CN106854754B - 一种400主峰晶面高度择优取向ito薄膜的制备方法 - Google Patents
一种400主峰晶面高度择优取向ito薄膜的制备方法 Download PDFInfo
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- CN106854754B CN106854754B CN201611166365.7A CN201611166365A CN106854754B CN 106854754 B CN106854754 B CN 106854754B CN 201611166365 A CN201611166365 A CN 201611166365A CN 106854754 B CN106854754 B CN 106854754B
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- thin film
- ito thin
- sputtering
- main peak
- substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201611166365.7A CN106854754B (zh) | 2016-12-16 | 2016-12-16 | 一种400主峰晶面高度择优取向ito薄膜的制备方法 |
Applications Claiming Priority (1)
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CN201611166365.7A CN106854754B (zh) | 2016-12-16 | 2016-12-16 | 一种400主峰晶面高度择优取向ito薄膜的制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN106854754A CN106854754A (zh) | 2017-06-16 |
CN106854754B true CN106854754B (zh) | 2019-04-26 |
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CN201611166365.7A Active CN106854754B (zh) | 2016-12-16 | 2016-12-16 | 一种400主峰晶面高度择优取向ito薄膜的制备方法 |
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CN (1) | CN106854754B (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108103466A (zh) * | 2017-12-21 | 2018-06-01 | 君泰创新(北京)科技有限公司 | 高迁移率透明导电氧化物薄膜的制备方法 |
CN108374155B (zh) * | 2018-02-27 | 2021-06-29 | 清华大学 | Ito薄膜及其制备方法 |
CN109234711B (zh) * | 2018-09-25 | 2020-06-02 | 桂林电子科技大学 | 一种溶胶凝胶法制备(400)晶面择优取向ito薄膜的方法 |
CN109881153B (zh) * | 2019-04-18 | 2020-12-04 | 大连交通大学 | 具有(400)晶面择优的铟锡氧化物在透明薄膜热电偶上的应用 |
CN111763911A (zh) * | 2020-05-25 | 2020-10-13 | 先导薄膜材料(广东)有限公司 | Ito薄膜 |
CN114481101B (zh) * | 2021-12-15 | 2023-09-29 | 中南大学 | 一种调控金属镀层晶面取向的方法获得的金属材料和应用 |
CN115094378B (zh) * | 2022-06-13 | 2023-11-03 | 桂林电子科技大学 | 一种多层复合ito薄膜 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000109321A (ja) * | 1998-10-05 | 2000-04-18 | Mitsubishi Materials Corp | Ito薄膜及びその製造方法 |
KR100514952B1 (ko) * | 2003-01-15 | 2005-09-14 | 주식회사 피앤아이 | 씨앗층과 벌크층의 성막 시퀀스 방법을 이용한 인듐 주석산화물 박막 형성 방법 |
CN102945694B (zh) * | 2012-11-08 | 2015-05-20 | 深圳南玻显示器件科技有限公司 | Ito基板及其制备方法 |
CN103632754B (zh) * | 2013-11-21 | 2015-12-09 | 中国科学院宁波材料技术与工程研究所 | 一种超薄铝掺杂氧化锌透明导电薄膜及其制备方法 |
CN105714262A (zh) * | 2016-05-05 | 2016-06-29 | 常州工学院 | 一种择优生长ito透明导电薄膜的制备方法 |
CN105957924A (zh) * | 2016-06-28 | 2016-09-21 | 常州工学院 | 一种利用ZnO缓冲层制备择优取向ITO光电薄膜的方法 |
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- 2016-12-16 CN CN201611166365.7A patent/CN106854754B/zh active Active
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Effective date of registration: 20210730 Address after: 546100 southwest of the intersection of Nanbei Central Avenue and No. C road in Laibin overseas Chinese investment zone, Guangxi Zhuang Autonomous Region Patentee after: GUANGXI ZHONGPEI OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 541004 1 Jinji Road, Qixing District, Guilin, the Guangxi Zhuang Autonomous Region Patentee before: GUILIN University OF ELECTRONIC TECHNOLOGY |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A preparation method for ITO thin films with highly preferred orientation of 400 main peak crystal planes Effective date of registration: 20230703 Granted publication date: 20190426 Pledgee: Guangxi Laibin Rural Commercial Bank Co.,Ltd. Pledgor: GUANGXI ZHONGPEI OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: Y2023450000095 |