JPS61284370A - High-speed grinding method for internal surface of ceramics - Google Patents
High-speed grinding method for internal surface of ceramicsInfo
- Publication number
- JPS61284370A JPS61284370A JP12674985A JP12674985A JPS61284370A JP S61284370 A JPS61284370 A JP S61284370A JP 12674985 A JP12674985 A JP 12674985A JP 12674985 A JP12674985 A JP 12674985A JP S61284370 A JPS61284370 A JP S61284370A
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- diamond
- grinder
- internal surface
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明はセラミックス材の加工物内径を高速かつ精密
に研削仕上けるセラミックスの内面高速研削加工法に関
するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for high-speed grinding of the inner surface of ceramics for finishing the inner diameter of a ceramic workpiece at high speed and precision.
(従来技術と技術的課題)
従来、窒化珪素””5N4sジルコニアzro□、炭化
mesis、アルミナAl2O3などの高硬度かつ密度
の高いセラミックス材は、従来の金属研削加工法と同一
の手法で研削加工を行なうとなると極めて長時間を要す
ることになシ、殆んど研削不可能であって実用的でなか
った。特に上記セラミックス材の加工物内面の研削加工
は砥石と加工物の接触弧が長く、砥石軸の剛性不足もあ
って今までにもダイヤモンド砥石を使用して各種の夫々
独立した加工手法でいろいろ試みられているが、十分な
効果が全く得られなくて、セラミックスの内面高速研削
加工は殆んど不可能視されている−のが現在の斯界の趨
勢である。(Prior art and technical issues) Conventionally, high hardness and high density ceramic materials such as silicon nitride, 5N4S zirconia ZRO□, Mesis carbide, and alumina Al2O3 have been grinded using the same method as the conventional metal grinding method. If this were to be done, it would take an extremely long time, and it would be almost impossible to grind, making it impractical. In particular, when grinding the inner surface of the ceramic workpiece mentioned above, the arc of contact between the grinding wheel and the workpiece is long, and the grinding wheel shaft lacks rigidity, so many attempts have been made using diamond grinding wheels and various independent processing methods. However, the current trend in this field is that no sufficient effect can be obtained, and high-speed grinding of the inner surface of ceramics is considered almost impossible.
そこでこの発明は、従来不可能視されていた各櫨セラミ
ックス材の加工物内面を高速かつ精密に研削仕上げ加工
できる加工法を提供することを技術的課題とする。Therefore, the technical object of the present invention is to provide a processing method that can grind and finish the inner surface of a workpiece made of Hashi ceramic materials at high speed and precision, which has been thought to be impossible in the past.
(技術的手段)
この発明のセ”ラミックスの内面高速研削加工法は、ダ
イヤモンド砥石に高圧の冷却水を噴射して、−該砥石の
目づまりの原因となる研削粉を除去しつつ、同時に冷却
することにより高熱によるダイヤモンド切れ刃の焼損及
び剥離を防止しなからCNO制御により砥石切込み台及
び工作主軸台を制御、プランジカーブドを重畳して各種
セラミックス材の加工物穴内面を所定の寸法まで高速で
切込み、次いでトラバースカットを加えて仕上げること
を特徴とするものである。(Technical means) The high-speed internal grinding method for ceramics of the present invention involves injecting high-pressure cooling water onto a diamond grinding wheel to remove grinding powder that causes clogging of the grinding wheel and cooling it at the same time. This prevents burnout and peeling of the diamond cutting edge due to high heat, and controls the grindstone cutting head and work headstock using CNO control, and superimposes the plunge curve to quickly cut the inner surface of the workpiece hole of various ceramic materials to the specified size. It is characterized by making a notch, then adding a traverse cut to finish.
次にこの発明を図面について説明する。Next, this invention will be explained with reference to the drawings.
先ず/は穴内面2を有する加工物で、工作主軸台の主軸
にチャック制止されている。3は砥石スピンドル≠に取
付けられたダイヤモンド砥石、3は冷却水噴射管である
。なお砥石スピンドル弘は高い剛性を必要とするため、
砥石タイルの材質はタングステン合金製のヘビーメタル
を使用し、スピンドル大径化のため、オイルエア一方式
を採用する。また砥石は電着法によるダイヤモンド砥石
3を使用するもので、ノン下レッシングトスる。First, / is a workpiece having a hole inner surface 2, which is chucked to the main spindle of a work headstock. 3 is a diamond grindstone attached to a grindstone spindle, and 3 is a cooling water injection pipe. In addition, since the grinding wheel spindle Hiroshi requires high rigidity,
The grindstone tiles are made of tungsten alloy heavy metal, and an oil-air type is used to increase the diameter of the spindle. Further, a diamond grinding wheel 3 made by electrodeposition is used as a grinding wheel, and the diamond grinding wheel 3 is used without grinding.
即ち加工物/及びダイヤモンド砥石3を夫々反対方向に
高速U転させ、ダイヤモンド砥石3に高圧の冷却水を冷
却水噴射管jから噴射して、該砥石3の目づt9及び冷
却することによってダイヤモンド切れ刃の焼損並びに剥
離を防止しながら、毎分3.!;mMの切込み速度によ
りラシアル方向にプランジカットを重畳して繰9返し、
所定の寸法まで切り込んだのち、トラバースカットを2
〜3回繰シ返して仕上げ加工を完了するものである。That is, the workpiece/and the diamond grinding wheel 3 are rotated at high speed in opposite directions, and high-pressure cooling water is injected to the diamond grinding wheel 3 from the cooling water injection pipe j, and the diamond grinding wheel 3 is cut and cooled. 3.5 mm per minute while preventing burnout and peeling of the cutting edge. ! ; Plunge cuts were superimposed in the radial direction at a cutting speed of mm and repeated 9 times;
After cutting to the specified dimensions, make 2 traverse cuts.
Finishing is completed by repeating ~3 times.
特にこのプランジ研削なしではセラミックス材の内面高
速研削は望めない。In particular, high-speed internal grinding of ceramic materials cannot be expected without plunge grinding.
なおまたダイヤモンド砥石のドレッシングを経済的に行
う適切な方法がないため、高圧(75に9/e11)の
冷却水を研削動作中のダイヤモンド砥石に噴射して砥石
の目詰シを防止すると共に、高速(周速/roo〜ro
ootn/1nin)、重研削により発生する高熱によ
る砥粒の焼損、剥離、脱落を防止するものである。Furthermore, since there is no suitable method for economically dressing a diamond grinding wheel, high-pressure (75 to 9/e11) cooling water is injected onto the diamond grinding wheel during grinding to prevent clogging of the grinding wheel. High speed (peripheral speed/roo~ro
This prevents abrasive grains from being burnt out, peeled off, or fallen off due to the high heat generated during heavy grinding.
(発明の効果) 次に実施例を挙げてこの発明の効果を述べる。(Effect of the invention) Next, the effects of this invention will be described with reference to Examples.
実施例
セラミックス材 (窒化珪素、ビッカース硬度/ 60
0に9/rr M)゛の穴径sofP1mIx研削長さ
10O#nの場合で、かつダイヤモン下砥石径≠j;m
ml X幅2Qmmの場合、プランジカット6回の後、
トラバースカット2〜3回行って研削取υ代半径7mm
の際、加工時間3分10秒であって従来の加工法の約7
750時間であった。Example ceramic material (silicon nitride, Vickers hardness/60
0 to 9/rr M)゛ hole diameter sofP1mIx grinding length 10O#n, and diamond lower grinding wheel diameter≠j;m
ml x width 2Qmm, after 6 plunge cuts,
Traverse cut 2 to 3 times and grind to a radius of 7mm
In this case, the processing time was 3 minutes and 10 seconds, which was about 7 seconds using the conventional processing method.
It was 750 hours.
叙上のように、この発明は、高剛化された砥石スピンド
ルにノンドレッシングの電着法によるダイヤモンド砥石
を使用して、高圧冷却水を研削作動中の該ダイヤモンド
砥石に噴射し、プランジ重畳研削とトラバース研削との
複合研削法を採用することによって、従来殆んど不可能
視されていたセラミックス材の内面高速研削加工が安定
して、かつ高精度に実現できるようになった。As described above, the present invention uses a diamond grinding wheel made by non-dressing electrodeposition on a highly rigid grinding wheel spindle, injects high pressure cooling water to the diamond grinding wheel during grinding operation, and performs plunge superposition grinding. By adopting a combined grinding method of grinding and traverse grinding, it has become possible to stably and accurately grind the internal surface of ceramic materials at high speed, which was previously considered almost impossible.
図面はこの発明の実施例を示すもので、第1図は加工状
態の説明図、第2図は砥石の行程図である。
/0.加工物、26.穴内面、30.ダイヤモンド砥石
、10.砥石スピンドル、50.冷却水噴射管特許出願
人 大成機械株式会社
6115人:0恒罹−■−−長一ノ11酒1174ミ第
1図
第2図
21.穴内面
31.ダイヤモンド砥石
≠ 0.砥石スピンドル
よ2.冷却水噴射管The drawings show an embodiment of the present invention, and FIG. 1 is an explanatory diagram of the processing state, and FIG. 2 is a diagram of the stroke of the grindstone. /0. Processed product, 26. Inner surface of hole, 30. Diamond whetstone, 10. Grinding wheel spindle, 50. Cooling water injection pipe patent applicant Taisei Kikai Co., Ltd. 6115 people: 0 Koichi No. 11 Liquor 1174 Mi Figure 1 Figure 2 Figure 21. Hole inner surface 31. Diamond whetstone ≠ 0. Grindstone spindle 2. cooling water injection pipe
Claims (1)
目づまりの原因となる研削粉を除去しつつ、かつ高熱に
よるダイヤモンド切れ刃の焼損及び剥離を防止しながら
CNC制御により砥石切込み台及び工作主軸台を制御、
プランジカットを重畳して各種セラミックス材の加工物
穴内面を所定の寸法まで高速で切込み、次いでトラバー
スカットを加えて仕上げることを特徴とするセラミック
スの内面高速研削加工法。High-pressure cooling water is injected onto the diamond grinding wheel to remove grinding powder that causes clogging of the grinding wheel, while also preventing burnout and peeling of the diamond cutting edge due to high heat. control the stand,
A high-speed grinding method for the internal surface of ceramics, which is characterized by superimposing plunge cuts to cut the inner surface of the workpiece hole of various ceramic materials to a predetermined dimension at high speed, and then finishing by adding a traverse cut.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12674985A JPS61284370A (en) | 1985-06-11 | 1985-06-11 | High-speed grinding method for internal surface of ceramics |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12674985A JPS61284370A (en) | 1985-06-11 | 1985-06-11 | High-speed grinding method for internal surface of ceramics |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61284370A true JPS61284370A (en) | 1986-12-15 |
JPH0448580B2 JPH0448580B2 (en) | 1992-08-07 |
Family
ID=14942957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12674985A Granted JPS61284370A (en) | 1985-06-11 | 1985-06-11 | High-speed grinding method for internal surface of ceramics |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61284370A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996002356A1 (en) * | 1994-07-14 | 1996-02-01 | Zf Friedrichshafen Ag | Device for carrying out a process that avoids overstressing a workpiece during grinding |
JP2002307305A (en) * | 2001-04-17 | 2002-10-23 | Okamoto Machine Tool Works Ltd | Skip shift plunge grinding method for cylindrical workpiece |
JP2002331446A (en) * | 2001-05-08 | 2002-11-19 | Okamoto Machine Tool Works Ltd | Grinding device of cylindrical work having repetitive profile and shift plunge grinding method of cylindrical work |
JP2016176148A (en) * | 2014-08-22 | 2016-10-06 | 三井金属鉱業株式会社 | Manufacturing method of target material for cylindrical sputtering target |
JP2017082280A (en) * | 2015-10-27 | 2017-05-18 | 住友金属鉱山株式会社 | Cylindrical sputtering target and method for manufacturing the same |
-
1985
- 1985-06-11 JP JP12674985A patent/JPS61284370A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996002356A1 (en) * | 1994-07-14 | 1996-02-01 | Zf Friedrichshafen Ag | Device for carrying out a process that avoids overstressing a workpiece during grinding |
JP2002307305A (en) * | 2001-04-17 | 2002-10-23 | Okamoto Machine Tool Works Ltd | Skip shift plunge grinding method for cylindrical workpiece |
JP2002331446A (en) * | 2001-05-08 | 2002-11-19 | Okamoto Machine Tool Works Ltd | Grinding device of cylindrical work having repetitive profile and shift plunge grinding method of cylindrical work |
JP2016176148A (en) * | 2014-08-22 | 2016-10-06 | 三井金属鉱業株式会社 | Manufacturing method of target material for cylindrical sputtering target |
JP2017082280A (en) * | 2015-10-27 | 2017-05-18 | 住友金属鉱山株式会社 | Cylindrical sputtering target and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JPH0448580B2 (en) | 1992-08-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |