shaped ceramic 10, and makes cylinder-shaped ceramic
10 one end 10c is kept by 3 retaining hooks 23.Whereby, rotating mechanism 20 can make the cylinder-shaped pottery kept by retaining hook 23
Porcelain 10 is rotated along with the rotation of rotating part 22 around rotary shaft A.
In addition, the rotary shaft of cylinder-shaped ceramic 10, substantially with the rotary shaft A of rotating mechanism 20 in coaxial.Therefore, Fig. 1 etc.
In, for the simplification of diagram, the rotary shaft of cylinder-shaped ceramic 10 is also illustrated as " rotary shaft A ".In addition, following sometimes with cylinder
The meaning of the rotary shaft A of shape ceramics 10 uses " rotary shaft A ".
In addition, among the above, the retaining hook 23 of rotating mechanism 20 is set as 3, but it's not limited to that for number.In addition, above-mentioned
Cylinder-shaped ceramic 10 is kept with retaining hook 23 in rotating mechanism 20, but this is only to illustrate, it's not limited to that.For example, rotation
Mechanism 20, which can also have, is formed as cricoid maintaining part to replace retaining hook 23, and one end 10c of cylinder-shaped ceramic 10 is inserted
It is fixed on the maintaining part etc., is constituted with other to keep cylinder-shaped ceramic 10.
Vibration suppressing mechanism 30 is rotatably kept near the other end 10d of cylinder-shaped ceramic 10, and is inhibited because rotating institute
The vibration of the cylinder-shaped ceramic 10 of generation.The rotary shaft A of the cylinder-shaped ceramic 10 in rotation can be made to reach stable whereby, so can
Promote grinding precision when aftermentioned attrition process.
Specifically, vibration suppressing mechanism 30 has not shown body part and processing assisted tool 31 in figure.It processes auxiliary
31 setting of tool is helped rotatably to keep near the other end 10d of cylinder-shaped ceramic 10 in body part, and from the side outer peripheral surface 10b.
Cylinder-shaped ceramic 10 is the relatively low and crisp material of mechanical strength.Thus, for example processing assisted tool 31 in
When the part that cylinder-shaped ceramic 10 contacts is the made of metal of stainless steel etc., because of the contact with assisted tool 31 is processed, have in periphery
Face 10b generates the doubt of deeper damage or rupture.
Therefore, the processing assisted tool 31 of present embodiment is can inhibit the generation of damage or the rupture of cylinder-shaped ceramic 10
Mode is constituted.The composition of following more detailed description processing assisted tool 31.
Fig. 3 is the expanded profile for showing processing assisted tool 31 shown in FIG. 1.As shown in Fig. 2 etc., processing assisted tool 31 has
Standby multiple rollers 34 and the support portion 35 for supporting multiple rollers 34 respectively.In addition, Fig. 1 is into Fig. 3, for the simplification of diagram, with void
Quasi- line shows support portion 35.
Roller 34 as shown in Figure 1 to Figure 3, is for example formed as cylindric.In addition, roller 34 is an example of rotary body.
Multiple rollers 34 configure the peripheral side near the other end 10d of cylinder-shaped ceramic 10.For example, roller 34 is 3 (Fig. 1
In see 1 less), and centered on the rotary shaft A of cylinder-shaped ceramic 10 mutually across 120 degree interval and configure.On in addition,
Roller 34 is configured with (such as 120 degree interval) at equal intervals in stating, but this is only to illustrate, it's not limited to that, multiple rollers 34 that
This interval can arbitrarily be set.
In addition, above-mentioned multiple rollers 34, be connected to the outer peripheral surface 10b of the cylinder-shaped ceramic 10 rotated in the circumferential direction respectively and
Setting, therefore be configured to follow the rotation of cylinder-shaped ceramic 10, it is rotated around rotary shaft B.
Specifically, as Fig. 2 and Fig. 3 are displayed the details of, roller 34 has core material 36, bearing 37, inner peripheral portion 38 and outer
Circumference 39.
Core material 36, for example formed as appropriate location that is cylindric, and being fixed on support portion 35.In addition, core material 36, such as
Metal materials or the vulcanies, resin such as iron, stainless steel, titanium or titanium alloy can be used, but be not limited to these.
For example formed as cylindric, and the position for surrounding core material 36 is arranged in inner peripheral portion 38 when the direction rotary shaft B is watched
It sets.In addition, being inserted into bearing 37 between core material 36 and inner peripheral portion 38.In other words, the configuration of bearing 37 is outside in the diameter of core material 36
Side and be inner peripheral portion 38 radially inner side.Therefore, inner peripheral portion 38 and peripheral part 39 are rotatably supported at core material 36 by bearing 37.
In addition, bearing 37 is arranged respectively near the both ends of core material 36 in example shown in Fig. 1, Fig. 3 etc., but and unlimited
Due to this, the configuration place of bearing 37 or number can arbitrarily be set.
Inner peripheral portion 38, such as metal materials or the vulcanies, resin such as iron, stainless steel, titanium or titanium alloy can be used,
But it is not limited to these.
It is formed in a manner of the face of radial outside of the peripheral part 39 to be coated inner peripheral portion 38, and is formed as cylindric.In addition,
Peripheral part 39 is configured in a manner of the outer peripheral surface 10b for being connected to cylinder-shaped ceramic 10.
Then, it is connected to the material of the peripheral part 39 of cylinder-shaped ceramic 10, is resin or rubber.In addition, above-mentioned resin can
Using the resin material containing one or more of polyamide, ABS resin, polycarbonate resin, acrylic resin etc., but
It is not limited to these.In addition, above-mentioned rubber, can be used and contain chloroprene rubber, nitrile rubber, natural rubber, isoprene
The rubber material of one or more of rubber, butadiene rubber, urethane rubber etc., but it is not limited to these.
In this way, in present embodiment, since the material of peripheral part 39 is configured to resin or rubber, so with periphery is assumed
Portion 39 is that metal situation is compared, and the load that cylinder-shaped ceramic 10 is acted on from roller 34 can be reduced when contact.Whereby, even if
Such as make as fragile material cylinder-shaped ceramic 10 rotate to process inner peripheral surface 10a when, also can inhibit because with the contact of roller 34
And the outer peripheral surface 10b of cylinder-shaped ceramic 10 is made to generate damage or rupture.
Length L1 (referring to Fig. 1), the more preferably for example, 15mm or more in the direction rotary shaft B of the roller 34 of above-mentioned composition, especially
It is preferably 30mm or more, more preferably 50mm or more.That is, in a manner of increasing the contact area of roller 34 and cylinder-shaped ceramic 10
The overall length L1 of roller 34 is set, the face pressure for acting on from roller 34 cylinder-shaped ceramic 10 can be reduced when contact.It whereby can be effectively
The outer peripheral surface 10b of cylinder-shaped ceramic 10 is inhibited to generate damage or rupture.
In addition, there is no particular restriction for the upper limit of the length L1 in the direction rotary shaft B of roller 34, from the step of using roller 34
It is more preferably 5000mm or less from the point of view of the treatability of operation.
In addition, overall length L2 of the overall length L1 in the direction rotary shaft B of roller 34 relative to the direction rotary shaft A of cylinder-shaped ceramic 10
The ratio of (referring to Fig. 1), is more preferably 3% or more, especially preferably 5% or more.Whereby, it can reduce when contact from roller 34 and make
For the face pressure of cylinder-shaped ceramic 10, therefore the outer peripheral surface 10b of cylinder-shaped ceramic 10 can more effectively be inhibited to generate damage or broken
It splits.
In addition, Rockwell hardness (ASTM specification, D785, R scale) is more preferably when the material of above-mentioned peripheral part 39 is resin
Such as 80 or more 125 hereinafter, especially preferably 80 or more 120 or less.In addition, when the material of above-mentioned peripheral part 39 is rubber,
Rubber hardness (JIS specification, K6253-3:2012) is more preferably for 80 or more 95 hereinafter, especially preferably 80 or more 90 or less.
Whereby, compared with assuming peripheral part 39 for metal situation, it can further decrease when contact from roller 34 and act on
In the load of cylinder-shaped ceramic 10, and the outer peripheral surface 10b for being able to suppress cylinder-shaped ceramic 10 generates damage or rupture.In addition, working as
When hardness is higher than above range, the outer peripheral surface 10b of cylinder-shaped ceramic 10 generates damage or rupture sometimes, is lower than above range
When, it can not inhibit to vibrate, deteriorate machining accuracy sometimes.
In addition, roller 34 is connected to the position of cylinder-shaped ceramic 10, more preferably for example from the circle kept by rotating mechanism 20
One end 10c of tubular ceramics 10 starts, and the 1/2 position C1 (referring to Fig. 1) compared with overall length L2 is more located at the side other end 10d.As
Preferred example, 2/3 position C2 (reference of the position of roller 34 since one end 10c of cylinder-shaped ceramic 10, compared with overall length L2
Fig. 1) more it is located at the side other end 10d.
Whereby, vibration suppressing mechanism 30 can stably keep cylinder-shaped ceramic 10, and can further suppress cylinder-shaped pottery
The vibration of porcelain 10.Furthermore since the rotary shaft A of the cylinder-shaped ceramic of rotation 10 reaches stable, so grinding can be promoted further
Precision.
Support portion 35 as above supports 3 rollers 34 respectively.3 support portions 35 are respectively arranged in vibration suppressing mechanism 30
Not shown body part in figure, and being configured to when X-direction viewing can radially independently moving in cylinder-shaped ceramic 10
It is dynamic.
Thus, for example in processing before with support portion 35 and roller 34 to keep cylinder-shaped ceramic 10 when, first in X-direction see
When seeing, it is redefined for by the space that 3 rollers 34 are kept bigger compared with the outer diameter of cylinder-shaped ceramic 10.Then by cylinder-shaped ceramic
After 10 other end 10d is nearby installed in the space kept by 3 rollers 34, make 3 support portions 35 and roller 34 respectively toward radial
Medial movement.
Roller 34 is then connected to both constant-pressures the outer peripheral surface 10b of cylinder-shaped ceramic 10, and makes cylinder-shaped ceramic 10
Other end 10d is rotatably kept by 3 rollers 34.
Processing unit (plant) 1 has grinding stone 40 (referring to Figure 1 and Figure 2).Grinding stone 40 is by not shown mobile mechanism in figure, on one side
It is moved inner peripheral surface 10a is connected in the hollow portion 11 of cylinder-shaped ceramic 10 on one side.That is, making pottery in processing unit (plant) 1 to cylindrical shape
The inner peripheral surface 10a of porcelain 10 carries out traversing grinding.In addition, the grinding method of the inner peripheral surface 10a of cylinder-shaped ceramic 10 is not limited to
Traversing grinding, any means.
In addition, roller 34 is set as 3 in above embodiment, but it's not limited to that for number.In addition, will in above-mentioned example
Multiple rollers 34 are all formed as identical composition, and but not limited to this, such as can be formed as part or all of multiple rollers 34
Different composition.
In this regard, illustrated with example shown in Fig. 2.Here, when the direction rotary shaft A is watched, it will more cylinder-shaped pottery
2 rollers that the center of gravity G of porcelain 10 is more located at Z axis lower side are expressed as symbol 34a, and the roller table of Z axis upper side will be more located at compared with center of gravity G
It is shown as symbol 34b.
In above-mentioned roller 34a, because of the effect of the weight of cylinder-shaped ceramic 10 itself, so that compared to the part contacted with roller 34b,
It is higher with the load of the part contacted roller 34a on cylinder-shaped ceramic 10, it is easy to produce damage or rupture.
Thus, for example the material of the only peripheral part 39 of 2 roller 34a can be configured to resin or rubber.In addition, for example may be used
It is longer that the overall length L1 of 2 roller 34a is configured to the overall length L1 compared with roller 34b.
As above, about 2 roller 34a, even if the material of peripheral part 39 is configured to resin or rubber, or increase complete
Long L1, the outer peripheral surface 10b that also can inhibit cylinder-shaped ceramic 10 generate the situation of damage or rupture.
Referring next to Fig. 4, illustrate the manufacturing method of the sputtered target material of the processing assisted tool 31 using present embodiment.Fig. 4
It is the flow chart for showing the processing step of manufacture sputtered target material.
As shown in figure 4, keeping one end 10c of cylinder-shaped ceramic 10 first with the retaining hook 23 of rotating mechanism 20, and will justify
Tubular ceramics 10 are installed on rotating mechanism 20 (step S1).
Then by the roller 34 of processing assisted tool 31, the other end 10d (step of cylinder-shaped ceramic 10 is rotatably kept
S2).In addition, the processing sequence of step S1, S2 is not limited to above-mentioned, such as it can carry out step S1's after step S2 processing
It handles, or carries out the processing of step S1, S2 under same opportunity.
Then by rotating mechanism 20, cylinder-shaped ceramic 10 is made to rotate in circumferential direction and carry out grinding to inner peripheral surface 10a and add
Work (step S3).By above each step, terminate the processing of the inner peripheral surface 10a of a series of cylinder-shaped ceramic 10.
In addition, the processing other than above-mentioned steps S1 to S3 can be carried out when making sputtered target material.Such as it can make pottery to cylindrical shape
The outer peripheral surface 10b of porcelain 10 carries out the processing of attrition process.
As noted above, the processing assisted tool 31 of first embodiment has with the rotation of cylinder-shaped ceramic 10 and rotates
Roller (rotary body) 34.The length of the rotary axis direction of roller 34 is 15mm or more, and the material of at least peripheral part 39 of roller 34
It is 80 or more 125 resin or rubber hardness 80 or more 95 below rubber below of Rockwell hardness.It can inhibit cylindrical shape whereby
Ceramic 10 damage or the generation of rupture.
In addition, the cylinder-shaped ceramic 10 that the generation for as above damaging or rupturing is suppressed is splashed due to can be used to be used as
Target is plated, so in the present embodiment, the yield that also can inhibit sputtered target material cylinder-shaped ceramic reduces.
(embodiment)
[embodiment 1]
Deploying the specific surface area (BET specific surface area) as measured by BET (Brunauer-Emmett-Teller) method is
4m225.9 mass % of ZnO powder, the BET specific surface area 7m of/g2The In of/g2O344.2 mass % and BET specific surface of powder
Product is 10m2The Ga of/g2O329.9 mass % of powder carries out ball milling mixing by zirconia ball in pot, and modulates raw material powder
End.
In the pot, relative to 100 mass % of raw material powder, polyvinyl alcohol, 0.4 matter of 0.3 mass % are added respectively
Polybasic carboxylic acid ammonium, the polyethylene glycol of 1.0 mass % and the water of 50 mass % of % are measured, ball milling mixing is carried out and modulates pulp
Liquid.
Then the slurries are supplied to spray-drying installation, in atomization revolution 14,000rpm, 200 DEG C of inlet temperature, outlet
It is spray-dried under conditions of 80 DEG C of temperature, modulates granule.
By the granule, the internal diameter of the columned core (plug) with outer diameter 150mm is filled in while striking real
The urethane rubber mold of the cylindrical shape of 220mm (wall thickness 10mm), long 1300mm, after closing rubber mold, with
800kgf/cm2Pressure carry out CIP forming, and make columnar formed body.
The formed body is heated to 1400 DEG C from room temperature with 300 DEG C/h of heating rate, after being kept for 12 hours, with cooling rate
50 DEG C/h is cooling, and the sintering of body is formed whereby, and produces sintered body.Then it will pass through sintering made by the above method
Body is cut off in a manner of making overall length L2 become 500mm and obtains the cylinder-shaped ceramic 10 of IGZO.
Then after the attrition process for carrying out outer peripheral surface 10b to above-mentioned cylinder-shaped ceramic 10, the material with peripheral part 39 is used
Matter is the processing assisted tool 31 of polyamide, the roller 34 that overall length L1 is 15mm, Rockwell hardness is 120, carries out inner peripheral surface 10a's
Attrition process.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, does not confirm the generation of rupture or cracking, after processing
The depth of damage is 0.4mm.
In addition, when the depth of the damage after processing does not reach 0.5mm, being judged to processing well and full in this specification
On the other hand quality criteria of the foot as cylinder-shaped ceramic 10 when being 0.5mm or more, is judged to processing bad and does not meet matter
Measure benchmark.
[embodiment 2]
By by sintered body made by method same as Example 1, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The material of circumference 39 is the processing assisted tool 31 of polyamide, the roller 34 that overall length L1 is 60mm, Rockwell hardness is 120, is carried out
The attrition process of inner peripheral surface 10a.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, does not confirm the production of rupture or cracking
Raw, the depth of the damage after processing is 0.2mm.
[embodiment 3]
By by sintered body made by method same as Example 1, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The material of circumference 39 is the processing assisted tool 31 of acrylic resin, the roller 34 that overall length L1 is 60mm, Rockwell hardness is 81, in progress
The attrition process of circumferential surface 10a.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, does not confirm the generation of rupture or cracking,
The depth of damage after processing is 0.3mm.
[embodiment 4]
Deploying the specific surface area as measured by BET method (BET specific surface area) is 5m2The SnO of/g210 mass % of powder and
BET specific surface area is 5m2The In of/g2O390 mass % of powder carries out ball milling mixing by zirconia ball in pot, and modulates
Raw material powder.
In the pot, relative to 100 mass % of raw material powder, polyvinyl alcohol, 0.2 matter of 0.3 mass % are added respectively
Polybasic carboxylic acid ammonium, the polyethylene glycol of 0.5 mass % and the water of 50 mass % of % are measured, ball milling mixing is carried out and modulates pulp
Liquid.
The step of until spray drying to forming after this, is using step same as Example 1.With heating rate
Resulting formed body is heated to 1600 DEG C from room temperature by 300 DEG C/h, cooling with 50 DEG C/h of cooling rate after being kept for 12 hours, is borrowed
The sintering of body is formed in this, and produces sintered body.By the sintered body by make overall length L2 become 1000mm in a manner of cut off and
Obtain the cylinder-shaped ceramic 10 of ITO.
Then to the attrition process for carrying out outer peripheral surface 10b by the resulting cylinder-shaped ceramic 10 of the above method after, use tool
The material for having peripheral part 39 is the processing assisted tool 31 of polyamide, the roller 34 that overall length L1 is 60mm, Rockwell hardness is 120,
Carry out the attrition process of inner peripheral surface 10a.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, does not confirm rupture or cracking
Generation, the depth of the damage after processing is 0.1mm.
[embodiment 5]
By by sintered body made by method same as Example 4, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The material of circumference 39 is the processing assisted tool 31 of polycarbonate resin, the roller 34 that overall length L1 is 60mm, Rockwell hardness is 125, into
The attrition process of row inner peripheral surface 10a.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing does not confirm rupture or cracking
It generates, the depth of the damage after processing is 0.2mm.
[embodiment 6]
By by sintered body made by method same as Example 1, cut off in a manner of making overall length L2 become 500mm
And obtain cylinder-shaped ceramic 10.Then after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10, using with periphery
The material in portion 39 is the processing assisted tool 31 of chloroprene rubber, the roller 34 that overall length L1 is 15mm, rubber hardness is 90, in progress
The attrition process of circumferential surface 10a.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, does not confirm the generation of rupture or cracking,
The depth of damage after processing is 0.4mm.
[embodiment 7]
By by sintered body made by method same as Example 1, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The material of circumference 39 is the processing assisted tool 31 of chloroprene rubber, the roller 34 that overall length L1 is 60mm, rubber hardness is 90, is carried out
The attrition process of inner peripheral surface 10a.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, does not confirm the production of rupture or cracking
Raw, the depth of the damage after processing is 0.2mm.
[embodiment 8]
By by sintered body made by method same as Example 4, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The material of circumference 39 is the processing assisted tool 31 of butadiene rubber, the roller 34 that overall length L1 is 60mm, rubber hardness is 82, in progress
The attrition process of circumferential surface 10a.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, does not confirm the generation of rupture or cracking,
The depth of damage after processing is 0.2mm.
[comparative example 1]
By by sintered body made by method same as Example 1, cut off in a manner of making overall length L2 become 500mm
And obtain cylinder-shaped ceramic 10.Then after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10, using with periphery
The processing assisted tool 31 for the roller 34 that the material in portion 39 is SUS304, overall length L1 is 15mm carries out the attrition process of inner peripheral surface 10a.
In addition, SUS304 is with resin used in the present invention or rubber phase than extremely hard.The outer peripheral surface of cylinder-shaped ceramic 10 after processing
10b, though not confirming the generation of rupture or cracking, the depth of the damage after processing is 0.9mm.
[comparative example 2]
By by sintered body made by method same as Example 1, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The processing assisted tool 31 for the roller 34 that the material of circumference 39 is SUS304, overall length L1 is 10mm, the grinding for carrying out inner peripheral surface 10a add
Work.In comparative example 2, the outer peripheral surface 10b of cylinder-shaped ceramic 10 generates rupture in processing, can not be processed.It can not thus survey
The depth of damage after fixed processing.
[comparative example 3]
By by sintered body made by method same as Example 4, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The processing assisted tool 31 for the roller 34 that the material of circumference 39 is SUS304, overall length L1 is 10mm, the grinding for carrying out inner peripheral surface 10a add
Work.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, though the generation of rupture or cracking is not confirmed, the damage after processing
The depth of wound is 0.6mm.
[comparative example 4]
By by sintered body made by method same as Example 1, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The processing assisted tool 31 for the roller 34 that the material of circumference 39 is SUS304, overall length L1 is 60mm, the grinding for carrying out inner peripheral surface 10a add
Work.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, though the generation of rupture or cracking is not confirmed, the damage after processing
The depth of wound is 0.9mm.
[comparative example 5]
By by sintered body made by method same as Example 1, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The material of circumference 39 is the processing assisted tool 31 of polyamide, the roller 34 that overall length L1 is 10mm, Rockwell hardness is 120, is carried out
The attrition process of inner peripheral surface 10a.The outer peripheral surface 10b of cylinder-shaped ceramic 10 after processing, though do not confirm rupture or cracking
It generates, but the depth of the damage after processing is 0.6mm.
[comparative example 6]
By by sintered body made by method same as Example 1, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The material of circumference 39 is the processing assisted tool 31 of fluororesin, the roller 34 that overall length L1 is 60mm, Rockwell hardness is 50, carries out inner peripheral surface
The attrition process of 10a.The outer peripheral surface 10b of cylinder-shaped ceramic 10 in processing can not inhibit though not generating rupture or cracking
Vibration, thus can not be processed.
[comparative example 7]
By by sintered body made by method same as Example 1, cut in a manner of making overall length L2 become 1000mm
It is disconnected to obtain cylinder-shaped ceramic 10.Then outer using having after the attrition process for carrying out outer peripheral surface 10b to the cylinder-shaped ceramic 10
The material of circumference 39 is chloroprene rubber, overall length L1 is 60mm, rubber hardness is 60 (more soft compared with embodiment institute user
Chloroprene rubber) roller 34 processing assisted tool 31, carry out inner peripheral surface 10a attrition process.Cylinder-shaped pottery in processing
The outer peripheral surface 10b of porcelain 10 can not inhibit to vibrate though not generating rupture or cracking, thus can not be processed.
In Examples and Comparative Examples, the outer peripheral surface 10b of cylinder-shaped ceramic 10 is formed in after the attrition process of inner peripheral surface 10a
Damage depth be after the attrition process of inner peripheral surface 10a, grind cylinder-shaped ceramic 10 outer peripheral surface 10b, and so that damage
Grinding depth needed for until disappearance is assessed.In addition, only exemplifying effect of the invention in above-described embodiment, comparative example
The cylinder-shaped sputtered target material of fruit especially pronounced IGZO and ITO.However, the present invention not only splashes the cylindrical shape of IGZO and ITO
Plating target reaches effect.
[table 1]
(second embodiment)
Illustrate the processing assisted tool 131 of second embodiment referring next to Fig. 5.Fig. 5 shows second embodiment
Assisted tool 131 is processed, is similarly expanded profile with Fig. 3.
As shown in figure 5, the bearing 37 configured in first embodiment in the inside of roller 34 is removed in second embodiment, and
And intermediary is inserted into bearing 137 between support portion 35 and core material 136.
Specifically, in the roller 134 of Yu Jiagong assisted tool 131, core material 136 is formed in such a way that both ends are outstanding.In addition, the
The core material 36 of one embodiment is fixed on support portion 35, but the core material 136 of second embodiment is not fixed on support portion then
35, but it is fixed on inner peripheral portion 138.
In addition, between the both ends of core material 136 outstanding and the appropriate location of support portion 35, inserted with bearing 137.Such as
This, bearing 137 configures the radial outside in core material 136.In addition, bearing 137 is by core material 136, inner peripheral portion 138 and peripheral part 139,
It is rotatably supported at support portion 35.
Whereby, in the processing assisted tool 131 of second embodiment, the diameter of roller 134 can be formed as keeping bearing in relatively
Composition it is smaller, so may achieve processing assisted tool 131 miniaturization.
In addition, example of the core material 136 with inner peripheral portion 138 for Different Individual is shown in second embodiment, in above content,
But these may be alternatively formed to one.
In addition, the shape of roller 34,134 is configured to cylindrical body in above embodiment, but not limited to this, as long as outside
Side can contact in cylinder-shaped ceramic 10, then can also be the arbitrary shape such as spherical.
In addition, being kept in above content by vibration suppressing mechanism 30 near the other end 10d of cylinder-shaped ceramic 10
At one, but it can also be kept by vibration suppressing mechanism 30 more than at two.
In addition, shown in example shown in Fig. 1 etc. the rotary shaft B of roller 34 it is parallel with the rotary shaft A of cylinder-shaped ceramic 10 or
Substantially parallel example, but not limited to this, for example, rotary shaft B can be located at the position for intersecting or reversing relative to rotary shaft A
It sets.
Further effect or variation can be exported easily by skilled artisan.Therefore, of the invention
Wider form is not limited to indicated above and explanation specific detailed content and representative embodiments.Therefore,
Under the spirit or scope for not departing from the recapitulative concept of the invention as defined in claims and the equivalents, it can carry out
Various changes.
Claims (11)
1. a kind of processing assisted tool is the processing assisted tool of cylinder-shaped ceramic,
Have the rotary body rotated with the rotation of the cylinder-shaped ceramic,
The length of the rotary axis direction of the rotary body is 15mm or more,
And the material of at least peripheral part of the rotary body is that Rockwell hardness 80 or more 125 resin or rubber below are hard
Spend 80 or more 95 rubber below.
2. processing assisted tool according to claim 1, wherein the resin contains polyamide, ABS resin, poly- carbonic acid
One or more of ester resin, acrylic resin.
3. processing assisted tool according to claim 1, wherein the rubber contains chloroprene rubber, nitrile rubber, natural
One or more of rubber, isoprene rubber, butadiene rubber, urethane rubber.
4. processing assisted tool according to claim 1, wherein the outside of the core material in the rotary body, configuration rotation support
The bearing of the rotary body.
5. processing assisted tool according to claim 1, wherein the cylinder-shaped ceramic rotated in present dynasty's circumferential direction it is interior
When circumferential surface is processed, the rotary body is connected to the outer peripheral surface of the cylinder-shaped ceramic to keep the cylinder-shaped ceramic.
6. a kind of manufacturing method of sputtered target material, it includes:
Using processing assisted tool according to any one of claim 1 to 5, to rotate the guarantor for keeping the cylinder-shaped ceramic
Hold step；And
The processing that the inner peripheral surface of the cylinder-shaped ceramic for keeping and rotating by the processing assisted tool is processed
Step.
7. the manufacturing method of sputtered target material according to claim 6, wherein the overall length of the cylinder-shaped ceramic be 500mm with
On.
8. the manufacturing method of sputtered target material according to claim 6, wherein the overall length of the cylinder-shaped ceramic be 750mm with
On.
9. the manufacturing method of sputtered target material according to claim 6, wherein the overall length of the cylinder-shaped ceramic is 1000mm
More than.
10. the manufacturing method of sputtered target material according to claim 6, wherein the cylinder-shaped ceramic contain In, Zn, Al,
One or more of Ga, Zr, Ti, Sn, Mg and Si.
11. the manufacturing method of sputtered target material according to claim 6, wherein the holding step passes through multiple rotations
Body keeps the cylinder-shaped ceramic.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015073454A JP6585913B2 (en) | 2015-03-31 | 2015-03-31 | Processing jig and method of manufacturing sputtering target material |
| JP2015-073454 | 2015-03-31 | ||
| PCT/JP2015/085687 WO2016157648A1 (en) | 2015-03-31 | 2015-12-21 | Machining jig and method for manufacturing sputtering target member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107208258A CN107208258A (en) | 2017-09-26 |
| CN107208258B true CN107208258B (en) | 2019-06-28 |
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| CN201580074869.3A Active CN107208258B (en) | 2015-03-31 | 2015-12-21 | Process the manufacturing method of assisted tool and sputtered target material |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6585913B2 (en) |
| KR (1) | KR102417294B1 (en) |
| CN (1) | CN107208258B (en) |
| TW (1) | TWI720962B (en) |
| WO (1) | WO2016157648A1 (en) |
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| JP7165071B2 (en) * | 2019-02-19 | 2022-11-02 | トーヨーエイテック株式会社 | Honing machine |
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|---|---|---|---|---|
| JPS58154029U (en) * | 1982-04-06 | 1983-10-14 | 豊田工機株式会社 | 3-point steady rest device |
| TW200540289A (en) * | 2004-03-05 | 2005-12-16 | Tosoh Corp | Cylindrical sputtering target, ceramic sintered body, and process for producing sintered body |
| JP2008023624A (en) * | 2006-07-19 | 2008-02-07 | Ntn Corp | Workpiece support device and machine structure worked thereby |
| CN101688293A (en) * | 2007-07-02 | 2010-03-31 | 东曹株式会社 | Tubular sputtering target |
| JP2014148026A (en) * | 2013-02-04 | 2014-08-21 | Okamoto Machine Tool Works Ltd | Workpiece vibration suppression device for cylindrical grinding apparatus |
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|---|---|---|---|---|
| JPS6017949U (en) * | 1983-02-21 | 1985-02-06 | 豊田工機株式会社 | Jig for processing the inner surface of thin-walled sleeves |
| KR20010097296A (en) * | 2000-04-21 | 2001-11-08 | 임성순 | Material supporting construction for centerless grinder |
| JP3960587B2 (en) * | 2001-12-03 | 2007-08-15 | 株式会社日進製作所 | Honing processing method, honing machine cutting device and honing machine |
| JP3866613B2 (en) * | 2002-05-14 | 2007-01-10 | 有限会社ユズリハ製作所 | Fixing roll processing equipment |
| JP4961672B2 (en) * | 2004-03-05 | 2012-06-27 | 東ソー株式会社 | Cylindrical sputtering target, ceramic sintered body, and manufacturing method thereof |
| US20050279630A1 (en) * | 2004-06-16 | 2005-12-22 | Dynamic Machine Works, Inc. | Tubular sputtering targets and methods of flowforming the same |
| US10150240B2 (en) * | 2013-03-27 | 2018-12-11 | Toray Industries, Inc | Sweeper roller, plastic film manufacturing device that uses same, and manufacturing method |
-
2015
- 2015-03-31 JP JP2015073454A patent/JP6585913B2/en active Active
- 2015-12-21 CN CN201580074869.3A patent/CN107208258B/en active Active
- 2015-12-21 WO PCT/JP2015/085687 patent/WO2016157648A1/en active Application Filing
- 2015-12-21 KR KR1020177022816A patent/KR102417294B1/en active IP Right Grant
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2016
- 2016-01-04 TW TW105100039A patent/TWI720962B/en active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58154029U (en) * | 1982-04-06 | 1983-10-14 | 豊田工機株式会社 | 3-point steady rest device |
| TW200540289A (en) * | 2004-03-05 | 2005-12-16 | Tosoh Corp | Cylindrical sputtering target, ceramic sintered body, and process for producing sintered body |
| JP2008023624A (en) * | 2006-07-19 | 2008-02-07 | Ntn Corp | Workpiece support device and machine structure worked thereby |
| CN101688293A (en) * | 2007-07-02 | 2010-03-31 | 东曹株式会社 | Tubular sputtering target |
| JP2014148026A (en) * | 2013-02-04 | 2014-08-21 | Okamoto Machine Tool Works Ltd | Workpiece vibration suppression device for cylindrical grinding apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201634179A (en) | 2016-10-01 |
| CN107208258A (en) | 2017-09-26 |
| TWI720962B (en) | 2021-03-11 |
| KR102417294B1 (en) | 2022-07-05 |
| KR20170133320A (en) | 2017-12-05 |
| WO2016157648A1 (en) | 2016-10-06 |
| JP2016194096A (en) | 2016-11-17 |
| JP6585913B2 (en) | 2019-10-02 |
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