CN106872549A - 一种气体感测器及其制作方法 - Google Patents
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Abstract
一种气体感测器及其制作方法，气体感测器包含一基板、一加热层、一绝缘层及多个排列的检测单元，该加热层设置于该基板上，该绝缘层设置于该加热层上，该检测单元设置于该绝缘层上，该检测单元包括一检测电极、一阻隔部以及一反应感测膜，该阻隔部包括多个向上延伸的阻隔壁，该阻隔壁围绕该检测电极而形成一容置空间，该反应感测膜设置于该阻隔部内的该容置空间并和该检测电极接触，当该反应感测膜和一待测气体接触时会进行一电化学反应，使该检测电极产生一对应该待测气体的识别信号。
Description
技术领域
本发明涉及一种气体感测器，尤其涉及一种具有低制造成本及简易工艺的气体感测器。
背景技术
气体感测器泛指检测气体的物理或化学性质的装置，而广泛应用于医疗、工业、科技、环保等各种领域。
如中国台湾发明专利公告第I458464号，提出一种可早期检测及辨识肺炎种类的呼吸器包含一吐气端管路及一气体辨识装置，该气体辨识装置是利用一气体辨识芯片来分析一病人由该吐气端管路所呼出的一混合气体以辨识该病人罹患的肺炎种类，该气体辨识芯片为包含一感测器阵列、一感测器介面电路、一随机类神经网路芯片、一记忆体及一微控制器，该微控制器连接该感测器介面电路、该随机类神经网路芯片及该记忆体并控制其运作。藉此，可早期检测并辨识肺炎的种类，以提供更有效的治疗。
于以上现有技术之中，是采半导体工艺进行感测器阵列的制造，然而，一般来说，此种感测器阵列的结构复杂，且半导体工艺的制造成本高昂，并不利于此种气体感测器于商业上的推广。
发明内容
本发明的主要目的，在于解决现有气体感测器的感测器阵列结构复杂，且因采用半导体工艺而具有于制造时需耗费大量时间以及制造成本较高昂的问题。
为达上述目的，本发明提供一种气体感测器，包含有一基板；一设置于该基板上的加热层；一设置于该加热层上的绝缘层；以及多个排列且设置于该绝缘层上的检测单元，该检测单元分别包括一检测电极、一围绕该检测电极的阻隔部以及一反应感测膜，该检测电极包括一第一电极及一第二电极，该第一电极包括一第一条状电极以及一自该第一条状电极延伸的第一指状电极，该第二电极包括一第二条状电极以及一自该第二条状电极延伸的第二指状电极，该第一指状电极和该第二指状电极彼此交替排列，该反应感测膜设置于该阻隔部内的一容置空间并和该检测电极接触；其中，该反应感测膜和一待测气体接触而进行一电化学反应，使该检测电极产生一对应该待测气体的识别信号。
为达上述目的，本发明提供气体感测器的制作方法，包含下列步骤，提供一基板；于该基板上形成一加热层；于该加热层上形成一绝缘层；于该绝缘层上形成至少一检测电极，该检测电极包括一第一电极及一第二电极，该第一电极包括一第一条状电极以及一自该第一条状电极延伸的第一指状电极，该第二电极包括一第二条状电极以及一自该第二条状电极延伸的第二指状电极，该第一指状电极和该第二指状电极彼此交替排列；于该绝缘层上形成一阻隔部，该阻隔部围绕该检测电极，且于该检测电极上形成一容置空间；以及将一高分子材料填充至该阻隔部内的该容置空间并且形成一反应感测膜，而得到一气体感测器。
由以上可知，本发明相较于现有技艺可达到的功效在于，利用本发明得到的该气体感测器，结构相对简单，且制造方便，毋须采用半导体设备或工艺，适合大量生产且投入成本较低。
以下结合附图和具体实施例对本发明进行详细描述，但不作为对本发明的限定。
附图说明
图1，为本发明一实施例的气体感测器俯视示意图；
图2，为图1的A-A方向剖面示意图；
图3，为本发明一实施例的检测电极示意图；
图4A至图4D，为本发明一实施例的制作流程图。
具体实施方式
涉及本发明的详细说明及技术内容，现就配合附图说明如下：
请搭配参阅图1、图2及图3所示，分别为本发明一实施例的气体感测器俯视示意图、图1的A-A方向剖面示意图及检测电极示意图，本发明为一种气体感测器1，包含一基板10、一加热层20、一绝缘层30及多个排列的检测单元40，该加热层20设置于该基板10上，该基板10的材料可为玻璃、铟锡氧化物或聚对苯二甲酸乙二酯(Polyethylene Terephthalate，简称PET)。该加热层20的材料为选用可加热至一高于室温的温度者，于本发明的一实施例中，该加热层20的材料可为铟锡氧化物，且较佳地接受一电流而加热至一介于30℃至70℃之间的温度。该绝缘层30设置于该加热层20上，其中该绝缘层30的材料可为聚对苯二甲酸乙二酯。
该检测单元40设置于该绝缘层30上，且呈一阵列或一图案排列，于本实施例中，该检测单元40可采8×4的阵列排列，彼此间较佳地相距100μm。该检测单元40包括至少一检测电极401、一阻隔部402以及一反应感测膜403，于本发明中，该反应感测膜403的材料可为羧甲基纤维素铵(CMC-NH4)、聚苯乙烯(Polystyrene，简称PS)、聚乙烯己二酸(Poly(ethylene adipate))、聚氧化乙烯(Poly(ethylene Oxide)，简称PEO)、聚己内酯(Polycaprolactone)、聚乙二醇(PEG)、聚乙烯芐基氯(Poly(vinylbenzyl chloride)，简称PVBC)、甲基乙烯基醚-马来酸交替型共聚物(Poly(methyl vinyl ether-alt-maleicacide))、乙烯基苯酚-甲基丙烯酸甲酯共聚物(Poly(4-vinylphenol-co-methyl methacrylate))、乙基纤维素(Ethylcellulose，简称EC)、偏氯乙烯-丙烯腈共聚物(Poly(vinylidenechloride-co-acrylonitrile)，简称PVdcAN)、聚环氧氯丙烷(Polyepichlorohydrin，简称PECH)、聚乙烯亚胺(Polyethyleneimine)、胜肽((Beta-Amyloid(1-40))、人体半乳糖凝集(Human galectin-1或Humanalbumin)、苯乙烯-烯丙醇共聚物(Styrene/Allyl alcohol copolymer，简称SAA)、乙烯-醋酸乙烯酯共聚物(Poly(ethylene-co-vinyl acetate))、聚异丁烯(Polyisobutylene，简称PIB)、丙烯腈-丁二烯共聚物Poly(acrylonitrile-co-butadiene)、聚(4-乙烯嘧啶)(Poly(4-vinylpyridine)、羟丙甲纤维素(Hydroxypropyl methylcellulose)、聚异戊二烯(Polyisoprene)、聚α甲基苯乙烯(Poly(alpha-methylstyrene))、3-氯-1,2-环氧丙烷-氧化乙烯共聚物(Poly(epichlorohydrin-co-ethylene oxide))、聚乙烯缩丁醛(Poly(vinylbutyral-co-vinyl alcohol-vinyl acetate))、聚苯乙烯(Polystyrene，简称PS)、木质素磺酸盐(Lignin)、脂肽(Acylpeptide)、聚丙酸(Poly(vinylproplonate))、聚乙烯吡咯烷酮(Poly(vinylpyrrolidone)，简称PVP)、二聚酸-烷基多胺共聚物(Poly(dimer acid-co-alkyl polyamine))、聚(4-乙基苯酚)(Poly(4-vinylphenol)、聚羟乙基丙烯酸甲酯(Poly(2-hydroxyethylmethacrylate))、氯乙烯-乙酸乙烯酯共聚物(Poly(vinyl chloride-co-vinylacetate))、三醋酸纤维素(Cellulose triacetate)、聚(乙烯硬脂酸酯)Poly(viny stearate)、聚双酚A碳酸酯(Poly(bisphenol A carbonate)，简称PC)、聚偏二氟乙烯(Poly(vinylidene fluoride)，简称PVDF)或其组合。于本实施例中，该检测电极401在每个该检测单元40中的数量可为4个，彼此间较佳地相距30μm，如此一来，该检测电极401的数量可达128个，但可配合使用需求会有不同的数量，不以本实施例的举例为限。
该检测电极401包括一第一电极4011及一第二电极4012，该第一电极4011包括一第一条状电极4011a及一第一指状电极4011b，该第二电极4012包括一第二条状电极4012a及一第二指状电极4012b，该第一条状电极4011a与该第二条状电极4012a沿一第一轴向延伸且平行设置，该第一指状电极4011b沿一第二轴向自该第一条状电极4011a朝该第二条状电极4012a延伸，该第二指状电极4012b沿该第二轴向自该第二条状电极4012a朝该第一条状电极4011a延伸，该第一指状电极4011b与该第二指状电极4012b呈平行且彼此交替排列设置，如图3所示。该第一轴向和该第二轴向相异，而于本实施例中，该第一轴向和该第二轴向彼此垂直。此外，其中该检测电极401的材料可选自为铟锡氧化物、铜、镍、铬、铁、钨、磷、钴或及银或上述组合。该阻隔部402包括多个远离该绝缘层30且向上延伸的阻隔壁4021，该阻隔壁4021围绕该检测电极401而形成一容置空间4022。该反应感测膜403设置于该阻隔部402内的该容置空间4022并和该检测电极401接触。实际应用时，该反应感测膜403和一待测气体接触而进行一电化学反应，使该检测电极401产生一对应该待测气体的识别信号。
请继续参阅图4A至图4D所示，为本发明一实施例的制作流程示意图，本发明进一步提供一种气体感测器1的制作方法，包含下列步骤：
首先，如图4A所示，提供一基板10，于该基板10上形成一加热层20，其中该基板10的材料可选自玻璃、铟锡氧化物及聚对苯二甲酸乙二酯或上述组合，而该加热层20为接受一电流而加热至一介于30℃至70℃之间的温度，该加热层20的材料可为铟锡氧化物。
接着，如图4B所示，于该加热层20上形成一绝缘层30，其中该绝缘层30的材料可为聚对苯二甲酸乙二酯。
然后，如图4C所示，于该绝缘层30上形成至少一检测电极401，该检测电极401包括一第一电极4011及一第二电极4012，该第一电极4011包括一第一条状电极4011a及一第一指状电极4011b，该第二电极4012包括一第二条状电极4012a及一第二指状电极4012b，该第一条状电极4011a与该第二条状电极4012a沿一第一轴向延伸且平行设置，该第一指状电极4011b沿一第二轴向自该第一条状电极4011a朝该第二条状电极4012a延伸，该第二指状电极4012b沿该第二轴向自该第二条状电极4012a朝该第一条状电极4011a延伸，该第一指状电极4011b与该第二指状电极4012b呈平行且彼此交替排列设置。该第一轴向和该第二轴向相异，而于本实施例中，该第一轴向和该第二轴向彼此垂直。此外，其中该检测电极401的材料可选自铟锡氧化物、铜、镍、铬、铁、钨、磷、钴及银或上述组合。
待形成该检测电极401后，于该绝缘层30上形成一阻隔部402，该阻隔部402围绕该检测电极401，并包括多个远离该绝缘层30且向上延伸的阻隔壁4021，该阻隔壁4021围绕该检测电极401而于该检测电极401上形成一容置空间4022。
最后，如图4D所示，将一高分子材料填充至该阻隔部402内的该容置空间4022并且形成一反应感测膜403，该反应感测膜403和该检测电极401接触。
综上所述，利用本发明的方法所得到的该气体感测器，为具备结构简单的优点，且前述的步骤均可采厚膜工艺，例如卷对卷(Roll to Roll)工艺，而不须使用半导体工艺或薄膜技术，制造方便且成本较低，适合大量生产。
当然，本发明还可有其它多种实施例，在不背离本发明精神及其实质的情况下，熟悉本领域的技术人员当可根据本发明作出各种相应的改变和变形，但这些相应的改变和变形都应属于本发明所附的权利要求的保护范围。
Claims (16)
1.一种气体感测器，其特征在于，包含有：
一基板；
一设置于该基板上的加热层；
一设置于该加热层上的绝缘层；以及
多个排列且设置于该绝缘层上的检测单元，该检测单元分别包括至少一检测电极、一围绕该检测电极的阻隔部以及一反应感测膜，该检测电极包括一第一电极及一第二电极，该第一电极包括一第一条状电极以及一自该第一条状电极延伸的第一指状电极，该第二电极包括一第二条状电极以及一自该第二条状电极延伸的第二指状电极，该第一指状电极和该第二指状电极彼此交替排列，该反应感测膜设置于该阻隔部内的一容置空间并和该检测电极接触；
其中，该反应感测膜和一待测气体接触而进行一电化学反应，使该检测电极产生一对应该待测气体的识别信号。
2.根据权利要求1所述的气体感测器，其特征在于，该基板的材料择自于玻璃、铟锡氧化物及聚对苯二甲酸乙二酯所组成的群组。
3.根据权利要求1所述的气体感测器，其特征在于，该加热层接受一电流而加热至一介于30℃至70℃之间的温度。
4.根据权利要求1所述的气体感测器，其特征在于，该加热层的材料为铟锡氧化物。
5.根据权利要求1所述的气体感测器，其特征在于，该绝缘层的材料为聚对苯二甲酸乙二酯。
6.根据权利要求1所述的气体感测器，其特征在于，该检测电极的材料择自于铟锡氧化物、铜、镍、铬、铁、钨、磷、钴及银所组成的群组。
7.根据权利要求1所述的气体感测器，其特征在于，该阻隔部包括多个远离该绝缘层而向上延伸的阻隔壁，该阻隔壁围绕出该容置空间。
8.根据权利要求1所述的气体感测器，其特征在于，该检测电极的该第一条状电极与该第二条状电极沿一第一轴向延伸且平行设置，该第一指状电极沿一与该第一轴向相异的第二轴向自该第一条状电极朝该第二条状电极延伸，该第二指状电极沿该第二轴向自该第二条状电极朝该第一条状电极延伸，该第一指状电极与该第二指状电极呈平行排列设置。
9.一种气体感测器的制作方法，其特征在于，包含下列步骤：
提供一基板；
于该基板上形成一加热层；
于该加热层上形成一绝缘层；
于该绝缘层上形成至少一检测电极，该检测电极包括一第一电极及一第二电极，该第一电极包括一第一条状电极以及一自该第一条状电极延伸的第一指状电极，该第二电极包括一第二条状电极以及一自该第二条状电极延伸的第二指状电极，该第一指状电极和该第二指状电极彼此交替排列；
于该绝缘层上形成一阻隔部，该阻隔部围绕该检测电极，且于该检测电极上形成一容置空间；以及
将一高分子材料填充至该阻隔部内的该容置空间并且形成一反应感测膜，而得到一气体感测器。
10.根据权利要求9所述的气体感测器的制作方法，其特征在于，该基板材质择自于玻璃、铟锡氧化物及聚对苯二甲酸乙二酯所组成的群组。
11.根据权利要求9所述的气体感测器的制作方法，其特征在于，该加热层接受一电流而加热至一介于30℃至70℃之间的温度。
12.根据权利要求9所述的气体感测器的制作方法，其特征在于，该加热层的材料为铟锡氧化物。
13.根据权利要求9所述的气体感测器的制作方法，其特征在于，该绝缘层的材料为聚对苯二甲酸乙二酯。
14.根据权利要求9所述的气体感测器的制作方法，其特征在于，该检测电极的材料择自于铟锡氧化物、铜、镍、铬、铁、钨、磷、钴及银所组成的群组。
15.根据权利要求9所述的气体感测器的制作方法，其特征在于，该阻隔部包括多个远离该绝缘层而向上延伸的阻隔壁，该阻隔壁围绕出该容置空间。
16.根据权利要求9所述的气体感测器的制作方法，其特征在于，该检测电极的该第一条状电极与该第二条状电极沿一第一轴向延伸且平行设置，该第一指状电极沿一与该第一轴向相异的第二轴向自该第一条状电极朝该第二条状电极延伸，该第二指状电极沿该第二轴向自该第二条状电极朝该第一条状电极延伸，该第一指状电极与该第二指状电极呈平行排列设置。
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- 2016-04-05 DE DE102016106186.7A patent/DE102016106186A1/de not_active Ceased
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| CN114002269A (zh) * | 2021-11-01 | 2022-02-01 | 杭州电子科技大学 | 一种多肽/MoS2/SnO2复合材料制备方法及应用 |
| CN114002269B (zh) * | 2021-11-01 | 2023-11-24 | 杭州电子科技大学 | 一种多肽/MoS2/SnO2复合材料制备方法及应用 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017106886A (ja) | 2017-06-15 |
| TWI565944B (zh) | 2017-01-11 |
| US20170168009A1 (en) | 2017-06-15 |
| DE102016106186A1 (de) | 2017-06-14 |
| TW201721137A (zh) | 2017-06-16 |
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