CN107208258A - Process the manufacture method of assisted tool and sputtered target material - Google Patents
Process the manufacture method of assisted tool and sputtered target material Download PDFInfo
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- CN107208258A CN107208258A CN201580074869.3A CN201580074869A CN107208258A CN 107208258 A CN107208258 A CN 107208258A CN 201580074869 A CN201580074869 A CN 201580074869A CN 107208258 A CN107208258 A CN 107208258A
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- Prior art keywords
- cylinder
- shaped ceramic
- processing
- rubber
- assisted tool
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Abstract
Problem of the present invention is the generation for suppressing periphery surface damage or the rupture of cylinder-shaped ceramic.In order to solve the problem, a kind of processing assisted tool (31,131) of embodiment possesses rotary body (34,134).Rotary body (34,134) rotates with the rotation of cylinder-shaped ceramic (10).The length of the rotation direction of principal axis of rotary body (34,134) is more than 15mm, and the material of at least peripheral part (39,139) of rotary body (34,134), is resin or rubber hardness rubber less than more than 80 95 of the Rockwell hardness below more than 80 125.
Description
Technical field
Disclosed embodiment is related to the manufacture method of processing assisted tool and sputtered target material.
Background technology
In the past, it is known, there is a kind of inner side in cylindrical shape target to configure magnetic field generation device, and make from inner side
The target is cooled down, and is rotated while sputter is carried out, whereby in the sputtering unit that film is formed on substrate.
Above-mentioned cylindrical shape target, for example, be ground processing to the cylinder-shaped ceramic as sintered body and manufacture.It is specific and
Speech, such as while rotating cylinder-shaped ceramic, while grinding the size of inner peripheral surface or outer peripheral face, adjustment internal diameter or external diameter with grinding stone
And manufacture cylindrical shape target.
It is above-mentioned in the prior art, such as when being ground processing to the inner peripheral surface of cylinder-shaped ceramic, the one of cylinder-shaped ceramic
Side is kept and rotated by rotating mechanism.On the other hand, the another side of cylinder-shaped ceramic, the outer peripheral face is auxiliary by processing
Help tool rotatably to keep, suppress whereby because of the vibration of the cylinder-shaped ceramic produced by rotation, and lift grinding precision and (for example join
Examine patent document 1).
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2014-148026 publications.
The content of the invention
[the invention problem to be solved]
However, in above-mentioned processing assisted tool, from the viewpoint of the generation of damage or rupture for suppressing cylinder-shaped ceramic, still
There is the space further improved.
That is, because cylinder-shaped ceramic is the relatively low and crisp material of mechanical strength, so auxiliary to process as above
When helping tool holding outer peripheral face, because of the contact with processing assisted tool, the doubt in the deeper damage of outer peripheral face generation or rupture is had.
So produce the cylinder-shaped ceramic of damage or rupture, it is impossible to sputtered target material is used as, so having causes sputter target
The problem of yield of timber-used cylinder-shaped ceramic is reduced.
In view of said circumstances and create a kind of specific implementation form, its object is to provide one kind can suppress cylindrical shape pottery
The processing assisted tool and the manufacture method of sputtered target material of the generation of damage or the rupture of porcelain.
[being used to the means to solve the problem]
A kind of processing assisted tool of embodiment possesses the rotary body rotated with the rotation of cylinder-shaped ceramic.This
Outside, the length of the rotation direction of principal axis of the rotary body is more than 15mm, and the material of at least peripheral part of the rotary body is
Resin or rubber hardness rubber less than more than 80 95 of the Rockwell hardness (RockwellHardness) below more than 80 125.
[The effect of invention]
According to a kind of embodiment, the generation of damage or the rupture of cylinder-shaped ceramic can be suppressed.
Brief description of the drawings
Fig. 1 is the profile of the configuration example for the processing unit (plant) for showing the processing assisted tool for possessing first embodiment.
Fig. 2 is that profile when near the processing assisted tool shown in Fig. 1 is watched from the length direction side of cylinder-shaped ceramic.
Fig. 3 is the expand profile for showing the processing assisted tool shown in Fig. 1.
Fig. 4 is the flow chart for the process step for showing manufacture sputtered target material.
Fig. 5 is the expand profile for the processing assisted tool for showing second embodiment.
Primary clustering symbol description
1 processing unit (plant)
10 cylinder-shaped ceramics
20 rotating mechanisms
30 vibration suppressing mechanisms
31st, 131 processing assisted tool
34th, 134 roller
35 supporting parts
36th, 136 core
37th, 137 bearing
38th, 138 inner peripheral portion
39th, 139 peripheral part
40 grinding stones.
Embodiment
Describe the manufacturer of the processing assisted tool and sputtered target material disclosed in present application in detail below with reference to appended drawings
Method.In addition, the present invention is not limited to embodiment as shown below.
(first embodiment)
Fig. 1 is the profile of the configuration example for the processing unit (plant) for showing the processing assisted tool for possessing first embodiment.In addition,
Fig. 2 is that profile when near the processing assisted tool shown in Fig. 1 is watched from the length direction side of cylinder-shaped ceramic.
In addition, for correct, Fig. 1 is profile when showing the I-I line cutting off processing devices with Fig. 2.In addition, in Fig. 2,
In order to be readily understood by description, provide mutually orthogonal X-direction, Y direction and Z-direction, and using Z axis positive direction as
The three-dimensional orthogonal coordinate system in direction is illustrated vertically upward.
In addition, in Fig. 1, Fig. 2 and Fig. 3, Fig. 5 described later, only showing the inscape needed for explanation, one being omitted sometimes
As inscape record.In addition, Fig. 1, Fig. 2 and Fig. 3, Fig. 5 are schematic diagram.
Processing unit (plant) 1 shown in Fig. 1 is the device processed the cylinder-shaped ceramic 10 of strip and manufacture sputtered target material.
In addition, the target manufactured using processing unit (plant) 1, is installed in not shown sputtering unit in figure, to enter to be about to film to be formed at
Sputter in figure on not shown substrate.
As shown in Figure 1 and Figure 2, cylinder-shaped ceramic 10 is formed as the tubular with hollow bulb 11.In addition, cylinder-shaped ceramic 10
To be made via granulation step, forming step and sintering step.
Specifically, the slurries containing such as ceramic material powder and organic additive are made in granulation step, and are led to
Cross and are carried out by spray drying treatment and granule is made for the slurries.In forming step, for example, CIP (Cold are carried out to granule
Isostatic Pressing：Cold isostatic pressing) shape and make columnar formed body.Then in sintering step, in burning
Sintered shaped body in freezing of a furnace and make sintered body.
The sintered body so made turns into cylinder-shaped ceramic 10, and the cylinder-shaped ceramic 10 is by processing unit (plant) 1 while rotating
While being ground processing to inner peripheral surface 10a.In addition, being not limited to as the preparation method of the cylinder-shaped ceramic 10 of sintered body
Above-mentioned person, can be any means.
That is, although for example in above-mentioned forming step being shaped using CIP, it is not limited to this, it is possible to use extruding
Other shaping gimmicks such as shaping, injection molding or casting forming.
In addition, the ceramic raw material of cylinder-shaped ceramic 10, can exemplify IGZO (In2O3-Ga2O3-ZnO)、ITO(In2O3-
SnO2) and AZO (Al2O3- ZnO) etc., but it is not limited to these.That is, cylinder-shaped ceramic 10, for example can containing In, Zn, Al,
One or more of Ga, Zr, Ti, Sn, Mg and Si.
The cylinder-shaped ceramic 10 so made, because total length is longer, puts on processing assisted tool and cylinder-shaped ceramic 10
The power of contact portion is bigger, is more preferably more than 750mm so ought total length be for example more than 500mm, especially preferably 1000mm
During the above, aftermentioned processing assisted tool can be suitably applicable.But 500mm cylinder-shaped ceramic 10 also can not be reached to total length and is used and is added
Work assisted tool.
As shown in figure 1, processing unit (plant) 1 possesses rotating mechanism 20 and vibration suppressing mechanism 30.Rotating mechanism 20 keeps cylinder
One end 10c of shape ceramics 10, and rotate cylinder-shaped ceramic 10.
Specifically, rotating mechanism 20 possesses body 21, rotating part 22 and retaining hook 23.In body 21, hold
Receive the driving source (not shown) of the motor that makes the rotation driving of rotating part 22 etc..
Rotating part 22 is connected to the output shaft of above-mentioned driving source, and when revolving force is transmitted from driving source, around rotation
Axle A rotates.Retaining hook 23 is connected to rotating part 22, and is configured with multiple one end 10c in cylinder-shaped ceramic 10 outer circumferential side,
To keep cylinder-shaped ceramic 10.
Specifically, for example retaining hook 23 be 3 (1 is seen in Fig. 1 less), and centered on rotary shaft A mutually across
120 degree of interval and configure.In addition, 3 retaining hooks 23, being respectively structured as when X-direction is watched can be in cylinder-shaped ceramic 10
Radially independently move.
Thus, for example when with retaining hook 23 to keep cylinder-shaped ceramic 10, first when X-direction is watched, by 3 guarantors
The space that tenaculum 23 is kept is redefined for bigger compared with the external diameter of cylinder-shaped ceramic 10.Then by one end of cylinder-shaped ceramic 10
10c is installed in behind the space kept by 3 retaining hooks 23,3 retaining hooks 23 is moved respectively toward radially inner side.
Retaining hook 23 is then connected to the outer peripheral face 10b of cylinder-shaped ceramic 10 with both constant-pressures, and makes cylinder-shaped ceramic
10 one end 10c is kept by 3 retaining hooks 23.Whereby, rotating mechanism 20 can make the cylindrical shape pottery kept by retaining hook 23
Porcelain 10, rotates along with the rotation of rotating part 22 around rotary shaft A.
In addition, the rotary shaft of cylinder-shaped ceramic 10, substantially the rotary shaft A with rotating mechanism 20 is in coaxial.Therefore, Fig. 1 etc.
In, for the simplification of diagram, the rotary shaft of cylinder-shaped ceramic 10 is also illustrated as " rotary shaft A ".In addition, following sometimes with cylinder
The rotary shaft A of shape ceramics 10 meaning uses " rotary shaft A ".
In addition, in above-mentioned, the retaining hook 23 of rotating mechanism 20 is set to 3, but number is not limited to this.In addition, above-mentioned
Cylinder-shaped ceramic 10 is kept in rotating mechanism 20 with retaining hook 23, but this is only to illustrate, and is not limited to this.For example, rotation
Mechanism 20, which can also possess, is formed as the maintaining part of ring-type to replace retaining hook 23, and one end 10c of cylinder-shaped ceramic 10 is inserted
The maintaining part etc. is fixed on, is constituted to keep cylinder-shaped ceramic 10 with other.
Vibration suppressing mechanism 30 is rotatably kept near the other end 10d of cylinder-shaped ceramic 10, and is suppressed because of rotation institute
The vibration of the cylinder-shaped ceramic 10 of generation.The rotary shaft A of the cylinder-shaped ceramic 10 in rotation can be made to reach stabilization whereby, so can
Lift grinding precision during aftermentioned attrition process.
Specifically, vibration suppressing mechanism 30 possesses not shown body and processing assisted tool 31 in figure.Processing is auxiliary
Help tool 31 to be arranged on body, and rotatably kept near the other end 10d of cylinder-shaped ceramic 10 from outer peripheral face 10b sides.
Cylinder-shaped ceramic 10, is the relatively low and crisp material of mechanical strength.Thus, for example processing assisted tool 31 in
When the part that cylinder-shaped ceramic 10 is contacted is the metal of stainless steel etc., because of the contact with processing assisted tool 31, have in periphery
The deeper damage of face 10b generations or the doubt of rupture.
Therefore, the processing assisted tool 31 of present embodiment is can suppress the generation of damage or the rupture of cylinder-shaped ceramic 10
Mode is constituted.Following more detailed description processes the composition of assisted tool 31.
Fig. 3 is the expand profile for showing the processing assisted tool 31 shown in Fig. 1.As shown in Fig. 2 etc., processing assisted tool 31 has
Standby multiple rollers 34 and the supporting part 35 for supporting multiple rollers 34 respectively.In addition, Fig. 1 is into Fig. 3, for the simplification of diagram, with void
Intend line to show supporting part 35.
Roller 34 is formed as cylindric as shown in Figure 1 to Figure 3, for example.In addition, roller 34 is one of rotary body.
Multiple rollers 34 configure the outer circumferential side near the other end 10d of cylinder-shaped ceramic 10.For example, roller 34 is 3 (Fig. 1
In see 1 less), and mutually configured centered on the rotary shaft A of cylinder-shaped ceramic 10 across 120 degree of interval.In addition, on
Configure roller 34 in stating with (such as 120 degree of intervals) at equal intervals, but this is only to illustrate, and is not limited to this, multiple rollers 34 that
This interval can arbitrarily be set.
In addition, above-mentioned multiple rollers 34, be connected to respectively the cylinder-shaped ceramic 10 rotated in the circumferential direction outer peripheral face 10b and
Set, therefore be configured to follow the rotation of cylinder-shaped ceramic 10, rotated around rotary shaft B.
Specifically, as Fig. 2 and Fig. 3 are displayed the details of, roller 34 possesses core 36, bearing 37, inner peripheral portion 38 and outer
All portions 39.
Core 36, for example formed as cylindric, and is fixed on the appropriate location of supporting part 35.In addition, core 36, for example
The metal materials such as iron, stainless steel, titanium or titanium alloy, or vulcanie, resin can be used, but is not limited to these.
Inner peripheral portion 38, for example formed as cylindric, and is arranged on the position for surrounding core 36 when rotary shaft B directions are watched
Put.In addition, inserting bearing 37 between core 36 and inner peripheral portion 38.In other words, the footpath that bearing 37 is configured in core 36 is outside
Side and for inner peripheral portion 38 radially inner side.Therefore, inner peripheral portion 38 and peripheral part 39 are rotatably supported at core 36 by bearing 37.
In addition, in example shown in Fig. 1, Fig. 3 etc., bearing 37 is arranged respectively near the two ends of core 36, but not limited
Due to this, the configuration place of bearing 37 or number can arbitrarily be set.
Inner peripheral portion 38, the metal material such as usable iron, stainless steel, titanium or titanium alloy, or vulcanie, resin,
But it is not limited to these.
Formed in the way of the face of radial outside of the peripheral part 39 to be coated to inner peripheral portion 38, and be formed as cylindric.In addition,
Peripheral part 39 is configured in the way of the outer peripheral face 10b for being connected to cylinder-shaped ceramic 10.
Then, the material of the peripheral part 39 of cylinder-shaped ceramic 10 is connected to, is resin or rubber.In addition, above-mentioned resin can
Using the resin material containing one or more of polyamide, ABS resin, polycarbonate resin, acrylic resin etc., but
It is not limited to these.In addition, above-mentioned rubber, can be used and contain chloroprene rubber, nitrile rubber, natural rubber, isoprene
The elastomeric material of one or more of rubber, butadiene rubber, urethane rubber etc., but it is not limited to these.
In this way, in present embodiment, due to the material of peripheral part 39 is configured into resin or rubber, so with assuming periphery
Portion 39 is that metal situation is compared, and the load that cylinder-shaped ceramic 10 is acted on from roller 34 can be reduced when contact.Whereby, even if
For example make to rotate as the cylinder-shaped ceramic 10 of fragile material to process during inner peripheral surface 10a, can also suppress because of the contact with roller 34
And the outer peripheral face 10b of cylinder-shaped ceramic 10 is produced damage or is ruptured.
Length L1 (referring to Fig. 1), for example, more preferably more than the 15mm in the rotary shaft B directions of the roller 34 of above-mentioned composition, especially
It is preferably more than 30mm, more preferably more than 50mm.That is, in the way of increasing the contact area of roller 34 and cylinder-shaped ceramic 10
To set the total length L1 of roller 34, the face pressure that cylinder-shaped ceramic 10 is acted on from roller 34 can be reduced when contact.Whereby can be effectively
The outer peripheral face 10b for suppressing cylinder-shaped ceramic 10 produces damage or ruptured.
In addition, there is no particular restriction for the length L1 in the rotary shaft B directions of roller 34 upper limit, from the step of using roller 34
It is more preferably below 5000mm from the point of view of the treatability of operation.
In addition, total length L2s of the total length L1 in the rotary shaft B directions of roller 34 relative to the rotary shaft A directions of cylinder-shaped ceramic 10
The ratio of (referring to Fig. 1), is more preferably more than 3%, especially preferably more than 5%.Whereby, it can reduce and make from roller 34 when contact
For the face pressure of cylinder-shaped ceramic 10, therefore it can more effectively suppress the outer peripheral face 10b generations damage or broken of cylinder-shaped ceramic 10
Split.
In addition, when the material of above-mentioned peripheral part 39 is resin, Rockwell hardness (ASTM specifications, D785, R scale) is more preferably
Such as less than more than 80 125, especially preferably less than more than 80 120.In addition, when the material of above-mentioned peripheral part 39 is rubber,
Rubber hardness (JIS specifications, K6253-3：2012) more preferably it is less than more than 80 95, especially preferably less than more than 80 90.
Whereby, compared with assuming peripheral part 39 for metal situation, it can further reduce and be acted on from roller 34 when contact
In the load of cylinder-shaped ceramic 10, and the outer peripheral face 10b that can suppress cylinder-shaped ceramic 10 produces damage or ruptured.In addition, working as
When hardness is higher than above range, the outer peripheral face 10b of cylinder-shaped ceramic 10 produces damage or ruptured sometimes, less than above range
When, it is impossible to suppress vibration, deteriorate machining accuracy sometimes.
In addition, roller 34 is connected to the position of cylinder-shaped ceramic 10, more preferably for example from the circle kept by rotating mechanism 20
One end 10c of tubular ceramics 10 starts, and the 1/2 position C1 (referring to Fig. 1) compared with total length L2 is more located at other end 10d sides.As
Preferred example, the position of roller 34 is since one end 10c of cylinder-shaped ceramic 10, the 2/3 position C2 (references compared with total length L2
Fig. 1) more it is located at other end 10d sides.
Whereby, vibration suppressing mechanism 30 can stably keep cylinder-shaped ceramic 10, and can further suppress cylindrical shape pottery
The vibration of porcelain 10.Furthermore, because the rotary shaft A of the cylinder-shaped ceramic 10 of rotation reaches stabilization, so grinding can be lifted further
Precision.
Supporting part 35 as above supports 3 rollers 34 respectively.3 supporting parts 35 are respectively arranged in vibration suppressing mechanism 30
Not shown body in figure, and be configured to when X-direction is watched can radially independently moving in cylinder-shaped ceramic 10
It is dynamic.
Thus, for example in processing before with supporting part 35 and roller 34 to keep cylinder-shaped ceramic 10 when, first in X-direction see
When seeing, the space kept by 3 rollers 34 is redefined for bigger compared with the external diameter of cylinder-shaped ceramic 10.Then by cylinder-shaped ceramic
It is installed near 10 other end 10d behind the space kept by 3 rollers 34, makes 3 supporting parts 35 and roller 34 respectively toward radially
Medial movement.
Roller 34 is then connected to the outer peripheral face 10b of cylinder-shaped ceramic 10 with both constant-pressures, and makes cylinder-shaped ceramic 10
Other end 10d is rotatably kept by 3 rollers 34.
Processing unit (plant) 1 possesses grinding stone 40 (referring to Fig. 1 and Fig. 2).Grinding stone 40 passes through not shown travel mechanism in figure, one side
Inner peripheral surface 10a will be connected in the hollow bulb 11 of cylinder-shaped ceramic 10 while mobile.That is, cylindrical shape is made pottery in processing unit (plant) 1
The inner peripheral surface 10a of porcelain 10 carries out traversing grinding.In addition, the inner peripheral surface 10a of cylinder-shaped ceramic 10 Ginding process is not limited to
Traversing is ground, any means.
In addition, roller 34 is set to 3 in above-mentioned embodiment, but number is not limited to this.In addition, will in above-mentioned example
Multiple rollers 34 are all formed as identical composition, but are not limited to this, for example, can be formed as part or all of multiple rollers 34
It is different to constitute.
On this point, illustrated with the example shown in Fig. 2.Here, when rotary shaft A directions are watched, will be made pottery compared with cylindrical shape
The center of gravity G of porcelain 10 is more expressed as symbol 34a positioned at 2 rollers of Z axis lower side, the roller table of Z axis upper side will be more located at compared with center of gravity G
It is shown as symbol 34b.
In above-mentioned roller 34a, because of the effect of the weight of cylinder-shaped ceramic 10 itself so that compared to the part contacted with roller 34b,
Load with the roller 34a parts contacted on cylinder-shaped ceramic 10 is higher, easily produces damage or ruptures.
Thus, for example the material of 2 roller 34a only peripheral part 39 can be configured into resin or rubber.In addition, for example may be used
2 roller 34a total length L1 is configured to total length L1 compared with roller 34b longer.
As above, on 2 roller 34a, even if the material of peripheral part 39 is configured into resin or rubber, or increase complete
Long L1, the outer peripheral face 10b that can also suppress cylinder-shaped ceramic 10 produces the situation of damage or rupture.
Referring next to Fig. 4, illustrate the manufacture method of the sputtered target material for processing assisted tool 31 using present embodiment.Fig. 4
It is the flow chart for the process step for showing manufacture sputtered target material.
As shown in figure 4, first with the retaining hook 23 of rotating mechanism 20, one end 10c of cylinder-shaped ceramic 10 is kept, and will circle
Tubular ceramics 10 are installed on rotating mechanism 20 (step S1).
Then by processing the roller 34 of assisted tool 31, the other end 10d (steps of cylinder-shaped ceramic 10 are rotatably kept
S2).In addition, the processing sequence of step S1, S2 is not limited to above-mentioned, for example, it can carry out step S1's after step S2 processing
Processing, or under same opportunity carry out step S1, S2 processing.
Then by rotating mechanism 20, cylinder-shaped ceramic 10 is made to be rotated in circumferential direction and be ground and add to inner peripheral surface 10a
Work (step S3).Each step more than, terminates the inner peripheral surface 10a of a series of cylinder-shaped ceramic 10 processing.
In addition, when sputtered target material is made, the processing beyond above-mentioned steps S1 to S3 can be carried out.Cylindrical shape can for example be made pottery
The outer peripheral face 10b of porcelain 10 is ground the processing of processing.
As noted above, the processing assisted tool 31 of first embodiment possesses to be rotated with the rotation of cylinder-shaped ceramic 10
Roller (rotary body) 34.The length of the rotation direction of principal axis of roller 34 is more than 15mm, and the material of at least peripheral part 39 of roller 34
It is resin or rubber hardness rubber less than more than 80 95 of the Rockwell hardness below more than 80 125.Cylindrical shape can be suppressed whereby
The damage or the generation of rupture of ceramics 10.
In addition, the cylinder-shaped ceramic 10 that the generation for as above damaging or rupturing is suppressed splashes due to can be used to be used as
Target is plated, so in the present embodiment, can also suppress the yield reduction of sputtered target material cylinder-shaped ceramic.
(embodiment)
[embodiment 1]
Allocate and be as the specific surface area (BET specific surface area) measured by BET (Brunauer-Emmett-Teller) method
4m2/ g mass the % of ZnO powder 25.9, BET specific surface area are 7m2/ g In2O3Powder 44.2 mass % and BET compare surface
Product is 10m2/ g Ga2O3The mass % of powder 29.9, ball milling mixing is carried out in pot by zirconia ball, and modulates raw material powder
End.
In the pot, relative to the mass % of material powder 100,0.3 mass % polyvinyl alcohol, 0.4 matter is added respectively
The water of % polybasic carboxylic acid ammonium, 1.0 mass % polyethylene glycol and 50 mass % is measured, ball milling mixing is carried out and modulates pulp
Liquid.
Then the slurries are supplied to spray-drying installation, in atomization revolution 14,000rpm, 200 DEG C of inlet temperature, outlet
It is spray-dried under conditions of 80 DEG C of temperature, modulates granule.
By the granule, strike real while being filled in the internal diameter of the columned SMIS (plug) with external diameter 150mm
220mm (wall thickness 10mm), long 1300mm drum urethane rubber mould, are closed after rubber mold, with
800kgf/cm2Pressure carry out CIP shapings, and make columnar formed body.
The formed body is heated to 1400 DEG C from normal temperature with 300 DEG C/h of programming rate, after being kept for 12 hours, with cooling rate
50 DEG C/h is cooled down, and the sintering of body is formed whereby, and produces sintered body.Then the sintering made by the above method will be passed through
Body, cuts off and obtains IGZO cylinder-shaped ceramic 10 in the way of total length L2 is turned into 500mm.
Then after the attrition process that outer peripheral face 10b is carried out to above-mentioned cylinder-shaped ceramic 10, the material with peripheral part 39 is used
Matter is the processing assisted tool 31 that polyamide, total length L1 are the roller 34 that 15mm, Rockwell hardness are 120, carries out inner peripheral surface 10a's
Attrition process.In the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing, the generation unconfirmed for arriving rupture or cracking, after processing
The depth of damage is 0.4mm.
In addition, in this specification, when the depth of the damage after processing does not reach 0.5mm, being judged to processing well and full
On the other hand foot, when being more than 0.5mm, is determined as that processing is bad and does not meet matter as the quality criteria of cylinder-shaped ceramic 10
Measure benchmark.
[embodiment 2]
By by the sintered body made by method same as Example 1, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 that polyamide, total length L1 are the roller 34 that 60mm, Rockwell hardness are 120, is carried out
Inner peripheral surface 10a attrition process.In the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing, the production unconfirmed for arriving rupture or cracking
Raw, the depth of the damage after processing is 0.2mm.
[embodiment 3]
By by the sintered body made by method same as Example 1, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 that acrylic resin, total length L1 are the roller 34 that 60mm, Rockwell hardness are 81, carry out in
Side face 10a attrition process.It is unconfirmed to rupture or the generation of cracking in the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing,
The depth of damage after processing is 0.3mm.
[embodiment 4]
Allotment is 5m as the specific surface area (BET specific surface area) measured by BET method2/ g SnO2The mass % of powder 10 and
BET specific surface area is 5m2/ g In2O3The mass % of powder 90, ball milling mixing is carried out in pot by zirconia ball, and is modulated
Material powder.
In the pot, relative to the mass % of material powder 100,0.3 mass % polyvinyl alcohol, 0.2 matter is added respectively
The water of % polybasic carboxylic acid ammonium, 0.5 mass % polyethylene glycol and 50 mass % is measured, ball milling mixing is carried out and modulates pulp
Liquid.
After this spray drying to shape untill the step of using step same as Example 1.With programming rate
The formed body of gained is heated to 1600 DEG C by 300 DEG C/h from normal temperature, after being kept for 12 hours, is cooled down, borrowed with 50 DEG C/h of cooling rate
The sintering of body is formed in this, and produces sintered body.By the sintered body by make total length L2 turn into 1000mm in the way of cut off and
Obtain ITO cylinder-shaped ceramic 10.
Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10 as obtained by the above method, tool is used
The material for having peripheral part 39 is the processing assisted tool 31 that polyamide, total length L1 are the roller 34 that 60mm, Rockwell hardness are 120,
Carry out inner peripheral surface 10a attrition process.In the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing, unconfirmed arrive ruptures or is cracked
Generation, the depth of the damage after processing is 0.1mm.
[embodiment 5]
By by the sintered body made by method same as Example 4, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 that polycarbonate resin, total length L1 are the roller 34 that 60mm, Rockwell hardness are 125, is entered
Row inner peripheral surface 10a attrition process.It is unconfirmed to rupture or cracking in the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing
Produce, the depth of the damage after processing is 0.2mm.
[embodiment 6]
By by the sintered body made by method same as Example 1, cut off in the way of total length L2 is turned into 500mm
And obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with periphery
The material in portion 39 is the processing assisted tool 31 that chloroprene rubber, total length L1 are the roller 34 that 15mm, rubber hardness are 90, carry out in
Side face 10a attrition process.It is unconfirmed to rupture or the generation of cracking in the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing,
The depth of damage after processing is 0.4mm.
[embodiment 7]
By by the sintered body made by method same as Example 1, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 that chloroprene rubber, total length L1 are the roller 34 that 60mm, rubber hardness are 90, is carried out
Inner peripheral surface 10a attrition process.In the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing, the production unconfirmed for arriving rupture or cracking
Raw, the depth of the damage after processing is 0.2mm.
[embodiment 8]
By by the sintered body made by method same as Example 4, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 that butadiene rubber, total length L1 are the roller 34 that 60mm, rubber hardness are 82, carry out in
Side face 10a attrition process.It is unconfirmed to rupture or the generation of cracking in the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing,
The depth of damage after processing is 0.2mm.
[comparative example 1]
By by the sintered body made by method same as Example 1, cut off in the way of total length L2 is turned into 500mm
And obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with periphery
The material in portion 39 is the processing assisted tool 31 for the roller 34 that SUS304, total length L1 are 15mm, carries out inner peripheral surface 10a attrition process.
In addition, SUS304 is extremely hard compared with resin used in the present invention or rubber.In the outer peripheral face of the cylinder-shaped ceramic 10 after processing
10b, though unconfirmed to the generation for rupturing or being cracked, the depth of the damage after processing is 0.9mm.
[comparative example 2]
By by the sintered body made by method same as Example 1, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 for the roller 34 that SUS304, total length L1 are 10mm, and the grinding for carrying out inner peripheral surface 10a adds
Work.In comparative example 2, the outer peripheral face 10b of cylinder-shaped ceramic 10 produces rupture in processing, it is impossible to be processed.It can not thus survey
The depth of damage after fixed processing.
[comparative example 3]
By by the sintered body made by method same as Example 4, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 for the roller 34 that SUS304, total length L1 are 10mm, and the grinding for carrying out inner peripheral surface 10a adds
Work.In the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing, though unconfirmed arrive the generation for rupturing or being cracked, the damage after processing
The depth of wound is 0.6mm.
[comparative example 4]
By by the sintered body made by method same as Example 1, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 for the roller 34 that SUS304, total length L1 are 60mm, and the grinding for carrying out inner peripheral surface 10a adds
Work.In the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing, though unconfirmed arrive the generation for rupturing or being cracked, the damage after processing
The depth of wound is 0.9mm.
[comparative example 5]
By by the sintered body made by method same as Example 1, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 that polyamide, total length L1 are the roller 34 that 10mm, Rockwell hardness are 120, is carried out
Inner peripheral surface 10a attrition process.In the outer peripheral face 10b of the cylinder-shaped ceramic 10 after processing, though unconfirmed arrive what is ruptured or be cracked
Produce, but the depth of the damage after processing is 0.6mm.
[comparative example 6]
By by the sintered body made by method same as Example 1, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is the processing assisted tool 31 that fluororesin, total length L1 are the roller 34 that 60mm, Rockwell hardness are 50, carries out inner peripheral surface
10a attrition process.The outer peripheral face 10b of cylinder-shaped ceramic 10 in processing, though not producing rupture or being cracked, can not suppress
Vibration, thus can not be processed.
[comparative example 7]
By by the sintered body made by method same as Example 1, cut in the way of total length L2 is turned into 1000mm
Break and obtain cylinder-shaped ceramic 10.Then after the attrition process that outer peripheral face 10b is carried out to the cylinder-shaped ceramic 10, using with outer
The material in all portions 39 is that chloroprene rubber, total length L1 are that 60mm, rubber hardness are 60 (more soft compared with embodiment institute user
Chloroprene rubber) roller 34 processing assisted tool 31, carry out inner peripheral surface 10a attrition process.Cylindrical shape pottery in processing
The outer peripheral face 10b of porcelain 10, though not producing rupture or being cracked, can not suppress vibration, thus can not be processed.
In embodiment and comparative example, in the outer peripheral face 10b that cylinder-shaped ceramic 10 is formed at after inner peripheral surface 10a attrition process
Damage depth be after inner peripheral surface 10a attrition process, grind cylinder-shaped ceramic 10 outer peripheral face 10b, and so that damage
Grinding depth needed for untill disappearance is estimated.In addition, in above-described embodiment, comparative example, only exemplifying the effect of the present invention
Really especially pronounced IGZO and ITO cylindrical shape sputtered target material.However, cylindrical shape of the present invention not only to IGZO and ITO is splashed
Plating target reaches effect.
[table 1]
(second embodiment)
Illustrate the processing assisted tool 131 of second embodiment referring next to Fig. 5.Fig. 5 shows second embodiment
Assisted tool 131 is processed, expand profile is similarly with Fig. 3.
As shown in figure 5, the bearing 37 configured in first embodiment in the inside of roller 34 is removed in second embodiment, and
And intermediary inserts bearing 137 between supporting part 35 and core 136.
Specifically, in the roller 134 of processing assisted tool 131, core 136 is formed in the way of two ends are protruded.In addition, the
The core 36 of one embodiment is fixed on supporting part 35, but the core 136 of second embodiment is not fixed on supporting part then
35, and it is integrally fixed at inner peripheral portion 138.
In addition, between the two ends of prominent core 136 and the appropriate location of supporting part 35, inserted with bearing 137.Such as
This, bearing 137 configures the radial outside in core 136.In addition, bearing 137 is by core 136, inner peripheral portion 138 and peripheral part 139,
It is rotatably supported at supporting part 35.
Whereby, in the processing assisted tool 131 of second embodiment, the diameter of roller 134 can be formed as interior and keeps bearing
Composition it is smaller, so may achieve processing assisted tool 131 miniaturization.
In addition, core 136 and the example that inner peripheral portion 138 is Different Individual are shown in second embodiment, in the above,
But these may be alternatively formed to one.
In addition, the shape of roller 34,134 is configured into cylinder in above-mentioned embodiment, but this is not limited to, as long as outside
The week side of boss can contact in cylinder-shaped ceramic 10, then be alternatively the arbitrary shape such as spherical.
In addition, being kept in the above by vibration suppressing mechanism 30 near the other end 10d of cylinder-shaped ceramic 10
At one, but it can also be kept by vibration suppressing mechanism 30 more than at two.
In addition, shown in example shown in Fig. 1 etc. roller 34 rotary shaft B it is parallel with the rotary shaft A of cylinder-shaped ceramic 10 or
Almost parallel example, but this is not limited to, for example, rotary shaft B can be located at the position for intersecting or reversing relative to rotary shaft A
Put.
Further effect or variation, easily can be exported by skilled artisan.Therefore, it is of the invention
Wider form, is not limited to indicated above and explanation specific detailed content and representative embodiments.Therefore,
In the case where not departing from the spirit or scope of recapitulative inventive concept as defined in claims and the equivalents, it can carry out
A variety of changes.
Claims (11)
1. one kind processing assisted tool, is the processing assisted tool of cylinder-shaped ceramic,
Possess the rotary body rotated with the rotation of the cylinder-shaped ceramic,
The length of the rotation direction of principal axis of the rotary body is more than 15mm,
And the material of at least peripheral part of the rotary body, is that resin or rubber of the Rockwell hardness below more than 80 125 are hard
The rubber of degree less than more than 80 95.
2. processing assisted tool according to claim 1, wherein the resin contains polyamide, ABS resin, poly- carbonic acid
One or more of ester resin, acrylic resin.
3. processing assisted tool according to claim 1, wherein the rubber contain chloroprene rubber, it is nitrile rubber, natural
One or more of rubber, isoprene rubber, butadiene rubber, urethane rubber.
4. processing assisted tool according to any one of claim 1 to 3, wherein the outside of the core in the rotary body,
Configuration can make the bearing of the rotary body rotation.
5. processing assisted tool according to any one of claim 1 to 4, wherein, the circle rotated in present dynasty's circumferential direction
When the inner peripheral surface of tubular ceramics is processed, the rotary body is connected to the outer peripheral face of the cylinder-shaped ceramic to keep the cylinder
Shape ceramics.
6. a kind of manufacture method of sputtered target material, it is included：
Using processing assisted tool according to any one of claim 1 to 5, the cylinder-shaped ceramic is rotatably kept
Keep step；And
The processing that the inner peripheral surface of the cylinder-shaped ceramic for keeping and rotating by the processing assisted tool is processed
Step.
7. the manufacture method of sputtered target material according to claim 6, wherein the total length of the cylinder-shaped ceramic be 500mm with
On.
8. the manufacture method of sputtered target material according to claim 6, wherein the total length of the cylinder-shaped ceramic be 750mm with
On.
9. the manufacture method of sputtered target material according to claim 6, wherein the total length of the cylinder-shaped ceramic is 1000mm
More than.
10. the manufacture method of the sputtered target material according to any one of claim 6 to 9, wherein the cylinder-shaped ceramic contains
There are one or more of In, Zn, Al, Ga, Zr, Ti, Sn, Mg and Si.
11. the manufacture method of the sputtered target material according to any one of claim 6 to 10, wherein the holding step passes through
Multiple rotary bodies keep the cylinder-shaped ceramic.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015073454A JP6585913B2 (en) | 2015-03-31 | 2015-03-31 | Processing jig and method of manufacturing sputtering target material |
| JP2015-073454 | 2015-03-31 | ||
| PCT/JP2015/085687 WO2016157648A1 (en) | 2015-03-31 | 2015-12-21 | Machining jig and method for manufacturing sputtering target member |
Publications (2)
| Publication Number | Publication Date |
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| CN107208258A true CN107208258A (en) | 2017-09-26 |
| CN107208258B CN107208258B (en) | 2019-06-28 |
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| CN201580074869.3A Active CN107208258B (en) | 2015-03-31 | 2015-12-21 | Process the manufacturing method of assisted tool and sputtered target material |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6585913B2 (en) |
| KR (1) | KR102417294B1 (en) |
| CN (1) | CN107208258B (en) |
| TW (1) | TWI720962B (en) |
| WO (1) | WO2016157648A1 (en) |
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| JP7165071B2 (en) * | 2019-02-19 | 2022-11-02 | トーヨーエイテック株式会社 | Honing machine |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58154029U (en) * | 1982-04-06 | 1983-10-14 | 豊田工機株式会社 | 3-point steady rest device |
| TW200540289A (en) * | 2004-03-05 | 2005-12-16 | Tosoh Corp | Cylindrical sputtering target, ceramic sintered body, and process for producing sintered body |
| US20050279630A1 (en) * | 2004-06-16 | 2005-12-22 | Dynamic Machine Works, Inc. | Tubular sputtering targets and methods of flowforming the same |
| JP2008023624A (en) * | 2006-07-19 | 2008-02-07 | Ntn Corp | Workpiece support device and machine structure worked thereby |
| CN101688293A (en) * | 2007-07-02 | 2010-03-31 | 东曹株式会社 | Tubular sputtering target |
| JP2014148026A (en) * | 2013-02-04 | 2014-08-21 | Okamoto Machine Tool Works Ltd | Workpiece vibration suppression device for cylindrical grinding apparatus |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6017949U (en) * | 1983-02-21 | 1985-02-06 | 豊田工機株式会社 | Jig for processing the inner surface of thin-walled sleeves |
| KR20010097296A (en) * | 2000-04-21 | 2001-11-08 | 임성순 | Material supporting construction for centerless grinder |
| JP3960587B2 (en) * | 2001-12-03 | 2007-08-15 | 株式会社日進製作所 | Honing processing method, honing machine cutting device and honing machine |
| JP3866613B2 (en) * | 2002-05-14 | 2007-01-10 | 有限会社ユズリハ製作所 | Fixing roll processing equipment |
| JP4961672B2 (en) * | 2004-03-05 | 2012-06-27 | 東ソー株式会社 | Cylindrical sputtering target, ceramic sintered body, and manufacturing method thereof |
| KR20150133692A (en) * | 2013-03-27 | 2015-11-30 | 도레이 카부시키가이샤 | Sweeper roller, plastic film manufacturing device that uses same, and manufacturing method |
-
2015
- 2015-03-31 JP JP2015073454A patent/JP6585913B2/en active Active
- 2015-12-21 CN CN201580074869.3A patent/CN107208258B/en active Active
- 2015-12-21 KR KR1020177022816A patent/KR102417294B1/en active IP Right Grant
- 2015-12-21 WO PCT/JP2015/085687 patent/WO2016157648A1/en active Application Filing
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2016
- 2016-01-04 TW TW105100039A patent/TWI720962B/en active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58154029U (en) * | 1982-04-06 | 1983-10-14 | 豊田工機株式会社 | 3-point steady rest device |
| TW200540289A (en) * | 2004-03-05 | 2005-12-16 | Tosoh Corp | Cylindrical sputtering target, ceramic sintered body, and process for producing sintered body |
| US20050279630A1 (en) * | 2004-06-16 | 2005-12-22 | Dynamic Machine Works, Inc. | Tubular sputtering targets and methods of flowforming the same |
| JP2008023624A (en) * | 2006-07-19 | 2008-02-07 | Ntn Corp | Workpiece support device and machine structure worked thereby |
| CN101688293A (en) * | 2007-07-02 | 2010-03-31 | 东曹株式会社 | Tubular sputtering target |
| JP2014148026A (en) * | 2013-02-04 | 2014-08-21 | Okamoto Machine Tool Works Ltd | Workpiece vibration suppression device for cylindrical grinding apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI720962B (en) | 2021-03-11 |
| JP6585913B2 (en) | 2019-10-02 |
| KR20170133320A (en) | 2017-12-05 |
| WO2016157648A1 (en) | 2016-10-06 |
| JP2016194096A (en) | 2016-11-17 |
| CN107208258B (en) | 2019-06-28 |
| KR102417294B1 (en) | 2022-07-05 |
| TW201634179A (en) | 2016-10-01 |
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