KR102417294B1 - Machining jig and method for manufacturing sputtering target member - Google Patents

Abstract

It is made into a subject to suppress generation|occurrence|production of the flaw or crack in the outer peripheral surface of cylindrical ceramics. In order to solve such a subject, the processing jig which concerns on one aspect of embodiment is provided with a rotating body. The rotating body rotates according to the rotation of the cylindrical ceramics. The length of the rotating body in the direction of the rotation axis is 15 mm or more, and the material of at least the outer periphery of the rotating body is a resin having a Rockwell hardness of 80 or more and 125 or less, or a rubber having a rubber hardness of 80 or more and 95 or less.

Description

A processing jig and the manufacturing method of a sputtering target material TECHNICAL FIELD

The disclosed embodiment relates to a processing jig and a method for manufacturing a sputtering target material.

DESCRIPTION OF RELATED ART Conventionally, the sputtering apparatus which forms a thin film on a board|substrate by sputtering while a magnetic field generating apparatus is arrange|positioned inside a cylindrical target material, rotates this target material from inside, is known.

Said cylindrical target material grinds and manufactures cylindrical ceramics which are a sintered body, for example. A cylindrical target material is manufactured by grinding an inner peripheral surface and an outer peripheral surface with a grindstone, for example, rotating cylindrical ceramics, specifically, adjusting the dimension of an inner diameter and an outer diameter.

In the above-mentioned prior art, for example, when grinding the inner peripheral surface of cylindrical ceramics, one end side of cylindrical ceramics is hold|maintained by a rotating mechanism and it is rotated. On the other hand, on the other end side of the cylindrical ceramics, the outer peripheral surface is rotatably held by the processing jig, thereby suppressing the vibration of the cylindrical ceramics caused by rotation to improve the grinding accuracy (for example, Patent Literature see 1).

Japanese Patent Laid-Open No. 2014-148026

However, the above processing jig has room for further improvement in that it suppresses the occurrence of scratches and cracks in the cylindrical ceramics.

That is, since cylindrical ceramics is a soft material with relatively low mechanical strength, when the outer peripheral surface is maintained with a processing jig as described above, there is a fear that deep scratches or cracks may occur on the outer peripheral surface due to contact with the processing jig.

Since the cylindrical ceramics in which such a flaw and a crack generate|occur|produced cannot be used as a sputtering target material, there exists a problem of leading to the fall of the yield of the cylindrical ceramics for sputtering target materials.

One aspect of embodiment is made in view of the above, and it aims at providing the manufacturing method of the processing jig and sputtering target material which can suppress generation|occurrence|production of the flaw and crack in cylindrical ceramics.

The processing jig which concerns on one aspect of embodiment is equipped with the rotating body which follows the rotation of cylindrical ceramics and rotates. In addition, the length of the rotating body in the direction of the axis of rotation is 15 mm or more, and the material of at least the outer periphery of the rotating body is a resin having a Rockwell hardness of 80 or more and 125 or less, or a rubber having a rubber hardness of 80 or more and 95 or less.

According to one aspect of embodiment, generation|occurrence|production of the flaw and the crack in cylindrical ceramics can be suppressed.

BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing which shows the structural example of the processing apparatus provided with the processing jig which concerns on 1st Embodiment.
It is sectional drawing when the processing jig vicinity shown in FIG. 1 is seen from the longitudinal direction side of cylindrical ceramics.
Fig. 3 is an enlarged cross-sectional view of the processing jig shown in Fig. 1 .
It is a flowchart which shows the process procedure which manufactures a sputtering target material.
5 is an enlarged cross-sectional view showing the processing jig according to the second embodiment.

Hereinafter, with reference to an accompanying drawing, the manufacturing method of the processing jig and sputtering target material which this application discloses is demonstrated in detail. In addition, this invention is not limited by embodiment shown below.

(First embodiment)

BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing which shows the structural example of the processing apparatus provided with the processing jig which concerns on 1st Embodiment. Moreover, FIG. 2 is sectional drawing when the processing jig vicinity shown in FIG. 1 is seen from the longitudinal direction side of cylindrical ceramics.

In addition, FIG. 1 has shown the cross section when the processing apparatus is cut|disconnected by line I-I of FIG. 2 precisely. 2 shows a three-dimensional orthogonal coordinate system in which the X-axis direction, the Y-axis direction, and the Z-axis direction orthogonal to each other are defined, and the positive Z-axis direction is the vertically upward direction for easy explanation.

In addition, in FIGS. 1 and 2 and FIGS. 3 and 5 mentioned later, only the components necessary for description are shown, and description about general components may be abbreviate|omitted. In addition, all of FIG. 1, 2 and FIG. 3, 5 are schematic diagrams.

The processing apparatus 1 shown in FIG. 1 is an apparatus for processing the elongate cylindrical ceramics 10, and manufacturing a sputtering target material. In addition, the target material manufactured using the processing apparatus 1 is set in the sputtering apparatus (not shown), and sputtering which forms a thin film on the board|substrate (not shown) is performed.

1, 2, the cylindrical ceramics 10 is formed in the cylindrical shape which has the hollow part 11. As shown in FIG. Moreover, the cylindrical ceramics 10 is manufactured through a granulation process, a shaping|molding process, and a baking process.

Specifically, in a granulation process, the slurry containing ceramic raw material powder and an organic additive is manufactured, for example, and this slurry is spray-dried, and granule is manufactured. In a shaping|molding process, the granule is shape|molded, for example by CIP (Cold Isostatic Pressing), and a cylindrical molded object is manufactured. And in a baking process, a molded object is baked in a kiln, and a sintered object is manufactured.

The sintered body produced in this way is cylindrical ceramics 10 , and while this cylindrical ceramics 10 is rotated by the processing device 1 , grinding processing is performed on the inner peripheral surface 10a. In addition, the manufacturing method of the cylindrical ceramics 10 which is a sintered body is not limited to an above-mentioned thing, Any method may be sufficient.

That is, for example, although CIP molding was used in the above-mentioned molding process, it is not limited to this, You may use other molding methods, such as extrusion molding, injection molding, and injection molding.

Moreover, as a ceramic raw material of the cylindrical ceramics 10, IGZO (In ₂ O ₃ -Ga ₂ O ₃ -ZnO), ITO (In ₂ O ₃ -SnO ₂ ), AZO (Al ₂ O ₃ -ZnO), etc. Although it can be illustrated, it is not limited to these. That is, the cylindrical ceramics 10 may contain 1 or more types of In, Zn, Al, Ga, Zr, Ti, Sn, Mg, and Si, for example.

As the overall length of the cylindrical ceramics 10 produced in this way increases, the force applied to the contact portion between the processing jig and the cylindrical ceramics 10 increases. For example, the total length is 500 mm or more, preferably 750 mm or more, more preferably 1000 mm or more, it is suitable to apply the processing jig mentioned later. However, you may use a processing jig with respect to the cylindrical ceramics 10 whose total length is less than 500 mm.

As shown in FIG. 1 , the processing apparatus 1 includes a rotation mechanism 20 and a vibration suppression mechanism 30 . The rotation mechanism 20 rotates the cylindrical ceramics 10 while holding the one end 10c of the cylindrical ceramics 10 .

In detail, the rotation mechanism 20 is equipped with the main-body part 21, the rotation part 22, and the holding claw 23. As shown in FIG. A drive source (not shown), such as a motor which rotationally drives the rotating part 22, is accommodated in the main body part 21. As shown in FIG.

While being connected to the output shaft of an above-described drive source, the rotation part 22 will rotate around the rotation shaft A when rotational force is transmitted from a drive source. A plurality of holding claws 23 are disposed on the outer peripheral side of one end 10c of the cylindrical ceramics 10 while being connected to the rotating part 22 to hold the cylindrical ceramics 10 .

Specifically, for example, there are three holding claws 23 (one is not visible in FIG. 1), and is arranged with an interval of 120 degrees from each other centering on the rotation axis A. Moreover, each of the three holding claws 23 is comprised so that movement is possible independently in the radial direction of the cylindrical ceramics 10 when it sees from the X-axis direction.

Therefore, for example, when holding the cylindrical ceramics 10 by the holding claws 23, first, when viewed in the X-axis direction, the space surrounded by the three holding claws 23 is in advance of the cylindrical ceramics 10. Set it to be larger than the outer diameter of And after the one end 10c of the cylindrical ceramics 10 is set in the space surrounded by the three holding claws 23, the three holding claws 23 are respectively moved radially inward.

Next, by bringing the holding claw 23 into contact with the outer circumferential surface 10b of the cylindrical ceramics 10 with a predetermined pressure, one end 10c of the cylindrical ceramics 10 is held by the three holding claws 23 . do. For this reason, the rotating mechanism 20 can rotate the cylindrical ceramics 10 hold|maintained by the holding claw 23 around the rotating shaft A with rotation of the rotating part 22. As shown in FIG.

Moreover, the rotation axis of the cylindrical ceramics 10 becomes substantially coaxial with the rotation axis A of the rotation mechanism 20 . Accordingly, in FIG. 1 and the like, the rotation axis of the cylindrical ceramics 10 is also shown as "rotation axis A" for the sake of simplification of illustration. In addition, below, "rotation shaft A" may be used in the meaning of the rotation shaft A of the cylindrical ceramics 10.

In addition, in the above, although the holding claw 23 of the rotation mechanism 20 was made into three pieces, the number of objects is not limited to this. Moreover, in the rotation mechanism 20 mentioned above, although the cylindrical ceramics 10 was hold|maintained by the holding claw 23, this is an illustration and is not limited. For example, the rotation mechanism 20 is provided with a holding part formed in a ring shape instead of the holding claw 23, and the one end 10c of the cylindrical ceramics 10 is inserted through this holding part to fix it, etc. You may hold the cylindrical ceramics 10 with another structure.

The vibration suppression mechanism 30 maintains the vicinity of the other end 10d of the cylindrical ceramics 10 rotatably, and suppresses the vibration of the cylindrical ceramics 10 generated by rotation. For this reason, since the rotating shaft A of the rotating cylindrical ceramics 10 is stabilized, the grinding precision at the time of the grinding process mentioned later can be improved.

In detail, the vibration suppression mechanism 30 is equipped with the main body part and the processing jig 31 which are not shown in figure. The processing jig 31 is formed in the body part, and hold|maintains the vicinity of the other end 10d of the cylindrical ceramics 10 rotatably from the outer peripheral surface 10b side.

By the way, the cylindrical ceramics 10 is a soft material with comparatively low mechanical strength. Therefore, for example, when the portion of the processing jig 31 that comes into contact with the cylindrical ceramics 10 is made of metal such as stainless steel, a deep flaw or crack is formed on the outer peripheral surface 10b by contact with the processing jig 31 . may occur.

Then, in the processing jig 31 which concerns on this embodiment, it was set as the structure which can suppress generation|occurrence|production of the flaw and the crack in the cylindrical ceramics 10. Hereinafter, the structure of such a processing jig 31 is demonstrated in more detail.

3 : is an enlarged sectional view of the processing jig 31 shown in FIG. As shown in FIG. 2 etc., the processing jig 31 is equipped with the some roller 34 and the support part 35 which supports the some roller 34, respectively. In addition, in FIGS. 1-3, for the simplification of illustration, the support part 35 was shown with the imaginary line.

As shown in FIGS. 1-3, the roller 34 is formed in the cylindrical shape, for example. In addition, the roller 34 is an example of a rotating body.

The plurality of rollers 34 are arranged on the outer peripheral side of the vicinity of the other end 10d of the cylindrical ceramics 10 . For example, there are three rollers 34 (one is not visible in FIG. 1 ), and is disposed with an interval of 120 degrees from each other about the rotation axis A of the cylindrical ceramics 10 as a center. In addition, in the above, although the rollers 34 were arrange|positioned at equal intervals (for example, an interval of 120 degrees), this is an example and is not limited, The space|interval of several roller 34 comrades can be set arbitrarily.

In addition, the plurality of rollers 34 described above are each formed in contact with the outer peripheral surface 10b of the cylindrical ceramics 10 rotating in the circumferential direction, and thereby follow the rotation of the cylindrical ceramics 10 and rotate around the rotational axis B. is configured to

In detail, as shown well in FIG.2 and FIG.3, the roller 34 is equipped with the core 36, the bearing 37, the inner peripheral part 38, and the outer peripheral part 39. do.

The core 36 is fixed to the appropriate position of the support part 35 while being formed in column shape, for example. Moreover, as the core material 36, although metal materials, such as iron, stainless steel, titanium, and a titanium alloy, hard rubber, and resin, can be used, it is not limited to these, for example.

The inner peripheral portion 38 is formed in a cylindrical shape, for example, and is formed in a position that surrounds the core material 36 when viewed from the rotation axis B direction. Moreover, the bearing 37 is interposed between the core material 36 and the inner peripheral part 38, and is inserted. In other words, the bearing 37 is arrange|positioned radial direction outer side of the core material 36, and the radial direction inner side of the inner peripheral part 38. As shown in FIG. Accordingly, the bearing 37 rotatably supports the inner periphery 38 and the outer periphery 39 with respect to the core 36 .

In addition, in the example shown in FIGS. 1, 3, etc., although the bearing 37 was made to be arrange|positioned respectively near the both ends of the core material 36, it is not limited to this, The arrangement place and number of bearing 37 can be set arbitrarily. do.

For the inner peripheral part 38, although metal materials, such as iron, stainless steel, titanium, and a titanium alloy, hard rubber, and resin, can be used, these are examples and are not limited, for example.

The outer peripheral portion 39 is formed in a cylindrical shape while being formed so as to cover the surface of the inner peripheral portion 38 outside in the radial direction. Moreover, the outer peripheral part 39 is arrange|positioned so that it may contact|abut against the outer peripheral surface 10b of the cylindrical ceramics 10. As shown in FIG.

And the material of the outer peripheral part 39 which contact|abuts the cylindrical ceramics 10 is resin or rubber. In addition, although the resin material containing 1 or more types of polyamide resin, ABS resin, polycarbonate resin, polypropylene resin, etc. can be used as said resin, it is not limited to these. Moreover, as said rubber, although the rubber material containing 1 or more types of chloroprene rubber, nitrile rubber, natural rubber, isoprene rubber, butadiene rubber, urethane rubber, etc. can be used, it is not limited to these.

Thus, in this embodiment, since the material of the outer peripheral part 39 is resin or rubber, compared with the case where the outer peripheral part 39 was made of metal, the roller 34 acts on the cylindrical ceramics 10 at the time of contact. load can be reduced. For this reason, for example, even when rotating the cylindrical ceramics 10 which is a brittle material and processing the inner peripheral surface 10a, the outer peripheral surface 10b of the cylindrical ceramics 10 is scratched or cracked by contact with the roller 34, for example. This can be prevented from occurring.

The length L1 in the direction of the rotation axis B of the roller 34 configured as described above (see FIG. 1 ) is, for example, preferably 15 mm or more, more preferably 30 mm or more, and still more preferably 50 mm or more. That is, by setting the overall length L1 of the roller 34 so as to increase the contact area between the roller 34 and the cylindrical ceramics 10, the action acting on the cylindrical ceramics 10 from the roller 34 at the time of contact surface pressure can be reduced. For this reason, it can suppress effectively that a flaw and a crack generate|occur|produce in the outer peripheral surface 10b of the cylindrical ceramics 10. As shown in FIG.

Moreover, although the upper limit in particular of the length L1 of the rotation axis B direction of the roller 34 is not restrict|limited, From the viewpoint of operation handling in the process using the roller 34, it is preferable that it is 5000 mm or less.

In addition, the ratio of the total length L1 in the rotational axis B direction of the roller 34 to the total length L2 in the rotational axis A direction of the cylindrical ceramics 10 (see Fig. 1) is preferably 3% or more, more Preferably it is 5 % or more. For this reason, it is possible to reduce the surface pressure acting on the cylindrical ceramics 10 from the rollers 34 at the time of contact, thereby more effectively suppressing the occurrence of scratches or cracks on the outer peripheral surface 10b of the cylindrical ceramics 10. have.

Further, when the material of the outer peripheral portion 39 is resin, the Rockwell hardness (ASTM standard, D785, R scale) is, for example, preferably 80 or more and 125 or less, and more preferably 80 or more and 120 or less. Moreover, when the material of the said outer peripheral part 39 is rubber, 80 or more and 95 or less are preferable and, as for rubber hardness (JIS standard, K6253-3:2012), 80 or more and 90 or less are more preferable.

For this reason, compared with the case where the outer peripheral portion 39 is made of metal, the load acting on the cylindrical ceramics 10 from the rollers 34 at the time of contact can be further reduced, and the outer peripheral surface 10b of the cylindrical ceramics 10 It can suppress the occurrence of scratches or cracks. In addition, when the hardness is higher than the above range, scratches or cracks may occur on the outer peripheral surface 10b of the cylindrical ceramics 10. If the hardness is lower than the above range, vibration cannot be suppressed and processing precision may deteriorate.

Moreover, the position where the roller 34 abuts with respect to the cylindrical ceramics 10 is 1/2 of the total length L2 from the end 10c of the cylindrical ceramics 10 hold|maintained by the rotating mechanism 20, for example. The other end 10d side is more preferable than the position C1 (see Fig. 1). As a more preferable example, the position of the roller 34 is on the other end 10d side rather than the position C2 (see FIG. 1) at 2/3 of the total length L2 from the one end 10c of the cylindrical ceramics 10 .

For this reason, in the vibration suppression mechanism 30, while being able to hold|maintain the cylindrical ceramics 10 stably, the vibration of the cylindrical ceramics 10 can be suppressed further. Moreover, since the rotation axis A of the rotating cylindrical ceramics 10 is stabilized, grinding precision can be improved further.

The support part 35 supports the three rollers 34, respectively, as mentioned above. The three support portions 35 are each mounted to a body portion (not shown) of the vibration suppression mechanism 30 and are configured to be independently movable in the radial direction of the cylindrical ceramics 10 when viewed in the X-axis direction.

Therefore, for example, in the case of holding the cylindrical ceramics 10 by the support part 35 and the rollers 34 before processing, first, the space surrounded by the three rollers 34 when viewed in the X-axis direction is preliminarily formed. It sets so that it may become larger than the outer diameter of the cylindrical ceramics 10. And after the vicinity of the other end 10d of the cylindrical ceramics 10 is set in the space surrounded by the three rollers 34, the three support parts 35 and the roller 34 are respectively moved radially inward.

Next, by bringing the roller 34 into contact with the outer peripheral surface 10b of the cylindrical ceramics 10 at a predetermined pressure, the other end 10d of the cylindrical ceramics 10 is rotatably held by the three rollers 34 . will become

The processing apparatus 1 is equipped with the grindstone 40 (refer FIGS. 1 and 2). The grindstone 40 moves while making the inside of the hollow part 11 of the cylindrical ceramics 10 abut against the inner peripheral surface 10a by a moving mechanism (not shown). That is, in the processing apparatus 1, traverse grinding is performed with respect to the inner peripheral surface 10a of the cylindrical ceramics 10. In addition, the grinding method of the inner peripheral surface 10a of the cylindrical ceramics 10 is not limited to traverse grinding, What kind of method may be sufficient.

In addition, in said embodiment, although the roller 34 was made into three pieces, the number of objects is not limited to this. Moreover, in the above-mentioned example, although all the some roller 34 was made into the same structure, it is not limited to this, For example, it is good also considering a part or all of the some roller 34 mutually different structure.

This is demonstrated by the example shown in FIG. Here, when viewed from the rotation axis A direction, the two rollers located below the Z axis of the cylindrical ceramics 10 are located below the center of gravity (G) by reference numeral 34a, and the rollers located above the center of gravity (G) are located above the Z axis. It is assumed that it is represented by the code|symbol 34b.

Since the weight of the cylindrical ceramics 10 acts on the roller 34a described above, the portion in contact with the roller 34a of the cylindrical ceramics 10 has a load compared to the portion in contact with the roller 34b. high, and scratches and cracks are likely to occur.

Then, you may comprise so that the material of only the outer peripheral part 39 of the two rollers 34a may be made into resin or rubber, for example. Moreover, you may comprise so that the full length L1 of the two rollers 34a may be made longer than the full length L1 of the roller 34b, for example.

As described above, with respect to the two rollers 34a, even if the material of the outer peripheral portion 39 is made of resin or rubber or the overall length L1 is lengthened, the outer peripheral surface 10b of the cylindrical ceramics 10 is damaged. It can suppress the occurrence of cracks or cracks.

Next, the manufacturing method of the sputtering target material using the processing jig 31 which concerns on this embodiment is demonstrated with reference to FIG. It is a flowchart which shows the process procedure which manufactures a sputtering target material.

As shown in FIG. 4 , first, the cylindrical ceramics 10 is attached to the rotary mechanism 20 by holding the one end 10c of the cylindrical ceramics 10 by the holding claws 23 of the rotary mechanism 20 . (Step S1).

Next, the other end 10d of the cylindrical ceramics 10 is rotatably held by the roller 34 of the processing jig 31 (step S2). In addition, the order of the process of steps S1 and S2 is not limited to the above, For example, even if the process of step S1 may be implemented after the process of step S2, and further, even if the process of steps S1 and S2 is performed at the same timing do.

Then, the cylindrical ceramics 10 is rotated in the circumferential direction by the rotating mechanism 20, and the inner peripheral surface 10a is grind-processed (step S3). The processing of the inner peripheral surface 10a of the series of cylindrical ceramics 10 is complete|finished by each of the above processes.

In addition, in manufacturing a sputtering target material, you may make it process other than said step S1-S3 performed. For example, you may make it perform the process which grind-processes the outer peripheral surface 10b of the cylindrical ceramics 10.

As mentioned above, the processing jig 31 which concerns on 1st Embodiment is equipped with the roller (rotating body) 34 which follows the rotation of the cylindrical ceramics 10 and rotates. The length in the direction of the rotation axis of the roller 34 is 15 mm or more, and the material of at least the outer peripheral portion 39 of the roller 34 is a resin having a Rockwell hardness of 80 or more and 125 or less, or a rubber having a rubber hardness of 80 or more and 95 or less. . For this reason, generation|occurrence|production of the flaw and crack in the cylindrical ceramics 10 can be suppressed.

Moreover, since the cylindrical ceramics 10 by which generation|occurrence|production of a flaw or crack was suppressed as mentioned above can be used as a sputtering target material, in this embodiment, the fall of the yield of the cylindrical ceramics for sputtering target materials can also be suppressed.

Example

[Example 1]

25.9 mass % of a ZnO powder having a specific surface area (BET specific surface area) of 4 m 2 /g, and 44.2 mass % of an In ₂ O ₃ powder having a BET specific surface area of 7 m 2 /g, measured by the Brunauer-Emmett-Teller (BET) method And 29.9 mass % of Ga2O3 powder whose BET specific surface area is ₁₀ m< ₂ >/g was mix|blended, it ball mill-mixed with a zirconia ball in a pot, and prepared raw material powder.

0.3 mass % of polyvinyl alcohol, 0.4 mass % of ammonium polycarboxylate, 1.0 mass % of polyethylene glycol, and 50 mass % of water are added to this pot with respect to 100 mass % of raw material powder, respectively, Mill mixing was performed to prepare a slurry.

Next, this slurry was supplied to the spray-drying apparatus, atomizer rotation speed 14,000 rpm, 200 degreeC inlet temperature, and spray-drying were performed on the conditions of 80 degreeC of outlet temperature, and the granule was prepared.

The granules are filled while tapping into a cylindrical urethane rubber mold having an inner diameter of 220 mm (thickness of 10 mm) and a length of 1300 mm having a cylindrical core (central rod) having an outer diameter of 150 mm, After sealing the rubber mold, CIP molding was performed at a pressure of 800 kgf/cm 2 to prepare a cylindrical molded article.

The molded body was heated from room temperature to 1400°C at a temperature increase rate of 300°C/h, held for 12 hours, and then cooled at a temperature-fall rate of 50°C/h to perform firing of the molded body to prepare a fired body. And the sintered body manufactured by the said method was cut|disconnected so that full length L2 might be set to 500 mm, and the cylindrical ceramics 10 of IGZO was obtained.

Then, after grinding the outer circumferential surface 10b of the above-described cylindrical ceramics 10, a roller having a material of the outer circumferential portion 39 made of polyamide resin, a total length L1 of 15 mm, and a Rockwell hardness of 120 ( 34), the inner peripheral surface 10a was subjected to grinding processing using the processing jig 31 . No cracks or cracks were observed on the outer peripheral surface 10b of the cylindrical ceramics 10 after processing, and the depth of the flaw after processing was 0.4 mm.

In addition, in this specification, when the depth of the flaw after processing is less than 0.5 mm, processing is performed well and it is judged that the quality standard as cylindrical ceramics 10 is satisfied, whereas, when it is 0.5 mm or more, it is a quality standard with poor processing. It is judged that it does not satisfy

[Example 2]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, with respect to this cylindrical ceramics 10, after grinding the outer peripheral surface 10b, the material of the outer peripheral portion 39 is polyamide resin, the overall length L1 is 60 mm, and the roller 34 has a Rockwell hardness of 120. ), the inner peripheral surface 10a was subjected to grinding processing using a processing jig 31 having . In the outer peripheral surface 10b of the cylindrical ceramics 10 after a process, generation|occurrence|production of a crack or a crack was not recognized, but the depth of the flaw after a process was 0.2 mm.

[Example 3]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, with respect to this cylindrical ceramics 10, after grinding the outer peripheral surface 10b, the material of the outer peripheral portion 39 is polypropylene resin, the total length L1 is 60 mm, and the roller 34 having a Rockwell hardness of 81. ), the inner peripheral surface 10a was subjected to grinding processing using a processing jig 31 having . No cracks or cracks were observed on the outer peripheral surface 10b of the cylindrical ceramics 10 after processing, and the depth of the flaw after processing was 0.3 mm.

[Example 4]

10 mass % of SnO ₂ powder having a specific surface area (BET specific surface area) measured by the BET method of 5 m 2 /g and 90 mass % of In ₂ O ₃ powder having a BET specific surface area of 5 m 2 /g are blended, and in a pot It was ball mill-mixed with a zirconia ball, and the raw material powder was prepared.

In this pot, 0.3 mass % of polyvinyl alcohol, 0.2 mass % of ammonium polycarboxylate, 0.5 mass % of polyethylene glycol, and 50 mass % of water with respect to 100 mass % of raw material powder are added, respectively, Mill mixing was performed to prepare a slurry.

About the process from spray drying after this to shaping|molding, it was set as the procedure similar to Example 1. The resulting molded body was heated from room temperature to 1600°C at a temperature increase rate of 300°C/h, held for 12 hours, and then cooled at a temperature-fall rate of 50°C/h to perform firing of the molded body to prepare a fired body. This fired body was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 of ITO were obtained.

Then, after grinding the outer peripheral surface 10b of the cylindrical ceramics 10 obtained by the above method, the material of the outer peripheral portion 39 is polyamide resin, the total length L1 is 60 mm, and the Rockwell hardness is 120 The inner peripheral surface 10a was grinded using the processing jig 31 which has the phosphor roller 34. As shown in FIG. In the outer peripheral surface 10b of the cylindrical ceramics 10 after a process, generation|occurrence|production of a crack or a crack was not recognized, but the depth of the flaw after a process was 0.1 mm.

[Example 5]

The fired body manufactured by the method similar to Example 4 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, with respect to the cylindrical ceramics 10, after grinding the outer peripheral surface 10b, the material of the outer peripheral portion 39 is polycarbonate resin, the total length L1 is 60 mm, and the roller 34 has a Rockwell hardness of 125. ), the inner peripheral surface 10a was subjected to grinding processing using a processing jig 31 having . In the outer peripheral surface 10b of the cylindrical ceramics 10 after a process, generation|occurrence|production of a crack or a crack was not recognized, but the depth of the flaw after a process was 0.2 mm.

[Example 6]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 500 mm, and the cylindrical ceramics 10 was obtained. Then, with respect to this cylindrical ceramics 10, after grinding the outer peripheral surface 10b, the material of the outer peripheral portion 39 is chloroprene rubber, the total length L1 is 15 mm, and a roller 34 having a rubber hardness of 90 The inner peripheral surface 10a was grinded using the processing jig 31 which has. No cracks or cracks were observed on the outer peripheral surface 10b of the cylindrical ceramics 10 after processing, and the depth of the flaw after processing was 0.4 mm.

[Example 7]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, after grinding the outer peripheral surface 10b of this cylindrical ceramics 10, a roller 34 having a chloroprene rubber material, an overall length L1 of 60 mm, and a rubber hardness of 90, of the outer peripheral portion 39 The inner peripheral surface 10a was grinded using the processing jig 31 which has. In the outer peripheral surface 10b of the cylindrical ceramics 10 after a process, generation|occurrence|production of a crack or a crack was not recognized, but the depth of the flaw after a process was 0.2 mm.

[Example 8]

The fired body manufactured by the method similar to Example 4 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, with respect to this cylindrical ceramics 10, after grinding the outer peripheral surface 10b, the material of the outer peripheral portion 39 is butadiene rubber, the total length L1 is 60 mm, and a roller 34 having a rubber hardness of 82 The inner peripheral surface 10a was grinded using the processing jig 31 which has. No cracks or cracks were observed on the outer peripheral surface 10b of the cylindrical ceramics 10 after processing, and the depth of the flaw after processing was 0.2 mm.

[Comparative Example 1]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 500 mm, and the cylindrical ceramics 10 was obtained. Then, with respect to the cylindrical ceramics 10, after grinding the outer peripheral surface 10b, the material of the outer peripheral portion 39 is SUS304, the overall length L1 is a processing jig 31 having a roller 34 of 15 mm Grinding of the inner peripheral surface 10a was performed. In addition, SUS304 is considerably harder than the resin or rubber used in the present invention. Although generation|occurrence|production of a crack or a crack was not confirmed in the outer peripheral surface 10b of the cylindrical ceramics 10 after processing, the depth of the flaw after processing was 0.9 mm.

[Comparative Example 2]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, with respect to the cylindrical ceramics 10, after grinding the outer peripheral surface 10b, the material of the outer peripheral portion 39 is SUS304, the total length L1 is a processing jig 31 having a roller 34 of 10 mm Grinding of the inner peripheral surface 10a was performed. In Comparative Example 2, cracks occurred in the outer peripheral surface 10b of the cylindrical ceramics 10 during processing, and processing was not possible. For this reason, the depth of the flaw after processing could not be measured.

[Comparative Example 3]

The fired body manufactured by the method similar to Example 4 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, with respect to the cylindrical ceramics 10, after grinding the outer peripheral surface 10b, the material of the outer peripheral portion 39 is SUS304, the total length L1 is a processing jig 31 having a roller 34 of 10 mm Grinding of the inner peripheral surface 10a was performed. Although generation|occurrence|production of a crack or a crack was not confirmed in the outer peripheral surface 10b of the cylindrical ceramics 10 after processing, the depth of the flaw after processing was 0.6 mm.

[Comparative Example 4]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, with respect to the cylindrical ceramics 10, after grinding the outer peripheral surface 10b, the material of the outer peripheral portion 39 is SUS304, the overall length L1 is a processing jig 31 having a roller 34 of 60 mm Grinding of the inner peripheral surface 10a was performed. Although generation|occurrence|production of a crack or a crack was not confirmed in the outer peripheral surface 10b of the cylindrical ceramics 10 after processing, the depth of the flaw after processing was 0.9 mm.

[Comparative Example 5]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, after grinding the outer peripheral surface 10b of the cylindrical ceramics 10, the material of the outer peripheral portion 39 is a polyamide resin, the total length L1 is 10 mm, and a roller 34 having a Rockwell hardness of 120. The inner peripheral surface 10a was grinded using the processing jig 31 which has. Although generation|occurrence|production of a crack or a crack was not confirmed in the outer peripheral surface 10b of the cylindrical ceramics 10 after processing, the depth of the flaw after processing was 0.6 mm.

[Comparative Example 6]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, after grinding the outer peripheral surface 10b of the cylindrical ceramics 10, a roller 34 having a material of the outer peripheral portion 39 made of fluororesin, a total length L1 of 60 mm, and a Rockwell hardness of 50 The inner peripheral surface 10a was grinded using the processing jig 31 which has. No cracks or cracks occurred in the outer peripheral surface 10b of the cylindrical ceramics 10 during processing, but the vibration could not be suppressed and processing could not be performed.

[Comparative Example 7]

The fired body manufactured by the method similar to Example 1 was cut|disconnected so that the total length L2 might be set to 1000 mm, and the cylindrical ceramics 10 was obtained. Then, after grinding the outer peripheral surface 10b of the cylindrical ceramics 10, the material of the outer peripheral portion 39 is chloroprene rubber, the total length L1 is 60 mm, and the rubber hardness is 60 (than that used in the example) The inner peripheral surface 10a was grinded using the processing jig 31 which has the roller 34 which is soft chloroprene rubber). No cracks or cracks occurred in the outer peripheral surface 10b of the cylindrical ceramics 10 during processing, but the vibration could not be suppressed and processing could not be performed.

In Examples and Comparative Examples, the depth of the flaw generated on the outer circumferential surface 10b of the cylindrical ceramics 10 after the grinding of the inner circumferential surface 10a is, after the grinding of the inner circumferential surface 10a, the outer circumferential surface 10b of the cylindrical ceramics 10 ) was ground and evaluated as the grinding depth required until the scratches disappeared. In addition, in the said Example and a comparative example, the effect of this invention was illustrated only about the cylindrical sputtering target material of IGZO and ITO in which the especially remarkable. However, this invention does not exhibit an effect only to the cylindrical sputtering target material of IGZO and ITO.

(Second embodiment)

Next, the processing jig 131 which concerns on 2nd Embodiment is demonstrated with reference to FIG. FIG. 5 : is an enlarged cross-sectional view similar to FIG. 3 which shows the processing jig 131 which concerns on 2nd Embodiment.

As shown in FIG. 5, in the second embodiment, the bearing 37 disposed inside the roller 34 in the first embodiment is removed, and a bearing ( 137) was interposed.

In detail, in the roller 134 of the processing jig 131, the core material 136 is formed so that both ends may protrude. In addition, although the core material 36 which concerns on 1st Embodiment was being fixed to the support part 35, the core material 136 which concerns on 2nd Embodiment is not fixed to the support part 35, but to the inner peripheral part 138. assumed to be fixed.

And between the both ends of the protruding core material 136 and the appropriate position of the support part 35, the bearing 137 is interposed and inserted. In this way, the bearing 137 is disposed on the radially outer side of the core 136 . And the bearing 137 supports the core material 136, the inner peripheral part 138, and the outer peripheral part 139 with respect to the support part 35 rotatably.

For this reason, in the processing jig 131 which concerns on 2nd Embodiment, the diameter of the roller 134 can be made small compared with the structure which incorporates a bearing, and size reduction of the processing jig 131 can be achieved.

In addition, in 2nd Embodiment, although the example in which the core material 136 and the inner peripheral part 138 become a separate body was shown in the above, you may make it form these integrally.

In addition, in the above embodiment, although the shape of the rollers 34 and 134 was cylindrical, it is not limited to this, As long as the outer peripheral side can contact the cylindrical ceramics 10, for example, it may be any shape, such as a spherical shape. do.

Moreover, although it was made to hold|maintain one point in the vicinity of the other end 10d of the cylindrical ceramics 10 by the vibration suppression mechanism 30 in the above, you may make it hold|maintain two or more points by the vibration suppression mechanism 30.

In addition, in the example shown in FIG. 1 etc., although the example in which the rotation axis B of the roller 34 becomes parallel or substantially parallel with respect to the rotation axis A of the cylindrical ceramics 10 was shown, it is not limited to this, For example, the rotation axis B It may be a position of intersection or twist with respect to the axis of rotation A.

Additional effects and modifications can be easily derived by those skilled in the art. For this reason, the broader aspect of this invention is not limited to the specific detail and typical embodiment shown and described as mentioned above. Accordingly, various modifications are possible without departing from the spirit or scope of the overall inventive concept defined by the appended claims and their equivalents.

1: processing device
10: cylindrical ceramics
20: rotation mechanism
30: vibration suppression mechanism
31, 131: processing jig
34, 134: roller
35: support
36, 136: heartwood
37, 137: bearing
38, 138: inner housewife
39, 139: Outsourcing
40: grindstone

Claims (11)

A processing jig for cylindrical ceramics used as a sputtering target material, comprising:
and a rotating body that rotates according to the rotation of the cylindrical ceramics,
The length in the direction of the axis of rotation of the rotating body is 15 mm or more,
In addition, the material of at least the outer periphery of the rotating body is a resin having a Rockwell hardness of 80 or more and 125 or less, or a rubber having a rubber hardness of 80 or more and 95 or less. The method of claim 1,
The processing jig in which the said resin contains 1 or more types of a polyamide resin, an ABS resin, a polycarbonate resin, and a polypropylene resin. The method of claim 1,
The processing jig, wherein the rubber contains at least one of chloroprene rubber, nitrile rubber, natural rubber, isoprene rubber, butadiene rubber, and urethane rubber. The method of claim 1,
A processing jig is disposed on the outer side of the core of the rotating body, the bearing for enabling the rotating body to rotate. The method of claim 1,
The rotating body is
A processing jig for holding the cylindrical ceramics in contact with the outer peripheral surface of the cylindrical ceramics when the inner circumferential surface of the cylindrical ceramics rotating in the circumferential direction is machined. A holding step of rotatably holding the cylindrical ceramics used as a sputtering target material using the processing jig according to any one of claims 1 to 5;
The manufacturing method of the sputtering target material including the processing process of processing the inner peripheral surface of the said cylindrical ceramics which is hold|maintained and rotated by the said processing jig|tool. 7. The method of claim 6,
The manufacturing method of the sputtering target material whose total length of the said cylindrical ceramics is 500 mm or more. 7. The method of claim 6,
The manufacturing method of the sputtering target material whose total length of the said cylindrical ceramics is 750 mm or more. 7. The method of claim 6,
The manufacturing method of the sputtering target material whose total length of the said cylindrical ceramics is 1000 mm or more. 7. The method of claim 6,
The manufacturing method of the sputtering target material in which the said cylindrical ceramics contains 1 or more types of In, Zn, Al, Ga, Zr, Ti, Sn, Mg, and Si. 7. The method of claim 6,
The said holding process holds the said cylindrical ceramics with the some said rotating body, The manufacturing method of the sputtering target material.

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