CN1068289C - 加固了的半导体晶片容器 - Google Patents

加固了的半导体晶片容器 Download PDF

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Publication number
CN1068289C
CN1068289C CN95193275A CN95193275A CN1068289C CN 1068289 C CN1068289 C CN 1068289C CN 95193275 A CN95193275 A CN 95193275A CN 95193275 A CN95193275 A CN 95193275A CN 1068289 C CN1068289 C CN 1068289C
Authority
CN
China
Prior art keywords
cassette
dispenser
wafer
wafer cassette
dispensers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN95193275A
Other languages
English (en)
Chinese (zh)
Other versions
CN1149279A (zh
Inventor
巴里·格雷格荪
博伊德·威特曼
詹姆斯·E·霍利迪
加里·M·加拉格尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Empak Inc
Original Assignee
Empak Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Empak Inc filed Critical Empak Inc
Publication of CN1149279A publication Critical patent/CN1149279A/zh
Application granted granted Critical
Publication of CN1068289C publication Critical patent/CN1068289C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1916—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
    • H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/0025—Preventing defects on the moulded article, e.g. weld lines, shrinkage marks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
CN95193275A 1994-05-23 1995-05-23 加固了的半导体晶片容器 Expired - Lifetime CN1068289C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/247,887 US5476176A (en) 1994-05-23 1994-05-23 Reinforced semiconductor wafer holder
US08/247,887 1994-05-23

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CNB001033433A Division CN1165982C (zh) 1994-05-23 1995-05-23 加固了的半导体晶片容器

Publications (2)

Publication Number Publication Date
CN1149279A CN1149279A (zh) 1997-05-07
CN1068289C true CN1068289C (zh) 2001-07-11

Family

ID=22936797

Family Applications (2)

Application Number Title Priority Date Filing Date
CN95193275A Expired - Lifetime CN1068289C (zh) 1994-05-23 1995-05-23 加固了的半导体晶片容器
CNB001033433A Expired - Lifetime CN1165982C (zh) 1994-05-23 1995-05-23 加固了的半导体晶片容器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNB001033433A Expired - Lifetime CN1165982C (zh) 1994-05-23 1995-05-23 加固了的半导体晶片容器

Country Status (7)

Country Link
US (1) US5476176A (enExample)
EP (1) EP0760794A4 (enExample)
JP (1) JPH09512960A (enExample)
CN (2) CN1068289C (enExample)
MY (1) MY112149A (enExample)
TW (1) TW271489B (enExample)
WO (1) WO1995032132A1 (enExample)

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US7600359B2 (en) * 2002-05-09 2009-10-13 Seagate Technology Llc Method of merging two disks concentrically without gap between disks
US6988620B2 (en) * 2002-09-06 2006-01-24 E.Pak International, Inc. Container with an adjustable inside dimension that restricts movement of items within the container
US7168153B2 (en) * 2002-10-10 2007-01-30 Maxtor Corporation Method for manufacturing single-sided hard memory disks
US7083376B2 (en) 2002-10-10 2006-08-01 Maxtor Corporation Automated merge nest for pairs of magnetic storage disks
KR100675627B1 (ko) * 2002-10-10 2007-02-01 엘지.필립스 엘시디 주식회사 기판 수납용 카세트
TWI337160B (en) * 2003-10-09 2011-02-11 Entegris Inc Shipper with tooth design for improved loading
JP4667769B2 (ja) * 2004-06-11 2011-04-13 信越ポリマー株式会社 基板収納容器
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KR20130140750A (ko) * 2010-12-14 2013-12-24 에베 그룹 에. 탈너 게엠베하 웨이퍼를 고정 및 장착하기 위한 홀딩 장치
JP5759324B2 (ja) * 2011-09-22 2015-08-05 矢崎総業株式会社 コネクタ及び一体成形品
USD714369S1 (en) 2011-11-23 2014-09-30 Coorstek, Inc. Wafer paddle
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Also Published As

Publication number Publication date
WO1995032132A1 (en) 1995-11-30
CN1282101A (zh) 2001-01-31
TW271489B (enExample) 1996-03-01
EP0760794A1 (en) 1997-03-12
CN1149279A (zh) 1997-05-07
JPH09512960A (ja) 1997-12-22
EP0760794A4 (en) 1998-08-12
CN1165982C (zh) 2004-09-08
MY112149A (en) 2001-04-30
US5476176A (en) 1995-12-19

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C06 Publication
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C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
C17 Cessation of patent right
CX01 Expiry of patent term

Expiration termination date: 20150523

Granted publication date: 20010711