CN106735963A - A kind of machining beams space propagation pointing accuracy detection means - Google Patents
A kind of machining beams space propagation pointing accuracy detection means Download PDFInfo
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- CN106735963A CN106735963A CN201710014871.2A CN201710014871A CN106735963A CN 106735963 A CN106735963 A CN 106735963A CN 201710014871 A CN201710014871 A CN 201710014871A CN 106735963 A CN106735963 A CN 106735963A
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- thang
- kng
- axle
- position sensing
- sensing chip
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of machining beams space propagation pointing accuracy detection means, including laser beam-generating section point, light path part, galvanometer system and detection part.Laser, beam expanding lens, speculum one are sequentially fixed in horizontal direction light path, orientation rotation thang-kng axle and speculum two are fixed on vertical direction light path, pitching rotation thang-kng axle is connected with orientation rotation thang-kng axle and is placed in light path, galvanometer system is located at pitching rotation thang-kng axle rear, and be connected with motor in galvanometer, position sensing chip array is respectively fixed with horizontal display rack and vertical display rack, the laser beam for injecting galvanometer is pointed to by industrial computer is controlled.Device provided by the present invention can realize that light beam points to closed-loop control experiment, and without human intervention, it is possible to achieve the high speed of laser beam, high-precision control.
Description
Technical field
The present invention relates to laser beam accuracy control system, more particularly to a kind of machining beams space propagation pointing accuracy inspection
Survey device.
Background technology
Laser Processing be the energy using light by energy density very high is reached after lens focus in focus, by photo-thermal
Effect is processed.Laser Processing does not need that instrument, process velocity be fast, areal deformation is small.Compared with conventional machining techniques, laser
Process technology have waste of material it is few, in large-scale production cost effect substantially, to processing object have very strong adaptability
Etc. advantageous feature.
Laser Processing belongs to contactless processing, and the energy and its translational speed of high energy laser beam are adjustable.It can
With to various metals, nonmetallic processing, particularly can be with processing high-hardness, fragility high and dystectic material.Laser can be used for
Cutting, surface treatment, welding, mark and perforation processing etc., it is also possible to for Laser Surface Treatment, including laser transformation hardening,
Laser cladding, laser surface alloying and laser surface remelting etc..In Europe, to superior automobile car shell and base, aircraft wing
And the welding of the special material such as spacecraft body, laser technology is used substantially.
However, when being processed to large scale component by laser, during Laser beam propagation, its pointing accuracy is received
To each part assembling of transmission light path and kinematic accuracy influence, it tends to be difficult to high-precision demand is reached, so as to influence component to process
Quality.Therefore, it is necessary to be directed to existing Laser Processing equipment, stability is poor, the low confinement problems of precision, propose it is a kind of completely
Foot high speed, high accuracy processing request and the machining beams space propagation pointing accuracy detection means that can be compensated automatically.
The content of the invention
Can meet high speed, high-precision requirement it is an object of the invention to provide one kind, and possess the processing light of feedback function
Beam space propagation pointing accuracy detection means.
To achieve the above objectives, the technical solution adopted by the present invention is：A kind of machining beams space propagation pointing accuracy inspection
Device, including base plate are surveyed, also including laser beam-generating section point, light path part, galvanometer system and detection part；The laser occurs
Part includes being fixed on the laser that being used on base plate produce laser；The light path part includes beam expanding lens, speculum one, side
Position rotates thang-kng axle, torque motor one, speculum two, pitching rotation thang-kng axle, torque motor two and orientation rotation thang-kng axle
Support；Wherein beam expanding lens is fixed on base plate, and positioned at the laser beam output end side of laser, is realized straight to laser beam
Footpath and the change of the angle of divergence；The speculum one is fixed on base plate, and positioned at the right side of beam expanding lens, is used to realize to beam expanding lens
The direction of the laser beam of output changes, and laser beam direction is changed into straight up；The orientation rotation thang-kng axle and reflection
The light direction that mirror two is fixed on after speculum one reflects by orientation rotation thang-kng bracing strut, pitching rotation thang-kng axle and orientation
Rotation thang-kng axle is connected and perpendicular to orientation rotation thang-kng axle, and the light direction after the reflection of reflected mirror two；The side
Position rotation thang-kng axle is connected with torque motor one, and torque motor one drives orientation rotation thang-kng axle to rotate and realizes that light path changes；
The pitching rotation thang-kng axle is connected with torque motor two, and torque motor two drives pitching rotation thang-kng axle to rotate and realize light path
Change；The detection part includes industrial computer, position sensing chip array one, position sensing chip array two, position sensing core
Chip arrays three, position sensing chip display rack and electrolevel；The position sensing chip display rack is by horizontal display rack
Constituted with the vertical display rack perpendicular to horizontal display rack；The position sensing chip array one, position sensing chip array three
It is respectively arranged on horizontal display rack, wherein position sensing chip array one is immediately below galvanometer system light way outlet, and position is quick
Sense chip array one, position sensing chip array three are used to detect light beam pointing accuracy after the rotation of orientation rotation thang-kng axle；Position
Sensitive chip array two rotates simultaneously on vertical display rack for detecting that orientation rotation thang-kng axle and pitching rotate thang-kng axle
Light beam afterwards is pointed to；Position sensing chip array one, position sensing chip array two and position sensing chip array three are distinguished
It is connected with industrial computer, to realize the control that laser beam is pointed to；The electrolevel is fixed on the top of galvanometer system, real
Now to the measurement at galvanometer system inclination angle.
Above-mentioned laser coincides and diameter parallel plane where base plate with beam expanding lens axis.
Above-mentioned speculum one, speculum two are in 45 degree of angles with light path.
Above-mentioned laser, beam expanding lens use adjustment frame as its clamping device, and the adjustment frame is vertically on base plate.
Above-mentioned position sensing chip array one, position sensing chip array two, position sensing chip array three believe voltage
Number industrial computer is sent to, torque motor one, torque motor two and galvanometer system are controlled by industrial computer.
The end face of above-mentioned orientation rotation thang-kng axle is bolted with orientation rotation thang-kng bracing strut.
Beneficial effects of the present invention：Compared with existing laser control system, the present invention has advantages below：
1. feedback is introduced by position sensing chip, realize the automatic calibration to laser alignment, it is whole without human intervention,
Improve the efficiency of system；
2. compared with traditional laser control system, array format is set to by by position sensing chip, expanded sharp
The detection range that light light beam is pointed to.
3. compared with traditional laser control system, increase electrolevel and detected, improve laser working light path
Precision.
4. it is good with high degree of automation, controllability compared with traditional laser control system, system experimentation high precision,
The features such as having a wide range of application.
The present invention is described further with reference to the accompanying drawings and examples.
Brief description of the drawings
Fig. 1 is the structural representation of present system device；
Fig. 2 is galvanometer system cut-away view；
Fig. 3 is operation principle block diagram of the invention.
Description of reference numerals：1. base plate；2. laser；3. beam expanding lens；4. speculum one；5. orientation rotation thang-kng axle；6.
Torque motor one；7. speculum two；8. pitching rotates thang-kng axle；9. torque motor two；10. galvanometer system；11. position sensing cores
Chip arrays one；12. position sensing chip arrays two；13. industrial computers；14. position sensing chip arrays three；15. position sensing cores
Piece display rack；16. orientation rotation thang-kng bracing struts；17. electrolevels；18. speculums three；19. speculums four；20. swing
Motor one；21. oscillating motors two；22. field lenses.
Specific embodiment
As shown in Figure 1, Figure 3, the invention provides a kind of machining beams space propagation pointing accuracy detection means, including bottom
Plate 1, also including laser beam-generating section point, light path part, galvanometer system 10 and detection part；The laser beam-generating section point includes solid
It is scheduled on the laser 2 that being used on base plate 1 produce laser；The light path part includes beam expanding lens 3, speculum one 4, orientation rotation
Thang-kng axle 5, torque motor 1, speculum 27, pitching rotation thang-kng axle 8, torque motor 29 and orientation rotation thang-kng axle branch
Frame 16；Wherein beam expanding lens 3 is fixed on base plate 1, and positioned at the laser beam output end side of laser 2, is realized to laser light
The change of beam diameter and the angle of divergence, to improve focusing performance；The speculum 1 is fixed on base plate 1, and positioned at beam expanding lens 3
Right side, be used to realize that the direction of the laser beam to the output of beam expanding lens 3 changes, laser beam direction is changed into straight up；
The orientation rotation thang-kng axle 5 is with speculum 27 after orientation rotation thang-kng bracing strut 16 is fixed on the reflection of speculum 1
Light direction, pitching rotation thang-kng axle 8 is connected and perpendicular to orientation rotation thang-kng axle 5 with orientation rotation thang-kng axle 5, and positioned at warp
Light direction after the reflection of speculum 27；The orientation rotation thang-kng axle 5 is connected with torque motor 1, and torque motor 1 drives
Dynamic orientation rotation thang-kng axle 5 rotates and realizes that light path changes；The pitching rotation thang-kng axle 8 is connected with torque motor 29, torque
Motor 29 drives pitching rotation thang-kng axle 8 to rotate and realize that light path changes；The galvanometer system 10 and pitching rotation thang-kng axle 8
It is connected and is placed in the light path exit of pitching rotation thang-kng axle 8；Pointed to by the control realization light path to the entirety of galvanometer system 10
Change；As shown in Fig. 2 the galvanometer system 10 includes speculum 3 18, speculum 4 19, oscillating motor 1, swing electricity
Machine 2 21, field lens 22；Galvanometer system 10 is connected with pitching rotation thang-kng axle 8 and is placed in the smooth way outlet of pitching rotation thang-kng axle 8
Place；Speculum 3 18 is located at the internal light porch of galvanometer system 10, and speculum 3 18, speculum 4 19 are mutually perpendicular to, and instead
Penetrate mirror 3 18 to be connected with oscillating motor 1, speculum 4 19 swings 2 21 and is connected with torque, by oscillating motor control
The control that light beam is pointed to is realized in the deflection of speculum；Field lens 22 is located at the internal light exit of galvanometer system 10, realizes that light beam converges
The lifting of cumulative power.The detection part includes industrial computer 13, position sensing chip array 1, position sensing chip array two
12nd, position sensing chip array 3 14, position sensing chip display rack 15 and electrolevel 17；The position sensing chip
Display rack 15 is constituted by horizontal display rack and perpendicular to the vertical display rack of horizontal display rack；The position sensing chip array one
11st, position sensing chip array 3 14 is respectively arranged on horizontal display rack, and wherein position sensing chip array 1 is located at galvanometer
Immediately below the smooth way outlet of system 10, position sensing chip array 1, position sensing chip array 3 14 are used to detect that orientation is revolved
Turn light beam pointing accuracy after thang-kng axle 5 rotates；Position sensing chip array 2 12 is located on vertical display rack, for detecting orientation
Postrotational light beam is pointed to rotation thang-kng axle 5 simultaneously with pitching rotation thang-kng axle 8；Position sensing chip array one 11, position is quick
Sense chip array 2 12 and position sensing chip array 3 14 are connected with industrial computer 13 respectively, to realize that laser beam is pointed to
Control；The electrolevel 17 is fixed on the top of galvanometer system 10, realizes the measurement to the inclination angle of galvanometer system 10.
The laser 2 is coincided with the axis of beam expanding lens 3 and diameter parallel is in the place plane of base plate 1.
The speculum 1, speculum 27 are in 45 degree of angles with light path.
The laser 2, beam expanding lens 3 use adjustment frame as its clamping device, and the adjustment frame is located at base plate 1 vertically
On.
The position sensing chip array 1, position sensing chip array 2 12, position sensing chip array 3 14 will
Voltage signal is sent to industrial computer 13, and torque motor 1, torque motor 29 and galvanometer system 10 are entered by industrial computer 13
Row control.
The end face of the orientation rotation thang-kng axle 5 is bolted with orientation rotation thang-kng bracing strut 16.
The laser of apparatus of the present invention, beam expanding lens, speculum are sequentially fixed in horizontal direction light path, orientation rotation thang-kng
Axle and speculum are fixed on vertical direction light path, and pitching rotation thang-kng axle is connected with orientation rotation thang-kng axle and is placed in light path, shakes
Mirror system is located at pitching rotation thang-kng axle rear, and position sensing chip array is individually fixed in horizontal display rack and vertical display rack
On, and be connected with motor in galvanometer, the laser beam for injecting galvanometer is pointed to by industrial computer is controlled.With tradition
Laser control system is compared, and overcomes existing optical fiber laser marking system low, the low confinement problems of stability that there is precision；
And currently available technology there is no satisfaction high speed, the laser control system of high-precision requirement, device involved in the present invention can be real
Existing light beam points to closed-loop control experiment, and without human intervention, it is possible to achieve the high speed of laser beam, high-precision control.
To detect the space propagation pointing accuracy of machining beams, light path alignment is carried out during implementation first, outgoing beam is passed through
Position sensing chip center is directed at after each device, after after system stable operation, a series of voltage signal is directly given to industrial computer,
The Beam Control that galvanometer system is realized specifying is sent it to, to detect the space propagation pointing accuracy of machining beams, is controlled first
Laser beam processed draws a special shaped profile on the sensitive chip of position；Then missed by detecting shape contour central point respectively
Difference namely center of circle error are so that it is determined that system absolute position error, true by detecting shape contour error namely circularity profile errors
Determine system control accuracy error；Finally by industrial computer to galvanometer system and the control realization machining beams space of torque motor
Transmit the precise control pointed to.
On the basis of the above, closed-loop control system experiment is carried out；Increase analog vibration, point to light beam space propagation and occur
Skew, so as to gained signal after skew can be sent to industrial computer and entered by the hot spot on the sensitive chip of position with shifting
Row adjustment, is so achieved that the real-time control of light beam.The above-mentioned detection method of repetition can be analyzed and draw closed-loop control system
Control accuracy, so as to be adjusted and improvement to control error.
Meanwhile, the rotation of thang-kng axle is rotated with orientation rotation thang-kng axle and pitching, the reading of electrolevel can occur
The each position number of degrees are gathered the identification of laggard line parameter by change, and with position sensing chip obtained by information compare, can obtain
To systematic error component in all directions, the accuracy of system detectio can be improved by adjustment.
Part that the embodiment of the present invention is not described in detail, technique and letter represent the well-known components and often of the category industry
With means and general knowledge, do not describe one by one here.Exemplified as above is only for example, not constituting to the present invention to of the invention
Protection domain limitation, it is every with the present invention it is same or analogous design belong within protection scope of the present invention.
Claims (6)
1. a kind of machining beams space propagation pointing accuracy detection means, including base plate (1), it is characterised in that also including laser
Generation part, light path part, galvanometer system (10) and detection part；
The laser beam-generating section point includes being fixed on the laser (2) for being used on base plate (1) producing laser；
The light path part includes beam expanding lens (3), speculum one (4), orientation rotation thang-kng axle (5), torque motor one (6), anti-
Penetrate mirror two (7), pitching and rotate thang-kng axle (8), torque motor two (9) and orientation rotation thang-kng bracing strut (16)；Wherein expand
Mirror (3) is fixed on base plate (1), and positioned at the laser beam output end side of laser (2), realize to laser beam spot sizes and
The change of the angle of divergence；The speculum one (4) is fixed on base plate (1), and positioned at the right side of beam expanding lens (3), and it is right to be used to realize
The direction of the laser beam of beam expanding lens (3) output changes, and laser beam direction is changed into straight up；The orientation rotation thang-kng
Axle (5) is fixed on the light extraction side after speculum one (4) reflects with speculum two (7) by orientation rotation thang-kng bracing strut (16)
To, pitching rotates thang-kng axle (8) and is connected with orientation rotation thang-kng axle (5) and perpendicular to orientation rotation thang-kng axle (5), and positioned at warp
Light direction after the reflection of speculum two (7)；The orientation rotation thang-kng axle (5) is connected with torque motor one (6), torque motor
One (6) driving orientation rotation thang-kng axle (5) rotates and realizes that light path changes；The pitching rotates thang-kng axle (8) and torque motor
Two (9) connections, torque motor two (9) drives pitching rotation thang-kng axle (8) to rotate and realizes that light path changes；
The detection part include industrial computer (13), position sensing chip array one (11), position sensing chip array two (12),
Position sensing chip array three (14), position sensing chip display rack (15) and electrolevel (17)；The position sensing
Chip display rack (15) is constituted by horizontal display rack and perpendicular to the vertical display rack of horizontal display rack；The position sensing chip
Array one (11), position sensing chip array three (14) are respectively arranged on horizontal display rack, wherein position sensing chip array one
(11) immediately below galvanometer system (10) light way outlet, position sensing chip array one (11), position sensing chip array three
(14) for detect orientation rotation thang-kng axle (5) rotation after light beam pointing accuracy；Position sensing chip array two (12) is located at perpendicular
On straight display rack, for detecting that orientation rotation thang-kng axle (5) rotates thang-kng axle (8) while postrotational light beam is pointed to pitching；
Position sensing chip array one (11), position sensing chip array two (12) and position sensing chip array three (14) respectively with
Industrial computer (13) is connected, to realize the control that laser beam is pointed to；The electrolevel (17) is fixed on galvanometer system
(10) top, realizes the measurement to galvanometer system (10) inclination angle.
2. a kind of machining beams space propagation pointing accuracy detection means according to claim 1, it is characterised in that：It is described
Laser (2) coincides and diameter parallel plane where base plate (1) with beam expanding lens (3) axis.
3. a kind of machining beams space propagation pointing accuracy detection means according to claim 1, it is characterised in that：It is described
Speculum one (4), speculum two (7) are in 45 degree of angles with light path.
4. a kind of machining beams space propagation pointing accuracy detection means according to claim 1, it is characterised in that：It is described
Laser (2), beam expanding lens (3) use adjustment frame as its clamping device, and the adjustment frame is vertically on base plate (1).
5. a kind of machining beams space propagation pointing accuracy detection means according to claim 1, it is characterised in that：It is described
Position sensing chip array one (11), position sensing chip array two (12), position sensing chip array three (14) believe voltage
Number industrial computer (13) is sent to, by industrial computer (13) to torque motor one (6), torque motor two (9) and galvanometer system
(10) it is controlled.
6. a kind of machining beams space propagation pointing accuracy detection means according to claim 1, it is characterised in that：It is described
The end face of orientation rotation thang-kng axle (5) is bolted with orientation rotation thang-kng bracing strut (16).
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| CN108169895A (en) * | 2018-02-09 | 2018-06-15 | 中国科学院西安光学精密机械研究所 | A kind of hard light path light beam flexible transfer localization method and device |
| CN111168243A (en) * | 2020-01-02 | 2020-05-19 | 西安交通大学 | Laser polishing processing equipment |
| CN111408836A (en) * | 2020-04-23 | 2020-07-14 | 中国科学院西安光学精密机械研究所 | High-precision adjusting method for double-swing-head laser processing light beam pointing and laser processing system |
| CN112325808A (en) * | 2020-11-03 | 2021-02-05 | 北京石油化工学院 | Flatness real-time calibration compensation measurement method based on multiple PSDs |
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| CN111168243A (en) * | 2020-01-02 | 2020-05-19 | 西安交通大学 | Laser polishing processing equipment |
| CN111408836A (en) * | 2020-04-23 | 2020-07-14 | 中国科学院西安光学精密机械研究所 | High-precision adjusting method for double-swing-head laser processing light beam pointing and laser processing system |
| CN111408836B (en) * | 2020-04-23 | 2021-05-18 | 中国科学院西安光学精密机械研究所 | High-precision adjusting method for double-swing-head laser processing light beam pointing and laser processing system |
| CN112325808A (en) * | 2020-11-03 | 2021-02-05 | 北京石油化工学院 | Flatness real-time calibration compensation measurement method based on multiple PSDs |
| WO2023235906A1 (en) * | 2022-06-09 | 2023-12-14 | Trotec Laser Gmbh | Method for determining, in particular static, geometrical errors of a laser machine for cutting, engraving, marking and/or inscribing a workpiece and a method for determining the location or position of the centre point of a detector on the detector element and a calibration segment and laser machine therefor |
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