JPH10118940A - Grinding wheel and grinding liquid supply method - Google Patents

Grinding wheel and grinding liquid supply method

Info

Publication number
JPH10118940A
JPH10118940A JP8297498A JP29749896A JPH10118940A JP H10118940 A JPH10118940 A JP H10118940A JP 8297498 A JP8297498 A JP 8297498A JP 29749896 A JP29749896 A JP 29749896A JP H10118940 A JPH10118940 A JP H10118940A
Authority
JP
Japan
Prior art keywords
grinding
grinding fluid
fluid
grinding wheel
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8297498A
Other languages
Japanese (ja)
Inventor
Yasushi Yoshitomi
靖 吉富
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP8297498A priority Critical patent/JPH10118940A/en
Publication of JPH10118940A publication Critical patent/JPH10118940A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To improve a cooling performance in a grinding part and also carry out a super precise finish grinding. SOLUTION: This grinding wheel 11 is constituted so that an abrasive grain layer 15 is installed around a grinding wheel pedestal 14 and work is ground at the surface of the grain layer 15 by being rotated. A grinding liquid supply groove 14a as a 'grinding liquid receiver' for receiving the grinding liquid injected from a grinding liquid nozzle is formed on the side surface of the grinding wheel pedestal 14 and also a grinding liquid pipe road 14b for guiding the grinding liquid from the grinding liquid supply groove 14a to the grain layer 15 is formed on the grinding wheel pedestal 14. The grain layer 15 is formed in porous so that the grinding liquid from the grinding liquid pipe road 14b is seeped out on the surface of the grain layer 15.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、工作物を研削す
る研削砥石、特に、研削液を供給するための改良が施さ
れた研削砥石及び、この研削砥石を使用した研削液供給
方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grinding wheel for grinding a workpiece, and more particularly to a grinding wheel improved to supply a grinding fluid and a method for supplying a grinding fluid using the grinding wheel. is there.

【0002】[0002]

【従来の技術】一般に、研削加工においては、図4に示
すように、高速で回転する研削砥石1を使って工作物2
を研削して行くため、研削部の温度上昇が大きく、その
ままでは工作物2の焼け、割れ、加工変質層の生成等が
発生する可能性が高い。また、研削砥石1においても高
温になることによる研削砥石1の磨耗が生じ、砥石1の
寿命が短くなる、という問題がある。
2. Description of the Related Art Generally, in a grinding process, as shown in FIG.
, The temperature rise of the grinding portion is large, and as it is, there is a high possibility that the workpiece 2 will be burned, cracked, and a damaged layer will be formed. Further, there is also a problem that the grinding wheel 1 is worn due to the high temperature, and the life of the grinding wheel 1 is shortened.

【0003】この問題を解決するためには、研削砥石1
と工作物2の接触点に研削液ノズル3から研削液をか
け、研削砥石1と工作物2の温度を下げることが一般的
に行われている。この研削液としては、水道水、水溶性
の研削液、あるいは非水溶性の研削液等がある。また、
より冷却効果を高めるために、通常の研削液の代わり
に、温度が極めて低い液体窒素をかける等の方法も採ら
れている。
In order to solve this problem, a grinding wheel 1
It is common practice to apply a grinding fluid from a grinding fluid nozzle 3 to a contact point between the grinding wheel 1 and the workpiece 2. Examples of the grinding fluid include tap water, a water-soluble grinding fluid, and a non-water-soluble grinding fluid. Also,
In order to further enhance the cooling effect, a method of applying liquid nitrogen having a very low temperature instead of a normal grinding liquid has been adopted.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、一般的
な研削加工では研削砥石1が高速で回転しているため、
砥石1の表面近傍では、ごく薄い空気層が砥石1と一緒
に高速で回転している。このため、研削部を冷却するた
めに外部から液を供給しても、実際の研削部に正確に冷
却水たる研削液が供給されないことがある。特に、加工
能率の向上に効果があるとされている砥石周速が100
m/s以上にもなる高速研削においては、研削液の研削
部への供給がさらに不十分になる。
However, in a general grinding process, the grinding wheel 1 is rotating at a high speed.
In the vicinity of the surface of the grindstone 1, a very thin air layer is rotating at a high speed together with the grindstone 1. For this reason, even when a liquid is externally supplied to cool the grinding unit, the grinding liquid, which is a cooling water, may not be accurately supplied to the actual grinding unit. In particular, the peripheral speed of the grindstone, which is said to be effective in improving the machining efficiency, is 100
In high-speed grinding at m / s or more, the supply of the grinding fluid to the grinding portion becomes further insufficient.

【0005】このような場合、工作物2が高温になり、
表面が焼けてしまったり、加工後の残留応力が増加する
こと等による加工面の劣化などが生じ、工作物2の精度
劣化、良品率の低下につながる、という問題が生じてい
る。
In such a case, the temperature of the workpiece 2 becomes high,
There is a problem that the surface is burned, the processed surface is deteriorated due to an increase in residual stress after the processing, and the like, which leads to a deterioration in accuracy of the workpiece 2 and a decrease in the yield rate.

【0006】また、研削部の温度が上昇すると、研削砥
石1の砥粒や結合材の磨耗が進行するため、研削砥石1
の研削能力の低下による加工面の劣化や、研削砥石1の
切れ味を向上させるためのドレッシング作業の増加によ
る加工能率の低下などの問題が生じている。特に、ガラ
スやセラミックなどの研削加工では工作物2の硬度が高
いため、研削砥石1としてダイヤモンド砥石を使用する
ことが多いが、研削部の冷却が十分でない場合には、研
削砥石1の磨耗が非常に大きくなる。
[0006] When the temperature of the grinding section rises, the abrasive grains and the binder of the grinding wheel 1 wear away, so that the grinding wheel 1
There are problems such as deterioration of the machined surface due to a decrease in the grinding ability of the steel, and a decrease in machining efficiency due to an increase in dressing work for improving the sharpness of the grinding wheel 1. In particular, in the grinding of glass or ceramic, the hardness of the workpiece 2 is high, so that a diamond grindstone is often used as the grinding grindstone 1. Very large.

【0007】これらの問題解決のために、通常のポンプ
でなく、高圧で研削液を研削部へ噴射させるなどの方法
も提案されているが、加工精度が0.1μm程度が要求
されるような超精密仕上げ研削の場合には、研削砥石1
や工作物2に作用する力によって加工誤差が生じる等の
問題点がある。
In order to solve these problems, a method of injecting a grinding fluid at a high pressure into the grinding portion instead of a normal pump has been proposed. However, such a method requires a processing accuracy of about 0.1 μm. In case of ultra-precision finish grinding, grinding wheel 1
There is a problem that a machining error occurs due to the force acting on the workpiece 2 or the workpiece 2.

【0008】そこで、この発明は、研削部における冷却
性能を向上させることができると共に、超精密仕上げ研
削も精度良く行うことができる研削砥石及び研削液供給
方法を提供することを課題としている。
Accordingly, an object of the present invention is to provide a grinding wheel and a method of supplying a grinding fluid capable of improving cooling performance in a grinding section and performing ultra-precision finish grinding with high accuracy.

【0009】[0009]

【課題を解決するための手段】かかる課題を達成するた
めに、請求項1に記載の発明は、砥石台金の周囲に砥粒
層が設けられ、回転されることにより、前記砥粒層の表
面で工作物を研削する研削砥石において、前記砥石台金
の側面部に、研削液ノズルから噴射された研削液を受け
る研削液受け部を形成すると共に、前記砥石台金に、該
研削液受け部から前記砥粒層まで研削液を案内する研削
液管路を形成する一方、前記砥粒層は、前記研削液管路
からの研削液が砥粒層表面ににじみ出るように多孔質に
形成した研削砥石としたことを特徴としている。
In order to achieve the above object, the invention according to claim 1 is provided with an abrasive layer around a grindstone base metal, and by rotating the abrasive layer, the abrasive layer is formed. In a grinding wheel for grinding a workpiece on a surface, a grinding fluid receiving portion for receiving a grinding fluid ejected from a grinding fluid nozzle is formed on a side surface of the grinding wheel base, and the grinding fluid receiver is provided on the grinding wheel base. While forming a grinding fluid conduit for guiding the grinding fluid from the portion to the abrasive grain layer, the abrasive grain layer was formed porous so that the grinding fluid from the grinding fluid pipeline oozed to the surface of the abrasive grain layer. It is characterized by a grinding wheel.

【0010】請求項2に記載の発明は、請求項1に記載
の研削砥石を回転させると共に、該研削砥石の研削液受
け部に研削液を噴射させ、該研削液が遠心力により、前
記研削液管路を通して前記砥粒層まで導かれ、該砥粒層
中を多孔質を通して該砥粒層の表面までにじみ出させて
研削部に研削液を供給するようにした研削液供給方法と
したことを特徴とする。
According to a second aspect of the present invention, the grinding wheel according to the first aspect is rotated and a grinding fluid is jetted to a grinding fluid receiving portion of the grinding wheel. A grinding fluid supply method in which the abrasive fluid is guided to the abrasive layer through a liquid conduit, and oozes through the abrasive layer to the surface of the abrasive layer through a porous material to supply the grinding fluid to the grinding unit. Features.

【0011】[0011]

【発明の実施の形態】以下、この発明の実施の形態につ
いて説明する。
Embodiments of the present invention will be described below.

【0012】図1乃至図3には、この発明の実施の形態
を示す。
1 to 3 show an embodiment of the present invention.

【0013】まず構成を説明すると、図1中符号11
は、円形の研削砥石で、この研削砥石11が図示省略の
駆動装置で回転駆動されることにより、円柱形状の工作
物12が研削されるようになっていると共に、この研削
砥石11に研削液を噴射させる研削液ノズル13が配設
されている。
First, the structure will be described.
Is a circular grinding wheel. The grinding wheel 11 is rotatably driven by a drive device (not shown) so that a cylindrical workpiece 12 is ground. A grinding fluid nozzle 13 for injecting is provided.

【0014】具体的には、研削砥石11は、図1及び図
2に示すように、金属製の砥石台金14の周囲に、リン
グ状の砥粒層15が設けられている。
More specifically, as shown in FIGS. 1 and 2, the grinding wheel 11 is provided with a ring-shaped abrasive layer 15 around a metal wheel base 14.

【0015】この砥石台金14には、側面部に、研削砥
石11の中心軸を中心に、「研削液受け部」としてのリ
ング状の研削液供給溝14aが形成され、この研削液供
給溝14aから前記砥粒層15の内面まで放射状に多数
の研削液管路14bが形成されている。
A ring-shaped grinding fluid supply groove 14a as a "grinding fluid receiving portion" is formed on the side surface of the grinding wheel base metal 14 around the central axis of the grinding wheel 11, and the grinding fluid supply groove is formed. A large number of grinding fluid conduits 14b are formed radially from 14a to the inner surface of the abrasive grain layer 15.

【0016】また、その砥粒層15は、ダイヤモンドの
砥粒が結合材で結合され、微細な空孔が多数存在する多
孔質に形成され、この多孔質中を研削液が浸み出るよう
になっている。
The abrasive layer 15 is formed so that diamond abrasive grains are bonded by a bonding material to form a porous body having a large number of fine pores. Has become.

【0017】そして、前記研削液ノズル13が、その研
削砥石11の研削液供給溝14aに臨み、この研削液ノ
ズル13から研削液が、その研削液供給溝14aに噴射
されるようになっている。
The grinding fluid nozzle 13 faces the grinding fluid supply groove 14a of the grinding wheel 11, and the grinding fluid is injected from the grinding fluid nozzle 13 into the grinding fluid supply groove 14a. .

【0018】次に、作用について説明する。Next, the operation will be described.

【0019】研削砥石11及び工作物12をそれぞれ矢
印方向に回転させることにより、工作物12を研削す
る。
The workpiece 12 is ground by rotating the grinding wheel 11 and the workpiece 12 in the directions of the arrows.

【0020】この際に、研削ノズル13から研削液を研
削砥石11側面の研削液供給溝14aに噴射する。この
研削液は、その研削液供給溝14aで受けられ、研削砥
石11が高速で回転していることから、放射状の研削液
管路14bを遠心力により、周縁部の砥粒層15に向け
て流れる。そして、この研削液が、多孔質の砥粒層15
中を浸透して周面ににじみ出る。これにより、砥粒層1
5の研削部が冷却されることとなる。
At this time, a grinding fluid is sprayed from a grinding nozzle 13 into a grinding fluid supply groove 14 a on the side surface of the grinding wheel 11. This grinding fluid is received by the grinding fluid supply groove 14a, and the grinding wheel 11 is rotating at a high speed, so that the radial grinding fluid pipeline 14b is centrifugally moved toward the abrasive layer 15 at the peripheral edge. Flows. Then, the grinding fluid is applied to the porous abrasive layer 15.
Penetrates the inside and oozes out to the surrounding surface. Thereby, the abrasive layer 1
5 will be cooled.

【0021】このように研削液をにじみ出させることに
より、従来のように外部から研削液を掛けるものと比較
すれば、研削砥石11を高速で回転させていても、研削
部に研削液を確実に供給できる。遠心力を利用している
ため、高速で回転すればする程、にじみ出る速度を速く
できることから、十分な研削液の量を供給できる。従っ
て、工作物12の表面が焼けてしまったり、加工後の残
留応力が増加すること等による加工面の劣化などが生じ
ることなく、工作物12の精度が向上すると共に、良品
率が増加する。
By oozing out the grinding fluid in this way, even if the grinding wheel 11 is rotated at a high speed, the grinding fluid can be surely applied to the grinding portion as compared with the conventional method in which the grinding fluid is applied from the outside. Can supply. Since the centrifugal force is used, the higher the speed of rotation, the higher the bleeding speed can be. Therefore, a sufficient amount of grinding fluid can be supplied. Accordingly, the accuracy of the workpiece 12 is improved, and the yield rate is increased, without causing the surface of the workpiece 12 to be burned or deterioration of the processed surface due to an increase in residual stress after the processing.

【0022】また、研削部の温度上昇が抑制されるた
め、研磨砥石11の砥粒層15の砥粒や結合材の磨耗が
進行することなく、研磨砥石11の研削能力の低下によ
る加工面の劣化が抑制されると共に、研磨砥石11の切
れ味を向上させるためのドレッシング作業の減少による
加工能率の向上などが図られる。
Further, since the temperature rise in the grinding portion is suppressed, wear of the abrasive grains and the binder of the abrasive layer 15 of the grinding wheel 11 does not progress, and the grinding surface of the grinding wheel 11 due to a decrease in grinding ability does not progress. Deterioration is suppressed and processing efficiency is improved by reducing dressing work for improving the sharpness of the polishing grindstone 11.

【0023】特に、ガラスやセラミックなどの研削加工
では工作物13の硬度が高いため、研削砥石11として
この実施の形態のようにダイヤモンド砥石を使用するこ
とが多いが、研削部の冷却が十分でない場合には、研削
砥石11の磨耗が非常に多くなる。
In particular, in the grinding of glass or ceramics, the hardness of the workpiece 13 is high, and therefore, a diamond grindstone is often used as the grinding wheel 11 as in this embodiment, but the cooling of the grinding portion is not sufficient. In such a case, the wear of the grinding wheel 11 becomes extremely large.

【0024】すなわち、図3のグラフを見ると、ダイヤ
モンドは、200℃〜400℃付近では、CBNやSi
Cより、かなり硬いのに対し、高温になるに従って急激
に硬度が低下することが分かる。一般的な加工では、研
削部付近の温度は400℃から500℃にもなるといわ
れており、研削液の供給が不十分になるとさらに研削部
の温度が上昇し、砥粒強度の低下が磨耗増大につながっ
ているものと思われる。
That is, looking at the graph of FIG. 3, diamond shows that CBN or Si
C shows that although the hardness is considerably high, the hardness rapidly decreases as the temperature increases. In general processing, it is said that the temperature in the vicinity of the grinding part will be from 400 ° C to 500 ° C. If the supply of the grinding fluid becomes insufficient, the temperature of the grinding part further increases, and the decrease in the abrasive grain strength increases the wear. It seems to be connected to.

【0025】そこで、この実施の形態のように、砥粒層
15の内側から研削液をにじみ出させて、研削部に研削
液を十分に供給することにより、砥粒強度の低下を抑制
できる。
Therefore, as in this embodiment, the grinding fluid is oozed out from the inside of the abrasive grain layer 15 and the grinding fluid is sufficiently supplied to the grinding portion, so that the reduction in the abrasive grain strength can be suppressed.

【0026】また、このように砥粒層15の内側から研
削液をにじみ出させて、研削部に研削液を十分に供給す
るようにすれば、高圧で研削液を研削部へ噴射させる場
合のように、研削砥石11や工作物12に作用する力に
よって加工誤差が生じることがない。従って、0.1μ
m程度の加工精度が要求されるような超精密仕上げ研削
の場合でも、当該加工精度を維持できる。
If the grinding fluid is oozed from the inside of the abrasive grain layer 15 and the grinding fluid is sufficiently supplied to the grinding portion, the grinding fluid is sprayed to the grinding portion at a high pressure. In addition, no processing error occurs due to the force acting on the grinding wheel 11 and the workpiece 12. Therefore, 0.1μ
Even in the case of ultra-precision finish grinding in which a processing accuracy of about m is required, the processing accuracy can be maintained.

【0027】さらに、このように砥粒層15の内側から
研削液をにじみ出させて、研削部に研削液を供給するよ
うにすれば、砥粒層15に研削液が流れる溝や孔を形成
する必要がないことから、以下のような利点が得られ
る。すなわち、砥粒層15に研削液が流れる溝や孔等を
形成すると、高精度の仕上げ面が要求されるセラミック
やガラスなどの硬脆材料の精密研削においては、その溝
等の影響で、砥粒層15表面に連続的な衝撃が加わり、
クラックの発生などが生じ表面粗さが劣化する虞があ
る。これに対して、この発明のように、砥粒層15の内
側から研削液をにじみ出させて、研削部に研削液を供給
するようにすれば、溝等を形成する必要がないため、加
工時の工作物12への衝撃がなくなり、クラックの発生
を防止できる。
Further, if the grinding fluid is oozed out from the inside of the abrasive grain layer 15 and the grinding fluid is supplied to the grinding portion, grooves and holes through which the grinding fluid flows are formed in the abrasive grain layer 15. Since there is no need, the following advantages can be obtained. That is, if grooves or holes through which the grinding fluid flows are formed in the abrasive layer 15, precision grinding of hard and brittle materials such as ceramics and glass requiring a high-precision finished surface is affected by the grooves and the like. A continuous impact is applied to the surface of the grain layer 15,
There is a possibility that cracks are generated and the surface roughness is deteriorated. On the other hand, if the grinding fluid is oozed out from the inside of the abrasive grain layer 15 and the grinding fluid is supplied to the grinding portion as in the present invention, it is not necessary to form a groove or the like. The impact on the workpiece 12 is eliminated, and the occurrence of cracks can be prevented.

【0028】さらにまた、研削液ノズル13から研削砥
石11側面部に設けられた研削液供給溝14aに研削液
を噴射するだけで、研削液管路14b等を介して研削部
に研削液を供給することができるため、研削砥石11の
構造を変えるだけで、研削装置の他の構成を変更する必
要がないと共に、可動しない研削液ノズル13から高速
回転する研削砥石11への研削液の供給のための特別な
構造も必要ない。
Further, the grinding fluid is supplied to the grinding portion via the grinding fluid pipe 14b or the like simply by spraying the grinding fluid from the grinding fluid nozzle 13 into the grinding fluid supply groove 14a provided on the side surface of the grinding wheel 11. Therefore, only by changing the structure of the grinding wheel 11, there is no need to change the other configuration of the grinding device, and the supply of the grinding fluid from the non-movable grinding fluid nozzle 13 to the grinding wheel 11 that rotates at high speed can be performed. No special structure is required.

【0029】[0029]

【発明の効果】以上説明してきたように、請求項1又は
2に記載の発明によれば、砥粒層の表面に研削液をにじ
み出させることにより、従来のように外部から研削液を
掛けるものと比較すれば、研削砥石を高速で回転させて
いても、研削部に研削液を確実に供給できる。遠心力を
利用しているため、高速で回転すればする程、にじみ出
る速度を速くできることから、十分な研削液の量を供給
できる。従って、工作物の表面が焼けてしまったり、加
工後の残留応力が増加すること等による加工面の劣化な
どが生じることなく、工作物の精度が向上すると共に、
良品率を増加させることができる。
As described above, according to the first or second aspect of the present invention, the grinding fluid is applied to the surface of the abrasive grain layer by applying the grinding fluid from the outside as in the prior art. In comparison with the above, the grinding fluid can be reliably supplied to the grinding section even when the grinding wheel is rotated at a high speed. Since the centrifugal force is used, the higher the speed of rotation, the higher the bleeding speed can be. Therefore, a sufficient amount of grinding fluid can be supplied. Therefore, the accuracy of the workpiece is improved without the surface of the workpiece being burned or deterioration of the processed surface due to an increase in residual stress after the processing, etc.
The non-defective rate can be increased.

【0030】また、研削部の温度上昇が抑制されるた
め、研磨砥石の砥粒層の砥粒や結合材の磨耗が進行する
ことなく、研磨砥石の研削能力の低下による加工面の劣
化が抑制されると共に、研磨砥石の切れ味を向上させる
ためのドレッシング作業の減少による加工能率の向上な
どを図ることができる。
In addition, since the temperature rise in the grinding portion is suppressed, the wear of the abrasive grains and the binder in the abrasive layer of the grinding wheel does not progress, and the deterioration of the processed surface due to the reduction in the grinding ability of the grinding wheel is suppressed. At the same time, it is possible to improve the processing efficiency by reducing the dressing work for improving the sharpness of the grinding wheel.

【0031】また、このように砥粒層の内側から研削液
をにじみ出させて、研削部に研削液を十分に供給するよ
うにすれば、高圧で研削液を研削部へ噴射させる場合の
ように、研削砥石や工作物に作用する力によって加工誤
差が生じることがない。従って、0.1μm程度の加工
精度が要求されるような超精密仕上げ研削の場合でも、
当該加工精度を維持できる。
Further, if the grinding fluid is oozed out from the inside of the abrasive layer and the grinding fluid is sufficiently supplied to the grinding portion, the grinding fluid is sprayed to the grinding portion at a high pressure. There is no machining error caused by the force acting on the grinding wheel or the workpiece. Therefore, even in the case of ultra-precision finish grinding that requires processing accuracy of about 0.1 μm,
The processing accuracy can be maintained.

【0032】さらに、このように砥粒層の内側から研削
液をにじみ出させて、研削部に研削液を供給するように
すれば、砥粒層に研削液が流れる溝や孔を形成する必要
がないことから、加工時の工作物への衝撃がなくなり、
クラックの発生を防止できる。
Further, if the grinding fluid is oozed from the inside of the abrasive grain layer and the grinding fluid is supplied to the grinding portion, it is necessary to form grooves and holes through which the grinding fluid flows in the abrasive grain layer. Since there is no impact on the workpiece during machining,
The occurrence of cracks can be prevented.

【0033】さらにまた、研削液ノズルから研削砥石側
面部に設けられた研削液受け部に研削液を噴射するだけ
で、研削液管路等を介して研削部に研削液を供給するこ
とができるため、研削砥石の構造を変えるだけで、研削
装置の他の構成を変更する必要がないと共に、可動しな
い研削液ノズルから高速回転する研削砥石への研削液の
供給のための特別な構造も必要ない、という実用上有益
な効果を発揮する。
Further, the grinding liquid can be supplied to the grinding portion via the grinding liquid pipe or the like simply by spraying the grinding liquid from the grinding liquid nozzle to the grinding liquid receiving portion provided on the side surface of the grinding wheel. Therefore, it is not necessary to change other configurations of the grinding machine only by changing the structure of the grinding wheel, and a special structure is required for supplying the grinding fluid from the stationary grinding fluid nozzle to the high-speed rotating grinding wheel. There is no practical useful effect.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の実施の形態に係る研削状態を示す概
略斜視図である。
FIG. 1 is a schematic perspective view showing a grinding state according to an embodiment of the present invention.

【図2】同実施の形態に係る研削砥石の断面図である。FIG. 2 is a cross-sectional view of the grinding wheel according to the embodiment.

【図3】温度と硬度との関係を示すグラフ図である。FIG. 3 is a graph showing a relationship between temperature and hardness.

【図4】従来例を示す研削状態の概略正面図である。FIG. 4 is a schematic front view showing a conventional example in a grinding state.

【符号の説明】[Explanation of symbols]

11 研削砥石 12 工作物 13 研削液ノズル 14 砥石台金 14a 研削液供給溝(研削液受け部) 14b 研削液管路 15 砥粒層 11 Grinding wheel 12 Workpiece 13 Grinding fluid nozzle 14 Grinding wheel base 14a Grinding fluid supply groove (grinding fluid receiver) 14b Grinding fluid conduit 15 Abrasive layer

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 砥石台金の周囲に砥粒層が設けられ、回
転されることにより、前記砥粒層の表面で工作物を研削
する研削砥石において、 前記砥石台金の側面部に、研削液ノズルから噴射された
研削液を受ける研削液受け部を形成すると共に、前記砥
石台金に、該研削液受け部から前記砥粒層まで研削液を
案内する研削液管路を形成する一方、前記砥粒層は、前
記研削液管路からの研削液が砥粒層表面ににじみ出るよ
うに多孔質に形成したことを特徴とする研削砥石。
An abrasive grain layer is provided around a grindstone base, and is rotated to grind a workpiece on the surface of the grindstone layer. While forming a grinding fluid receiving portion for receiving the grinding fluid injected from the fluid nozzle, the grinding wheel base metal, while forming a grinding fluid conduit for guiding the grinding fluid from the grinding fluid receiving portion to the abrasive layer, The grinding wheel is characterized in that the abrasive layer is formed so as to be porous so that the grinding fluid from the grinding fluid channel oozes to the surface of the abrasive layer.
【請求項2】 請求項1に記載の研削砥石を回転させる
と共に、該研削砥石の研削液受け部に研削液を噴射さ
せ、該研削液が遠心力により、前記研削液管路を通して
前記砥粒層まで導かれ、該砥粒層中を多孔質を通して該
砥粒層の表面までにじみ出させて研削部に研削液を供給
するようにしたことを特徴とする研削液供給方法。
2. The grinding wheel according to claim 1, wherein the grinding wheel is rotated and a grinding fluid is jetted to a grinding fluid receiving portion of the grinding wheel. The grinding fluid passes through the grinding fluid pipeline by centrifugal force. A grinding fluid is supplied to the grinding portion by being guided to the layer and oozing through the abrasive grain layer through the porous material to the surface of the abrasive grain layer.
JP8297498A 1996-10-19 1996-10-19 Grinding wheel and grinding liquid supply method Pending JPH10118940A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8297498A JPH10118940A (en) 1996-10-19 1996-10-19 Grinding wheel and grinding liquid supply method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8297498A JPH10118940A (en) 1996-10-19 1996-10-19 Grinding wheel and grinding liquid supply method

Publications (1)

Publication Number Publication Date
JPH10118940A true JPH10118940A (en) 1998-05-12

Family

ID=17847294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8297498A Pending JPH10118940A (en) 1996-10-19 1996-10-19 Grinding wheel and grinding liquid supply method

Country Status (1)

Country Link
JP (1) JPH10118940A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2004041477A1 (en) * 2002-11-06 2006-03-02 株式会社野村鍍金 Surface treatment method for vacuum member
JP2007118130A (en) * 2005-10-28 2007-05-17 Jaburo Kogyo Kk Workpiece polishing method, and polishing tool and polishing device for use therein
KR100979067B1 (en) * 2009-11-30 2010-08-30 현주빈 A profile wheel for using stone
JP2012228748A (en) * 2011-04-26 2012-11-22 Kai R & D Center Co Ltd Electric edged tool sharpener
KR20170040811A (en) * 2015-10-05 2017-04-14 이화다이아몬드공업 주식회사 Edge wheel for edge grinding of substrate having passage of cooling water and method of manufacturing the wheel
CN107838821A (en) * 2017-12-13 2018-03-27 江苏瑞泰砂轮制造有限公司 A kind of Wear-resistant, high-temperature resistant emery wheel
WO2019127776A1 (en) * 2017-12-26 2019-07-04 武汉华星光电半导体显示技术有限公司 Grinding device
WO2019180873A1 (en) * 2018-03-22 2019-09-26 住友電工ハードメタル株式会社 End mill
US10780549B2 (en) 2017-12-26 2020-09-22 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Polishing device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2004041477A1 (en) * 2002-11-06 2006-03-02 株式会社野村鍍金 Surface treatment method for vacuum member
US8517795B2 (en) 2002-11-06 2013-08-27 Nomura Plating Co., Ltd. Surface treatment method for vacuum member
JP2007118130A (en) * 2005-10-28 2007-05-17 Jaburo Kogyo Kk Workpiece polishing method, and polishing tool and polishing device for use therein
KR100979067B1 (en) * 2009-11-30 2010-08-30 현주빈 A profile wheel for using stone
JP2012228748A (en) * 2011-04-26 2012-11-22 Kai R & D Center Co Ltd Electric edged tool sharpener
KR20170040811A (en) * 2015-10-05 2017-04-14 이화다이아몬드공업 주식회사 Edge wheel for edge grinding of substrate having passage of cooling water and method of manufacturing the wheel
CN107838821A (en) * 2017-12-13 2018-03-27 江苏瑞泰砂轮制造有限公司 A kind of Wear-resistant, high-temperature resistant emery wheel
WO2019127776A1 (en) * 2017-12-26 2019-07-04 武汉华星光电半导体显示技术有限公司 Grinding device
US10780549B2 (en) 2017-12-26 2020-09-22 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Polishing device
WO2019180873A1 (en) * 2018-03-22 2019-09-26 住友電工ハードメタル株式会社 End mill
CN111886101A (en) * 2018-03-22 2020-11-03 住友电工硬质合金株式会社 End mill
JPWO2019180873A1 (en) * 2018-03-22 2021-03-18 住友電工ハードメタル株式会社 End mill
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