CN109909602B - Optical-electromechanical cooperative control system of ultrafast laser processing equipment - Google Patents
Optical-electromechanical cooperative control system of ultrafast laser processing equipment Download PDFInfo
- Publication number
- CN109909602B CN109909602B CN201910275965.4A CN201910275965A CN109909602B CN 109909602 B CN109909602 B CN 109909602B CN 201910275965 A CN201910275965 A CN 201910275965A CN 109909602 B CN109909602 B CN 109909602B
- Authority
- CN
- China
- Prior art keywords
- laser
- galvanometer
- control module
- optical
- control system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses an optical-mechanical-electrical cooperative control system of ultrafast laser processing equipment, which comprises a cooperative control system, a main industrial personal computer, a numerical control motion platform, a galvanometer, an image industrial personal computer, an Ethernet switch, a laser and a vision measurement system, wherein the main industrial personal computer is connected with the laser; the optical-mechanical-electrical cooperative control system utilizes the Ethernet to construct a local area network, establishes network connection among the galvanometer, the motion control console and the vision measuring platform, and realizes independent control and cooperative control of the galvanometer, the motion control console and the vision measuring platform. And for the laser, the laser is simultaneously configured to the I/O ports of the galvanometer and the motion control platform to reduce instruction delay. The optical-electromechanical cooperative control system is suitable for rapid integration of a general motion control platform, a laser, a galvanometer and a vision measuring platform, faces to the field of traditional and ultra-fast laser processing, and can greatly improve the system development efficiency.
Description
Technical Field
The invention belongs to the field of automatic control, and particularly relates to an optical-mechanical-electrical cooperative control system of ultrafast laser processing equipment, which is used for realizing effective integration of a traditional numerical control machine tool, a laser, a galvanometer processing head and a visual detection platform.
Background
The laser has many excellent optical characteristics, and compared with the traditional processing, the efficiency of the laser processing is obviously improved; the diameter of the laser spot can be as small as micron, and the laser spot can be used for material surface regulation or micropore microgroove machining. The development direction of the five-axis ultrafast laser processing equipment which is an advanced laser processing technology is the highest point of the national strategic technology, and a plurality of blanks exist in the domestic research on the aspect of multi-axis ultrafast laser processing.
Although five-axis high-power laser cutting equipment is available in China at present, in the field of ultrafast laser processing, ultrafast laser processing equipment with advanced performance and integrated functions of visual online detection and seven-axis five-linkage is not reported. And because the common numerical control system does not relate to the control functions of the laser and the vision measuring platform, the cooperation control of the common numerical control system, the laser system, the vision measuring system and even the vibrating mirror processing head is required to be completed by means of the optical-mechanical-electrical cooperation control system.
Disclosure of Invention
Aiming at the problems and the integration of the hard optical path seven-axis ultrafast laser processing equipment, the invention provides an optical-electromechanical cooperative control system of the ultrafast laser processing equipment.
The invention is realized by adopting the following technical scheme:
an optical-electromechanical cooperative control system of ultrafast laser processing equipment comprises a cooperative control system, a main industrial personal computer, a numerical control motion platform, a galvanometer, an image industrial personal computer, an Ethernet switch, a laser light source and a structured light three-dimensional vision measuring device; wherein the content of the first and second substances,
the cooperative control system runs on a main industrial personal computer, the numerical control motion platform, the vibrating mirror and the image industrial personal computer form a local area control network through an Ethernet switch, the laser light source is respectively configured to the numerical control motion platform and the vibrating mirror through an RS232 serial port and a DB interface, the control of the on-off and light-emitting of the laser light source is respectively realized through the numerical control motion platform and the vibrating mirror, the interlocking between the laser light source and the vibrating mirror is realized, and the cooperative control system running on the main industrial personal computer cooperatively controls the numerical control motion platform, the vibrating mirror and the structured light three-dimensional vision measuring device through a network communication technology.
The invention has the further improvement that the cooperative control system comprises a main control module, a galvanometer control module, a laser control module, a vision measurement platform control module and a numerical control motion control module; wherein the content of the first and second substances,
the main control module inquires an external input state, a laser control module state, a galvanometer control module state, a motion control platform module state and a vision measurement platform control module state at any time through a clock of the main control module, updates the self state according to the external input state and the states of the modules and makes an action instruction;
the optical controller control module is provided with a scanning clock of the laser controller control module, realizes light emitting control and power control of the laser light source and debugging of the laser through RS232 serial port communication, or circularly inquires a control instruction distributed by the main control module and the state of the laser light source;
the galvanometer control module is provided with a scanning clock of the galvanometer control module, and the control of the galvanometer processing function is independently realized by a socket communication technology through an Ethernet switch and a network cable, or a control instruction distributed by the main control module and the state of the galvanometer are inquired in a circulating manner;
the numerical control motion control module is provided with a scanning clock of the numerical control motion control module, and the numerical control motion platform is independently controlled or the control instruction distributed by the main control module and the state of the numerical control motion platform are circularly inquired by the data access mode provided by the numerical control system through an Ethernet switch and a network cable;
the vision measurement control module is provided with a scanning clock of the vision measurement module, and communication with an image industrial personal computer is realized by means of a socket communication technology through an Ethernet switch and a network cable, so that a camera is controlled to photograph and transmit data, or control instructions distributed by the main control module and the state of the structured light three-dimensional vision measurement device are inquired in a circulating mode.
The invention is further improved in that the laser source is a German ultrafast picosecond laser EDGEWAVE with the power of 100W.
The invention is further improved in that the numerical control motion platform adopts a Siemens 840Dsl numerical control system.
The invention has the further improvement that the image industrial personal computer and the main industrial personal computer adopt a porphyry industrial personal computer.
The invention has the further improvement that the German CTI galvanometer is selected as the galvanometer.
The invention has the further improvement that the numerical control motion platform comprises a machine tool base and a marble base; the three-dimensional structured light three-dimensional vision measuring device comprises a machine tool base, a five-axis motion platform, a Y-axis motion platform, a processing head and a structured light three-dimensional vision measuring device, wherein the five-axis motion platform is arranged on the machine tool base and used for realizing translation in X, Y, Z three directions and rotation in A, C two directions;
the marble base station is provided with a laser light source, a light beam transmission system and a real-time on-line power detection device;
the beam transmission system comprises a first reflector, a second reflector, a third reflector, a beam expander, an 1/4 wave plate, a shutter, an optical bracket and an optical bracket;
the vertical column is connected with a Z-direction moving platform through a Z-direction sliding block, a Z-direction nut and a Z-direction lead screw which are arranged on the Z-direction guide rail, the vertical column drives the Z-direction lead screw to rotate through the rotation of the Z-direction motor, the vertical movement of the Z-direction moving platform is realized through the transmission of the lead screw nut, a processing head support and a visual measurement device base are arranged on the Z-direction moving platform, wherein the processing head support is used for supporting a processing head, the visual measurement device base is used for supporting a structured light three-dimensional visual measurement device, and the processing head and the structured light three-dimensional visual measurement device are driven to move up and down through the processing head support and the visual measurement device base when the Z-direction moving platform moves up and down;
a fourth reflective mirror, a fifth reflective mirror, a spectroscope, a light path alignment module and a galvanometer are arranged in the processing head, and the modules are aligned according to the center of a light path transmission direction;
an X-direction grating ruler reading head, an X-direction guide rail, an X-direction motor, an X-direction forward bearing seat and an X-direction backward bearing seat are arranged on a machine tool base, an X-direction sliding block is arranged on the X-direction guide rail, X-direction lead screws are arranged on the X-direction forward bearing seat and the X-direction backward bearing seat, the X-direction lead screws are driven to rotate through the rotation of the X-direction motor, an X-direction moving table is driven to move along the X direction, and the X-direction moving table is connected with the machine tool base through the support of the X-direction sliding block, an X-direction;
when the laser processing device works, the first reflector, the second reflector and the third reflector are used for reflecting light generated by laser to the sixth reflector and reflecting the light to the processing head through the sixth reflector; the fourth reflector in the machining head is used for reflecting the laser reflected by the sixth reflector to the vibrating mirror, the vibrating mirror reflects the light beam to the spectroscope according to a set angle through self movement, one part of the light beam passing through the spectroscope is used for machining, and the other part of the light beam is reflected to the light path alignment module through the fifth reflector and is used for light path offset correction.
The invention is further improved in that a Y-direction guide rail, a Y-direction motor, a Y-direction grating ruler reading head, a Y-direction forward bearing seat and a Y-direction backward bearing seat are arranged on the X-direction moving platform, the Y-direction motor drives a Y-direction lead screw and a Y-direction nut to move through rotation of the Y-direction motor, and further drives the Y-direction moving platform to move along the Y direction, and the Y-direction moving platform is connected with the X-direction moving platform through the support of a Y-direction sliding block and the Y-direction nut, the Y-direction lead screw, the Y-direction forward bearing seat and the Y-direction backward bearing.
The invention is further improved in that a double-turntable mechanism is arranged on the Y-direction moving table and comprises a turntable, a turntable motor and a table swinging motor.
The invention has the further improvement that during processing, a blank is clamped on a rotary table, a Z-axis motion table of processing equipment is moved to a preset position, then a three-dimensional structure optical vision measuring device projects stripe light to the surface of the blank, the stripe light is shot by the three-dimensional structure optical vision measuring device after being projected, then the rotary table rotates a set angle to enable the blank to be positioned at the next station, the projection shooting process is repeated, after the required measuring step is completed, data obtained by the three-dimensional structure optical vision measuring device is transmitted to a main control machine, required modification profile data is obtained after the processing of a controller computer, processing data is transmitted to a seven-axis processing center, the blank is processed to obtain a workpiece, the workpiece is taken down after the processing, and then the next blank is processed.
The invention has the following beneficial technical effects:
the invention provides an optical-mechanical-electrical cooperative control system of ultrafast laser processing equipment, which runs on a main industrial personal computer, wherein the main industrial personal computer, a numerical control motion platform, a galvanometer and an image industrial personal computer form a local area control network through an Ethernet switch, a laser is respectively configured on the numerical control motion platform and the galvanometer through an RS232 serial port and a DB interface, the control of the opening and closing and the light emitting of the laser are respectively realized through the numerical control motion platform and the galvanometer, the interlocking between the two is realized, the cooperative control system operated on the main industrial personal computer cooperatively controls the numerical control motion platform, the galvanometer and the vision measuring system through the network communication technology, the invention realizes the cooperative control of the laser, the galvanometer, the motion control platform and the vision measuring platform, therefore, the on-line detection of the workpiece outline, the automatic transmission of processing data and the seven-axis five-linkage control of the power transmission platform can be realized.
Further, the laser light source adopt the laser of processing usefulness, the mirror that shakes adopt the mirror that shakes of industrial processing usefulness, motion control platform include the triaxial, five-axis motion platform commonly used in industry, vision measurement platform adopt the vision measurement system commonly used in industry that uses the industrial computer as the computational core.
Furthermore, the optical-mechanical-electrical cooperative control system is used as a universal cooperative control technology framework, and the main clock scanning period and each sub-module clock scanning period of the cooperative control module can be adjusted. In addition, the modular combination technology of the optical-electromechanical cooperative control system can combine the submodules in any order.
Drawings
Fig. 1 is a schematic view of an optical-electromechanical cooperative control hardware connection structure of an ultrafast laser processing device.
Fig. 2 is a schematic diagram of the control logic of the optical-electromechanical cooperative control system.
FIG. 3 illustrates an opto-electro-mechanical system control command type.
Fig. 4 is a schematic view of the processing flow of the optical-electromechanical cooperative control system applied to the ultrafast laser processing equipment.
Fig. 5 is a schematic structural view of an ultrafast laser processing apparatus.
Fig. 6 is a schematic diagram of the optical path system structure.
Fig. 7 is a schematic view of a processing head.
FIG. 8 is a schematic structural diagram of a machine tool base and X-direction moving parts.
FIG. 9 is a schematic structural diagram of an X-direction moving table and a Y-direction moving part of a machine tool.
FIG. 10 is a schematic view showing the structure of the assembling relationship between the Z-direction motion table of the machine tool and the processing head and the vision measuring device.
FIG. 11 is a schematic view showing the structure of a Z-direction moving table and a Z-direction moving part of a machine tool.
FIG. 12 is a schematic structural diagram of the Y-direction motion table and the dual-rotary table of the machine tool.
Fig. 13 is a schematic diagram of an ultrafast laser processing flow.
Detailed Description
The invention is illustrated in more detail below by means of examples, which are only illustrative and the scope of protection of the invention is not limited by these examples.
As shown in fig. 1, the optical-electromechanical cooperative control system for ultrafast laser processing equipment provided by the present invention operates on a main industrial personal computer 135, the main industrial personal computer 135, a numerical control motion platform a, a galvanometer 31 and an image industrial personal computer b form a local area control network through an ethernet switch c, a laser light source 1 is respectively configured to the numerical control motion platform a and the galvanometer 31 through an RS232 serial port and a DB interface, the control of the opening and closing and the light emitting of the laser light source 1 is respectively realized through the numerical control motion platform a and the galvanometer 31, and the interlocking between the two is realized, and the cooperative control system operating on the main industrial personal computer 135 cooperatively controls the numerical control motion platform a, the galvanometer 31 and a structured light three-dimensional vision measuring device 5 through a network communication technology.
As shown in fig. 2, the master control module a of the cooperative control system queries the external input state, the state of the laser control module C, the state of the galvanometer control module B, the state of the motion control platform module E, and the state of the vision measurement platform control module D at any time by using the clock of the master control module a, updates its own state, and makes an action command according to the external input state and the states of these modules.
The laser control module C of the cooperative control system is provided with a scanning clock of the laser control module C, so that light emitting control and power control of the laser light source 1 and debugging of the laser can be realized through RS232 serial port communication, and control instructions distributed by the main control module A and the state of the laser light source 1 can be inquired circularly.
The galvanometer control module B of the cooperative control system is provided with a scanning clock of the galvanometer control module B, and can independently control the processing function of the galvanometer 31 by means of a socket communication technology through an Ethernet switch c and a network cable and also can circularly inquire a control instruction distributed by the main control module A and the state of the galvanometer 31.
The numerical control motion control module E of the cooperative control system is provided with a scanning clock of the numerical control motion control module E, and can independently realize the control of the numerical control motion platform a through an Ethernet switch c and a network cable by means of a data access mode provided by the numerical control system, and can also circularly inquire a control instruction distributed by the main control module A and the state of the numerical control motion platform a.
The vision measurement control module D of the cooperative control system is provided with a scanning clock of the vision measurement module D, and can realize communication with the image industrial personal computer b by means of socket communication technology through the Ethernet switch c and a network cable, so that the camera is controlled to photograph and transmit data, and control instructions distributed by the main control module A and the state of the structured light three-dimensional vision measurement device 5 can be inquired circularly.
As shown in fig. 1, a seven-axis five-linkage ultrafast laser processing system is designed and integrated by the optical-electromechanical cooperative control system of the present invention, wherein a german ultrafast picosecond laser EDGEWAVE is used as a laser source 1, and the power is 100W; the numerical control motion platform a adopts a Siemens 840Dsl numerical control system; the image industrial personal computer b and the main industrial personal computer 135 adopt a porphyry industrial personal computer; the galvanometer 31 is a German CTI galvanometer. The optical-mechanical-electrical integration technology designed by the invention can effectively integrate a seven-axis five-linkage picosecond laser processing device and is used in the field of ultrafast laser processing and manufacturing.
Fig. 4 is a schematic view of the processing flow of the optical-electromechanical cooperative control system applied to the ultrafast laser processing equipment. As shown in step (1) of fig. 4, clamping a workpiece blank W on a turntable, controlling and sending a control command to a numerical control system by an optical-electromechanical cooperative control system, moving a Z axis of a processing device to a proper position, changing a self state of the numerical control system after the numerical control system moves in place, scanning the changed state by the optical-electromechanical cooperative control system, then sending a photographing command to a three-dimensional structured light vision measuring system, projecting stripe light to the surface of the workpiece by the vision measuring system, as shown in step (2), photographing by a camera after the stripe light is projected as in step (3), after one photographing is completed, changing the self state of the vision measuring system, scanning the state by the optical-electromechanical cooperative control system, sending a command to the numerical control system, rotating an a shaft C by a certain angle to enable the hair to be located at the next station, and repeating the steps (2) and (3) of the projection photographing process, and (3) after the required measurement step is finished, controlling the vision measurement module by the optical-electromechanical cooperative control system, transmitting data obtained by the three-dimensional structured light vision measurement device to the industrial personal computer WW as in step (4), processing by the industrial personal computer WW to obtain required modified profile data, transmitting processing data to the numerical control system by the optical-electromechanical cooperative control system, processing the blank as in step (5), taking down a processed workpiece W1 after processing as in step (6), and processing the next workpiece.
Fig. 5 to 13 are schematic diagrams showing the structure of the optical-electromechanical cooperative control system applied to the ultrafast laser processing equipment. A seven-axis five-linkage ultrafast laser processing system comprises a laser light source 1, a marble base 13 and a marble base 13, wherein the marble base 13 is arranged on a base 8; a beam transmission system 2, the beam transmission system 2 is mounted on the marble base 13 and comprises a first reflector 22, a second reflector 25, a third reflector 28, a beam expander 21, an 1/4 wave plate 23, a shutter 24, an optical bracket 26 and an optical bracket 27, wherein the first reflector 22, the second reflector 25 and the third reflector 28 are used for reflecting the light generated by the laser to a sixth reflector 1111 and reflecting the light to the processing head 3 through the sixth reflector 1111, the sixth reflector 1111 is mounted on a reflector bracket 1110 positioned on the upright post 11, and a light-passing pipe 9 is mounted between the sixth reflector 1111 and the beam transmission system 2 in order to prevent environmental dust from entering the beam transmission system 2; the fourth reflecting mirror 34 in the processing head 3 is used for reflecting the laser reflected by the sixth reflecting mirror 1111 to the vibrating mirror 31, the vibrating mirror 31 reflects the light beam to the spectroscope 33 according to a set angle through the self-movement, one part of the light beam passing through the spectroscope 33 is used for processing, the other part of the light beam is reflected to the light path pointing module 32 through the fifth reflecting mirror 35 for light path offset correction, the processing head 3 is installed on the processing head support 116, the processing head support 116 is installed on the Z-direction moving platform 1112, the fourth reflecting mirror 34, the fifth reflecting mirror 35, the spectroscope 33, the light path pointing module 32 and the vibrating mirror 31 are installed in the processing head 3, the modules are aligned according to the center of the light path transmission direction, the vibrating mirror 31 comprises two vibrating mirror motors, the two reflecting lenses are driven by the vibrating mirror motors, the light beam is reflected to the processing point of the processing plane, the contour laser processing on the plane is realized, the processing head 3 is installed on the, the up-and-down movement in the Z direction can be realized; a five-axis motion platform which can realize translation in X, Y, Z three directions and rotation in A, C two directions, the base of the five-axis motion platform is a machine tool base 4 which is placed on the ground, an X-direction grating ruler reading head 41, an X-direction guide rail 42, an X-direction motor 43, an X-direction forward bearing seat 48 and an X-direction backward bearing seat 45 are arranged on the machine tool base 4, an X-direction slider 44 is arranged on the X-direction guide rail 42, an X-direction lead screw 47 is arranged on the X-direction forward bearing seat 48 and the X-direction backward bearing seat 45, the X-direction motor 43 rotates to drive the X-direction lead screw 47 to rotate to drive the X-direction motion platform 10 to move along the X direction, the X-direction motion platform 10 is connected with the machine tool base 4 through the support of the X-direction slider 44, an X-direction nut 46 and an X-direction guide rail 47, a Y-direction guide rail 103, a Y-direction motor 101, a Y, A Y-direction rear bearing seat 103, which drives a Y-direction lead screw 108 and a Y-direction nut 105 to move through the rotation of a Y-direction motor 101, and further drives a Y-direction motion table 12 to move along the Y direction, the Y-direction motion table 12 is connected with an X-direction motion table 10 through the support of a Y-direction slider 102 and the Y-direction nut 105, the Y-direction lead screw 108, a Y-direction forward bearing seat 106 and a Y-direction rear bearing seat 104, a double-turntable mechanism is arranged on the Y-direction motion table 12 and comprises a turntable 122, a turntable motor 123 and a swing table motor 121, an upright post 11 of a five-axis motion platform is arranged on a machine tool base 4, a Z-direction motor 113, a Z-direction grating ruler 111, a Z-direction guide rail 114 and a Z-direction forward bearing seat 115 are arranged on the upright post 11, the Z-direction rear bearing seat 119 is connected with a Z-direction motion table 1112 through a slider 1113, a Z-direction nut 1114 and a Z-direction lead, The Z-direction motion platform 1112 moves up and down through the transmission of a screw nut, a processing head support 116 and a visual measuring device base 118 are mounted on the Z-direction motion platform 1112, wherein the processing head support 116 is used for supporting a processing head 3, the visual measuring device base 118 is used for supporting a structured light three-dimensional visual measuring device 5, and the processing head 3 and the structured light three-dimensional visual measuring device 5 are driven to move up and down through the processing head support 116 and the visual measuring device base 118 when the Z-direction motion platform 1112 moves up and down; a structured light three-dimensional vision measuring device 5 is mounted on the vision measuring device base 118; a real-time on-line power detection device 6 mounted on the marble platform 13; an optical path alignment module 32 is mounted in the processing head 3.
The laser adopts a PX200-2-GF German EDGEWAVE picosecond laser 1, the laser is positioned on a marble base station 13 beside a five-axis motion platform, and the marble base station 13 is isolated from the five-axis motion platform. The five-axis motion platform adopts a 840Dsl numerical control system to realize five-axis linkage control, comprises X, Y, Z three moving shafts and A, C two rotating shafts, has a five-axis linkage function, can realize the arbitrary adjustment of the laser beam space pose, and is used for the adjustment of the optical axis space pose. The structured light three-dimensional measuring device 5 comprises a CCD visual camera and a stripe light projector, the online generation of the three-dimensional point cloud of the processed workpiece and the edge extraction of the processing contour are realized by the stripe light measuring principle, and the structured light three-dimensional online detecting device 5 is arranged on a Z-axis motion table 1112 of the five-axis motion platform 4 and is positioned at the lower part of the processing head 3. The mirror vibration machining head 31 adopts a CTI two-dimensional scanning mirror vibration, comprises two mirror vibration motors, drives two reflecting lenses through the mirror vibration motors, reflects light beams to machining points of a machining plane, realizes contour laser machining on the plane, and the CTI mirror vibration 31 is located on a Z-direction moving table 1112 and moves along with a Z axis. The real-time power detection unit 6 is composed of a power meter, a beam splitter and corresponding interfaces, and is installed in the beam transmission system 2 for monitoring the laser power, as shown in detail in the unit 6 in fig. 6. Optical path alignment component the optical path alignment component 32, which includes a CMOS camera, a beam splitter and corresponding interfaces, is installed in the optical beam transmission system 2 for detecting optical path skew, see component 32 in fig. 7 in detail.
Referring to fig. 13, firstly as shown in fig. 13, a blank 131 is clamped on a turntable 122, a processing equipment Z-axis motion table 1112 is moved to a predetermined position, then a three-dimensional structure optical vision measuring device 5 projects stripe light onto the surface of the blank 131, the stripe light is photographed by the three-dimensional structure optical vision measuring device 5 after being projected, then the turntable 122 rotates by a set angle to enable the blank 131 to be located at the next station, the projection photographing process is repeated, after the required measuring step is completed, data obtained by the three-dimensional structure optical vision measuring device 5 is transmitted to a control computer 135, the controller computer 135 processes the data to obtain required modified profile data, the processing data is transmitted to a seven-axis processing center, the blank 131 is processed to obtain a workpiece 134, the workpiece 134 is taken down after processing, and then the next blank 131 is processed.
Claims (9)
1. An optical-electromechanical cooperative control system of ultrafast laser processing equipment is characterized by comprising a cooperative control system, a main industrial personal computer (135), a numerical control motion platform (a), a galvanometer (31), an image industrial personal computer (b), an Ethernet switch (c), a laser light source (1) and a structured light three-dimensional vision measuring device (5); wherein the content of the first and second substances,
the cooperative control system runs on a main industrial personal computer (135), the main industrial personal computer (135), a numerical control motion platform (a), a galvanometer (31) and an image industrial personal computer (b) form a local control network through an Ethernet switch (c), a laser light source (1) is respectively configured to the numerical control motion platform (a) and the galvanometer (31) through an RS232 serial port and a DB interface, the opening and closing and light emitting of the laser light source (1) are respectively controlled through the numerical control motion platform (a) and the galvanometer (31), and the interlocking between the laser light source and the galvanometer is realized, and the cooperative control system running on the main industrial personal computer (135) cooperatively controls the numerical control motion platform (a), the galvanometer (31) and a structured light three-dimensional vision measuring device (5) through a network communication technology;
the cooperative control system comprises a main control module (A), a galvanometer control module (B), a laser control module (C), a vision measurement control module (D) and a numerical control motion control module (E); wherein the content of the first and second substances,
the master control module (A) queries the external input state and the state of the laser control module (C), the state of the galvanometer control module (B), the state of the numerical control motion control module (E) and the state of the vision measurement control module (D) at any time through the clock of the master control module (A), updates the self state and makes an action instruction according to the external input state and the states of the modules;
the laser control module (C) is provided with a scanning clock of the laser control module (C), and realizes light emitting control, power control and debugging of the laser light source (1) through RS232 serial port communication, or circularly inquires a control instruction distributed by the main control module (A) and the state of the laser light source (1);
the galvanometer control module (B) is provided with a scanning clock of the galvanometer control module (B), and the processing function of the galvanometer (31) is independently controlled by the socket communication technology through an Ethernet switch (c) and a network cable, or a control instruction distributed by the main control module (A) and the state of the galvanometer (31) are circularly inquired;
the numerical control motion control module (E) is provided with a scanning clock of the numerical control motion control module (E), and the numerical control motion platform (a) is independently controlled or the control instruction distributed by the main control module (A) and the state of the numerical control motion platform (a) are circularly inquired through an Ethernet switch (c) and a network cable by means of a data access mode provided by a numerical control system;
the vision measurement control module (D) is provided with a scanning clock of the vision measurement control module (D), and communication with the image industrial personal computer (b) is realized by means of a socket communication technology through the Ethernet switch (c) and a network cable, so that a camera is controlled to photograph and transmit data, or a control instruction distributed by the main control module (A) and the state of the structured light three-dimensional vision measuring device (5) are inquired in a circulating mode.
2. The optical-electromechanical cooperative control system of the ultrafast laser processing equipment as claimed in claim 1, wherein the laser light source (1) is a german ultrafast picosecond laser EDGEWAVE with a power of 100W.
3. The optical-electromechanical cooperative control system of the ultrafast laser processing equipment as claimed in claim 1, wherein the numerical control motion platform (a) is a siemens 840Dsl numerical control system.
4. The optical-electromechanical cooperative control system for the ultrafast laser processing equipment, as recited in claim 1, wherein the image industrial computer (b) and the main industrial computer (135) are selected from a porphyry industrial computer.
5. The optical-electromechanical cooperative control system of the ultrafast laser processing equipment as claimed in claim 1, wherein the galvanometer (31) is a germany CTI galvanometer.
6. The optical-electromechanical cooperative control system of the ultrafast laser processing equipment of claim 1, wherein the numerical control motion platform (a) comprises a machine base (4) and a marble base (13); the three-dimensional structured light vision measuring device comprises a machine tool base (4), a five-axis motion platform, an X-direction motion platform (10), an upright post (11), a Y-direction motion platform (12), a processing head (3) and a structured light three-dimensional vision measuring device (5), wherein the five-axis motion platform is mounted on the machine tool base (4) and used for realizing translation in three directions of X, Y, Z and rotation in two directions of A, C;
the marble base (13) is provided with a laser light source (1), a light beam transmission system (2) and a real-time power online detection device (6);
the beam transmission system (2) comprises a first reflector (22), a second reflector (25), a third reflector (28), a beam expander (21), an 1/4 wave plate (23), a shutter (24), an optical bracket (26) and an optical bracket (27);
a Z-direction motor (113), a Z-direction grating ruler (111), a Z-direction guide rail (114), a Z-direction front bearing seat (115), a Z-direction rear bearing seat (119) and a sixth reflective mirror (1111) are arranged on the upright post (11), the upright post (11) is connected with a Z-direction moving platform (1112) through a Z-direction slider (1113) arranged on the Z-direction guide rail, a Z-direction nut (1114) and a Z-direction lead screw (112), the Z-direction moving platform (1112) is driven to rotate through the rotation of the Z-direction motor (113) and realizes the up-and-down movement of the Z-direction moving platform (1112) through the transmission of the lead screw nut, a processing head bracket (116) and a visual measuring device base (118) are arranged on the Z-direction moving platform (1112), wherein the processing head bracket (116) is used for supporting a processing head (3), the visual measuring device base (118) is used for supporting a structured light three-dimensional visual measuring device (, The visual measurement device base (118) drives the processing head (3) and the structured light three-dimensional visual measurement device (5) to move up and down;
a fourth reflecting mirror (34), a fifth reflecting mirror (35), a spectroscope (33), an optical path alignment module (32) and a galvanometer (31) are arranged in the processing head (3), and the optical path alignment modules are aligned according to the transmission direction center of an optical path;
an X-direction grating ruler reading head (41), an X-direction guide rail (42), an X-direction motor (43), an X-direction forward bearing seat (48) and an X-direction backward bearing seat (45) are installed on a machine tool base (4), an X-direction sliding block (44) is installed on the X-direction guide rail (42), an X-direction lead screw (47) is installed on the X-direction forward bearing seat (48) and the X-direction backward bearing seat (45), the X-direction lead screw (47) is driven to rotate through the rotation of the X-direction motor (43), an X-direction moving platform (10) is driven to move along the X direction, and the X-direction moving platform (10) is connected with the machine tool base (4) through the support of the X-direction sliding block (44), an X-direction nut (46) and the;
when the laser processing device works, the first reflective mirror (22), the second reflective mirror (25) and the third reflective mirror (28) are used for reflecting light generated by laser to the sixth reflective mirror (1111) and reflecting the light to the processing head (3) through the sixth reflective mirror (1111); the fourth reflective mirror (34) in the processing head (3) is used for reflecting the laser reflected by the sixth reflective mirror (1111) to the vibrating mirror (31), the vibrating mirror (31) reflects the light beam to the light splitter (33) according to a set angle through self movement, one part of the light beam passing through the light splitter (33) is used for processing, and the other part of the light beam is reflected to the light path alignment module (32) through the fifth reflective mirror (35) and is used for light path offset correction.
7. The optical, electromechanical cooperative control system of the ultrafast laser processing equipment of claim 6, wherein the X-direction moving table (10) is provided with a Y-direction guide rail (103), a Y-direction motor (101), a Y-direction grating scale reading head (107), a Y-direction forward bearing seat (106) and a Y-direction backward bearing seat (103), the Y-direction motor (101) rotates to drive the Y-direction lead screw (108) and the Y-direction nut (105) to move, the Y-direction moving table (12) is further driven to move along the Y-direction, and the Y-direction moving table (12) is connected with the X-direction moving table (10) through the support of the Y-direction sliding block (102) and the Y-direction nut (105), the Y-direction lead screw (108), the Y-direction forward bearing seat (106) and the Y-direction backward bearing seat (104).
8. The optical-electromechanical cooperative control system for the ultrafast laser processing equipment as claimed in claim 7, wherein the Y-direction moving stage (12) is provided with a dual-stage mechanism comprising a stage (122), a stage motor (123) and a stage swing motor (121).
9. The optical-electro-mechanical cooperative control system for ultrafast laser processing equipment as claimed in claim 8, wherein during processing, the blank (131) is clamped on the turntable (122), the Z-axis motion stage (1112) of the processing equipment is moved to a predetermined position, then the three-dimensional structured light vision measuring device (5) projects stripe light onto the surface of the blank (131), the stripe light is photographed by the three-dimensional structured light vision measuring device (5) after being projected, then the turntable (122) rotates by a set angle to make the blank (131) be at the next station, the projection photographing process is repeated, when the required measuring step is completed, the data obtained by the three-dimensional structured light vision measuring device (5) is transmitted to the main controller (135), the controller computer (135) obtains the required modified profile data after processing, the processing data is transmitted to the seven-axis processing center, and the blank (131) is processed, obtaining a workpiece (134), removing the workpiece (134) after processing, and then processing the next blank (131).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910275965.4A CN109909602B (en) | 2019-04-08 | 2019-04-08 | Optical-electromechanical cooperative control system of ultrafast laser processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910275965.4A CN109909602B (en) | 2019-04-08 | 2019-04-08 | Optical-electromechanical cooperative control system of ultrafast laser processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109909602A CN109909602A (en) | 2019-06-21 |
| CN109909602B true CN109909602B (en) | 2020-07-28 |
Family
ID=66968905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910275965.4A Active CN109909602B (en) | 2019-04-08 | 2019-04-08 | Optical-electromechanical cooperative control system of ultrafast laser processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109909602B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110703273B (en) * | 2019-10-16 | 2022-05-06 | 江苏科技大学 | Laser-assisted visual real-time position measuring device and measuring method thereof |
| CN110919174B (en) * | 2019-12-20 | 2021-06-25 | 武汉华工激光工程有限责任公司 | Rotary light path light beam device and rotary light path light beam system |
| CN111618423B (en) * | 2020-06-15 | 2021-04-13 | 北京航空航天大学 | Multi-axis linkage laser processing numerical control system based on industrial personal computer and working method thereof |
| CN113427134A (en) * | 2021-06-25 | 2021-09-24 | 西安交通大学 | Multi-axis laser processing system for on-machine error detection and correction |
| CN113510377A (en) * | 2021-07-13 | 2021-10-19 | 江苏蔚之领域智能科技有限公司 | Friction pair inner curved surface texture processing device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102000911A (en) * | 2010-07-29 | 2011-04-06 | 西安交通大学 | Five-axis linkage laser processing machine |
| JP6091153B2 (en) * | 2012-10-18 | 2017-03-08 | 株式会社アマダホールディングス | Welding robot system and placement method of placement object on surface plate in welding robot |
| CN204053240U (en) * | 2014-08-08 | 2014-12-31 | 福建省辉锐电子技术有限公司 | A kind of touch-screen etching laser machining |
| CN108213744B (en) * | 2016-12-21 | 2020-05-05 | 沈阳高精数控智能技术股份有限公司 | Laser micropore machining cooperative control system based on industrial personal computer and method thereof |
| CN106799613A (en) * | 2016-12-29 | 2017-06-06 | 大族激光科技产业集团股份有限公司 | A kind of processing method of laser composite manufacture device and complex parts |
| CN207746548U (en) * | 2017-12-31 | 2018-08-21 | 东莞市恒好激光科技有限公司 | A kind of light path system of five-axle linkage laser cutting machine |
-
2019
- 2019-04-08 CN CN201910275965.4A patent/CN109909602B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109909602A (en) | 2019-06-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109909602B (en) | Optical-electromechanical cooperative control system of ultrafast laser processing equipment | |
| CN105081924B (en) | A kind of optical zoom CNC grinding machines and control system and control method | |
| CN204470781U (en) | A kind of Five-axis linkage laser processing machine based on speculum leaded light | |
| CN109940270A (en) | A kind of sevenfive axis ultrafast laser machining system | |
| CN110039194B (en) | Laser cutting device | |
| CN105345595B (en) | A kind of micro-diameter milling tool high-precision tool setting device and presetting cutter method | |
| JP6150619B2 (en) | Dual laser head | |
| CN107030379A (en) | A kind of laser Machining head, laser processing device and its processing method | |
| CN113427134A (en) | Multi-axis laser processing system for on-machine error detection and correction | |
| CN108941900A (en) | Laser splitting device and double-station laser process equipment and method | |
| WO2022052162A1 (en) | Three-dimensional scanning system having double-paraboloidal mirror dynamic focusing module | |
| CN201702514U (en) | Laser scribing machine used for CCD device assisted positioning type wafer processing | |
| CN106735878A (en) | The laser process equipment and its method of cell phone rear cover and frame | |
| CN201245024Y (en) | Laser inner carving apparatus | |
| CN107186338A (en) | Laser cutting head and dimension laser cutting device | |
| CN206425685U (en) | The laser process equipment of cell phone rear cover and frame | |
| CN203853681U (en) | Ultraviolet laser-beam drilling machine | |
| CN113732517B (en) | Laser processing equipment and system | |
| CN109940280B (en) | Multi freedom laser marking machine | |
| CN109693034A (en) | A kind of infrared light method and picosecond laser system of processing out with ultraviolet picosecond laser | |
| CN210817953U (en) | Five-axis laser micromachining device based on scanning galvanometer | |
| CN211589356U (en) | Orthogonal linear motor platform | |
| CN205393786U (en) | Laser beam machining head, laser beam machining device | |
| CN216404197U (en) | Laser cutting system | |
| CN117283144A (en) | Laser re-engraving machine based on visual identification |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210426 Address after: No.085, 1st building, jiaodayi village, Beilin District, Xi'an City, Shaanxi Province, 710000 Patentee after: Mei Xuesong Address before: 710049 Xianning West Road, Shaanxi, China, No. 28, No. Patentee before: XI'AN JIAOTONG University |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210603 Address after: Room 1807, building 3, 311 Yanxin Road, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000 Patentee after: Wuxi Chaotong Intelligent Manufacturing Technology Research Institute Co.,Ltd. Address before: No.085, 1st building, jiaodayi village, Beilin District, Xi'an City, Shaanxi Province, 710000 Patentee before: Mei Xuesong |
|
| TR01 | Transfer of patent right |