CN107151786B - 一种软硬复合涂层木工刀具及其制备方法 - Google Patents
一种软硬复合涂层木工刀具及其制备方法 Download PDFInfo
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- CN107151786B CN107151786B CN201710418581.4A CN201710418581A CN107151786B CN 107151786 B CN107151786 B CN 107151786B CN 201710418581 A CN201710418581 A CN 201710418581A CN 107151786 B CN107151786 B CN 107151786B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
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Priority Applications (1)
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CN201710418581.4A CN107151786B (zh) | 2017-06-06 | 2017-06-06 | 一种软硬复合涂层木工刀具及其制备方法 |
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CN201710418581.4A CN107151786B (zh) | 2017-06-06 | 2017-06-06 | 一种软硬复合涂层木工刀具及其制备方法 |
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CN107151786A CN107151786A (zh) | 2017-09-12 |
CN107151786B true CN107151786B (zh) | 2019-02-26 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108796454B (zh) * | 2018-07-06 | 2020-08-04 | 中国核动力研究设计院 | 一种核反应堆用锆包壳表面金属涂层pvd制备工艺 |
CN111334752B (zh) * | 2020-02-28 | 2022-10-28 | 广东汇成真空科技股份有限公司 | 一种制备CrCN薄膜的方法 |
CN112144021B (zh) * | 2020-09-21 | 2022-05-13 | 宁波云涂科技有限公司 | 一种适用于高频电刀的疏水性硬质涂层及其制备方法 |
CN113737144B (zh) * | 2021-08-27 | 2022-05-20 | 西安交通大学 | 一种高频电刀用Al2O3/CrN复合绝缘涂层及其制备方法 |
CN113843424A (zh) * | 2021-09-09 | 2021-12-28 | 哈尔滨理工大学 | 一种多层涂层保护型切削刀具及其生产方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008279563A (ja) * | 2007-05-11 | 2008-11-20 | Sumitomo Electric Ind Ltd | 表面被覆切削工具 |
CN101746101A (zh) * | 2009-12-23 | 2010-06-23 | 山东大学 | 软硬复合涂层刀具及其制备方法 |
CN103029366A (zh) * | 2012-12-06 | 2013-04-10 | 浙江工业大学 | 一种含有NiCrN三元涂层的制品及制备方法 |
CN103045998A (zh) * | 2012-12-06 | 2013-04-17 | 浙江工业大学 | 一种含有CrNiTiAlN五元涂层的制品及制备方法 |
CN103132074A (zh) * | 2011-11-28 | 2013-06-05 | 钴碳化钨硬质合金公司 | 功能等级的涂层 |
CN103143761A (zh) * | 2013-03-22 | 2013-06-12 | 武汉大学 | 一种AlTiN-MoN纳米多层复合涂层铣刀及其制备方法 |
CN104029435A (zh) * | 2014-06-10 | 2014-09-10 | 上海理工大学 | 一种具有高硬度和低摩擦系数的NbN/WS2多层涂层及其制备方法 |
CN105862004A (zh) * | 2016-06-15 | 2016-08-17 | 济宁学院 | TiAlCrN&MoS2/Ti/Al/Cr多元叠层润滑涂层刀具及其制备工艺 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101743019B1 (ko) * | 2015-01-30 | 2017-06-05 | 한국과학기술연구원 | 고온 내산화성이 우수한 초경도 탄화붕소 박막, 그 박막을 이용하는 절삭 공구 및 그 박막의 제조방법 |
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- 2017-06-06 CN CN201710418581.4A patent/CN107151786B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008279563A (ja) * | 2007-05-11 | 2008-11-20 | Sumitomo Electric Ind Ltd | 表面被覆切削工具 |
CN101746101A (zh) * | 2009-12-23 | 2010-06-23 | 山东大学 | 软硬复合涂层刀具及其制备方法 |
CN103132074A (zh) * | 2011-11-28 | 2013-06-05 | 钴碳化钨硬质合金公司 | 功能等级的涂层 |
CN103029366A (zh) * | 2012-12-06 | 2013-04-10 | 浙江工业大学 | 一种含有NiCrN三元涂层的制品及制备方法 |
CN103045998A (zh) * | 2012-12-06 | 2013-04-17 | 浙江工业大学 | 一种含有CrNiTiAlN五元涂层的制品及制备方法 |
CN103143761A (zh) * | 2013-03-22 | 2013-06-12 | 武汉大学 | 一种AlTiN-MoN纳米多层复合涂层铣刀及其制备方法 |
CN104029435A (zh) * | 2014-06-10 | 2014-09-10 | 上海理工大学 | 一种具有高硬度和低摩擦系数的NbN/WS2多层涂层及其制备方法 |
CN105862004A (zh) * | 2016-06-15 | 2016-08-17 | 济宁学院 | TiAlCrN&MoS2/Ti/Al/Cr多元叠层润滑涂层刀具及其制备工艺 |
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Application publication date: 20170912 Assignee: Chuzhou Yishen Machinery Manufacturing Co., Ltd. Assignor: Nanjing Forestry University Contract record no.: 2019320000165 Denomination of invention: Soft and hard composite coating woodworking tool and preparing method thereof Granted publication date: 20190226 License type: Common License Record date: 20190528 Application publication date: 20170912 Assignee: NANJING ZHAOZHE ELECTROMECHANICAL TECHNOLOGY CO., LTD. Assignor: Nanjing Forestry University Contract record no.: 2019320000166 Denomination of invention: Soft and hard composite coating woodworking tool and preparing method thereof Granted publication date: 20190226 License type: Common License Record date: 20190528 |
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Effective date of registration: 20201223 Address after: 225400 No.8 Hengfeng Road, agricultural products processing park, Taizhou City, Jiangsu Province Patentee after: TAIZHOU RAYARD WOOD INDUSTRY Co.,Ltd. Address before: Longpan road Xuanwu District of Nanjing city of Jiangsu Province, No. 159 210037 Patentee before: NANJING FORESTRY University |