CN107003198B - 半导体压力传感器 - Google Patents

半导体压力传感器 Download PDF

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Publication number
CN107003198B
CN107003198B CN201580067525.XA CN201580067525A CN107003198B CN 107003198 B CN107003198 B CN 107003198B CN 201580067525 A CN201580067525 A CN 201580067525A CN 107003198 B CN107003198 B CN 107003198B
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China
Prior art keywords
resistor
membrane
output node
node
output
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CN201580067525.XA
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English (en)
Chinese (zh)
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CN107003198A (zh
Inventor
A·J·范德维尔
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Melexis Technologies NV
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Melexis Technologies NV
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Priority claimed from PCT/EP2014/077230 external-priority patent/WO2015086680A1/en
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Publication of CN107003198A publication Critical patent/CN107003198A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
CN201580067525.XA 2014-12-10 2015-12-08 半导体压力传感器 Active CN107003198B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EPPCT/EP2014/077230 2014-12-10
PCT/EP2014/077230 WO2015086680A1 (en) 2013-12-11 2014-12-10 Semiconductor pressure sensor
EP15171268.4A EP3032235B1 (en) 2014-12-10 2015-06-09 Semiconductor pressure sensor
EP15171268.4 2015-06-09
PCT/EP2015/079010 WO2016091896A1 (en) 2014-12-10 2015-12-08 Semiconductor pressure sensor

Publications (2)

Publication Number Publication Date
CN107003198A CN107003198A (zh) 2017-08-01
CN107003198B true CN107003198B (zh) 2020-06-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580067525.XA Active CN107003198B (zh) 2014-12-10 2015-12-08 半导体压力传感器

Country Status (5)

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EP (1) EP3032235B1 (enExample)
JP (1) JP6474492B2 (enExample)
KR (1) KR20170095218A (enExample)
CN (1) CN107003198B (enExample)
WO (1) WO2016091896A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3358309B1 (en) 2017-02-06 2019-04-24 Melexis Technologies SA Method and circuit for biasing and readout of resistive sensor structure
US10704969B2 (en) 2017-11-21 2020-07-07 The Boeing Company Stress sensor
US10983024B2 (en) * 2017-11-28 2021-04-20 Daeyang Electric Co., Ltd. Semiconductor pressure sensor
WO2020058091A1 (en) 2018-09-18 2020-03-26 Unilever Plc Method of chemical monitoring the fat removal from surfaces
CN109374158B (zh) * 2018-12-14 2024-08-13 华景传感科技（无锡）有限公司 一种压力传感器
CN113227954B (zh) 2018-12-20 2025-01-24 深圳纽迪瑞科技开发有限公司 压力感应装置、压力感应方法及电子终端
US11189536B2 (en) 2018-12-31 2021-11-30 Micron Technology, Inc. Method and apparatus for on-chip stress detection
DE102021200720B4 (de) 2021-01-27 2023-08-03 Infineon Technologies Ag Transistorbasierter stress-sensor und verfahren zum ermitteln einer gradienten-kompensierten mechanischen spannungskomponente
EP4421468B1 (en) * 2023-02-27 2025-02-12 Melexis Technologies NV Pressure sensor resistor configuration for stress compensation
EP4567393A1 (en) * 2023-12-04 2025-06-11 TE Connectivity Solutions GmbH Piezoresistive sensor element and piezoresistive pressure sensor with minimized long-term drift

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996022515A1 (en) * 1995-01-19 1996-07-25 Honeywell Inc. Apparatus for detection of a diaphragm rupture in a pressure sensor
CN1460846A (zh) * 2002-05-21 2003-12-10 株式会社电装 薄膜类型的半导体压力传感器
CN1287134C (zh) * 2003-03-07 2006-11-29 株式会社电装 具有隔膜的半导体压力传感器
CN101044382A (zh) * 2004-09-24 2007-09-26 格伦德福斯联合股份公司 压力传感器

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Publication number Priority date Publication date Assignee Title
JPS5217780A (en) * 1975-07-04 1977-02-09 Hitachi Ltd Pressure convertor with semi-conductor elements
CA1186163A (en) 1982-01-04 1985-04-30 James B. Starr Semiconductor pressure transducer
JPS60128673A (ja) 1983-12-16 1985-07-09 Hitachi Ltd 半導体感圧装置
US4777826A (en) * 1985-06-20 1988-10-18 Rosemount Inc. Twin film strain gauge system
JPH08279621A (ja) * 1995-04-03 1996-10-22 Motorola Inc 平衡圧力センサとその方法
JP4568982B2 (ja) * 2000-10-06 2010-10-27 株式会社デンソー 物理量検出装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996022515A1 (en) * 1995-01-19 1996-07-25 Honeywell Inc. Apparatus for detection of a diaphragm rupture in a pressure sensor
CN1460846A (zh) * 2002-05-21 2003-12-10 株式会社电装 薄膜类型的半导体压力传感器
CN1287134C (zh) * 2003-03-07 2006-11-29 株式会社电装 具有隔膜的半导体压力传感器
CN101044382A (zh) * 2004-09-24 2007-09-26 格伦德福斯联合股份公司 压力传感器

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
双恒流源应变测试;陈小娟;《双恒流源应变测试》;20090731;第32卷(第7期);全文 *

Also Published As

Publication number Publication date
JP2018504588A (ja) 2018-02-15
JP6474492B2 (ja) 2019-02-27
CN107003198A (zh) 2017-08-01
EP3032235B1 (en) 2017-09-20
WO2016091896A1 (en) 2016-06-16
EP3032235A1 (en) 2016-06-15
KR20170095218A (ko) 2017-08-22

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