JP6496681B2 - Target material for cylindrical sputtering target and cylindrical sputtering target - Google Patents

Description

The disclosed embodiment relates to a target material for a cylindrical sputtering target and a cylindrical sputtering target .

  2. Description of the Related Art There is known a magnetron rotary cathode sputtering apparatus that has a magnetic field generator inside a cylindrical target material, and performs sputtering while rotating the target material while cooling the target material from the inside. In such a sputtering apparatus, the entire outer peripheral surface of the target material becomes erosion and is uniformly cut. For this reason, in the conventional flat plate type magnetron sputtering apparatus, the usage efficiency is 20 to 30%, whereas in the magnetron type rotary cathode sputtering apparatus, an extremely high usage efficiency of 70% or more is obtained.

  Further, in the magnetron type rotary cathode sputtering apparatus, by performing sputtering while rotating the target material, a larger power can be input per unit area than in the flat plate type magnetron sputtering apparatus, so that a high deposition rate can be obtained.

  Such a rotary cathode sputtering method is widely used as a metal target material that can be easily processed into a cylindrical shape and has high mechanical strength. On the other hand, a ceramic target material has a characteristic that its mechanical strength is low and brittle compared to a metal target material.

  Furthermore, since the thermal expansion coefficient of ceramic materials is smaller than that of metal materials used as cylindrical backing tubes, it is due to the difference in thermal expansion between the cylindrical target material and the backing tube during sputtering. Cracks are likely to occur in the target material. For this reason, measures for overcoming these problems have been studied for ceramic cylindrical target materials (see, for example, Patent Documents 1 and 2).

JP 2005-281862 A JP 2009-30165 A

  However, the above-described conventional technology still does not provide a target material that is sufficiently strong against cracking, and there is room for further improvement.

One aspect of the embodiments has been made in view of the above, and an object thereof is to provide a target material for a cylindrical sputtering target and a cylindrical sputtering target that can further suppress the occurrence of cracks during fabrication.

Cylindrical sputtering target target material according to the embodiment, at least one of the outer and inner peripheral surfaces of ceramic sputtering target material to have a 2 or more grinding streaks grinding direction are different.

According to one aspect of the embodiment, it is possible to provide a target material for a cylindrical sputtering target and a cylindrical sputtering target that can further suppress generation of cracks during production.

FIG. 1A is a schematic diagram illustrating an outline of a configuration of a cylindrical sputtering target. 1B is a cross-sectional view taken along the line A-A ′ of FIG. 1A. Drawing 2A is an explanatory view showing an outline of a manufacturing method of a target material for cylindrical sputtering targets concerning an embodiment. Drawing 2B is an explanatory view showing an outline of a manufacturing method of a target material for cylindrical sputtering targets concerning an embodiment. FIG. 3A is an explanatory diagram illustrating an example of traverse grinding. FIG. 3B is a partially enlarged view of FIG. 3A. FIG. 4A is an explanatory diagram illustrating an example of traverse grinding. FIG. 4B is a partially enlarged view of FIG. 4A. FIG. 5 is an explanatory diagram illustrating an outline of a method for manufacturing a target material for a cylindrical sputtering target according to the first embodiment. FIG. 6 is an explanatory diagram illustrating an outline of a method for manufacturing a target material for a cylindrical sputtering target according to the second embodiment. FIG. 7 is a flowchart showing an example of a method for producing a target material for a cylindrical sputtering target according to the embodiment.

Hereinafter, with reference to the accompanying drawings, the cylindrical sputtering target target material disclosed in the present application and the embodiment of a cylindrical sputtering target will be described in detail. In addition, this invention is not limited by embodiment shown below.

First, a cylindrical sputtering target to which the target material for a cylindrical sputtering target according to the embodiment can be applied will be described with reference to FIGS. 1A and 1B.

  FIG. 1A is a schematic diagram illustrating an outline of a configuration of a cylindrical sputtering target, and FIG. 1B is a cross-sectional view taken along line A-A ′ of FIG. 1A. For ease of explanation, FIGS. 1A and 1B illustrate a three-dimensional orthogonal coordinate system including a Z-axis having a vertically upward direction as a positive direction and a vertically downward direction as a negative direction. Such an orthogonal coordinate system may also be shown in other drawings used in the following description.

  As shown in FIGS. 1A and 1B, a cylindrical sputtering target (hereinafter referred to as “cylindrical target”) 1 is a ceramic target material for cylindrical sputtering target (hereinafter referred to as “cylindrical target material”). 2 and a backing tube 3. The cylindrical target material 2 and the backing tube 3 are joined by a joining material 4.

Here, the cylindrical target material 2 is made of a ceramic material processed into a cylindrical shape, and is manufactured by a manufacturing method described later. Examples of the ceramic material capable of producing the cylindrical target material 2 include ITO (In ₂ O ₃ —SnO ₂ ), IGZO (In ₂ O ₃ —Ga ₂ O ₃ —ZnO), and AZO (Al ₂ O _3). -ZnO) and the like can be exemplified, but not limited thereto.

  Moreover, as the backing tube 3, what is conventionally used can be selected suitably and can be used. For example, stainless steel, titanium, titanium alloy, or the like can be applied, but is not limited thereto.

  Moreover, as the bonding material 4, a conventionally used material can be appropriately selected and used. For example, indium, indium-tin alloy, and the like can be mentioned, but the invention is not limited to these.

  In addition, although the cylindrical target 1 demonstrated the example in which the one cylindrical target material 2 was joined to the outer side of the one backing tube 3, it is not limited to this. For example, a cylindrical target 1 may be used in which two or more cylindrical target materials 2 are arranged on the same axis and joined to the outside of one or two or more backing tubes 3.

  Next, an example of a method for manufacturing the ceramic cylindrical target material 2 will be described. The cylindrical target material 2 comprises a granulation step of granulating a slurry containing ceramic raw material powder and an organic additive to produce a granule, and a molding step of shaping the granule to produce a cylindrical shaped body And a firing step of firing the molded body to produce a fired body. In addition, the manufacturing method of a sintered body is not limited to the above-mentioned thing, What kind of method may be sufficient.

  The fired body obtained in the firing step described above is produced so that the length and the outer diameter are larger and the inner diameter is smaller than the dimensions designed in advance as the cylindrical target material 2. Then, the length of the fired body is processed, for example, by cutting, and the outer diameter and the inner diameter are processed by grinding so as to have designed dimensions.

  Moreover, the manufacturing method of the cylindrical target material 2 according to the embodiment further includes an outer peripheral surface grinding step, an inner peripheral surface grinding step, a finish grinding step, and an end surface processing step. Through these steps, the outer diameter, inner diameter, and length of the fired body are processed into dimensions designed in advance. Below, first, an example of an outer peripheral surface grinding process and an inner peripheral surface grinding process is demonstrated in order using FIG. 2A and FIG. 2B.

  FIG. 2A and FIG. 2B are explanatory views showing an outline of a grinding process, in particular, in the manufacturing method of the cylindrical target material 2 according to the embodiment. First, the outer peripheral surface grinding step will be described below.

  The outer peripheral surface grinding step is a step of grinding the outer peripheral surface of a ceramic fired body (target material) 12 for manufacturing the cylindrical target material 2 to adjust the outer diameter to a predetermined dimension. As shown in FIGS. 2A and 2B, the fired body 12 is supported rotatably about a cylindrical shaft (not shown) as a rotation axis. Further, a grindstone 5 a for grinding the outer peripheral surface 12 a is disposed so as to face the outer peripheral surface 12 a of the fired body 12.

  The grindstone 5a rotates around the shaft 5b disposed so as to be parallel to the cylindrical axis of the fired body 12, and is parallel to the shaft 5b, that is, in a direction parallel to the cylindrical axis of the fired body 12. It is configured to be able to move forward and backward. In the following description, for the sake of convenience, the movement of the grindstone 5a from the end e1 side to the end e2 side of the fired body 12 is “forward”, and the grindstone 5a is moved from the end e2 side to the end e1 side. This is defined as “retreat”.

  In such a configuration, grinding of the outer peripheral surface 12a of the fired body 12 by the grindstone 5a is performed on the outer peripheral surface 12a of the fired body 12 rotating at a certain speed with the cylindrical shaft as the rotation axis as follows. . That is, when the grindstone 5a that rotates at high speed with the shaft 5b as the rotation axis is moved to the calcined body 12 side and adjusted so that the distance from the cylindrical axis of the calcined body 12 is narrowed, according to the arrangement of the adjusted grindstone 5a. The outer peripheral surface 12a side of the fired body 12 is ground by a predetermined thickness (depth). The thickness of the fired body 12 to be ground at this time is referred to as a cutting amount (or cutting depth).

  By the way, there are two methods of grinding the outer peripheral surface 12a of the fired body 12 to be the cylindrical target material 2, traverse grinding and plunge grinding. Below, traverse grinding is first demonstrated using FIG. 3A-FIG. 4B.

  FIG. 3A is an explanatory diagram illustrating an example of traverse grinding. In addition, about arrangement | positioning and the rotation direction of the sintered compact 12 and the grindstone 5a in FIG. 3A, it is the same as that of FIG. 2A and 2B.

  Traverse grinding is a method of grinding while moving the grindstone 5a in a direction parallel to the cylindrical axis of the fired body 12. As shown in FIG. 3A, when the grindstone 5a is moved forward with a cut amount with respect to the fired body 12 being constant, the outer peripheral surface 12a of the fired body 12 rotating about the cylindrical axis is the rotation of the fired body 12 and the grindstone 5a. Grinding is performed in response to the forward movement.

  At this time, the grinding streak d accompanying the grinding of the fired body 12 by the grindstone 5a is left on the outer peripheral surface 12a of the fired body 12. This grinding line d can be regarded as a trace indicating the grinding direction by the grindstone 5a. That is, when grinding is performed with the rotational speed of the fired body 12 and the speed of forward movement of the grindstone 5a being constant, the grinding direction left as the grinding stripe d on the outer peripheral surface 12a of the fired body 12 is linear. This point will be further described with reference to FIG. 3B.

  FIG. 3B is an enlarged view of the region 6 shown in FIG. 3A. As shown in FIG. 3B, when the region 6 that is a part of the outer peripheral surface 12a of the fired body 12 is enlarged, the grinding stripe d is a positive angle θ1 with respect to the straight line L2 that is perpendicular to the straight line L1 parallel to the cylindrical axis. (However, 0 ° <θ1 <90 °). Here, as shown in FIG. 3B, the “plus angle” means that a straight line L1 parallel to the cylindrical axis is a horizontal axis in the region 6 and passes through the intersection P of the straight line L1 and the grinding stripe d to the straight line L1. When a plane having the vertical axis L2 as the vertical axis is defined, the grinding stripe d has a clockwise (clockwise) inclination. On the other hand, the grinding stripe d can be formed to have a “minus angle”, that is, counterclockwise (counterclockwise) with respect to the straight line L1 parallel to the cylindrical axis and the straight line L2. An example of such a case will be described below with reference to FIGS. 4A and 4B.

  FIG. 4A is an explanatory view showing another example of traverse grinding, and FIG. 4B is an enlarged view of the region 6 shown in FIG. 4A. The configuration of FIGS. 4A and 4B has the same configuration as FIGS. 3A and 3B except that the grindstone 5a is moved backward.

  As shown in FIG. 4A, when the outer peripheral surface 12a of the fired body 12 is ground while the grindstone 5a is moved backward, grinding is performed corresponding to the rotation of the fired body 12 and the backward movement of the grindstone 5a. At this time, when the grinding is performed with the rotational speed of the fired body 12 and the speed of the backward movement of the grindstone 5a being constant, the angle formed by the grinding stripe d with respect to the straight line L2 perpendicular to the straight line L1 parallel to the cylindrical axis is negative. The angle θ1 (however, −90 ° <θ1 <0 °).

  In this way, in traverse grinding, even if the fired body 12 is rotated at a constant direction and speed, a straight line parallel to the cylindrical axis can be obtained by changing the direction and / or speed of the grindstone 5a. The angle formed by the straight line L2 perpendicular to L1 and the grinding stripe d can be changed.

  Next, plunge grinding will be described. Plunge grinding is a technique in which grinding is performed by giving only movement in the cutting direction without moving the grindstone 5a forward and backward. In this method, the outer surface 12a of the fired body 12 is ground at an angle of 90 ° with the straight line L1 parallel to the cylindrical axis, that is, in a grinding direction parallel to the straight line L2 perpendicular to the straight line L1.

  Returning to FIG. 2B, the inner peripheral surface grinding step will be described. The inner peripheral surface grinding step is a step of grinding the inner peripheral surface 12b of the fired body 12. As illustrated in FIG. 2B, a grindstone 6 a for grinding the inner peripheral surface 12 b is disposed on the inner peripheral surface 12 b side of the fired body 12.

  The grindstone 6a rotates around the shaft 6b disposed so as to be parallel to the cylindrical axis of the fired body 12, and is parallel to the shaft 6b, that is, in a direction parallel to the cylindrical axis of the fired body 12. It is configured to be able to move forward and backward. In the following description, as in the description of the grindstone 5a described above, the movement of the grindstone 6a from the end e1 side to the end e2 side of the fired body 12 is “advance” and from the end e2 side. The movement toward the end e1 side is defined as “retreat”.

  The inner peripheral surface 12b of the fired body 12 ground by the grindstone 6a having such a configuration is the same as that formed on the outer peripheral surface 12a of the fired body 12 by the grindstone 5a corresponding to the grinding direction by the grindstone 6a. The grinding line d is formed. That is, when the cutting amount of the grindstone 6a is made constant and moved forward and backward in a direction parallel to the cylindrical axis of the fired body 12, the inner peripheral surface 12b of the fired body 12 corresponds to the rotation of the fired body 12 and the forward and backward movement of the grindstone 6a. Then, traverse grinding is performed to form a grinding line d on the inner peripheral surface 12b.

  On the other hand, when plunge grinding is performed by giving only the movement in the cutting direction without moving the grindstone 6a forward and backward, the inner surface 12b of the fired body 12 has an angle of 90 ° with the straight line L1 parallel to the cylindrical axis. So that it is ground.

  In this way, the fired body 12 is ground according to the set cutting amount and grinding direction, respectively, with the outer peripheral surface 12a by the grindstone 5a and the inner peripheral surface 12b by the grindstone 6a. As a grinding device for grinding the fired body 12, for example, one grinder having both the grindstones 5a and 6a may be used. For example, a cylindrical grinder having the grindstone 5a and the grindstone 6a may be used. You may use separately the internal grinding machine which has arrange | positioned.

  Here, the rotational speed of the fired body 12 can be set according to the strength and size of the fired body 12, and can be, for example, 10 rpm to 150 rpm. When the rotational speed of the fired body 12 is 10 rpm or less, the grinding time becomes longer. When the rotational speed of the fired body 12 exceeds 150 rpm, the load on the fired body 12 becomes large. It may become easy to break.

  Further, the moving speeds of the grindstones 5a and 6a are preferably set to, for example, 3000 mm / min or less, and in the case of traverse grinding, for example, preferably set to 1 mm / min or more and 3000 mm / min or less. When the moving speed of the grindstones 5a and 6a exceeds 3000 mm / min, the load on the grindstones 5a and 6a increases depending on the cutting depth of the fired body 12 by the grindstones 5a and 6a, and the grindstones are easily chipped.

  In the above description, the grindstones 5a and 6a are both described as being configured to be able to advance and retract in the cylindrical axis direction of the fired body 12. However, the grindstones 5a and 6a may be configured to be relatively movable relative to the fired body 12. For example, the fired body 12 may be configured to advance and retract in the cylindrical axis direction. Furthermore, both the fired body 12 and the grindstones 5a and 6a may be configured to be able to advance and retract in the cylindrical axis direction.

  Next, the finish grinding process will be described. The finish grinding step refers to a step of grinding the outer peripheral surface 12a and the inner peripheral surface 12b of the fired body 12 performed at the end of each grinding step of the outer peripheral surface 12a and the inner peripheral surface 12b of the fired body 12. In the grinding process according to the embodiment, the outer peripheral surface 12a and the inner peripheral surface 12b of the fired body 12 are ground in two or more grinding directions. This point will be described below with reference to FIG.

  FIG. 5 is an explanatory view showing the outline of the method for manufacturing the cylindrical target material 2 according to the first embodiment, and is an enlarged view of the outer peripheral surface 12a of the fired body 12 shown in the region 6 shown in FIGS. 3A and 4A. It corresponds to. In FIG. 5, a line d <b> 2 indicates a grinding line d formed on the outer peripheral surface 12 a of the fired body 12 in the final grinding in the finish grinding process. A line d1 indicates the grinding line d formed on the outer peripheral surface 12a of the fired body 12 by finish grinding immediately before the grinding where the grinding line d2 of the line d2 is formed.

  As shown in FIG. 5, the outer peripheral surface 12a of the fired body 12 is ground in two grinding directions of lines d1 and d2. For this reason, generation | occurrence | production of the crack at the time of cylindrical target 1 preparation is suppressed compared with the cylindrical target material 2 obtained by grinding the sintered compact 12 only in the same grinding direction in a finishing process. The reason for this is considered to be as follows.

  That is, damage accumulates on the outer peripheral surface 12a of the ceramic cylindrical target material 2 due to repeated grinding. At this time, particularly when the grinding is repeated so that the same grinding direction is used in the finish grinding process, grinding damage accumulates in a specific direction and the surface of the cylindrical target material 2 becomes brittle. Becomes easy to break. On the other hand, in the manufacturing method of the cylindrical target material 2 according to the embodiment, since the grinding damage is dispersed by setting the grinding direction in the finish grinding process to 2 or more, generation of cracks along a specific direction is suppressed. can do.

  Here, the “finish grinding step” refers to a step of grinding a portion very close to the surface of the cylindrical target material 2 that affects the strength of the produced cylindrical target material 2. Specifically, for example, the final grinding of the outer peripheral surface 12a of the fired body 12 is 20 μm or less. That is, the occurrence of cracks in the cylindrical target material 2 can be suppressed by grinding the outer peripheral surface 12a of the fired body 12 so that at least the final 20 μm grinding is performed in two grinding directions.

  As shown in FIG. 5, the line d1 that is the first grinding line d is formed to have a positive angle θ1 with respect to the straight line L1 that is parallel to the cylindrical axis of the cylindrical target material 2 and the straight line L2. ing. The line d2 as the second grinding line d is a negative angle θ2 (however, −90 ° <θ2 <0 °) with respect to the straight line L1 perpendicular to the straight line L1 parallel to the cylindrical axis of the cylindrical target material 2. ).

  Here, the finish grinding in the grinding direction using the line d1 as the grinding line d can be performed by, for example, traverse grinding in which the grindstone 5a is moved forward (see FIGS. 3A and 3B). The finish grinding in the grinding direction with the line d2 as the grinding line d can be performed by, for example, traverse grinding in which the grindstone 5a is moved backward (see FIGS. 4A and 4B). That is, it can be realized by moving the grindstone 5a forward and backward in a direction parallel to the cylindrical axis and performing finish grinding in both directions.

  In the case of FIG. 5, the angle θ3 (where 0 ° <θ3 <180 °) at which the lines d1 and d2 intersect can be expressed as θ3 = | θ1-θ2 |. The angle θ3 at which the lines d1 and d2 intersect is required to be at least non-zero, but is preferably 0.3 ° ≦ θ3 ≦ 15 °, and more preferably 0.3 ° ≦ θ3 ≦ 6 °. If the angle θ3 is less than 0.3 °, the effect of suppressing the occurrence of cracks in the cylindrical target material 2 may not be clear. In addition, when the angle θ3 exceeds 15 °, it is difficult to produce in the first place, and the outer peripheral surface 12a is likely to be damaged or chipped when the fired body 12 is ground. The aforementioned angles θ1 and θ2 can be calculated from the moving speed of the grindstone 5a during grinding of the fired body 12, the rotational speed of the fired body 12, the outer diameter, the inner diameter of the cylindrical target material 2, and the like. .

  Further, the surface roughness Ra of the outer peripheral surface 12a after the finish grinding step is preferably 1.5 μm or less, more preferably 0.1 μm or more and 1.5 μm or less. If the surface roughness Ra of the outer peripheral surface 12a exceeds 1.5 μm, cracks may easily occur during the production of the cylindrical target 1. Here, the surface roughness Ra is a value corresponding to the “arithmetic average roughness Ra” in JIS B0601: 2013. The surface roughness Ra can be controlled by changing the count of the grindstone 5a used for finish grinding.

  By the way, in above-mentioned Embodiment 1, although the example grind | polished in two grinding directions was shown by finish-grinding the outer peripheral surface 12a of the baking body 12 in the both directions which move the grindstone 5a back and forth, finish grinding is carried out by another method. Even in this case, grinding can be performed in two grinding directions. This point will be described below with reference to FIG.

  FIG. 6 is an explanatory view showing an outline of the method for manufacturing the cylindrical target material 2 according to the second embodiment. Like FIG. 5, the outer peripheral surface 12a of the fired body 12 shown in the region 6 shown in FIGS. 3A and 4A. Is equivalent to a magnified view. 6 that are the same as those in FIG. 5 are given the same reference numerals, and descriptions thereof are omitted.

  As shown in FIG. 6, the line d1 is formed to have a positive angle θ1 with respect to the straight line L2. The line d2 is formed so as to have a positive angle θ2 different from θ1 with respect to the straight line L2.

  Finish grinding in the grinding direction using the lines d1 and d2 as the grinding stripes d can be realized, for example, by performing traverse grinding in which the grindstone 5a is moved forward at different moving speeds for each pass. In the case of FIG. 6, the angle θ3 at which the lines d1 and d2 intersect can be expressed as θ3 = | θ1−θ2 | as in the case of FIG. Hereinafter, this angle θ3 is also referred to as “intersection angle θ3 of grinding stripe d” or simply “intersection angle θ3”.

  Thus, in the manufacturing method of the cylindrical target material 2 which concerns on embodiment, generation | occurrence | production of the crack at the time of cylindrical target 1 preparation can be suppressed by performing the finish grinding of the outer peripheral surface 12a in two grinding directions. .

  Finally, the end face processing step will be described. The end face processing step is a step of manufacturing the cylindrical target material 2 having a predetermined length by processing the end face. The processing of the end surface may be, for example, by cutting, cutting, or grinding. Further, cutting or cutting and grinding may be combined, and the processing method is not limited.

  In the above-described embodiment, the example in which the outer peripheral surface 12a of the fired body 12 is finish-ground in two grinding directions has been described, but finish grinding may be performed in two or more grinding directions. In such a case, the angle formed by the two grinding lines d having the largest intersection angle is defined as the angle formed by the grinding direction corresponding to the angle θ3 at which the lines d1 and d2 described in FIGS. 5 and 6 intersect. Can do.

  In the above-described embodiment, the example in which the outer peripheral surface 12a of the fired body 12 is finish-ground has been described. However, the inner peripheral surface 12b may be finish-ground instead, and both the outer peripheral surface 12a and the inner peripheral surface 12b may be ground. You may finish-grind about. Since the inner peripheral surface 12b side is not consumed even when sputtering is performed, it is considered that it contributes to the long-term mechanical strength of the cylindrical target material 2 or the cylindrical target 1 in particular. The finish grinding of the inner peripheral surface 12b can be performed by the same method as the finish grinding of the outer peripheral surface 12a except that the grindstone 6a is used instead of the grindstone 5a shown in FIG. To do.

  In the above-described embodiment, an example in which the grindstone 5a is moved at a constant speed in finish grinding has been described.

  In the above-described embodiment, an example in which finish grinding is performed by traverse grinding has been described, but plunge grinding may be combined. However, even when plunge grinding is applied, it is preferable to include traverse grinding in the finishing process.

  Next, a method for manufacturing the cylindrical target material 2 according to the embodiment will be described in detail with reference to FIG. FIG. 7 is a flowchart showing a processing procedure for manufacturing the target material 2 for a cylindrical sputtering target according to the embodiment.

  As shown in FIG. 7, first, the outer peripheral surface 12a of the target material 12 is ground (step S11), and then the inner peripheral surface 12b of the target material 12 is ground (step S12). As the target material 12, a ceramic fired body can be used.

  Subsequently, the inner peripheral surface 12b of the target material 12 is finish-ground (step S13), and then the outer peripheral surface 12a of the target material 12 is finish-ground (step S14). Finally, the end surface of the target material 12 is processed (step S15).

  Through the above steps, the production of a series of cylindrical target materials 2 according to the embodiment is completed. Step S11 and step S12 may be switched in order. Step S13 and step S14 may be switched in order. Further, step S13 may be included in step S12, and similarly, step S14 may be included in step S11.

[Example 1]
(ITO cylindrical target. Reciprocating traverse finish grinding for inner and outer peripheral surfaces)
10 mass% of SnO ₂ powder having a specific surface area (BET specific surface area) measured by BET (Brunauer-Emmett-Teller) method of 5 m ² / g and 90 mass of In ₂ O ₃ powder having a BET specific surface area of 5 m ² / g %, And ball mill mixing with zirconia balls in a pot to prepare a raw material powder.

  In this pot, 0.3 parts by mass of polyvinyl alcohol, 0.2 parts by mass of ammonium polycarboxylate, 0.5 parts by mass of polyethylene glycol, and 50 parts by mass of water with respect to 100 parts by mass of the raw material powder. Were added to each other and mixed with a ball mill to prepare a slurry. Next, this slurry was supplied to a spray drying apparatus, and spray drying was performed under the conditions of an atomizing rotation number of 14,000 rpm, an inlet temperature of 200 ° C., and an outlet temperature of 80 ° C. to prepare granules.

The granules were filled while tapping into a cylindrical urethane rubber mold having an inner diameter of 220 mm (thickness 10 mm) having a cylindrical core (mandrel) with an outer diameter of 150 mm and a length of 450 mm, and the rubber mold was sealed, CIP (Cold Isostatic Pressing) molding was performed at a pressure of 800 kgf / cm ² to produce a substantially cylindrical shaped body.

  This molded body was heated at 600 ° C. for 10 hours to remove organic components. The rate of temperature increase was 20 ° C./h in the temperature range up to 400 ° C. and 50 ° C./h in the temperature range higher than 400 ° C. Furthermore, the heated molded body was fired to produce a fired body 12. Firing was performed in an oxygen atmosphere under conditions of a firing temperature of 1550 ° C., a firing time of 12 hours, and a heating rate of 300 ° C./h. Further, the temperature lowering rate was 50 ° C./h from 1550 ° C. to 800 ° C. and 30 ° C./h after 800 ° C.

  Next, the obtained fired body 12 was ground. First, after processing the outer peripheral surface 12a by plunge grinding until the outer diameter of the fired body 12 was 153.2 mm, the inner peripheral surface 12b was processed by plunge grinding until the inner diameter of the fired body 12 was 134.8 mm.

  Subsequently, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by traverse grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. One pass for moving the grindstone 6a from the end e1 to the end e2 in the forward direction, the cutting amount of the grindstone 6a is 0.01 mm, the moving speed of the grindstone 6a in the cylindrical axis direction (forward direction) is 300 mm / min, and the fired body 12 Finishing grinding was performed at a rotational speed of 70 rpm.

  Next, one pass for moving the grindstone 6a from the end portion e2 to the end portion e1 in the retreating direction is 0.01 mm, the cutting amount of the grindstone 6a is 0.01 mm, the moving speed of the grindstone 6a in the cylindrical axis direction (retreating direction) is 300 mm / min. Finish grinding was performed at a rotational speed of the body 12 of 70 rpm.

  The traverse grinding for moving the grindstone 6a in the forward and backward directions is repeated one pass at a time until the inner diameter of the fired body 12 reaches 135 mm, and then the grindstone 6a is moved in the forward and backward directions with a cutting depth of 0. Spark out was performed 2 passes (that is, 1 round trip).

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by traverse grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. One pass for moving the grindstone 5a in the forward direction from the end e1 to the end e2 is as follows. The cutting amount of the grindstone 5a is 0.002 mm, the moving speed of the grindstone 5a is 150 mm / min, and the rotational speed of the fired body 12 is 20 rpm. Finish grinding was performed.

  Next, one pass for moving the grindstone 5a in the backward direction from the end e2 to the end e1 is performed. The cutting amount of the grindstone 5a is 0.002 mm, the moving speed of the grindstone 5a in the cylindrical axis direction is 150 mm / min, and the fired body 12 is rotated. Finish grinding was performed at a speed of 20 rpm.

  After traverse grinding for moving the grindstone 5a in the forward and backward directions is repeated one pass at a time until the outer diameter of the fired body 12 reaches 153 mm, spark-out for moving the grindstone 5a in the cylindrical axis direction with a cutting depth of 0 is performed. Two passes were made. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  Nine cylindrical target materials 2 described above are prepared, and nine cylindrical target materials 2 are bonded to a titanium backing tube 3 having an outer diameter of 133 mm, an inner diameter of 123 mm, and a length of 3200 mm using In solder as a bonding material 4. Each was joined to produce a cylindrical target 1. The interval between the target materials 2 (the length of the divided portion) was 0.5 mm.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 of the two grinding lines d was calculated from the moving speed of the grindstone, the rotational speed of the fired body 12, and the dimensions of the cylindrical target material 2. Taking the plus direction of the inner peripheral surface 12b as an example, the grindstone 6a moves forward by 4.3 mm while the fired body 12 rotates once. Since the inner diameter of the inner peripheral surface 12b of the cylindrical target material 2 is 135 mm, the angle θ1 in the plus direction of the grinding stripe d is calculated as 1.8 ° from a right triangle having a bottom of 135 mm and a height of 4.3 mm. Can do. Similarly, the other angle θ2 = −1.8 ° was calculated. From these results, the above calculation formula of the intersection angle θ3 | θ1−θ2 | was applied, and the intersection angle θ3 = 3.6 ° was obtained. Hereinafter, the calculation method of the intersection angle θ3 is the same. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Example 2]
(IGZO cylindrical target. Reciprocating traverse finish grinding for both inner and outer peripheral surfaces)
And ZnO powder 44.2 wt% of the BET specific surface area of ^4m 2 / g, and _In 2 _{O 3} powder 25.9 wt% of the BET specific surface area of ^7m 2 / g, a BET specific surface area of ^10m ₂ / g Ga 2 O ₃ blended powder 29.9 wt%, and mixed in a ball mill with zirconia balls in a pot, to prepare a raw material powder.

  In this pot, 0.3 parts by weight of polyvinyl alcohol, 0.4 parts by weight of ammonium polycarboxylate, 1.0 part by weight of polyethylene glycol, and 50 parts by weight of water with respect to 100 parts by weight of the raw material powder. Were added to each other and mixed with a ball mill to prepare a slurry.

  Next, granules were prepared in the same manner as in Example 1, a molded body was produced, and organic components were removed from the molded body. Furthermore, the molded body was fired under the conditions of a firing temperature of 1400 ° C., a firing time of 10 hours, a temperature increase rate of 300 ° C./h, and a temperature decrease rate of 50 ° C./h, thereby producing a fired body 12.

  And manufacture of the cylindrical target material 2 by grinding and cutting | disconnection of the obtained sintered body 12, and joining of the cylindrical target material 2 and the backing tube 3 were performed like Example 1, and the cylindrical target 1 was produced.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Example 3]
(AZO cylindrical target. Reciprocating traverse finish grinding for both inner and outer peripheral surfaces)
And 95 wt% ZnO powder BET specific surface area of ^4m 2 / g, BET specific surface area is blended with _Al 2 _{O 3} powder 5% by weight of ^{5 m} 2 / g, and mixed in a ball mill with zirconia balls in a pot ceramics Raw material powder was prepared.

  In this pot, 0.3 parts by weight of polyvinyl alcohol, 0.4 parts by weight of ammonium polycarboxylate, 1.0 part by weight of polyethylene glycol, and 50 parts by weight of water with respect to 100 parts by weight of the raw material powder. Were added to each other and mixed with a ball mill to prepare a slurry.

  Next, granules were prepared in the same manner as in Example 1, a molded body was produced, and organic components were removed from the molded body. Furthermore, the molded body was fired under the conditions of a firing temperature of 1400 ° C., a firing time of 10 hours, a temperature increase rate of 300 ° C./h, and a temperature decrease rate of 50 ° C./h, thereby producing a fired body 12.

  Then, the cylindrical target material 2 was manufactured by grinding and cutting the obtained fired body 12, and the cylindrical target material 2 and the backing tube 3 were joined in the same manner as in Example 1 to produce the cylindrical target 1. .

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Example 4]
(Changing the crossing angle in Example 1)
The fired body 12 (ITO) obtained in the same manner as in Example 1 was processed to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm. First, after processing the outer diameter to 153.2 mm by plunge grinding, the inner diameter was processed to 134.8 mm by plunge grinding.

  Subsequently, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by traverse grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. Finish grinding was performed with one pass for moving the grindstone 6a in the forward direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the forward direction being 70 mm / min, and the rotational speed of the fired body 12 being 150 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 6a in the retreating direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the retreating direction being 70 mm / min, and the rotational speed of the fired body 12 being 150 rpm.

  The traverse grinding for moving the grindstone 6a in the forward direction and the backward direction was repeated one pass at a time until the inner diameter of the fired body 12 reached 135 mm, and then two spark-outs were performed.

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by traverse grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. Finish grinding was performed with one pass for moving the grindstone 5a in the forward direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the forward direction being 50 mm / min, and the rotational speed of the fired body 12 being 100 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 5a in the retreat direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the retreat direction being 50 mm / min, and the rotational speed of the fired body 12 being 100 rpm.

  Traverse grinding for moving the grindstone 5a in the forward direction and the backward direction was repeated one pass at a time until the outer diameter of the fired body 12 reached 153 mm, and then two spark-outs were performed. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  Then, the cylindrical target material 2 and the backing tube 3 were joined in the same manner as in Example 1 to produce the cylindrical target 1.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Example 5]
(Changing the crossing angle in Example 2)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 4 except that the fired body 12 (IGZO) obtained in the same manner as in Example 2 was used.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. In the nine cylindrical target materials 2, the crossing angle θ3 and the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a were measured, and the averages thereof were calculated. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Example 6]
(Changing the crossing angle in Example 3)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 4 except that the fired body 12 (AZO) obtained in the same manner as in Example 3 was used.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Example 7]
(One-way traverse finish grinding with the moving speed of the grinding wheel changed on both the inner and outer peripheral surfaces)
The fired body 12 (ITO) obtained in the same manner as in Example 1 was processed to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm. First, after processing the outer diameter to 153.2 mm by plunge grinding, the inner diameter was processed to 134.8 mm by plunge grinding.

  Subsequently, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by traverse grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. Finish grinding was performed with one pass for moving the grindstone 6a in the forward direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the forward direction being 400 mm / min, and the rotational speed of the fired body 12 being 70 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 6a in the forward direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the forward direction being 200 mm / min, and the rotational speed of the fired body 12 being 70 rpm.

  The traverse grinding for changing the moving speed of the grindstone 6a in the forward direction is repeated one pass at a time until the inner diameter of the fired body 12 reaches 135 mm, and then the grindstone 6a is moved in the forward and backward directions with a cutting depth of 0. I made two passes of sparking out.

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by traverse grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. Finish grinding was performed with one pass for moving the grindstone 5a in the forward direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the forward direction being 300 mm / min, and the rotational speed of the fired body 12 being 20 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 5a in the forward direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the forward direction being 150 mm / min, and the rotational speed of the fired body 12 being 200 rpm.

  The traverse grinding for changing the moving speed of the grindstone 5a in the forward direction was repeated one pass at a time until the outer diameter of the fired body 12 reached 153 mm, and then a spark out was performed for one pass. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  Then, the cylindrical target material 2 and the backing tube 3 were joined in the same manner as in Example 1 to produce the cylindrical target 1.

  In the obtained cylindrical target material 2, grinding streaks d in two directions were formed in the plus direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Example 8]
(One-way traverse finish grinding with the moving speed of the grinding wheel changed on both the inner and outer peripheral surfaces)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 7 except that the fired body 12 (IGZO) obtained in the same manner as in Example 2 was used.

  In the obtained cylindrical target material 2, grinding streaks d in two directions were formed in the plus direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Example 9]
(One-way traverse finish grinding with the moving speed of the grinding wheel changed on both the inner and outer peripheral surfaces)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 7 except that the fired body 12 (AZO) obtained in the same manner as in Example 3 was used.

  In the obtained cylindrical target material 2, grinding streaks d in two directions were formed in the plus direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Example 10]
(Changing the crossing angle in Example 1)
The fired body 12 (ITO) obtained in the same manner as in Example 1 was processed to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm. First, after processing the outer diameter to 153.2 mm by plunge grinding, the inner diameter was processed to 134.8 mm by plunge grinding.

  Subsequently, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by traverse grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. Finish grinding was performed with one pass for moving the grindstone 6a in the forward direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the forward direction being 50 mm / min, and the rotational speed of the fired body 12 being 150 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 6a in the retreating direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the retreating direction being 50 mm / min, and the rotational speed of the fired body 12 being 150 rpm.

  The traverse grinding for moving the grindstone 6a in the forward direction and the backward direction was repeated one pass at a time until the inner diameter of the fired body 12 reached 135 mm, and then two spark-outs were performed.

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by traverse grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. Finish grinding was performed with one pass for moving the grindstone 5a in the forward direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the forward direction being 30 mm / min, and the rotational speed of the fired body 12 being 100 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 5a in the retreating direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the retreating direction being 30 mm / min, and the rotational speed of the fired body 12 being 100 rpm.

  Traverse grinding for moving the grindstone 5a in the forward direction and the backward direction was repeated one pass at a time until the outer diameter of the fired body 12 reached 153 mm, and then one spark-out was performed. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when nine joined cylindrical target materials 2 were evaluated visually, one crack was recognized. The results are shown in Table 1.

[Example 11]
(Changing the crossing angle in Example 2)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 10 except that the fired body 12 (IGZO) obtained in the same manner as in Example 2 was used.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when nine joined cylindrical target materials 2 were evaluated visually, one crack was recognized. The results are shown in Table 1.

[Example 12]
(Changing the crossing angle in Example 3)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 10 except that the fired body 12 (AZO) obtained in the same manner as in Example 3 was used.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, two cracks were observed. The results are shown in Table 1.

[Example 13]
(Changing the crossing angle in Example 7)
The fired body 12 (ITO) obtained in the same manner as in Example 1 was processed to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm. First, after processing the outer diameter to 153.2 mm by plunge grinding, the inner diameter was processed to 134.8 mm by plunge grinding.

  Subsequently, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by traverse grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. Finish grinding was performed with one pass for moving the grindstone 6a in the forward direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the forward direction being 300 mm / min, and the rotational speed of the fired body 12 being 70 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 6a in the forward direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the forward direction being 330 mm / min, and the rotational speed of the fired body 12 being 70 rpm.

  The traverse grinding for changing the moving speed of the grindstone 6a in the forward direction is repeated one pass at a time until the inner diameter of the fired body 12 reaches 135 mm, and then the grindstone 6a is moved in the forward and backward directions with a cutting depth of 0. I made two passes of sparking out.

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by traverse grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. Finish grinding was performed with one pass for moving the grindstone 5a in the forward direction with a cutting amount of the grindstone 5a of 0.002 mm, a moving speed of the grindstone 5a in the forward direction of 150 mm / min, and a rotational speed of the fired body 12 of 20 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 5a in the forward direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the forward direction being 165 mm / min, and the rotational speed of the fired body 12 being 20 rpm.

  The traverse grinding for changing the moving speed of the grindstone 5a in the forward direction was repeated one pass at a time until the outer diameter of the fired body 12 reached 153 mm, and then a spark out was performed for one pass. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  Then, the cylindrical target material 2 and the backing tube 3 were joined in the same manner as in Example 1 to produce the cylindrical target 1.

  In the obtained cylindrical target material 2, grinding streaks d in two directions were formed in the plus direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, two cracks were observed. The results are shown in Table 1.

[Example 14]
(Changing the crossing angle in Example 8)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 13 except that the fired body 12 (IGZO) obtained in the same manner as in Example 2 was used.

  In the obtained cylindrical target material 2, grinding streaks d in two directions were formed in the plus direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when nine joined cylindrical target materials 2 were evaluated visually, one crack was recognized. The results are shown in Table 1.

[Example 15]
(Changing the crossing angle in Example 9)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 13 except that the fired body 12 (AZO) obtained in the same manner as in Example 3 was used.

  In the obtained cylindrical target material 2, grinding streaks d in two directions were formed in the plus direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when nine joined cylindrical target materials 2 were evaluated visually, one crack was recognized. The results are shown in Table 1.

[Example 16]
(Surface roughness Ra change of Example 1)
Example 1 except that the abrasive grain size of the grindstone 6a for grinding the inner peripheral surface 12b of the fired body 12 (ITO) is # 80 and the abrasive grain size of the grindstone 5a for grinding the outer peripheral surface 12a is # 140. Similarly, the cylindrical target material 2 and the cylindrical target 1 were produced.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when nine joined cylindrical target materials 2 were evaluated visually, one crack was recognized. The results are shown in Table 1.

[Example 17]
(Surface roughness Ra change of Example 2)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 16 except that the fired body 12 (IGZO) obtained in the same manner as in Example 2 was used.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when nine joined cylindrical target materials 2 were evaluated visually, one crack was recognized. The results are shown in Table 1.

[Example 18]
(Surface roughness Ra change of Example 3)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Example 16 except that the fired body 12 (AZO) obtained in the same manner as in Example 3 was used.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed in the positive direction and the negative direction on both the inner peripheral surface 12b and the outer peripheral surface 12a. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, two cracks were observed. The results are shown in Table 1.

[Example 19]
(Only the inner peripheral surface is reciprocating traverse finish grinding)
The fired body 12 (ITO) obtained in the same manner as in Example 1 was processed to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm. First, after processing the outer diameter to 153.2 mm by plunge grinding, the inner diameter was processed to 134.8 mm by plunge grinding.

  Subsequently, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by traverse grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. One pass for moving the grindstone 6a from the end e1 to the end e2 in the forward direction, the cutting amount of the grindstone 6a is 0.01 mm, the moving speed of the grindstone 6a in the cylindrical axis direction (forward direction) is 300 mm / min, and the fired body 12 Finishing grinding was performed at a rotational speed of 70 rpm.

  Next, one pass for moving the grindstone 6a from the end portion e2 to the end portion e1 in the retreating direction is 0.01 mm, the cutting amount of the grindstone 6a is 0.01 mm, the moving speed of the grindstone 6a in the cylindrical axis direction (retreating direction) is 300 mm / min. Finish grinding was performed at a rotational speed of the body 12 of 70 rpm.

  The traverse grinding for moving the grindstone 6a in the forward and backward directions is repeated one pass at a time until the inner diameter of the fired body 12 reaches 135 mm, and then the grindstone 6a is moved in the forward and backward directions with a cutting depth of 0. Spark out was performed 2 passes (that is, 1 round trip).

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by traverse grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. Finish grinding was performed with one pass for moving the grindstone 5a in the forward direction with a cutting amount of the grindstone 5a of 0.002 mm, a moving speed of the grindstone 5a in the forward direction of 150 mm / min, and a rotational speed of the fired body 12 of 20 rpm.

  The traverse grinding with the moving direction and moving speed constant in the forward direction of the grindstone 5a was repeated until the outer diameter of the fired body 12 became 153 mm, and then spark-out was performed for two passes. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  Then, the cylindrical target material 2 and the backing tube 3 were joined in the same manner as in Example 1 to produce the cylindrical target 1.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed only on the inner peripheral surface 12b in the plus direction and the minus direction, respectively. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, two cracks were observed. The results are shown in Table 1.

[Example 20]
(Only the outer peripheral surface is reciprocating traverse finish grinding)
The fired body 12 (ITO) obtained in the same manner as in Example 1 was processed to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm. First, after processing the outer diameter to 153.2 mm by plunge grinding, the inner diameter was processed to 134.8 mm by plunge grinding.

  Subsequently, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by traverse grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. Finish grinding was performed with one pass for moving the grindstone 6a in the forward direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the forward direction being 300 mm / min, and the rotational speed of the fired body 12 being 70 rpm.

  The traverse grinding with a constant moving direction and moving speed in the forward direction of the grindstone 5a was repeated until the inner diameter of the fired body 12 reached 135 mm, and then spark-out was performed for two passes.

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by traverse grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. Finish grinding was performed with one pass for moving the grindstone 5a in the forward direction with a cutting amount of the grindstone 5a of 0.002 mm, a moving speed of the grindstone 5a in the forward direction of 150 mm / min, and a rotational speed of the fired body 12 of 20 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 5a in the retreat direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the retreat direction being 150 mm / min, and the rotational speed of the fired body 12 being 20 rpm.

  The traverse grinding for moving the grindstone 5a in the forward direction and the backward direction was repeated one pass at a time until the outer diameter of the fired body 12 reached 153 mm, and then two spark-outs were performed. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  Then, the cylindrical target material 2 and the backing tube 3 were joined in the same manner as in Example 1 to produce the cylindrical target 1.

  In the obtained cylindrical target material 2, grinding lines d in one direction were formed only on the outer peripheral surface 12a in the plus direction and the minus direction, respectively. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, two cracks were observed. The results are shown in Table 1.

[Example 21]
(Traverse grinding by changing the moving speed of the grinding wheel on both the inner and outer peripheral surfaces)
The fired body 12 (ITO) obtained in the same manner as in Example 1 was processed to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm. First, after processing the outer diameter to 153.2 mm by plunge grinding, the inner diameter was processed to 134.8 mm by plunge grinding.

  Subsequently, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by traverse grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. One pass for moving the grindstone 6a from the end e1 to the end e2 in the forward direction, the cutting amount of the grindstone 6a is 0.01 mm, the moving speed of the grindstone 6a in the cylindrical axis direction (forward direction) is 300 mm / min, and the fired body 12 Finishing grinding was performed at a rotational speed of 70 rpm.

  Next, one pass for moving the grindstone 6a from the end portion e2 to the end portion e1 in the retreating direction is 0.01 mm, the cutting amount of the grindstone 6a is 0.01 mm, the moving speed of the grindstone 6a in the cylindrical axis direction (retreating direction) is 300 mm / min. Finish grinding was performed at a rotational speed of the body 12 of 70 rpm.

  Subsequently, one pass for moving the grindstone 6a in the forward direction from the end e1 to the end e2 is as follows: the cutting amount of the grindstone 6a is 0.01 mm, the moving speed of the grindstone 6a in the cylindrical axis direction (forward direction) is 70 mm / min, Finish grinding was performed with the rotational speed of the fired body 12 being 150 rpm.

  Further, one pass for moving the grindstone 6a from the end e2 to the end e1 in the retreating direction is 0.01 mm in depth of the grindstone 6a, the moving speed of the grindstone 6a in the cylindrical axis direction (retreating direction) is 70 mm / min, firing Finish grinding was performed at a rotational speed of the body 12 of 150 rpm.

  The traverse grinding performed by moving the grindstone 6a in the forward and backward directions while changing the moving speed of the grindstone 6a and the rotational speed of the calcined body 12 is performed one pass at a time until the inner diameter of the calcined body 12 reaches 135 mm. After repeating, spark out was performed 2 passes (that is, 1 round trip).

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by traverse grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. Finish grinding was performed with one pass for moving the grindstone 5a in the forward direction with a cutting amount of the grindstone 5a of 0.002 mm, a moving speed of the grindstone 5a in the forward direction of 150 mm / min, and a rotational speed of the fired body 12 of 20 rpm.

  Next, finish grinding was performed with one pass for moving the grindstone 5a in the retreat direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the retreat direction being 150 mm / min, and the rotational speed of the fired body 12 being 20 rpm.

  Subsequently, finish grinding was performed with one pass for moving the grindstone 5a in the forward direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the backward direction being 50 mm / min, and the rotational speed of the fired body 12 being 100 rpm. .

  Further, finish grinding was performed with one pass for moving the grindstone 5a in the retreating direction, with the cutting amount of the grindstone 5a being 0.002 mm, the moving speed of the grindstone 5a in the retreating direction being 50 mm / min, and the rotational speed of the fired body 12 being 100 rpm.

  The traverse grinding performed by moving the grindstone 5a in the forward and backward directions while changing the moving speed of the grindstone 5a and the rotational speed of the calcined body 12 is performed for one pass until the outer diameter of the calcined body 12 reaches 153 mm. After repeating each time, spark out was performed for two passes. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  Then, the cylindrical target material 2 and the backing tube 3 were joined in the same manner as in Example 1 to produce the cylindrical target 1.

  In the obtained cylindrical target material 2, grinding streaks d in two directions were formed on the inner peripheral surface 12b and the outer peripheral surface 12a in the plus direction and the minus direction, respectively. The intersection angle θ3 was calculated from θ3 = | θ1-θ2 | in the same manner as in Example 1. Further, for the nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated respectively. Moreover, when the nine cylindrical target materials 2 joined were visually evaluated, no cracks were observed. The results are shown in Table 1.

[Comparative Example 1]
(Plunge finish grinding)
The fired body 12 (ITO) obtained in the same manner as in Example 1 was processed to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm. First, after processing the outer diameter to 153.2 mm by plunge grinding, the inner diameter was processed to 134.8 mm by plunge grinding.

  Next, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by plunge grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. Finish grinding was performed with the cutting speed of the grindstone 6a being 0.03 mm / min and the rotational speed of the fired body 12 being 70 rpm until the inner diameter of the fired body 12 was 135 mm, and then grinding was performed for 5 seconds with a cutting depth of 0.

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by plunge grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. Finish grinding was performed with the cutting speed of the grindstone 5a being 0.04 mm / min and the rotational speed of the fired body 12 being 20 rpm until the outer diameter of the fired body 12 was 153 mm, and then grinding was performed for 5 seconds with an infeed amount of 0. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  Then, the cylindrical target material 2 and the backing tube 3 were joined in the same manner as in Example 1 to produce the cylindrical target 1.

  In the obtained cylindrical target material 2, the grinding streak d in the same direction as the straight line L <b> 2 was formed on both the inner peripheral surface 12 b and the outer peripheral surface 12 a. In nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated. Moreover, when nine joined cylindrical target materials 2 were visually evaluated, cracks were recognized in four. The results are shown in Table 1.

[Comparative Example 2]
(Plunge finish grinding)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Comparative Example 1 except that the fired body 12 (IGZO) obtained in the same manner as in Example 2 was used.

  In the obtained cylindrical target material 2, the grinding streak d in the same direction as the straight line L <b> 2 was formed on both the inner peripheral surface 12 b and the outer peripheral surface 12 a. In nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated. Moreover, when nine joined cylindrical target materials 2 were visually evaluated, cracks were recognized in four. The results are shown in Table 1.

[Comparative Example 3]
(Plunge finish grinding)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Comparative Example 1 except that the fired body 12 (AZO) obtained in the same manner as in Example 3 was used.

  In the obtained cylindrical target material 2, the grinding streak d in the same direction as the straight line L <b> 2 was formed on both the inner peripheral surface 12 b and the outer peripheral surface 12 a. In nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated. Moreover, when nine joined cylindrical target materials 2 were evaluated visually, five cracks were recognized. The results are shown in Table 1.

[Comparative Example 4]
(One-way traverse finish grinding for both inner and outer peripheral surfaces)
The fired body 12 (ITO) obtained in the same manner as in Example 1 was processed to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm. First, after processing the outer diameter to 153.2 mm by plunge grinding, the inner diameter was processed to 134.8 mm by plunge grinding.

  Subsequently, finish grinding of the inner peripheral surface 12b of the fired body 12 was performed by traverse grinding. As the grindstone 6a, one having vitrified binder and an abrasive grain size of # 170 was used. Finish grinding was performed with one pass for moving the grindstone 6a in the forward direction, with the cutting amount of the grindstone 6a being 0.01 mm, the moving speed of the grindstone 6a in the forward direction being 300 mm / min, and the rotational speed of the fired body 12 being 70 rpm.

  The traverse grinding with the moving direction and speed constant in the forward direction of the grindstone 6a was repeated until the inner diameter of the fired body 12 reached 135 mm, and then spark-out was performed for two passes.

  Subsequently, finish grinding of the outer peripheral surface 12a of the fired body 12 was performed by traverse grinding. As the grindstone 5a, one having vitrified binder and an abrasive grain size of # 600 was used. Finish grinding was performed with one pass for moving the grindstone 5a in the forward direction with a cutting amount of the grindstone 5a of 0.002 mm, a moving speed of the grindstone 5a in the forward direction of 150 mm / min, and a rotational speed of the fired body 12 of 20 rpm.

  The traverse grinding with the moving direction and speed constant in the forward direction of the grindstone 5a was repeated until the outer diameter of the fired body 12 became 153 mm, and then spark-out was performed for two passes. Finally, both ends of the fired body 12 were cut into a length of 300 mm to produce a cylindrical target material 2 having an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 300 mm.

  Then, the cylindrical target material 2 and the backing tube 3 were joined in the same manner as in Example 1 to produce the cylindrical target 1.

  In the obtained cylindrical target material 2, a grinding streak d in one direction was formed in the plus direction on both the inner peripheral surface 12 b and the outer peripheral surface 12 a. In nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated. Moreover, when nine joined cylindrical target materials 2 were visually evaluated, cracks were recognized in four. The results are shown in Table 1.

[Comparative Example 5]
(One-way traverse finish grinding for both inner and outer peripheral surfaces)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Comparative Example 4 except that the fired body 12 (IGZO) obtained in the same manner as in Example 2 was used.

  In the obtained cylindrical target material 2, a grinding streak d in one direction was formed in the plus direction on both the inner peripheral surface 12 b and the outer peripheral surface 12 a. In nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated. Moreover, when nine joined cylindrical target materials 2 were visually evaluated, cracks were observed in three of them. The results are shown in Table 1.

[Comparative Example 6]
(One-way traverse finish grinding for both inner and outer peripheral surfaces)
A cylindrical target material 2 and a cylindrical target 1 were produced in the same manner as in Comparative Example 4 except that the fired body 12 (AZO) obtained in the same manner as in Example 3 was used.

  In the obtained cylindrical target material 2, a grinding streak d in one direction was formed in the plus direction on both the inner peripheral surface 12 b and the outer peripheral surface 12 a. In nine cylindrical target materials 2, the surface roughness Ra on the inner peripheral surface 12b and the outer peripheral surface 12a was measured, and the average was calculated. Moreover, when nine joined cylindrical target materials 2 were evaluated visually, five cracks were recognized. The results are shown in Table 1.

  Further effects and modifications can be easily derived by those skilled in the art. Thus, the broader aspects of the present invention are not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications can be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

1 Cylindrical sputtering target (cylindrical target)
2 Target material for cylindrical sputtering target (cylindrical target material)
3 Backing tube 4 Bonding material 5a, 6a Grinding wheel 5b, 6b Shaft 6 Area 12 Firing body (target material)
12a Outer peripheral surface 12b Inner peripheral surface

Claims (10)

At least one of the outer peripheral surface your good beauty inner peripheral surface of the ceramic sputtering target material, the grinding direction has two or more different grinding streaks, cylindrical sputtering target target material. The straight line L1 parallel to the cylinder axis and the horizontal axis passes through the intersection point P of the grinding scan di and the straight line L1, when defining a plane and the vertical axis perpendicular straight line L2 to the straight line L1, before Symbol 2 or more The target material for a cylindrical sputtering target according to claim 1, wherein said grinding stripe has both positive and negative angles with respect to said straight line L2 . The straight line L1 parallel to the cylinder axis and the horizontal axis passes through the intersection point P of the grinding scan di and the straight line L1, when defining a plane and the vertical axis perpendicular straight line L2 to the straight line L1, before Symbol 2 or more grinding streaks, and have a only one of the positive and negative angles with respect to the straight line L2, the cylindrical sputtering target target material of claim 1. The two or more grinding streaks, a grindstone for grinding the sputtering target material or the sputtering target material, is moved forward and backward in the cylinder axis direction parallel the sputtering target material in both directions to the forward and backward movement is formed by grinding The target material for cylindrical sputtering targets according to any one of claims 1 to 3 . The two or more grinding lines are formed by traverse grinding for grinding the sputtering target material while performing at least one movement of the sputtering target material and the grinding stone for grinding the sputtering target material at a speed of two or more. The target material for cylindrical sputtering targets as described in any one of Claims 1-4 . Before SL 2 or more grinding streaks intersect at an angle less than 15 ° 0.3 ° or more, the cylindrical sputtering target target material according to any one of claims 1 to 5. The cylindrical sputtering target according to any one of claims 1 to 6 , wherein a surface roughness Ra of the outer peripheral surface and the inner peripheral surface having the two or more grinding lines is 1.5 µm or less. Target material. Wherein also the outer peripheral surface contact and the inner peripheral surface one, you have the above-described grinding streaks in the direction of 2 or more, the cylindrical sputtering target target material according to any one of claims 1 to 7. The target material for cylindrical sputtering targets according to any one of claims 1 to 8, wherein the sputtering target material is ITO, IGZO, or AZO . A target material for a cylindrical sputtering target according to any one of claims 1 to 9,
A backing tube bonded to the target material for the cylindrical sputtering target via a bonding material;
A cylindrical sputtering target.

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