CN114160964B - Double-pendulum-axis zero calibration method for laser processing - Google Patents
Double-pendulum-axis zero calibration method for laser processing Download PDFInfo
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- CN114160964B CN114160964B CN202111554409.4A CN202111554409A CN114160964B CN 114160964 B CN114160964 B CN 114160964B CN 202111554409 A CN202111554409 A CN 202111554409A CN 114160964 B CN114160964 B CN 114160964B
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- 238000012545 processing Methods 0.000 title claims abstract description 52
- 238000000034 method Methods 0.000 title claims abstract description 33
- 239000012780 transparent material Substances 0.000 claims abstract description 41
- 238000005530 etching Methods 0.000 claims description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims description 2
- 241000519995 Stachys sylvatica Species 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000289 melt material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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Abstract
The invention provides a double-pendulum-axis zero calibration method for laser processing, which mainly solves the problem that the existing calibration method is not suitable for double-pendulum-axis zero calibration of a five-axis linkage laser processing machine tool, so that the processing precision is low. The method of the invention can etch on a transparent material flat plate through laser beams by combining the motion of two motors of the double-swing-axis laser processing head with the focus focused after output, and can obtain the zero point position of the double-swing-axis motor by measuring the distance of etched laser spots. The device required by the method is simple in structure, can quickly and accurately obtain the zero coordinates of the A axis and the C axis, and is very suitable for high-precision calibration of the zero positions of the double swing axes in laser processing equipment.
Description
Technical Field
The invention belongs to the field of laser processing, and particularly relates to a double-pendulum-axis zero calibration method for laser processing.
Background
Laser machining is the application of a laser beam to the surface of a workpiece to ablate, melt material and alter the surface properties of the object by a high energy density laser. At present, laser processing is widely applied to a plurality of industries such as aviation, aerospace, navigation, automobiles, semiconductors and the like, and a five-axis linkage laser processing machine tool is equipment with higher processing precision.
In the debugging process of the five-axis linkage laser processing machine tool, the machining precision of the five-axis machine tool is determined by the superposition precision of the rotation axis of the double pendulum shafts and the X/Y/Z coordinate system of the machine tool. In addition, in the process that the machine tool outputs the machining program through the post-processing software, the rotation axes of the two motors of the double swing shafts arranged in the post-processing software are completely overlapped with the two shafts of the linear shaft respectively, and if the zero point setting precision of the double swing shafts of the machine tool is not accurate, the output machining program coordinate is deviated, so that the machining precision is influenced. And finally, the zero calibration precision of the double swing axes is the basis of the RTCP calibration precision of the five-axis machine tool, and high-precision five-axis machining can be realized only by establishing a high-precision five-axis coordinate system by a machine tool coordinate system. Chinese patent CN2018106993942 discloses an RTCP accuracy compensation method for five-axis laser processing equipment, which can implement RTCP accuracy compensation for a laser processing machine, but does not describe a zero calibration method for a double pendulum shaft. The zero point calibration of the double pendulum shafts of the traditional mechanical processing can be realized by a dial indicator measuring method, however, the method is not suitable for the double pendulum shafts of the laser processing equipment.
Disclosure of Invention
The invention aims to solve the problem that the existing method is not suitable for double-pendulum-shaft zero calibration of a five-shaft linkage laser processing machine tool, so that the processing precision is low, and provides a double-pendulum-shaft zero calibration method for laser processing.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention relates to a double-pendulum-axis zero calibration method for laser processing, which comprises the following steps:
step one, mounting a distance measuring sensor on the head of a double-swing-axis laser processing head, calibrating the positions of the distance measuring sensor and a laser focus, wherein the numerical value of the calibrated distance measuring sensor is J1;
secondly, when the selected double-swing-axis motor is an absolute value type motor, before a zero-point value is calibrated, the angle between the C-axis motor and the A-axis motor is adjusted through an eye observation method, so that the rotation axis of the A-axis motor is driven by the C-axis motor to be approximately parallel to the X-axis movement direction of the machine tool, the head of the double-swing-axis laser processing head is enabled to be approximately parallel to the Y-axis movement direction of the machine tool, the coordinates A1 and C1 of the A-axis and the C-axis at the moment are recorded, and the initial zero-point position of the double-swing-axis laser processing head is obtained and is used as the reference zero point of the machine tool coordinate system;
adjusting the A-axis motor and the C-axis motor to a primary zero position, placing a transparent material flat plate with the thickness of t at the position of a laser focus, adjusting the position of the transparent material flat plate to enable the plane of the transparent material flat plate to be parallel to the XZ plane, and meanwhile keeping the numerical value of the distance measuring sensor at J1;
step four, starting laser, and etching two lines on the front surface of the transparent material flat plate along the X direction and the Z direction respectively; starting the laser for a plurality of milliseconds, forming a spot 1 with the diameter of about 0.01mm on the front surface of the transparent material flat plate, and recording the Y-axis coordinate Y1; in the step, the two etched lines are used for measuring the distance components of the laser spots in the X direction and the Z direction in the subsequent step;
keeping the C axis at 0 ℃ unchanged, rotating the A axis by 180 degrees, moving the Y axis of the machine tool, adjusting the position of a double-swing-axis laser processing head through a distance measuring sensor to enable a laser focus to fall on the back of a transparent material flat plate, finely adjusting the Y axis to enable the numerical value of the distance measuring sensor to be displayed as J1, starting laser for a plurality of milliseconds, etching a spot 2 with the thickness of 0.01mm on the back of the transparent material flat plate, recording the Y axis coordinate Y2 at the moment, and enabling the rotating radius of the double-swing-axis laser processing head to be D = (= Y1-Y2 | -t)/2;
taking out the transparent material flat plate, measuring the distance between the spot 1 and the spot 2 under a microscope, calculating the distance difference between the two spots, if the distance difference between the two spots is smaller than a set value, acquiring the coordinates A0 and C0 of the axis A and the axis C at the moment, and executing the step nine; if the distance difference value of the two spots is larger than the set value, executing a seventh step;
step seven, measuring the distance between the spot 1 and the spot 2 under a microscope, and obtaining the distances dx and dy of the two spots in the X direction and the Z direction by taking the etched two lines in the step four as references, thereby obtaining the adjustment angle Ta = arctan (dz/2D) and the adjustment angle Tc = arctan (dx/2D) of the a axis and the C axis;
step eight, respectively adjusting the angles of the A shaft and the C shaft according to the adjusting angle Ta and the adjusting angle Tc obtained in the step seven; then repeating the third step to the sixth step, and repeatedly measuring and adjusting the angles of the A axis and the C axis until the distance difference between the two spots is smaller than a set value;
step nine, taking the A0 and the C0 as zero coordinates of the numerical control system.
Further, in the first step, the distance measuring sensor is a coaxial distance measuring sensor or a paraxial distance measuring sensor.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the method, the self movement of the two motors with the double swing shafts is combined with the focus focused after output, etching is carried out on a transparent material flat plate (such as an acrylic plate), and the zero position of the double swing shaft motor with higher precision can be obtained by measuring the distance of etched laser spots.
2. The device required by the method has a simple structure, can quickly and accurately obtain the zero point position of the machine tool coordinate system of the double-swing-head, and is very suitable for the alignment of the machine tool zero point coordinate system of the double-swing-axis laser processing head in laser processing equipment.
Drawings
FIG. 1 is a schematic diagram of a double-pendulum-axis laser processing head of a conventional five-axis linkage laser processing machine tool;
FIG. 2 is a schematic illustration of the spots on the surface of a flat plate of transparent material in the method of the present invention.
Reference numerals: the system comprises a laser beam 1, a 2-C axis motor, a first 3-reflector, a 4-A axis motor, a second 5-reflector, a 6-distance measuring sensor and a 7-transparent material flat plate.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood by those skilled in the art that these embodiments are only for explaining the technical principle of the present invention and are not intended to limit the scope of the present invention.
The invention provides a double-pendulum-axis zero calibration method for laser processing, which is used for solving the problem of double-pendulum-axis zero calibration in the existing laser processing equipment. The method provided by the invention can be used for etching a transparent material flat plate (such as an acrylic plate) through the laser beam 1 by combining the motion of the two motors with double swing shafts and the focus focused after output, and obtaining the zero point position of the double swing shaft motor by measuring the distance of the etched laser spots. The device required by the method is simple in structure, can quickly and accurately obtain the zero coordinates of the A axis and the C axis, and is very suitable for high-precision calibration of the zero positions of the double swing axes in laser processing equipment.
As shown in fig. 1, a double-pendulum-axis laser processing head of a conventional five-axis linkage laser processing machine tool comprises a C-axis motor 2, a first reflector 3, an a-axis motor 4 and a second reflector 5; according to the method, a transparent material flat plate 7 with the thickness of about 1mm is selected as a measuring tool of the laser focus, a distance measuring sensor 6 is arranged at the head of the double-swing-shaft laser processing head and used for measuring the distance between the double-swing-shaft laser processing head and the transparent material flat plate 7, the calibration of the laser focus position can be completed through the distance measuring sensor 6, and the consistency of the focus positions during etching of the front surface and the back surface of the transparent material flat plate 7 is ensured. Meanwhile, the distance measuring sensor 6 can adjust the space attitude of the transparent material flat plate 7 to be parallel to the XZ plane of the machine tool. The process of the invention is described below by way of specific numerical examples, comprising the following steps:
step one, mounting a distance measuring sensor on the head of a double-pendulum-axis laser processing head, then calculating the position of a laser focus, calibrating the distance between the laser focus and the distance measuring sensor, wherein the value of the calibrated distance measuring sensor is J1;
in the step, the position of the distance measuring sensor can be calibrated by using a transparent material flat plate, namely the transparent material flat plate is placed at a laser focus, so that the laser focus is just on the surface of the transparent material flat plate on the front side and the back side of the transparent material flat plate, and the value of the calibrated distance measuring sensor is J1;
secondly, adjusting the zero position of the double-pendulum-axis laser processing head in a visual observation mode, and taking the zero position as a reference zero point of a machine tool coordinate system;
selecting a transparent material flat plate with the length and the width of 50mm and the thickness t of 1mm as a measuring tool of the laser focus, adjusting the A-axis motor and the C-axis motor to zero positions thereof, and adjusting the spatial position of the transparent material flat plate to enable the laser focus to just fall on the surface of the transparent material flat plate; meanwhile, the posture of the transparent material flat plate is adjusted by using a distance measuring sensor, so that the transparent material flat plate is parallel to an XZ plane of the machine tool, and the numerical value of the distance measuring sensor is kept at J1;
keeping the laser normally open, and etching a white line with the width of 0.1mm on the front surface of the transparent material flat plate along the X direction and the Z direction respectively; starting laser for 0.1s, adjusting the laser power to about 0.2W, forming white spots with the diameter of about 0.01mm on the surface of a transparent material flat plate, marking the white spots as spots 1, and simultaneously recording the Y-axis coordinate Y1;
fifthly, keeping the C axis at 0 degree, rotating the A axis by 180 degrees, moving the Y axis of the machine tool, and adjusting the position of a double-swing-axis laser processing head through a distance measuring sensor to enable the laser focus to fall on the back of the transparent material flat plate; starting laser for 0.1s, adjusting the laser power to about 0.2W, forming white spots with the diameter of about 0.01 on the back surface of a flat plate of the transparent material, marking the white spots as spots 2, simultaneously recording a Y-axis coordinate Y2 at the moment, and recording the rotation radius D = (|. Y1-Y2 | -t)/2 of the processing head; at this time, t is 1mm, i.e., D = (| Y1-Y2 | -1)/2;
taking out the transparent material flat plate, measuring the distance between the spot 1 and the spot 2 under a microscope, calculating the distance difference between the two spots, if the distance difference between the two spots is smaller than a set value, acquiring the coordinates A0 and C0 of the axis A and the axis C at the moment, and executing the step nine; if the distance difference value of the two spots is larger than the set value, executing a seventh step;
step seven, as shown in fig. 2, measuring the distance between the spot 1 and the spot 2 under a microscope, and obtaining the distances dx and dy of the two spots in the X direction and the Z direction by using the two etched lines in the step four as a reference, and further obtaining the adjustment angle Ta = arctan (dz/2D) and the adjustment angle Tc = arctan (dx/2D) of the a axis and the C axis;
step eight, respectively adjusting the angles of the axis A and the axis C according to the adjusting angle Ta and the adjusting angle Tc obtained in the step seven, repeating the step three to the step six, and repeatedly measuring and adjusting the angles of the axis A and the axis C until the distance difference between the two spots is smaller than 10 micrometers;
and step nine, setting A0 and C0 as zero coordinates of the numerical control system.
Claims (6)
1. A double-pendulum-axis zero calibration method for laser processing is characterized by comprising the following steps:
step one, mounting a distance measuring sensor on the head of a double-pendulum-axis laser processing head, calibrating the positions of the distance measuring sensor and a laser focus, wherein the value of the calibrated distance measuring sensor is J1;
adjusting the angles of a C-axis motor and an A-axis motor in a visual observation mode, enabling the C-axis motor to drive the rotation axis of the A-axis to be parallel to the X-axis movement direction of the machine tool, enabling the head of the double-swing-axis laser processing head to be parallel to the Y-axis movement direction of the machine tool, recording coordinates A1 and C1 of the A-axis and the C-axis at the moment, obtaining a preliminary zero position of the double-swing-axis laser processing head, and taking the position as a reference zero point of a machine tool coordinate system;
adjusting the A-axis motor and the C-axis motor to a primary zero position, placing a transparent material flat plate with the thickness of t at the position of a laser focus, adjusting the position of the transparent material flat plate to enable the plane of the transparent material flat plate to be parallel to the XZ plane, and meanwhile keeping the numerical value of the distance measuring sensor at J1;
step four, starting laser, etching two lines on the front surface of the transparent material flat plate along the X direction and the Z direction respectively, then starting the laser for a plurality of milliseconds, forming a spot 1 on the front surface of the transparent material flat plate, and recording the Y-axis coordinate Y1 at the moment;
step five, keeping the C axis at 0 ℃ unchanged, rotating the A axis by 180 degrees, moving the Y axis of the machine tool, adjusting the position of the double-swing-axis laser processing head through a distance measuring sensor to enable the laser focus to fall on the back of the transparent material flat plate, finely adjusting the Y axis to enable the numerical value of the distance measuring sensor to be displayed as J1, starting laser for a plurality of milliseconds, etching a spot 2 on the back of the transparent material flat plate, recording the Y axis coordinate Y2 at the moment, and enabling the rotating radius of the double-swing-axis laser processing head to be D = (|. Y1-Y2 | -t)/2;
taking out the transparent material flat plate, measuring the distance between the spot 1 and the spot 2 under a microscope, obtaining the zero position of the double-pendulum-axis motor, calculating the distance difference of the two spots, obtaining the coordinates A0 and C0 of the axis A and the axis C at the moment if the distance difference of the two spots is smaller than a set value, and executing the ninth step; if the distance difference value of the two spots is larger than the set value, executing a seventh step;
step seven, measuring the distance between the spot 1 and the spot 2 under a microscope, and taking the two etched lines in the step four as references to obtain the distances dx and dy of the two spots in the X direction and the Z direction, and further obtaining the adjusting angles Ta = arctan (dz/2D) and Tc = arctan (dx/2D) of the A axis and the C axis;
step eight, respectively adjusting the angles of the A shaft and the C shaft according to the adjusting angle Ta and the adjusting angle Tc obtained in the step seven; repeating the third step and the sixth step until the distance difference value of the two spots is smaller than a set value;
and step nine, setting A0 and C0 as zero coordinates of the numerical control system.
2. The method for calibrating the zero point of the double pendulum shafts for laser processing according to claim 1, wherein: in the first step, the distance measuring sensor is a coaxial distance measuring sensor or a paraxial distance measuring sensor.
3. The method for calibrating the zero point of the double pendulum shafts for laser processing according to claim 1, wherein: in the third step, the transparent material flat plate is an acrylic plate.
4. The method for calibrating the zero point of the double pendulum shafts for laser processing according to claim 1, wherein: in the third step, the length and width of the transparent material flat plate are respectively 50mm, and the thickness is 1mm.
5. The method for calibrating the zero point of the double pendulum shafts for laser processing according to claim 1, wherein the method comprises the following steps: in step six, the distance between the two spots is set to be 10 micrometers.
6. The method for calibrating the zero point of the double pendulum shafts for laser processing according to claim 1, wherein the method comprises the following steps: in step four, the diameter of spot 1 is 0.01mm, and in step five, the diameter of spot 2 is 0.01mm.
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| CN106735961B (en) * | 2016-12-30 | 2019-04-02 | 中国科学院西安光学精密机械研究所 | Orthogonal double-pendulum-axis calibration and debugging method and reflector assembling and debugging method for laser processing |
| CN111408836B (en) * | 2020-04-23 | 2021-05-18 | 中国科学院西安光学精密机械研究所 | High-precision adjusting method for double-swing-head laser processing light beam pointing and laser processing system |
| CN111673292B (en) * | 2020-06-04 | 2022-05-27 | 西安中科微精光子科技股份有限公司 | RTCP error calibration compensation method for five-axis laser processing equipment |
| CN112184820B (en) * | 2020-12-02 | 2021-03-05 | 中国航空制造技术研究院 | Laser double-sided shot blasting spot positioning method and system and computer readable storage medium |
| CN113290330B (en) * | 2021-04-27 | 2022-05-10 | 中国科学院西安光学精密机械研究所 | Laser processing head space position calibration method of six-axis five-linkage machine tool |
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