CN108614519B - Online error measurement system and method based on laser dot matrix numerical control machine tool - Google Patents
Online error measurement system and method based on laser dot matrix numerical control machine tool Download PDFInfo
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- CN108614519B CN108614519B CN201810359992.5A CN201810359992A CN108614519B CN 108614519 B CN108614519 B CN 108614519B CN 201810359992 A CN201810359992 A CN 201810359992A CN 108614519 B CN108614519 B CN 108614519B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37581—Measuring errors
Abstract
The invention relates to an online error measurement system and method based on a laser dot matrix numerical control machine tool, which can realize unmanned, non-stop, real-time and efficient error detection of the numerical control machine tool and provide a basis for constructing real-time intelligent compensation of numerical control errors.
Description
Technical Field
The invention belongs to the technical field of numerical control machine tool error measurement, and particularly relates to an online error measurement system and method based on a laser dot matrix numerical control machine tool.
Background
The numerical control machine tool is equipment integrating advanced technologies such as a computer, automatic control, precise detection, information and advanced manufacturing, is the basis of industrial modernization, and is also important equipment related to national economy and national defense safety. The numerical control machine tool is a working master machine for realizing intelligent manufacturing in the equipment manufacturing industry, so that Chinese intelligent manufacturing can be realized as early as possible only by accelerating the development of the intelligent numerical control machine tool in China.
To realize intelligent numerical control machine tool, the first key element is to replace workers to realize operation by utilizing machines as far as possible, and the machines are required to have higher working efficiency and higher processing precision than workers. In order to achieve the purpose, the numerical control machine tool technology research needs to realize the purpose of converting originally necessary manual operation into machine automation and intelligent operation as far as possible. In the field of intelligent improvement of numerical control machines, intelligent compensation of machining errors of the numerical control machines is an important research topic. The existing error compensation is that an error generation model is established by utilizing long-term operation data of the numerical control machine, then an error compensation model is established according to the analysis of the error model, and the processing precision and the stability of the numerical control machine are improved by a superposition feedback compensation mode. In these error compensation processes, the construction of an error model relies on the accurate measurement of machine tool errors. The currently common machine tool error measurement methods include a laser interferometer method, a double sphere gauge method, a plane grating method and the like. However, these methods often require the error measurement after the machine is stopped in order to install the measuring equipment, and most operations of the measuring process need to be completed manually.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide the laser spot array-based online error measurement system and method, the method can realize unmanned, non-stop, real-time and efficient error detection of the numerical control machine, provides a basis for constructing real-time intelligent compensation of numerical control errors, can realize unmanned, non-stop, real-time and efficient error detection of the numerical control machine, and has the advantages of high sensitivity, simplicity and convenience in operation, high accuracy and the like.
In order to achieve the purpose, the technical scheme of the invention is as follows:
the laser dot matrix generating device consists of a knife handle, a laser generating device, a grating and a grating fixing device, the laser dot matrix generating device can be arranged in a numerical control machine tool to a disc, the grid positioning plate is fixed on a machining plane of the numerical control machine tool, the industrial camera is fixed on the numerical control machine tool, the lens angle of the industrial camera ensures that the grid positioning plate can be shot accurately and completely, and the computer is connected with the numerical control system of the industrial camera and the numerical control machine tool.
The grating can convert a single light beam generated by the laser generator into nine light beams which are uniformly distributed in a 3 multiplied by 3 mode, wherein two light beams on the outermost side of each row form an angle theta with each other.
The grid positioning plate is a diffuse reflection fine grid plate.
The grid positioning plate is provided with a dot array for calibrating the position of the laser spot, the distance between two adjacent dots is an integer m times of the movement step length of the X, Y shaft, and meanwhile, nine spots can be coincided with nine dots with a slightly larger middle range after the Z shaft moves by the integer n times of the step length.
A triaxial numerical control machine tool online error measurement method based on laser lattice can realize numerical control machine tool positioning error and motion online error measurement, and comprises the following steps:
first, calibration:
setting a numerical control program to replace a laser dot matrix generating device on a main shaft, moving the laser dot matrix generating device above a grid positioning plate through numerical control programming, continuously shooting by an industrial camera, determining the positions of nine beams of laser through computer operation, continuously controlling the main shaft to move through an operation tracking program and feeding back images through the industrial camera, and finally realizing that all light spots generated by the nine beams of laser are aligned to nine circular dots in the center of the grid positioning plate;
secondly, measuring the motion error:
the three-axis numerical control machine tool mainly carries out X, Y, Z coordinate axis motions in the machining process, 6 errors are generated when the three-axis numerical control machine tool moves along each coordinate axis direction, namely, an X-axis linear error, a Y-axis linear error, a Z-axis linear error, an X-axis angular error, a Y-axis angular error and a Z-axis angular error, namely, 18 errors are measured in the machining process of the three-axis numerical control machine tool, and the following 18 error measurement methods are described:
1) x, Y axis direction straight line error when moving along X, Y, Z axis;
during measurement, a laser dot matrix generating device is adjusted to emit a laser beam to enable the laser beam to be superposed with nine central dots on a grid positioning plate on the grid positioning plate, a starting point is defined at the moment, then the laser dot matrix generating device on a program control main shaft is set to move to a specific point along an X, Y axis from the starting point, the fact that the laser dot matrix generating device moving to the terminal point in an ideal state enables the laser dot matrix generating device to be superposed with nine central dots (X, Y axis) adjacent to the nine central dots on the grid positioning plate or nine central dots in a slightly larger range (Z axis) on the grid positioning plate, namely, m step lengths are moved along an X, Y axis or n step lengths are moved along the Z axis is guaranteed, and if a straight line error in the direction of the X, Y axis exists, the actual moving position of the laser dot has deviation with the position. When the machine tool moves along the X, Y, Z axis, the X, Y axis direction single-step linear error can be represented by the formula
Calculating to obtain;
2) z-axis line error when moving along axis X, Y, Z;
during measurement, firstly, the laser dot matrix generating device is adjusted to emit laser beams to enable the laser beams to be superposed with nine central dots on the grid positioning plate on a light spot and the grid positioning plate, the laser dots are defined as a starting point, then the laser dot matrix generating device on the program control main shaft is set to move to a specific point along an X, Y, Z axis from the starting point, the fact that the laser dot matrix generating device moving the terminal point in an ideal state enables the laser dots to be superposed with nine central dots (X, Y axis) adjacent to the nine central dots on the grid positioning plate or nine central dots with a larger range (Z axis) on the grid positioning plate, i.e., m steps along axis X, Y, or n steps along the Z-axis, if there is a Z-axis direction line error, the actual moved spot position deviates from the ideal spot position, and the single-step linear error in the Z-axis direction when the machine tool moves along the X, Y, Z axis can be formulated.
Calculating to obtain;
3) x, Y shaft angle error when moving along the X, Y, Z shaft;
during measurement, firstly, the laser dot matrix generating device is adjusted to emit laser beams to enable the laser beams to be superposed with nine central dots on the grid positioning plate on a light spot and the grid positioning plate, the laser dots are defined as a starting point, then the laser dot matrix generating device on the program control main shaft is set to move to a specific point along an X, Y, Z axis from the starting point, the fact that the laser dot matrix generating device moving the terminal point in an ideal state enables the laser dots to be superposed with nine central dots (X, Y axis) adjacent to the nine central dots on the grid positioning plate or nine central dots with a larger range (Z axis) on the grid positioning plate, i.e., m steps along axis X, Y, or n steps along the Z axis, if there is an X axis angle error, the spot position after the actual movement deviates from the ideal spot position, and the single-step long rotation angle error in the X-axis direction when the machine tool moves along the X, Y, Z axis can be formulated.
The calculation is obtained, if an X-axis angle error exists, the deviation of 90 degrees of rotation exists between the actually moved spot position and the spot position in an ideal state, and the calculation principle of the single-step long angle error in the Y-axis direction when the machine tool moves along the X, Y, Z axis is similar to that of the single-step long angle error in the X-axis direction when the machine tool moves along the X, Y, Z axis;
4) z-axis angular error when moving along axis X, Y, Z;
during measurement, firstly, the laser dot matrix generating device is adjusted to emit laser beams to enable the laser beams to be superposed with nine central dots on the grid positioning plate on a light spot and the grid positioning plate, the laser dots are defined as a starting point, then the laser dot matrix generating device on the program control main shaft is set to move to a specific point along an X, Y, Z axis from the starting point, the fact that the laser dot matrix generating device moving the terminal point in an ideal state enables the laser dots to be superposed with nine central dots (X, Y axis) adjacent to the nine central dots on the grid positioning plate or nine central dots with a larger range (Z axis) on the grid positioning plate, i.e., m steps along axis X, Y, or n steps along the Z-axis, if there is a Z-axis angle error, the actual moved spot position deviates from the ideal spot position, and the single step long rotation angle error in the Z-axis direction when the machine tool moves along the X, Y, Z axis can be formulated.
And (6) calculating.
The invention has the beneficial effects that:
the method provided by the invention provides an online error measurement system and a measurement method of a three-axis numerical control machine tool based on a laser dot matrix, can realize the unmanned, non-stop, real-time and efficient error detection of the numerical control machine tool, and has the advantages of high sensitivity, simplicity and convenience in operation, high accuracy and the like.
Drawings
FIG. 1 is a diagram of a laser lattice-based numerical control machine tool online error testing system.
FIG. 2 is a diagram of a laser dot matrix generator.
Fig. 3 is a schematic view of a grid positioning plate.
FIG. 4 is a graph illustrating deviation of X, Y axis direction line errors when moving along axis X, Y, Z.
FIG. 5 is a graph illustrating deviation of Z-axis direction line error when moving along axis X, Y, Z.
FIG. 6 is a graphical representation of the deviation of the X, Y shaft angle error as it moves along the X, Y, Z shaft.
FIG. 7 is a graphical representation of the deviation of the Z-axis angular error as it moves along axis X, Y, Z.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1, the system for testing the online error of the three-axis numerical control machine based on the laser dot matrix comprises a numerical control machine 1, a laser dot matrix generating device 2, a grid positioning plate 3, an industrial camera 4 and a computer 5.
As shown in figure 2, the laser dot matrix generating device 2 consists of a tool handle 2-1, a laser generating device 2-2, a grating 2-3 and a grating fixing device 2-4, wherein the grating can convert a single light beam generated by a laser generator into nine light arrays which are uniformly distributed by 3 multiplied by 3, and two light beams at the outermost side of each row form an angle theta. The laser dot matrix generating device 2 is similar to a common cutter, and can be arranged in a numerical control machine tool to a disc and replaced on a main shaft through a numerical control machine tool with a tool changing device.
As shown in fig. 3, the grid positioning plate 3 is a diffuse reflection fine grid plate, and a circular lattice for calibrating the laser spot position is arranged on the grid plate. The distance between two adjacent dots is m times of X, Y axis moving step length, and nine light spots after Z axis moving n times of step length can be coincided with nine dots with a slightly larger middle range.
Laser dot matrix generating device 2 is similar with ordinary cutter, can arrange the digit control machine tool in to the dish and replace to the main shaft through the digit control machine tool from taking the tool changing dress in, net locating plate 3 is fixed in a specific position on the machined surface of digit control machine tool 1, industrial camera 4 is fixed in digit control machine tool 1, the camera lens angle guarantees can accurate comprehensive shooting to net locating plate 3, computer 5 connects industrial camera 4 and digit control machine tool 1's numerical control system, computer 5 can gather the image that industrial camera 4 shot according to certain frequency, and handle the image through the procedure, acquire the characteristic point position, carry out the algorithm operation, and can feed back the numerical control system of digit control machine tool 1 with the result and be used for the real-time intelligent compensation of digit control machine tool error.
A triaxial numerical control machine tool online error measurement method based on laser lattice can realize numerical control machine tool positioning error and motion online error measurement, and comprises the following steps:
first, calibration:
setting a numerical control program to switch the laser dot matrix generating device 2 to a main shaft, moving the laser dot matrix generating device 2 to the position above the grid positioning plate 3 through numerical control programming, continuously shooting by an industrial camera 4, determining the positions of nine beams of laser through the operation of a computer 5, continuously controlling the main shaft to move through an operation tracking program, and finally realizing that light spots generated by the nine beams of laser all align to nine dots in the center of the grid positioning plate 3 through the image feedback of the industrial camera 4;
secondly, measuring the motion error:
the three-axis numerical control machine tool mainly carries out X, Y, Z coordinate axis motions in the machining process, 6 errors (X-axis linear error, Y-axis linear error, Z-axis linear error, X-axis angle error, Y-axis angle error and Z-axis angle error) are generated when the three-axis numerical control machine tool moves along each coordinate axis direction, namely, 18 errors are measured in the machining process of the three-axis numerical control machine tool. The following describes 18 error measurement methods.
1) X, Y axis direction straight line error when moving along X, Y, Z axis
During measurement, the laser dot matrix generating device 2 is adjusted to emit laser beams, light spots are displayed on the grid positioning plate 3 and coincide with nine central dots on the grid positioning plate 3, and the laser beams are defined as starting points. Then, the laser dot matrix generating device 2 on the program control main shaft is set to move from the initial point to a specific point along the X, Y axis, so that the fact that the laser dot matrix generating device 2 at the moving terminal point in an ideal state presents that a light spot on the grid positioning plate 3 coincides with nine dots (X, Y axis) adjacent to the middle nine dots on the grid positioning plate 3 or nine dots with a slightly larger central range (Z axis) is ensured, namely, the laser dot matrix generating device moves m steps along the X, Y axis or moves n steps along the Z axis. If there is an X, Y axis direction line error, the actual moved spot position will deviate from the ideal spot position as shown in fig. 4. When the machine tool moves along the X, Y, Z axis, the X, Y axis direction single-step linear error can be represented by the formula
And (6) calculating.
2) Z-axis straight line error during motion along X, Y, Z axes
During measurement, the laser dot matrix generating device 2 is adjusted to emit laser beams, light spots are displayed on the grid positioning plate 3 and coincide with nine central dots on the grid positioning plate 3, and the laser beams are defined as starting points. Then, the laser dot matrix generating device 2 on the program control main shaft is set to move to a specific point from the starting point along the X, Y, Z axis, so that the fact that the laser dot matrix generating device 2 at the moving end point in an ideal state presents that a light spot on the grid positioning plate 3 coincides with nine dots (X, Y axis) adjacent to nine dots in the middle of the grid positioning plate 3 or nine dots in a slightly larger range of the center (Z axis) is ensured, namely, the laser dot matrix generating device moves m steps along the X, Y axis or moves n steps along the Z axis. If there is a Z-axis direction line error, the actual moved spot position deviates from the ideal spot position as shown in fig. 5. The Z-axis direction single-step linear error of the machine tool moving along the X, Y, Z axis can be obtained by the following formula
And (6) calculating.
3) X, Y shaft angle error when moving along X, Y, Z shaft
During measurement, the laser dot matrix generating device 2 is adjusted to emit laser beams, light spots are displayed on the grid positioning plate 3 and coincide with nine central dots on the grid positioning plate 3, and the laser beams are defined as starting points. Then, the laser dot matrix generating device 2 on the program control main shaft is set to move to a specific point from the starting point along the X, Y, Z axis, so that the fact that the laser dot matrix generating device 2 at the moving end point in an ideal state presents that a light spot on the grid positioning plate 3 coincides with nine dots (X, Y axis) adjacent to nine dots in the middle of the grid positioning plate 3 or nine dots in a slightly larger range of the center (Z axis) is ensured, namely, the laser dot matrix generating device moves m steps along the X, Y axis or moves n steps along the Z axis. If there is an error in the X-axis rotation angle, the actual moved spot position deviates from the ideal spot position as shown in fig. 6. The single step rotation angle error in the X-axis direction when the machine tool moves along the X, Y, Z axis can be expressed by the formula
And (6) calculating. If there is an X-axis angular error, the actual moved spot position deviates from the ideal spot position by 90 ° as shown in fig. 6. The calculation principle of the Y-axis direction single-step rotation angle error when the machine tool moves along the X, Y, Z axis is similar to that of the X-axis direction single-step long rotation angle error when the machine tool moves along the X, Y, Z axis.
4) Z-axis angular error during motion along axis X, Y, Z
During measurement, the laser dot matrix generating device 2 is adjusted to emit laser beams, light spots are displayed on the grid positioning plate 3 and coincide with nine central dots on the grid positioning plate 3, and the laser beams are defined as starting points. Then, the laser dot matrix generating device 2 on the program control main shaft is set to move to a specific point from the starting point along the X, Y, Z axis, so that the fact that the laser dot matrix generating device 2 at the moving end point in an ideal state presents that a light spot on the grid positioning plate 3 coincides with nine dots (X, Y axis) adjacent to nine dots in the middle of the grid positioning plate 3 or nine dots in a slightly larger range of the center (Z axis) is ensured, namely, the laser dot matrix generating device moves m steps along the X, Y axis or moves n steps along the Z axis. If there is a Z-axis angular error, the actual moved spot position deviates from the ideal spot position as shown in fig. 7. The single step rotation angle error of the Z-axis direction when the machine tool moves along the X, Y, Z axis can be expressed by the formula
And (6) calculating.
Claims (4)
1. An on-line error measurement method based on a laser dot matrix numerical control machine tool can realize the on-line error measurement of the positioning error and the movement of the numerical control machine tool, and comprises a numerical control machine tool (1), a laser dot matrix generating device (2), a grid positioning plate (3), an industrial camera (4) and a computer (5), wherein the laser dot matrix generating device (2) consists of a tool handle (2-1), a laser generating device (2-2), a grating (2-3) and a grating fixing device (2-4), the laser dot matrix generating device (2) can be arranged in a tool pan of the numerical control machine tool (1), the grid positioning plate (3) is fixed on a processing plane of the numerical control machine tool (1), the industrial camera (4) is fixed on the numerical control machine tool (1), the lens angle of the industrial camera can ensure that the grid positioning plate (3) can be accurately and comprehensively shot, and the computer (5, the method is characterized by comprising the following steps of:
first, calibration:
setting a numerical control program to switch a laser dot matrix generating device (2) onto a main shaft, moving the laser dot matrix generating device (2) above a grid positioning plate (3) through numerical control programming, continuously shooting by an industrial camera (4), determining the positions of nine beams of laser through the operation of a computer (5), continuously controlling the main shaft to move through an operation tracking program, and finally realizing that light spots generated by the nine beams of laser are all aligned to nine circular spots in the center of the grid positioning plate (3) through the image feedback of the industrial camera (4);
secondly, measuring the motion error:
the three-axis numerical control machine tool mainly carries out X, Y, Z coordinate axis motions in the machining process, 6 errors are generated when the three-axis numerical control machine tool moves along each coordinate axis direction, namely, an X-axis linear error, a Y-axis linear error, a Z-axis linear error, an X-axis angular error, a Y-axis angular error and a Z-axis angular error, namely, 18 errors are measured in the machining process of the three-axis numerical control machine tool, and the following 18 error measurement methods are described:
1) x, Y axis direction straight line error when moving along X, Y, Z axis;
during measurement, firstly, a laser dot matrix generating device (2) is adjusted to emit a laser beam to enable the laser beam to be superposed with nine central dots on a grid positioning plate (3) on a spot and then defined as a starting point, then a program is set to control the laser dot matrix generating device (2) on a main shaft to move to a specific point from the starting point along a X, Y axis, and the situation that the laser dot matrix generating device (2) at the end point moves under an ideal state to enable the spot to be superposed with nine central dots adjacent to the nine central dots on the grid positioning plate (3) or nine central dots in a slightly larger range on the grid positioning plate (3) on the grid positioning plate is ensured, namely, the laser dot matrix generating device moves m steps along a X, Y axis or n steps along a Z axis, if a linear error in a X, Y axis direction exists, the actual moving spot position has a deviation with the spot position under the ideal, The single step linear error in the Y-axis direction can be represented by the formula
Calculating to obtain;
2) z-axis line error when moving along axis X, Y, Z;
during measurement, firstly, the laser dot matrix generating device (2) is adjusted to emit laser beams, light spots on the grid positioning plate (3) are superposed with nine dots in the middle of the grid positioning plate (3), and the laser beams are defined as a starting point, then setting a program to control the laser dot matrix generating device (2) on the main shaft to move from a starting point to a specific point along an X, Y, Z axis, ensuring that the laser dot matrix generating device (2) at the moving end point in an ideal state presents a light spot on the grid positioning plate (3) to be superposed with nine dots adjacent to the middle nine dots on the grid positioning plate (3) or nine dots with a slightly larger central range, i.e., m steps along axis X, Y, or n steps along the Z-axis, if there is a Z-axis direction line error, the spot position after the actual movement is deviated from the ideal spot position, and the single-step linear error in the Z-axis direction when the machine tool moves along the X, Y, Z axis can be formulated.
Calculating to obtain;
3) x, Y shaft angle error when moving along the X, Y, Z shaft;
during measurement, firstly, the laser dot matrix generating device (2) is adjusted to emit laser beams, light spots on the grid positioning plate (3) are superposed with nine dots in the middle of the grid positioning plate (3), and the laser beams are defined as a starting point, then setting a program to control the laser dot matrix generating device (2) on the main shaft to move from a starting point to a specific point along an X, Y, Z axis, ensuring that the laser dot matrix generating device (2) at the moving end point in an ideal state presents a light spot on the grid positioning plate (3) to be superposed with nine dots adjacent to the middle nine dots on the grid positioning plate (3) or nine dots with a slightly larger central range, i.e., m steps along axis X, Y, or n steps along the Z axis, if there is an X axis angle error, the spot position after the actual movement deviates from the ideal spot position, and the single-step long rotation angle error in the X-axis direction when the machine tool moves along the X, Y, Z axis can be formulated.
The calculation result shows that if the X-axis rotation angle error exists, the spot position after the actual movement and the spot position in the ideal state can rotate by 90 DEGoThe calculation principle of the single-step long rotation angle error in the Y-axis direction when the machine tool moves along the X, Y, Z axis is similar to that of the single-step long rotation angle error in the X-axis direction when the machine tool moves along the X, Y, Z axis;
4) z-axis angular error when moving along axis X, Y, Z;
during measurement, firstly, the laser dot matrix generating device (2) is adjusted to emit laser beams, light spots on the grid positioning plate (3) are superposed with nine dots in the middle of the grid positioning plate (3), and the laser beams are defined as a starting point, then setting a program to control the laser dot matrix generating device (2) on the main shaft to move from a starting point to a specific point along an X, Y, Z axis, ensuring that the laser dot matrix generating device (2) at the moving end point in an ideal state presents a light spot on the grid positioning plate (3) to be superposed with nine dots adjacent to the middle nine dots on the grid positioning plate (3) or nine dots with a slightly larger central range, i.e., m steps along axis X, Y, or n steps along the Z-axis, if there is a Z-axis angle error, the spot position after the actual movement deviates from the ideal spot position, and the single-step long rotation angle error in the Z-axis direction when the machine tool moves along the X, Y, Z axis can be formulated.
And (6) calculating.
2. The method for measuring the online error based on the laser dot matrix numerical control machine tool as claimed in claim 1, wherein the grating (2-3) can convert a single light beam generated by a laser generator into nine light arrays which are uniformly arranged in a 3 x 3 manner, wherein two outermost light beams of each row form an angle θ with each other.
3. The on-line error measurement method based on the laser dot matrix numerical control machine tool according to claim 1, characterized in that the grid positioning plate (3) is a diffuse reflection fine grid plate.
4. The on-line error measurement method based on the laser dot matrix numerical control machine tool as claimed in claim 1, characterized in that the grid positioning plate (3) has a dot matrix for calibrating the position of the laser spot, the distance between two adjacent dots is m times of the moving step length of X, Y axes, and simultaneously nine spots can be coincided with nine dots with a slightly larger middle range after the Z axis is moved n times of the moving step length of the integer.
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