CN108169895B - Hard light path light beam flexible transmission positioning method and device - Google Patents
Hard light path light beam flexible transmission positioning method and device Download PDFInfo
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- CN108169895B CN108169895B CN201810131547.3A CN201810131547A CN108169895B CN 108169895 B CN108169895 B CN 108169895B CN 201810131547 A CN201810131547 A CN 201810131547A CN 108169895 B CN108169895 B CN 108169895B
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- 238000000034 method Methods 0.000 title claims abstract description 26
- 230000005540 biological transmission Effects 0.000 title claims abstract description 16
- 230000033001 locomotion Effects 0.000 claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 claims abstract description 21
- 238000005516 engineering process Methods 0.000 claims abstract description 13
- 238000012544 monitoring process Methods 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 claims description 12
- 238000012546 transfer Methods 0.000 claims description 10
- 230000004807 localization Effects 0.000 claims description 7
- 230000001360 synchronised effect Effects 0.000 claims description 4
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- 239000000919 ceramic Substances 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 230000003252 repetitive effect Effects 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 2
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- 230000011514 reflex Effects 0.000 claims description 2
- 238000013461 design Methods 0.000 description 20
- 238000001514 detection method Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000011160 research Methods 0.000 description 6
- 238000012937 correction Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000004579 marble Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
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- 238000011161 development Methods 0.000 description 1
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- 238000005304 joining Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 208000020442 loss of weight Diseases 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
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Abstract
The invention provides a method and a device for flexibly transmitting and positioning a hard light path light beam, which adopt a space light beam flexible transmission technology to carry out laser manufacturing on a large-breadth complex pattern, and mainly comprise the following steps: planning a light beam space scanning path, carrying out light beam space scanning, controlling a component to move in space by a transmission positioning motion platform according to a scanning result, and accurately positioning the position of a light spot; associating the laser scanning speed with the laser pulses, wherein the faster the scanning speed is, the more the number of the laser pulses is, and finely manufacturing large-format complex patterns by controlling the scanning speed and the number of the laser pulses; controlling the light beam by a spatial four-degree-of-freedom rotating arm, completing a control process by the motion of a horizontal rotating shaft and a vertical rotating shaft, keeping the synchronization of the horizontal rotating shaft and the vertical rotating shaft in the control process, monitoring the angle deviation of the light beam by a CMOS camera, detecting the deflection angle of the light beam by a light beam position detector after the angle deviation passes through a reflector; and carrying out fine adjustment on the horizontal and vertical rotating shafts according to the deflection angle.
Description
Technical field:
The invention belongs to advanced laser manufacturing field, it is related to a kind of hard optical path light beam flexible transfer localization method and device.
For carrying out laser manufacture to large format complex pattern.
Background technique:
Complex-curved component laser surface is manufactured, it will usually realize that workpiece is opposite with laser using 5-axis movement platform
Movement is processed to complete complex component, however there are mechanical interferences, the big, precision/low efficiencys of space hold etc. for this processing method
Problem is not suitable for the manufacture of large-scale component.To solve the above-mentioned problems, more laser processing equipment manufacturers are all made of three both at home and abroad
Linear axis lathe combines double shaft laser transmission processing heads to form 5-axis movement lathe, realizes complex large-scale component laser surface system
It makes.Wherein, the LASERDYNE series five axis laser-processing systems of high-precision of PRIMA company are, it can be achieved that diameter is more than 1.5m aviation
The manufacture of engine part picture on surface quarter type[1]；Lanzhou space technology physics Institute is using the large-scale component laser surface produced
Manufacturing equipment, achievable spacecraft large size consolidate the manufacture of surface antenna reflector pattern[2]。
Currently, above-mentioned equipment can satisfy the application demand of some low precision laser surface manufactures, but with aerospace
The development of field technology proposes the requirement of the higher accuracy of manufacture for the manufacture of large complicated carved component surface, wherein existing
Following problem: 1) large format pattern high-precision joining manufactures；2) influence of the machining beams movement velocity to manufacturing quality[3]。
Bibliography:
[1] a kind of large scale ring-shaped thin-walled part laser incising type new method of Teng Zhiqiang, Li Ming, Wang Hui, Machine Design and system
It makes, 2016.12.
[2] Jianping YANG, Chen Xuekang, Wu dare, Wang Rui, Cao Shengzhu laser etching techniques and its space-vehicle antenna manufacture in
Application, Aerospace manufacturing technology.
[3] Wu Shanhong, Qi Jun, Yu Xiaoshun, Fang Minggang .Nd:YAG laser marking process test research, laser with it is infrared,
In April, 1999.
Summary of the invention:
Large-scale component surface it is conventionally manufactured, rely on five shaft platforms realize component movement, there are mechanical interferences, space hold
Greatly, the problems such as precision/low efficiency, the present invention develops light beam high-speed flexible and transmits location technology, reduces mechanical structure, anti-locking mechanism
Interference and raising manufacture efficiency, while developing the accurate pointing technology of light beam.Light beam space high-speed flexible transmission positioning and precisely finger
To technology, the problems such as space hold for solving large-scale component surface laser manufacturing equipment is big, precision/low efficiency, it is related to a kind of hard
Optical path light beam flexible transfer localization method and device, this method and device beam orthogonal pivot angle: -100 °~+100 °, beam level
Pivot angle: 0~360 °；Horizontal rotation central axis is with vertical rotary middle spindle orthogonal angles deviation :≤5 ", repetitive positioning accuracy≤2 μ
rad；Largest beam transmits scanning speed 1m/s.
Method specifically includes that planning light beam spacescan path, light beam spacescan is carried out, according to scanning result, by passing
Defeated positioning motion platform control member moves in space, and facula position is accurately positioned；By laser scanning speed and swash
Light pulse association, scanning speed is faster, and laser pulse number is more, by control scanning speed and laser pulse number to substantially
Face complex pattern finely manufactures；Light beam is controlled by space four-degree-of-freedom rotating arm, by horizontal and vertical rotary shaft
Control process is completed in movement, is kept horizontal synchronous with vertical rotating shaft in control process, is passed through CMOS camera monitoring light beam
Reflecting mirror is passed through in angular deviation, angular deviation, detects light beam deflection angle by beam position detector；According to deflection angle to water
Flat and vertical rotating shaft is finely adjusted.By adjustable mirror, adjustable mirror includes driving for installation in horizontal and vertical rotary shaft
The first driving mechanism that reflecting optics are rotated along trunnion axis, and the second driving that the driving reflecting optics are rotated along vertical axis
Mechanism.First driving mechanism includes the piezoelectric ceramic motor for fine tuning, the servo motor for coarse adjustment.The transmission positioning fortune
Moving platform control member is moved along XYZ axis, by the mobile realization component in XYZ axis direction relative to light beam translation；It is described
Light beam is rotated in the vertical and horizontal directions by the driving of space four-degree-of-freedom rotating arm, passes through rotation in the vertical and horizontal directions
Turn, realizes rotary motion of the component relative to light beam.
Device mainly includes beam angle offset detection system, beam delivery system, whistle control system, rotary axis
System；Wherein, wherein rotary shaft system includes adjustable mirror.It further include three discrete parts: light beam four-degree-of-freedom space high speed
Scan transfer technological system, Space Rotating synchronization accuracy control system and light beam direct detection and correction system.Light beam four is freely
The incidence relation of space high-velocity scanning transmission technology system research laser scanning speed and laser pulse is spent, realizes complex pattern essence
Thin manufacture；Space Rotating synchronization accuracy control system transmits light beam space four-degree-of-freedom, by horizontal and vertical rotary shaft
High-speed motion and synchronously control realize, if synchronization accuracy is low, the angular deviation that light beam will be caused to be directed toward, through optical reflection group
It will cause very big Working position after part amplification to deviate, therefore need research level, the synchronization accuracy control technology of vertical rotating shaft.Light
With correction system for light beam directive property to be adjusted, laser beam can exist certain beam direct detection in transmission process
System deviation significantly affects the laser accuracy of manufacture.Therefore, it is based on high speed and super precision scanning galvanometer processing head, research light beam is directed toward real
When detection and alignment technique, revise the dynamic error of light beam scanning, while compensating the precision of light beam space propagation and positioning system
Error.
To realize the light beam spatial flexible transmission in the hard optical path of laser, guarantees that light beam is precisely directed toward, pass through optical beam path first
Diameter planning, the research of beam Propagation positioning full closed loop control technology solve to couple based on beam level rotation with vertical rotary real
The Scan orientation and synchronous control technique that existing light beam space is directed toward；Secondly by loss of weight design, accurate adjustment design, anticollision interference
The technical research such as mechanism design, system calibrating and compensation, temperature-compensating, it is vertical to capture cantilever compensation, beam level axis and vertical axis
The Precision measurement adjustment manufacturing technology directly spent；Finally, being based on high-velocity scanning galvanometer processing head, fusion Working position, which accurately controls, to be set
Meter, the conjugation design of Working position and system calibrating, research and development light beam direct detection and correction system.By being passed to light beam space
The full closed loop control of defeated, high-velocity scanning processing head and light beam direct detection and correction realizes the space high-speed flexible transmission of light beam
Positioning and precisely direction.Transmission positioning motion platform control member is moved along XYZ axis, passes through the mobile reality in XYZ axis direction
Existing component is relative to light beam translation；The light beam is rotated in the vertical and horizontal directions by the driving of space four-degree-of-freedom rotating arm,
By rotation in the vertical and horizontal directions, rotary motion of the component relative to light beam is realized.
Detailed description of the invention:
The hard optical path light beam flexible transfer localization method component part schematic diagram of Fig. 1.
Fig. 2 light beam spatial flexible transmission positioning and accurate pointing system block diagram.
Specific embodiment:
Hard optical path light beam flexible transfer localization method, using spatial beam flexible transfer technology, to large format complex pattern
Laser manufacture is carried out, planning light beam spacescan path is specifically included that, light beam spacescan is carried out, according to scanning result, by passing
Defeated positioning motion platform control member moves in space, and facula position is accurately positioned；By laser scanning speed and swash
Light pulse association, scanning speed is faster, and laser pulse number is more, by control scanning speed and laser pulse number to substantially
Face complex pattern finely manufactures；Light beam is controlled by space four-degree-of-freedom rotating arm, by horizontal and vertical rotary shaft
Control process is completed in movement, is kept horizontal synchronous with vertical rotating shaft in control process, is passed through CMOS camera monitoring light beam
Reflecting mirror is passed through in angular deviation, angular deviation, detects light beam deflection angle by beam position detector；According to deflection angle to water
Flat and vertical rotating shaft is finely adjusted.The transmission positioning motion platform control member is moved along XYZ axis, by the axis side XYZ
Upward mobile realization component is relative to light beam translation；The light beam by space four-degree-of-freedom rotating arm drive it is horizontal with it is vertical
It is rotated on direction, by rotation in the vertical and horizontal directions, realizes rotary motion of the component relative to light beam.It is horizontal and vertical
By adjustable mirror, adjustable mirror includes the first driving machine for driving reflecting optics to rotate along trunnion axis for installation in direct rotary shaft
Structure, and the second driving mechanism that the driving reflecting optics are rotated along vertical axis.First driving mechanism includes for fine tuning
Piezoelectric ceramic motor, the servo motor for coarse adjustment, wherein beam orthogonal pivot angle is -100 ° to+100 °, beam level pivot angle
It is 0 ° to 360 °, horizontal rotation central axis is not more than 5 with vertical rotary middle spindle orthogonal angles deviation ", repetitive positioning accuracy is not
Greater than 2 μ rad.
Use the transmission positioning device of hard optical path light beam flexible transfer localization method, including beam angle separate-blas estimation system
System, beam delivery system, whistle control system, rotary shaft system；Wherein, wherein rotary shaft system includes adjustable mirror.
Adjustable mirror is used to reflex to along the laser beam that Z-direction is propagated and propagate along A axis, for convenience of laser is adjusted
The reflection direction of light beam realizes that the Bidimensional small angle of laser reflection microscope groups is adjusted using 3 orthogonal manners, adjusts used micro-
It adjusts screw rod to use the accurate fine thread of 0.25mm, the angular resolution needed for adjusting can satisfy by using allen wrench.
Laser reflection microscope group is pressed to by balance staff connection pedestal using disk spring, disk spring is rigidly preferable, and can pass through locking
Screw adjusts pressing force, and fine tuning screw rod can preferably keep the angle of laser reflection microscope group, be conducive to transport after being adjusted in place
Etc. position angle stability in vibration environments, wherein X-axis driving workbench vertically moves, and Y-axis drives on gantry beam
Laser and optic path system do transverse movement, and Z axis does transverse movement on Y-axis slide plate, and C axis and A axis are mounted on Z axis lower end
Do movement in vertical direction.In addition to adjustable mirror, stationary mirror is also may be selected in rotary shaft system.
Stationary mirror structure design considerations: requiring according to optical design techniques, and reflecting mirror need to be two-dimentional along X, Y horizontal plane
Fine adjustment.Stationary mirror structural design scheme: waist-shaped hole is designed on pedestal to be adjusted along X-axis；Board ends design is connected to adjust
Fixed block, by jackscrew along Y-axis fine adjustment.Stationary mirror structure is more mature structure design, is tested by several system.
Overall construction design meets optical design requirement, is able to satisfy design requirement.
Beam path switches over circuit by path switching mechanisms.Optical path switching construction design considerations: according to optical design
Technical requirements, dichroic reflection microscope group need to play the role of switching-over light path two positions.Optical path switching construction design scheme: light splitting
It reflects microscope group and the point-to-point position switching of progress is driven by cylinder；Screw thread unthreaded hole and marble upper screwed hole be by gap on bottom plate,
Fine tuning about the z axis can be carried out, the buffer on locating piece can carry out the fine tuning along incident light direction.It is whole to use point-to-point positioning
Structure, guiding leaning linear guide guiding, locating piece is fixed structure, and buffer is compressed to bottom and is also considered as fixed structure, by
Be in the reflecting mirror direction of motion it is reversed along mirror surface, therefore cylinder pushing direction on reflection angle without influence, linear guide uses upper silver
MGNR9R60PM, this guide rail are micron order guide rail, and the gap between sliding block and guide rail is 2 μm after precompressed.
Wave plate regulating mechanism is passed through to the rotary fine adjustment of prism in the Z-axis direction, wave plate adjustment structure design considerations: according to
Optical design techniques requirement, prism need to be along Z-direction rotary fine adjustment, and wave plate is rotatable.Wave plate adjustment structure design considerations: prism connection
Screw thread on part on unthreaded hole and marble mounting plate has gap, can adjust along the micro- rotation of Z axis.Wave plate is fixed on wave plate rotating frame
On, suitable position is rotated to, fixes position with fastening screw.
Since rotating arm needs rotary motion, circuit line is arranged in rotating arm A axis and C axis, in A axis
And metal hose wire laying mode is galvanometer line, CCD line, piano wire along clockwise direction around the hose center of circle before C axis.
For those skilled in the art, above-described embodiment is merely a preferred embodiment of the present invention, and should not be understood as to this hair
The limitation of bright the scope of the patents, under the premise of not departing from design of the invention, several improvement for making, substitution belong to this hair
Bright protection scope.
Claims (1)
1. a kind of hard optical path light beam flexible transfer localization method, using spatial beam flexible transfer technology, to large format complexity figure
Case carries out laser manufacture, comprising:
It plans light beam spacescan path, carries out light beam spacescan, according to scanning result, by transmission positioning motion platform control
Component moves in space, and facula position is accurately positioned；
Laser scanning speed is associated with laser pulse, scanning speed is faster, and laser pulse number is more, passes through control scanning speed
Degree and laser pulse number finely manufacture large format complex pattern；
Light beam is controlled by space four-degree-of-freedom rotating arm, was controlled by the movement completion of horizontal and vertical rotary shaft
Journey keeps horizontal synchronous with vertical rotating shaft in control process, and by CMOS camera monitoring light beam angular deviation, angle is inclined
Difference passes through reflecting mirror, detects light beam deflection angle by beam position detector；
Horizontal and vertical rotary shaft is finely adjusted according to deflection angle；
The transmission positioning motion platform control member is moved along XYZ axis, passes through the mobile realization component phase in XYZ axis direction
For light beam translation；The light beam is rotated in the vertical and horizontal directions by the driving of space four-degree-of-freedom rotating arm, by water
Rotary motion of the component relative to light beam is realized in the flat rotation in vertical direction；
Adjustable mirror is installed, adjustable mirror includes driving reflecting optics along trunnion axis in the horizontal and vertical rotary shaft
First driving mechanism of rotation, and the second driving mechanism that the driving reflecting optics are rotated along vertical axis；
First driving mechanism includes the piezoelectric ceramic motor for fine tuning, the servo motor for coarse adjustment, wherein light beam hangs down
Straight pivot angle is -100 ° to+100 °, and beam level pivot angle is 0 ° to 360 °, and horizontal rotation central axis and vertical rotary middle spindle are just
Angular deviation is handed over to be not more than 5 ", repetitive positioning accuracy is not more than 2 μ rad；
Adjustable mirror is used to reflex to along the laser beam that Z-direction is propagated and propagate along A axis, for convenience of laser beam is adjusted
Reflection direction, realize that the Bidimensional small angle of adjustable mirrors is adjusted using 3 orthogonal manners, adjust fine tuning screw rod used
Using the accurate fine thread of 0.25mm, the angular resolution needed for adjusting can satisfy by using allen wrench；Using dish
Laser reflection microscope group is pressed to balance staff connection pedestal by shape spring, and disk spring is rigidly preferable, and can pass through lock-screw tune
Pressing force is saved, fine tuning screw rod can preferably keep the angle of laser reflection microscope group, be conducive to Transport Vibration ring after being adjusted in place
Position angle stability in border.
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| CN201810131547.3A CN108169895B (en) | 2018-02-09 | 2018-02-09 | Hard light path light beam flexible transmission positioning method and device |
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| CN108169895B true CN108169895B (en) | 2019-06-28 |
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| CN109822876B (en) * | 2019-03-27 | 2024-04-19 | 镇江市辰辉电子科技有限公司 | Spectacle lens marking equipment |
| CN113787271B (en) * | 2021-11-15 | 2022-02-22 | 广东原点智能技术有限公司 | Five laser beam machining machines |
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| CN106695118A (en) * | 2017-03-13 | 2017-05-24 | 浙江师范大学 | Four-freedom-degree XY vibrating mirror scanning device and control method |
| CN106735963A (en) * | 2017-01-09 | 2017-05-31 | 西安电子科技大学 | A kind of machining beams space propagation pointing accuracy detection means |
| CN106853556A (en) * | 2015-12-09 | 2017-06-16 | 彭翔 | Multi-shaft interlocked ultrafast laser machining system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7351241B2 (en) * | 2003-06-02 | 2008-04-01 | Carl Zeiss Meditec Ag | Method and apparatus for precision working of material |
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|---|---|---|---|---|
| CN105033450A (en) * | 2015-05-27 | 2015-11-11 | 广东高聚激光有限公司 | Laser cold machining system |
| CN104889395A (en) * | 2015-06-25 | 2015-09-09 | 武汉大学 | Nanosecond-picosecond-femtosecond laser technology based metal product 3D printing method |
| CN106853556A (en) * | 2015-12-09 | 2017-06-16 | 彭翔 | Multi-shaft interlocked ultrafast laser machining system |
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