CN113290330B - Laser processing head space position calibration method of six-axis five-linkage machine tool - Google Patents

Laser processing head space position calibration method of six-axis five-linkage machine tool Download PDF

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CN113290330B
CN113290330B CN202110459057.8A CN202110459057A CN113290330B CN 113290330 B CN113290330 B CN 113290330B CN 202110459057 A CN202110459057 A CN 202110459057A CN 113290330 B CN113290330 B CN 113290330B
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axis
laser
machine tool
processing head
flat plate
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CN113290330A (en
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李明
李晨晨
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

Abstract

The invention provides a method for calibrating the spatial position of a laser processing head of a six-axis five-linkage machine tool, which solves the problems that the laser focus of the six-axis five-linkage machine tool and the C-axis rotation center coordinate are difficult to find and influence the subsequent processing precision. The method comprises the steps of arranging a detection flat plate on a C-axis rotary table, engraving a motion track of each axis on a high-precision detection flat plate by a laser focus, and capturing coordinates of each intersection point through a visual interface to obtain XYZ machine tool coordinates of the C-axis rotary table so as to establish a coordinate relation between the laser focus and the C-axis.

Description

Laser processing head space position calibration method of six-axis five-linkage machine tool
Technical Field
The invention belongs to the field of laser processing, and particularly relates to a method for calibrating the spatial position of a laser processing head of a six-axis five-linkage machine tool.
Background
The laser processing technology has the advantages of non-contact, approximate cold processing, no pollution, wide material applicability and the like, and becomes a key processing technology of large-scale components in the fields of aviation, aerospace and the like. During laser processing, the relative position relationship between a laser focus and each shaft needs to be accurately calibrated, and a foundation is laid for subsequent part processing.
In practical engineering application, for part of machine tool structures, a laser machine tool cannot drive an optical component to enable a laser focus to move to the center of a rotary table, so that the position of the laser focus cannot meet processing requirements; the Y axis and the X axis are independent, the Z axis is arranged on the Y axis sliding saddle, and the Y axis drives the Z axis to perform linear motion; the optical transmission system is connected with the Z-axis sliding saddle through the marble mounting plate, and the Z axis drives the optical transmission system to move up and down; the X/Y/Z/A/B axes of the machine tool are interpolated to realize five-axis linkage, but the C axis is not linked with other axes as an indexing axis, and the center of a C axis turntable and the position of a laser focus have deviation, so that the alignment is difficult to be found, and the subsequent processing precision is influenced.
Disclosure of Invention
The invention provides a method for calibrating the spatial position of a laser processing head of a six-axis five-linkage machine tool, which solves the problems that the laser focus of the six-axis five-linkage machine tool and the C-axis rotation center coordinate are difficult to find and influence the subsequent processing precision.
In order to achieve the purpose, the invention adopts the following technical scheme:
a method for calibrating the space position of a laser processing head of a six-axis five-linkage machine tool comprises the following steps:
the method comprises the following steps that firstly, a laser focus position calibration device is arranged on a laser processing head of a six-axis five-linkage machine tool, and the laser focus position calibration device comprises a distance measuring sensor and a vision camera;
step two, arranging a detection flat plate on the table surface of a C-axis turntable of the six-axis five-linkage machine tool;
moving a distance measuring sensor, and adjusting the space posture of the detection flat plate to enable the surface of the detection flat plate to be parallel to the plane of the XY axis;
adjusting the position of a laser processing head, and enabling a laser beam to be vertical to the detection flat plate to enable the laser focus to fall on the surface of the detection flat plate;
fifthly, adjusting the position of an imaging surface of the vision camera to enable the vision camera to clearly image at the laser focus;
rotating the C-axis turntable, wherein a laser beam emitted by the laser processing head forms a circular track on the detection flat plate;
seventhly, moving an X axis and a Y axis of the six-axis five-linkage machine tool to enable the laser beam to form two parallel lines on the detection flat plate, wherein the two parallel lines are intersected with the circular track to obtain four intersection points J1, J2, J3 and J4;
moving the X axis and the Y axis of the six-axis five-linkage machine tool, searching four intersection points through a vision camera, enabling the laser focus in the vision interface to coincide with the intersection points J1, J2, J3 and J4 respectively, and reading coordinates (X axis) when the laser focus in the vision interface coincides with the intersection points J1, J2, J3 and J41,y1)、(x2,y1)、(x3,y2)、(x4,y2));
Step nine, obtaining X and Y coordinates of a C-axis rotation center through coordinates of the four laser focuses;
Figure BDA0003041688650000021
Figure BDA0003041688650000022
and step ten, adjusting the position of the laser processing head to enable the axis of the laser beam to be parallel to the table top of the C-axis turntable, moving the Z axis to enable the laser focus in the visual interface to coincide with the end face of the C-axis turntable, obtaining the Z-axis coordinate of the C-axis rotation center, further obtaining the XYZ machine tool coordinate (x, y, Z) of the C-axis turntable, and accordingly establishing the coordinate relation between the laser focus and the C axis.
Further, in the tenth step, the A axis and the B axis are adjusted to 0 degree, the axis of a focusing mirror of the laser processing head is parallel to the C axis table surface, the Z axis is moved up and down, the laser focus in the visual interface is coincided with the C axis end surface, and therefore the Z axis coordinate value Z of the C axis end surface is obtained.
Further, in the first step, the visual camera is an on-axis visual camera or a paraxial visual camera.
Further, in the second step, the flatness of the detection flat plate is within 0.02 mm.
Further, in the first step, the distance measuring sensor is a paraxial distance measuring sensor.
Compared with the prior art, the method has the following beneficial effects:
1. the method comprises the steps of arranging a detection flat plate on a C-axis rotary table, engraving a motion track of each axis on a high-precision detection flat plate by a laser focus, and capturing coordinates of each intersection point through a visual interface to obtain XYZ machine tool coordinates of the C-axis rotary table so as to establish a coordinate relation between the laser focus and the C-axis.
2. The distance measuring sensor and the vision camera in the method are detachable structures, the structures do not influence the laser processing light path, the distance measuring sensor can realize high-precision alignment of the laser focus, and the position of the laser focus in the vision interface is calibrated through coaxial or paraxial vision, so that the high-precision alignment of the laser focus can be realized.
3. The method obtains the X and Y coordinates of the C-axis rotation center through calculation in a laser scribing mode on the detection flat plate, is direct and simple, needs a device with simple structure and low cost, and is very suitable for calibrating the coordinates of the C-axis workbench machine tool coordinate system in a six-axis five-linkage machine tool.
Drawings
FIG. 1 is a schematic structural view of a six-axis five-linkage laser machine tool according to the present invention;
FIG. 2 is a schematic view of the installation of the vision camera and range sensor of the present invention;
FIG. 3 is a schematic diagram of the trajectory of the laser focal point in the method of the present invention.
Reference numerals: the system comprises a 1-Z axis, a 2-optical transmission system, a 3-Z axis sliding saddle, a 4-Y axis sliding saddle, a 5-Y axis, a 6-X axis, a 7-X axis sliding saddle, an 8-C axis, a 9-workpiece, a 10-light beam space direction positioning module, a 21-vision camera, a 22-laser focusing module, a 23-distance measuring sensor and a 24-laser focus.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
As shown in fig. 1, the six-axis five-linkage laser machine tool mainly comprises an optical transmission system 2, an X axis 6, a Y axis 5, a Z axis 1, an a axis, a B axis and a C axis 8, wherein the optical transmission system 2 is installed on a Z axis saddle 3, the Z axis 1 is installed on a Y axis saddle 4, and the movement of the Z axis 1 and the Y axis 5 can realize the movement of the optical transmission system in the Y direction and the Z direction; the beam space pointing positioning module 10 in the optical transmission system 2 is arranged on an A axis and a B axis, the A axis and the B axis can realize the rotation of laser beams around the X axis 6 and the Z axis 1, the C axis 8 is arranged on an X axis saddle 7, and the workpiece 9 can realize indexing processing through the C axis 8. After the six-axis five-linkage machine tool is integrated, the machine tool coordinate system coordinate of the C-axis 8 rotation center is key data for realizing the machining of the workpiece 9, and the spatial coordinate of the machine tool coordinate system of the laser focus 24 are established. Based on the method, the loudness displacement relation between the laser focus 24 and the C-axis 8 rotating table is indirectly measured, the spatial positioning and focusing of the laser beam are realized, the accuracy of the method is high, and a reliable foundation is laid for the subsequent laser processing.
The invention provides a method for calibrating the space position of a laser processing head of a six-axis five-linkage machine tool, in particular to a method for calibrating the mutual position relation between a C-axis 8 rotation center and a laser focus 24.
Firstly, a laser focus position calibration device is built on a laser focusing module 22 for laser processing, the laser focus position calibration device mainly comprises a coaxial or paraxial vision camera 21 and a paraxial distance measuring sensor 23, the vision camera 21 and the distance measuring sensor 23 are detachable, and an optical system is not influenced;
secondly, a detection flat plate with good flatness is placed on the table top of the C-axis 8 rotary table, and the space posture of the detection flat plate is adjusted through a distance measuring sensor 23, so that the surface of the detection flat plate is parallel to the XY-axis 5 motion plane in high precision. And adjusting the posture of the light beam space pointing to the positioning module 10 to enable the laser beam to be vertical to the detection panel, calibrating the position of the laser focus 24 through the distance measuring sensor 23, and adjusting the position of the laser focus 24 in the Z direction based on the numerical value of the distance measuring sensor 23 to enable the laser focus 24 to be just positioned on the plane of the panel. After the laser focus 24 is aligned, adjusting the position of the vision camera 21 to make the vision image at the focus most clearly, wherein the vision camera 21 is used for amplifying and realizing the laser focus 24 position observed in real time; then, adjusting laser parameters to ensure that the width of the scribed line of the laser focus 24 on the detection flat plate is kept within 0.1 mm;
thirdly, rotating the C-axis 8 turntable to enable the laser focus 24 to carve a circular track on the detection flat plate, then moving the X-axis 6 and the Y-axis 5, utilizing the laser focus 24 to carve two secants on the detection flat plate, so as to obtain a focus point where the two secants intersect with the circular track, moving the X/Y-axis 5 of the machine tool, searching four intersection points through the vision camera 21, enabling the laser focus 24 in the vision interface to coincide with the four intersection points respectively, reading the machine tool coordinates of each axis of the machine tool at the four intersection points, and obtaining the coordinates of the rotation center of the C-axis 8 in the XY coordinate system by measuring the intersection point coordinates of the secants and the circular ring;
and finally, adjusting the posture of the light beam space pointing to the positioning module 10 to enable the laser beam to be parallel to the C-axis 8 workbench, and searching the machine tool Z-axis 1 coordinate of the C-axis 8 workbench, which is coincided with the laser focus 24 coordinate, through the interface of the vision camera 21, so as to obtain the XYZ machine tool coordinate of the C-axis 8 workbench and establish the coordinate relation between the laser focus 24 and the C-axis 8.
The device required by the method has a simple structure and is cheap, and the method is very suitable for calibrating the coordinate system of the C-axis 8 workbench machine tool in the six-axis five-linkage machine tool.
Based on the above description, the method for calibrating the spatial position of the laser processing head of the six-axis five-linkage machine tool provided by the invention specifically comprises the following steps:
step one, a laser focus position calibration device is arranged on a laser focusing module 22 of a laser processing head of a six-axis five-linkage machine tool, the laser focus position calibration device comprises a distance measuring sensor 23 and a vision camera 21, namely the vision camera 21 and the distance measuring sensor 23 are arranged at the head of a light beam space pointing positioning module 10;
the vision camera 21 is a coaxial vision camera 21 or a paraxial vision camera 21, the distance measuring sensor 23 is a paraxial distance measuring sensor 23, the vision camera 21 and the distance measuring sensor 23 can be detached without affecting an optical system, the distance measuring sensor 23 can be used for repeatedly finding the laser focus 24 at high precision, the vision camera 21 can mark the position of the laser focus 24 in a vision interface at high precision, and machine tool coordinates of a laser etching track can be conveniently found by using the vision interface;
secondly, arranging a detection flat plate on the table surface of a C-axis 8 turntable of the six-axis five-linkage machine tool, wherein the flatness of the detection flat plate is within 0.02 mm;
step three, moving a distance measuring sensor 23, detecting whether the flat plate is parallel to the XY-axis 5 motion plane, and adjusting the posture of the detection flat plate to enable the surface of the detection flat plate to be parallel to the XY-axis 5 plane;
regulating the position of a laser processing head, enabling a laser beam to be perpendicular to the detection flat plate, enabling a laser focus 24 to fall on the surface of the detection flat plate, and calibrating the position of the laser focus 24 through the ranging sensor 23 to obtain a calibration value of the ranging sensor 23;
in the step, the axis A and the axis B in the beam space pointing positioning module 10 are adjusted to enable the axis of the focusing mirror to be perpendicular to the end face of the axis C8, namely when the axis B is in a zero position, the rotation axis of the axis A motor is parallel to the axis X6; when the A-axis motor is in a zero position, the central line of the focusing mirror is parallel to the Y axis 5; adjusting the A axis and the B axis in the light beam space pointing positioning module 10 to 90 degrees and-90 degrees respectively, so that the axis of the focusing mirror is perpendicular to the end face of the C axis 8;
fifthly, adjusting the position of an imaging surface of the vision camera 21 to enable the vision camera 21 to image most clearly at a focal point, calibrating the position of a laser focal point 24 at a vision interface, and enabling the measurement value of the ranging sensor 23 to return to zero at the moment;
rotating the C-axis 8 turntable, and forming a circular track on the detection flat plate by the laser beam emitted by the laser processing head; at the moment, the laser focus 24 is far away from the gyration center of the C shaft 8, the distance between the laser focus 24 and the gyration center of the C shaft 8 is R, and the C shaft 8 is rotated to form a circular track with the radius of R on the flat plate;
seventhly, moving an X axis 6 and a Y axis 5 of the six-axis five-linkage machine tool to enable the laser beam to form two parallel lines on the detection flat plate, wherein the two parallel lines are intersected with the circular track to obtain four intersection points J1, J2, J3 and J4;
moving the vision camera 21 by moving an X axis 6 and a Y axis 5 of the six-axis five-linkage machine tool, wherein the vision camera 21 searches for four intersection points, so that a laser focus 24 in a vision interface is respectively superposed with the intersection points J1, J2, J3 and J4, and coordinates (X1, Y1), (X2, Y1), (X3, Y2), (X4, Y2)) when the focus of the vision interface is superposed with the points J1, J2, J3 and J4 are read;
calculating the X and Y coordinates of the C-axis 8 rotation center through the read four focus coordinates;
9.1) reading coordinates of the Y axis 5 to obtain the distance between two parallel lines as delta Y, and recording the distance between the center of the turntable and the secant line with the closer distance as E; obtaining an E value by adopting the following calculation method;
Figure BDA0003041688650000071
9.2) calculating to obtain the value E, and then obtaining the X and Y coordinate values of the laser focus 24 of the beam space pointing positioning module 10 in the machine tool coordinate system according to the value E;
Figure BDA0003041688650000072
Figure BDA0003041688650000073
step ten, adjusting the position of a laser processing head to enable the axis of a laser beam to be parallel to the table top of the C-axis 8 rotary table, moving the Z-axis 1 to enable a calibration point in a visual interface to coincide with the end face of the C-axis 8 rotary table, obtaining a Z-axis 1 coordinate value Z of the end face of the C-axis 8 rotary table, further obtaining XYZ machine tool coordinates (x, y, Z) of the C-axis 8 rotary table, and further establishing a coordinate relation between a laser focus 24 and the C-axis 8, so that a foundation is laid for establishing a workpiece 9 coordinate system.
In the step, the A axis and the B axis are adjusted to 0 degree, the axis of the focusing mirror is parallel to the table top of the C axis 8, the Z axis 1 is moved up and down, and the laser focus 24 in the visual interface is coincided with the end face of the C axis 8, so that the Z axis 1 coordinate value Z of the end face of the C axis 8 is obtained.

Claims (5)

1. A method for calibrating the space position of a laser processing head of a six-axis five-linkage machine tool is characterized by comprising the following steps:
the method comprises the following steps that firstly, a laser focus position calibration device is arranged on a laser processing head of a six-axis five-linkage machine tool, and the laser focus position calibration device comprises a distance measuring sensor and a vision camera;
step two, arranging a detection flat plate on the table surface of a C-axis turntable of the six-axis five-linkage machine tool;
moving the distance measuring sensor, and adjusting the space posture of the detection flat plate to enable the surface of the detection flat plate to be parallel to the plane of the XY axis;
adjusting the position of a laser processing head, and enabling a laser beam to be vertical to the detection flat plate to enable the laser focus to fall on the surface of the detection flat plate;
fifthly, adjusting the position of an imaging surface of the vision camera to enable the vision camera to clearly image at the laser focus;
rotating the C-axis turntable, wherein a laser beam emitted by the laser processing head forms a circular track on the detection flat plate;
moving an X axis and a Y axis of the six-axis five-linkage machine tool to enable the laser beam to form two parallel lines on the detection flat plate, wherein the two parallel lines are intersected with the circular track to obtain four intersection points J1, J2, J3 and J4, and at the moment, the two parallel lines are located on the same side of the C axis rotation center;
moving the X axis and the Y axis of the six-axis five-linkage machine tool, searching four intersection points through a vision camera, enabling the laser focus in the vision interface to coincide with the intersection points J1, J2, J3 and J4 respectively, and reading coordinates (X axis) when the laser focus in the vision interface coincides with the intersection points J1, J2, J3 and J41,y1)、(x2,y1)、(x3,y2)、(x4,y2));
Step nine, obtaining X and Y coordinates of a C-axis rotation center through coordinates of the four laser focuses;
Figure FDA0003461013810000011
Figure FDA0003461013810000012
and step ten, adjusting the position of a laser processing head to enable the axis of a laser beam to be parallel to the table top of the C-axis turntable, moving the Z axis to enable the laser focus in the visual interface to coincide with the end face of the C-axis turntable, obtaining the Z-axis coordinate of the C-axis rotation center, further obtaining the XYZ machine tool coordinates (x, y, Z) of the C-axis turntable, and accordingly establishing the coordinate relation between the laser focus and the C axis.
2. The method for calibrating the spatial position of the laser processing head of the six-axis five-linkage machine tool as claimed in claim 1, wherein: and step ten, adjusting the A axis and the B axis to 0 degree, enabling the axis of a focusing mirror of the laser processing head to be parallel to the C axis table surface, moving the Z axis up and down, enabling the laser focus in the visual interface to coincide with the C axis end surface, and obtaining the Z axis coordinate value Z of the C axis end surface.
3. The method for calibrating the spatial position of the laser processing head of the six-axis five-linkage machine tool as claimed in claim 2, wherein: in the first step, the visual camera is a coaxial visual camera or a paraxial visual camera.
4. The method for calibrating the spatial position of the laser processing head of the six-axis five-linkage machine tool as claimed in claim 1, 2 or 3, wherein: in the second step, the flatness of the detection flat plate is within 0.02 mm.
5. The method for calibrating the spatial position of the laser processing head of the six-axis five-linkage machine tool as claimed in claim 4, wherein: in the first step, the distance measuring sensor is a paraxial distance measuring sensor.
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