JPH0448580B2 - - Google Patents
Info
- Publication number
- JPH0448580B2 JPH0448580B2 JP12674985A JP12674985A JPH0448580B2 JP H0448580 B2 JPH0448580 B2 JP H0448580B2 JP 12674985 A JP12674985 A JP 12674985A JP 12674985 A JP12674985 A JP 12674985A JP H0448580 B2 JPH0448580 B2 JP H0448580B2
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- grinding wheel
- diamond
- workpiece
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910003460 diamond Inorganic materials 0.000 claims description 18
- 239000010432 diamond Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 14
- 229910010293 ceramic material Inorganic materials 0.000 claims description 7
- 239000000498 cooling water Substances 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 6
- 238000004070 electrodeposition Methods 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 101100008046 Caenorhabditis elegans cut-2 gene Proteins 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明はセラミツクス材の加工物内径を高速
かつ精密に研削仕上げるセラミツクスの内面高速
研削加工法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for high-speed grinding of the inner surface of ceramics for finishing the inner diameter of a ceramic workpiece at high speed and precision.
（従来技術と技術的課題）
従来、窒化珪素Si3N4，ジルコニアZrO2，炭化
珪素SiC，アルミナAl2O3などの高硬度かつ密度
の高いセラミツクス材は、従来の金属研削加工法
と同一の手法で研削加工を行なうとなると極めて
長時間を要することになり、殆んど研削不可能で
あつて実用的でなかつた。特に上記セラミツクス
材の加工物内面の研削加工は砥石と加工物の接触
弧が長く、砥石軸の剛性不足もあつて今までにも
ダイヤモンド砥石を使用して各種の夫々独立した
加工手法でいろいろ試みられているが、十分な効
果が全く得られなくて、セラミツクスの内面高速
研削加工は殆んど不可能視されているのが現在の
斯界の趨勢である。(Prior art and technical issues) Conventionally, high hardness and high density ceramic materials such as silicon nitride Si 3 N 4 , zirconia ZrO 2 , silicon carbide SiC, and alumina Al 2 O 3 have been processed using the same method as the conventional metal grinding method. Grinding using this method would require an extremely long time, making grinding almost impossible and impractical. In particular, when grinding the inner surface of a ceramic workpiece, the arc of contact between the grinding wheel and the workpiece is long, and the grinding wheel shaft lacks rigidity, so many attempts have been made using diamond grinding wheels and various independent processing methods. However, the current trend in the industry is that high-speed grinding of the internal surface of ceramics is considered almost impossible, as sufficient effects cannot be obtained at all.
そこでこの発明は、従来不可能視されていた各
種セラミツクス材の加工物内面を高速かつ精密に
研削仕上げ加工できる加工法を提供することを技
術的課題とする。 Therefore, the technical object of the present invention is to provide a processing method that can grind and finish the inner surface of a workpiece made of various ceramic materials at high speed and precision, which has been considered impossible in the past.
（技術的手段）
この発明のセラミツクスの内面高速研削加工法
は、ダイヤモンド砥石に高圧の冷却水を噴射し
て、該砥石の目づまりの原因となる研削粉を除去
しつつ、同時に冷却することにより高熱によるダ
イヤモンド切れ刃の焼損及び剥離を防止しながら
CNC制御により砥石切込み台及び工作主軸台を
制御、プランジカツトを重畳して各種セラミツク
ス材の加工物穴内面を所定の寸法まで高速で切込
み、次いでトラバースカツトを加えて仕上げるこ
とを特徴とするものである。この発明では、従来
のように砥石を左右にトラバースして研削する方
法では、所定の寸法に仕上げるまでに時間がかか
るので、第２図のようにプランジ研削を重ねたあ
と、トラバース研削で仕上げる方法を採用した。
この方法により、トラバース研削のみによる加工
法と比較して50倍〜100倍の高速加工が可能にな
つた、というのが趣旨である。(Technical means) The high-speed internal grinding method for ceramics of this invention injects high-pressure cooling water onto a diamond grinding wheel to remove grinding powder that causes clogging of the grinding wheel, and at the same time cools the diamond grinding wheel. While preventing burnout and peeling of the diamond cutting edge due to
It is characterized by controlling the grindstone cutting head and work headstock by CNC control, superimposing plunge cuts to cut the inner surface of the workpiece hole of various ceramic materials to a predetermined dimension at high speed, and then adding a traverse cut to finish. . In this invention, since the conventional method of grinding by traversing the grindstone from side to side takes time to finish to the specified dimensions, we have developed a method of repeating plunge grinding and then finishing by traverse grinding as shown in Figure 2. It was adopted.
The idea is that this method allows for 50 to 100 times faster machining compared to a machining method that uses only traverse grinding.
もともとトラバース研削もプランジ研削も個別
の研削方法としては公知のものであるが、第２図
のプランジ研削を従来の内面研削盤で行なおうと
れば時間がかかるのである。つまりプランジ研削
の仕上り面の段差を平坦（平面）にそろえるため
に長い時間がかかる。しかしCNC内面研削盤に
よるCNC制御により行えば、上記仕上り面の径
方向の寸法差は１〜2μ以内の差で収まるため、
このあとはトラバース研削を加えることにより、
スムーズに仕上げることができる。また一般の内
面研削盤などでは、たとえ熟練者でもプランジ研
削で加工面を１〜2μ以内にそろえることは、き
わめて困難である。 Both traverse grinding and plunge grinding are known as individual grinding methods, but if the plunge grinding shown in FIG. 2 were to be performed using a conventional internal grinding machine, it would take time. In other words, it takes a long time to make the steps on the finished surface of plunge grinding flat (flat). However, if this is done using CNC control using a CNC internal grinder, the dimensional difference in the radial direction of the finished surface will be within 1 to 2μ, so
After this, by adding traverse grinding,
It can be finished smoothly. Furthermore, with a general internal grinder, it is extremely difficult for even an experienced person to align the machined surfaces within 1 to 2 microns by plunge grinding.
次にこの発明を図面について説明する。 Next, this invention will be explained with reference to the drawings.
先ず１は穴内面２を有する加工物で、工作主軸
台の主軸にチヤツク掴止されている。３は砥石ス
ピンドル４に取付けられたダイヤモンド砥石、５
は冷却噴射管である。なお砥石スピンドル４は高
い剛性を必要とするため、砥石クイルの材質はタ
ングステン合金製のヘビーメタルを使用し、スピ
ンドル大径化のため、オイルエアー方式を採用す
る。また砥石は電着法によるダイヤモンド砥石３
を使用するもので、ノンドレツシングとする。 First, 1 is a workpiece having a hole inner surface 2, which is chucked and fixed on the main shaft of a work headstock. 3 is a diamond grindstone attached to a grindstone spindle 4, 5
is the cooling injection pipe. Since the grinding wheel spindle 4 requires high rigidity, heavy metal made of tungsten alloy is used as the material of the grinding wheel quill, and an oil-air method is adopted to increase the diameter of the spindle. In addition, the whetstone is a diamond whetstone 3 made by electrodeposition method.
It uses non-dressing.
即ち加工物１及びダイヤモンド砥石３を夫々反
対方向に高速回転させ、ダイヤモンド砥石３に高
圧の冷却水を冷却水噴射管５から噴射して、該砥
石３の目づまり及び冷却することによつてダイヤ
モンド切れ刃の焼損並びに剥離を防止しながら、
毎分3.5mmの切込み速度によりラジアル方向にプ
ランジカツトを重畳して繰り返し、所定の寸法ま
で切り込んだのち、トラバースカツトを２〜３回
繰り返して仕上げ加工を完了するものである。特
にこのプランジ研削なしではセラミツクス材の内
面高速研削は望めない。 That is, the workpiece 1 and the diamond grinding wheel 3 are rotated at high speed in opposite directions, and high-pressure cooling water is injected from the cooling water injection pipe 5 to the diamond grinding wheel 3 to prevent clogging of the grinding wheel 3 and to cool the diamond. While preventing burnout and peeling of the cutting edge,
Plunge cuts are repeated in the radial direction at a cutting speed of 3.5 mm per minute to cut to a predetermined size, and then traverse cuts are repeated two to three times to complete the finishing process. In particular, high-speed internal grinding of ceramic materials cannot be expected without plunge grinding.
なおまたダイヤモンド砥石のドレツシングを経
済的に行う適切な方法がないため、高圧（75Kg／
cm2）の冷却水を研削動作中のダイヤモンド砥石に
噴射して砥石の目詰りを防止すると共に、高速
（周速1800〜2000ｍ／min）、重研削により発生す
る高熱による砥粒の焼損、剥離、脱落を防止する
ものである。 Furthermore, since there is no suitable method for dressing diamond grinding wheels economically, high pressure (75 kg/
cm 2 ) of cooling water is sprayed onto the diamond grinding wheel during grinding to prevent clogging of the grinding wheel, and also to prevent burnout and peeling of the abrasive grains due to the high heat generated by high-speed (peripheral speed 1800 to 2000 m/min) and heavy grinding. , to prevent it from falling off.
（発明の効果） 次に実施例を挙げてこの発明の効果を述べる。(Effect of the invention) Next, the effects of this invention will be described with reference to Examples.
実施例
セラミツクス材（窒化珪素、ビツカース硬度
1600Kg／mm2）の穴径50mmφ×研削長さ100mmの場
合で、かつダイヤモンド砥石径45mmφ×幅20mmの
場合、プランジカツト６回の後、トラバースカツ
ト２〜３回行つて研削取り代半径１mmの際、加工
時間３分10秒であつて従来の加工法に比べてかな
り短時間であつた。Example Ceramic material (silicon nitride, Vickers hardness
1600Kg/mm 2 ) hole diameter 50mmφ x grinding length 100mm, and diamond grinding wheel diameter 45mmφ x width 20mm, after 6 plunge cuts, traverse cut 2 to 3 times, and when the grinding allowance radius is 1mm. The processing time was 3 minutes and 10 seconds, which was considerably shorter than the conventional processing method.
叙上のように、この発明は、高剛化された砥石
スピンドルにノンドレツシングの電着法によるダ
イヤモンド砥石を使用して、高圧冷却水を研削作
動中の該ダイヤモンド砥石に噴射し、CNC制御
によりプランジ重畳研削とトラバース研削との複
合研削法を採用することによつて、従来殆んど不
可能視されていたセラミツクス材の内面高速研削
加工が安定して、かつ高精度に実現できるように
なつた。またCNC制御によるものであるため、
プランジ研削を重ね、その径方向の寸法を１〜
2μ以内の精度にそろえることができるものであ
る。 As mentioned above, this invention uses a non-dressing electrodeposited diamond grinding wheel on a highly rigid grinding wheel spindle, injects high-pressure cooling water onto the diamond grinding wheel during grinding, and plunges it under CNC control. By adopting a combined grinding method of overlapping grinding and traverse grinding, high-speed internal grinding of ceramic materials, which was previously considered almost impossible, can now be achieved stably and with high precision. . Also, since it is CNC controlled,
Plunge grinding is repeated to reduce the radial dimension to 1~
It is possible to achieve accuracy within 2μ.
図面はこの発明の実施例を示すもので、第１図
は加工状態の説明図、第２図は砥石の行程図であ
る。
１…加工物、２…穴内面、３…ダイヤモンド砥
石、４…砥石スピンドル、５…冷却水噴射管。
The drawings show an embodiment of the present invention, and FIG. 1 is an explanatory diagram of the processing state, and FIG. 2 is a diagram of the stroke of the grindstone. 1... Workpiece, 2... Hole inner surface, 3... Diamond grindstone, 4... Grinding wheel spindle, 5... Cooling water injection pipe.
Claims (1)
ングの電着法によるダイヤモンド砥石を使用し
て、該ダイヤモンド砥石に高圧の冷却水を噴射
し、該砥石の目づまりの原因となる研削粉を除去
しつつ、かつ高熱によるダイヤモンド切れ刃の焼
損及び剥離を防止しながらCNC制御により砥石
の切込み制御及び工作物の回転、左右移動制御を
行い、プランジカツトを重畳して各種セラミツク
材の加工物穴内面を所定の寸法まで高速で切込
み、次いでトラバースカツトを加えて仕上げるこ
とを特徴とするセラミツクスの内面高速研削加工
法。1. Using a non-dressing electrodeposition diamond grinding wheel on a highly rigid grinding wheel spindle, spraying high-pressure cooling water onto the diamond grinding wheel to remove grinding powder that causes clogging of the grinding wheel, and While preventing burnout and peeling of the diamond cutting edge due to high heat, CNC control controls the cutting depth of the grinding wheel, rotation of the workpiece, and left/right movement, and overlaps plunge cuts to cut the inner surface of the workpiece hole in various ceramic materials to the specified size. A high-speed internal grinding method for ceramics that involves cutting at high speed and then finishing by adding a traverse cut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12674985A JPS61284370A (en) | 1985-06-11 | 1985-06-11 | High-speed grinding method for internal surface of ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12674985A JPS61284370A (en) | 1985-06-11 | 1985-06-11 | High-speed grinding method for internal surface of ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61284370A JPS61284370A (en) | 1986-12-15 |
| JPH0448580B2 true JPH0448580B2 (en) | 1992-08-07 |
Family
ID=14942957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12674985A Granted JPS61284370A (en) | 1985-06-11 | 1985-06-11 | High-speed grinding method for internal surface of ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61284370A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4424829A1 (en) * | 1994-07-14 | 1996-01-18 | Zahnradfabrik Friedrichshafen | Device for a method for avoiding excessive stress on a workpiece during grinding |
| JP4764564B2 (en) * | 2001-04-17 | 2011-09-07 | 株式会社岡本工作機械製作所 | Skip shift plunge grinding method for cylindrical work |
| JP4838441B2 (en) * | 2001-05-08 | 2011-12-14 | 株式会社岡本工作機械製作所 | Cylindrical workpiece grinding apparatus having repetitive profile and cylindrical workpiece shift plunge grinding method |
| KR20160074577A (en) * | 2014-08-22 | 2016-06-28 | 미쓰이금속광업주식회사 | Method for manufacturing target material for cylindrical sputtering target and cylindrical sputtering target |
| JP6376101B2 (en) * | 2015-10-27 | 2018-08-22 | 住友金属鉱山株式会社 | Cylindrical sputtering target and manufacturing method thereof |
-
1985
- 1985-06-11 JP JP12674985A patent/JPS61284370A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61284370A (en) | 1986-12-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |