CN107129137A - 玻璃基板的切断方法及玻璃基板的制造方法 - Google Patents

玻璃基板的切断方法及玻璃基板的制造方法 Download PDF

Info

Publication number
CN107129137A
CN107129137A CN201710173236.9A CN201710173236A CN107129137A CN 107129137 A CN107129137 A CN 107129137A CN 201710173236 A CN201710173236 A CN 201710173236A CN 107129137 A CN107129137 A CN 107129137A
Authority
CN
China
Prior art keywords
glass substrate
laser
cutting
glass
irradiation area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710173236.9A
Other languages
English (en)
Chinese (zh)
Inventor
高桥秀幸
植松利之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of CN107129137A publication Critical patent/CN107129137A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/08—Severing cooled glass by fusing, i.e. by melting through the glass
    • C03B33/082—Severing cooled glass by fusing, i.e. by melting through the glass using a focussed radiation beam, e.g. laser
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Laser Beam Processing (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
CN201710173236.9A 2013-05-28 2014-04-28 玻璃基板的切断方法及玻璃基板的制造方法 Pending CN107129137A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013112182 2013-05-28
JP2013-112182 2013-05-28
CN201480024048.4A CN105164073B (zh) 2013-05-28 2014-04-28 玻璃基板的切断方法及玻璃基板的制造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201480024048.4A Division CN105164073B (zh) 2013-05-28 2014-04-28 玻璃基板的切断方法及玻璃基板的制造方法

Publications (1)

Publication Number Publication Date
CN107129137A true CN107129137A (zh) 2017-09-05

Family

ID=51988520

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201710173236.9A Pending CN107129137A (zh) 2013-05-28 2014-04-28 玻璃基板的切断方法及玻璃基板的制造方法
CN201480024048.4A Expired - Fee Related CN105164073B (zh) 2013-05-28 2014-04-28 玻璃基板的切断方法及玻璃基板的制造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201480024048.4A Expired - Fee Related CN105164073B (zh) 2013-05-28 2014-04-28 玻璃基板的切断方法及玻璃基板的制造方法

Country Status (5)

Country Link
JP (1) JP6379392B2 (ja)
KR (1) KR20160013841A (ja)
CN (2) CN107129137A (ja)
TW (1) TWI651280B (ja)
WO (1) WO2014192482A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6379392B2 (ja) * 2013-05-28 2018-08-29 Ａｇｃ株式会社 ガラス基板の切断方法及びガラス基板の製造方法
JP6738043B2 (ja) * 2016-05-31 2020-08-12 日本電気硝子株式会社 ガラスフィルムの製造方法
JP6579040B2 (ja) * 2016-05-31 2019-09-25 日本電気硝子株式会社 ガラスロールの製造方法
JP2018024536A (ja) * 2016-08-08 2018-02-15 日本電気硝子株式会社 帯状ガラスフィルムの切断方法
KR102410719B1 (ko) * 2017-02-07 2022-06-20 니폰 덴키 가라스 가부시키가이샤 유리 필름의 제조 방법
JP6748920B2 (ja) * 2017-03-13 2020-09-02 日本電気硝子株式会社 ガラスフィルムの製造方法
JP6909403B2 (ja) * 2017-07-31 2021-07-28 日本電気硝子株式会社 ガラスフィルムの製造方法
WO2019065533A1 (ja) * 2017-09-27 2019-04-04 三星ダイヤモンド工業株式会社 ガラス基板の切断装置、切断方法、プログラム、及び記憶媒体
JP6883282B2 (ja) * 2017-11-27 2021-06-09 日本電気硝子株式会社 ガラスロールの製造方法
JP7227273B2 (ja) * 2018-11-30 2023-02-21 Hoya株式会社 ガラス板の製造方法、ガラス板の面取り方法、および磁気ディスクの製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05305467A (ja) * 1992-04-27 1993-11-19 Central Glass Co Ltd 光透過性材料のレーザー切断法
CN101712529A (zh) * 2008-09-29 2010-05-26 康宁股份有限公司 玻璃板的激光分割
CN102656105A (zh) * 2009-12-16 2012-09-05 康宁股份有限公司 从激光刻划的弯曲玻璃带的玻璃板分离
CN105164073B (zh) * 2013-05-28 2018-06-12 旭硝子株式会社 玻璃基板的切断方法及玻璃基板的制造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4467168A (en) * 1981-04-01 1984-08-21 Creative Glassworks International Method of cutting glass with a laser and an article made therewith
WO2007020835A1 (ja) * 2005-08-12 2007-02-22 Shibaura Mechatronics Corporation 脆性材料の割断加工システム及びその方法
DE102006018622B3 (de) * 2005-12-29 2007-08-09 H2B Photonics Gmbh Vorrichtung zum durchtrennenden Bearbeiten von Bauteilen aus sprödbrüchigem Material
JP2010099708A (ja) * 2008-10-24 2010-05-06 Japan Steel Works Ltd:The 被切断材の切断面処理方法および装置
CN101613180A (zh) * 2009-07-24 2009-12-30 深圳市大族激光科技股份有限公司 一种激光切割玻璃的方法
JP5532219B2 (ja) * 2010-01-18 2014-06-25 日本電気硝子株式会社 板状ガラスの切断方法及びその切断装置
JP5194076B2 (ja) * 2010-08-27 2013-05-08 三星ダイヤモンド工業株式会社 レーザ割断装置
JP5202595B2 (ja) * 2010-09-10 2013-06-05 三星ダイヤモンド工業株式会社 レーザ割断装置
JP2012061681A (ja) * 2010-09-15 2012-03-29 Mitsuboshi Diamond Industrial Co Ltd レーザ割断装置
US9790121B2 (en) * 2011-03-30 2017-10-17 Corning Incorporated Methods of fabricating a glass ribbon
JP2013014016A (ja) * 2011-06-30 2013-01-24 Mitsubishi Electric Corp 分割加工方法
JP5861864B2 (ja) * 2011-09-15 2016-02-16 日本電気硝子株式会社 ガラス板切断方法およびガラス板切断装置
JP5884691B2 (ja) * 2011-09-15 2016-03-15 日本電気硝子株式会社 ガラス板切断方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05305467A (ja) * 1992-04-27 1993-11-19 Central Glass Co Ltd 光透過性材料のレーザー切断法
CN101712529A (zh) * 2008-09-29 2010-05-26 康宁股份有限公司 玻璃板的激光分割
CN102656105A (zh) * 2009-12-16 2012-09-05 康宁股份有限公司 从激光刻划的弯曲玻璃带的玻璃板分离
CN105164073B (zh) * 2013-05-28 2018-06-12 旭硝子株式会社 玻璃基板的切断方法及玻璃基板的制造方法

Also Published As

Publication number Publication date
JPWO2014192482A1 (ja) 2017-02-23
TWI651280B (zh) 2019-02-21
JP6379392B2 (ja) 2018-08-29
TW201504173A (zh) 2015-02-01
CN105164073B (zh) 2018-06-12
WO2014192482A1 (ja) 2014-12-04
CN105164073A (zh) 2015-12-16
KR20160013841A (ko) 2016-02-05

Similar Documents

Publication Publication Date Title
CN107129137A (zh) 玻璃基板的切断方法及玻璃基板的制造方法
CN106346619B (zh) 晶片的生成方法
JP4666391B2 (ja) ガラス基板の分断方法
CN105665946B (zh) 晶片的生成方法
KR101369211B1 (ko) 레이저 할단 장치
KR100925287B1 (ko) 스크라이브 방법 및 스크라이브 장치
EP1803538A1 (en) Brittle material scribing method and scribing apparatus
TW201026619A (en) Method of cutting mother glass substrate for display panel and substrate of brittle material, and method of manufacturing display
US7015118B2 (en) Method for forming a scribe line on a semiconductor device and an apparatus for forming the scribe line
EP2239085A1 (en) Method for chamfering/machining brittle material substrate and chamfering/machining apparatus
JP5320395B2 (ja) 面取り加工装置
JP4080484B2 (ja) 脆性材料基板のスクライブ方法およびスクライブ装置
WO2003008352A1 (en) Device and method for scribing fragile material substrate
CN104364208B (zh) 玻璃基板的切割方法及玻璃基板的制造方法
JPWO2004002705A1 (ja) 脆性材料基板のスクライブ装置及びスクライブ方法
JP2012056229A (ja) レーザ割断装置
JP2008307747A (ja) 脆性材料の割断方法
JP5444158B2 (ja) 脆性材料基板の割断方法
CN114845964A (zh) 玻璃板的制造方法
TW201446451A (zh) 用於切割非金屬基材之裝置及方法
JP2009166249A (ja) 脆性基板の分断方法、及び素子基板の製造方法
JP2021031372A (ja) 分断方法およびノッチ形成方法
JP2013087000A (ja) レーザスクライブ装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Address after: Tokyo, Japan

Applicant after: AGC Corporation

Address before: Tokyo, Japan

Applicant before: Asahi Glass Co., Ltd.

CB02 Change of applicant information
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20170905

WD01 Invention patent application deemed withdrawn after publication