CN106705856B - Near-infrared displacement sensing apparatus and micro-displacement measuring method based on broadband light spectral domain Microscopic inteferometry - Google Patents
Near-infrared displacement sensing apparatus and micro-displacement measuring method based on broadband light spectral domain Microscopic inteferometry Download PDFInfo
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Abstract
The present invention provides a kind of near-infrared displacement sensing apparatus based on broadband light spectral domain Microscopic inteferometry, including wideband light source, Kohler illumination system, microscope tube, interference objective, precise electric control platform, short wavelength cutoff optical filter, SMA905 fibre-optical splice, optical fiber, spectrometer, computer and.Light channel structure is successively wideband light source along optical path direction of travel, Kohler illumination system, microscope tube, enter interference objective later, it is divided into reference beam and test beams by the semi-transparent semi-reflecting film of interference objective, the two passes through the reference plate and measured piece surface reflection of interference objective respectively, along backtracking and interfere, interference signal projects image planes by the imaging len and short wavelength cutoff optical filter of microscope tube, optical fiber is fixed on the image planes of microscope tube by SMA905 fibre-optical splice, interference signal imports spectrometer by optical fiber, spectrometer is connect with computer, export spectral domain interference fringe.
Description
Technical field
It is especially a kind of based on the close red of broadband light spectral domain Microscopic inteferometry the present invention relates to interference of light metrology and measurement field
Outer displacement sensing device and micro-displacement measuring method.
Background technique
With the development in the fields such as machine-building, optical element processing, electronics industry, for the work of micro-displacement measurement
It is required that higher and higher.Contact displacement sensing method mostly due to gauge head in measurement process contact surface, have scuffing tested
Danger (such as the principle and test of Jia Lide, Zheng Ziwen, Dai Yifan, Li Shengyi swing arm aspherical profile instrument on part surface
[J] optical precision engineering, 2007,15 (4): 499-504).It is too big for surface profile steepness or there are the element of groove,
Gauge head can not contact specified point, cause measurement error.Contactless displacement sensing technology mostly uses optic probe, measurement accuracy
Height will not damage measuring surface.White Light Interferometer is widely used in as a kind of high-precision contactless displacement sensing technology
The measurement of micro-displacement amount.Traditional White Light Interferometer multi-pass crosses the time domain scanning of reference mirror or test mirrors, by believing interference
Displacement sensing is realized in the positioning of number envelope extreme value place.But its measurement process needs a large amount of axial scan process, not only takes
When it is laborious, strict requirements also proposed to high-precision phase shifting equipment.External U Schnell (U Schnell, E
Zimmermann,R Dandliker.Absolute distance measurement with synchronously
sampled white-light channeled spectrum interferometry[J].Pure Appl.Opt.1995,
White light spectral domain interference displacement sensing device 4:643-651.) etc. is reported earliest, is accompanied wave according to carrier frequency spectral domain interference fringe position
The Slope relationship of long variation realizes displacement sensing, is not necessarily to scan reference mirror or test mirrors in measurement process, improves displacement
The efficiency of measurement.But its device is based on Michelson's interferometer, and lateral resolution is lower.On the other hand, currently used for micro-displacement
The displacement sensing apparatus of measurement is mostly visible light wave range (such as light of the such as Xue Hui, Shen Weidong, Gu Peifu based on white light interference
Learn thin film physics method for measuring thickness [J] Acta Optica, 2009,29 (7): 1877-1880), for the spectral domain of near infrared band
Interference displacement sensing device yet there are no the relevant technologies.
Summary of the invention
The first aspect of the present invention proposes a kind of near-infrared displacement sensing apparatus based on broadband light spectral domain Microscopic inteferometry,
Including wideband light source, Kohler illumination system, microscope tube, interference objective, precise electric control platform, short wavelength cutoff optical filter,
SMA905 fibre-optical splice, optical fiber, spectrometer, computer and.Light channel structure is successively wideband light source, Ke Le along optical path direction of travel
Lighting system, microscope tube enter interference objective later, are divided into reference beam and test by the semi-transparent semi-reflecting film of interference objective
Light beam, the two are passed through the reference plate and measured piece surface reflection of interference objective respectively, along backtracking and are interfered, interference letter
Imaging len and short wavelength cutoff optical filter number Jing Guo microscope tube project image planes, and optical fiber is fixed on by SMA905 fibre-optical splice
The image planes of microscope tube, interference signal import spectrometer by optical fiber, and spectrometer is connect with computer, and output spectral domain interferes item
Line.Light source is high power wideband light source, and light intensity magnitude is adjustable.
A kind of improvement according to the present invention, it is also proposed that micro-displacement measuring based on aforementioned near-infrared displacement sensing apparatus
Method, comprising:
Step 1 changes SMA905 fibre-optical splice, optical fiber, spectrometer into CCD, adjusts inclination and the height of precise electric control platform
Degree, so that occurring several airspace interference fringes in CCD visual field；
CCD is changed into SMA905 fibre-optical splice, optical fiber, spectrometer by step 2, precise electric control platform height is adjusted, so that light
Occurs the moderate spectral domain interference fringe of carrier frequency number on spectrometer；
Step 3, the wavelength band for crosstalk occur according to the spectral domain interference fringe that spectrometer records select suitable shortwave to cut
Only system is added in optical filter；
Step 4, adjustment wideband light source light intensity and the spectrometer time of integration, integral number of times, record the spectral domain of multiple contrasts
Interference fringe；
Step 5 extracts displacement using fourier transform method to the single width spectral domain interference pattern of acquisition.
Compared with prior art, the present invention remarkable advantage are as follows: contactless displacement amount method for sensing will not make measuring piece
At damage；Measurement process is not necessarily to axial scan, and measurement efficiency is high, and the time is short；System lateral resolution is high, especially in optics member
Demand is able to satisfy in the high-precision detection of part.
It should be appreciated that as long as aforementioned concepts and all combinations additionally conceived described in greater detail below are at this
It can be viewed as a part of the subject matter of the disclosure in the case that the design of sample is not conflicting.In addition, required guarantor
All combinations of the theme of shield are considered as a part of the subject matter of the disclosure.
Can be more fully appreciated from the following description in conjunction with attached drawing present invention teach that the foregoing and other aspects, reality
Apply example and feature.The features and/or benefits of other additional aspects such as illustrative embodiments of the invention will be below
Description in it is obvious, or learnt in practice by the specific embodiment instructed according to the present invention.
Detailed description of the invention
Attached drawing is not intended to drawn to scale.In the accompanying drawings, identical or nearly identical group each of is shown in each figure
It can be indicated by the same numeral at part.For clarity, in each figure, not each component part is labeled.
Now, example will be passed through and the embodiments of various aspects of the invention is described in reference to the drawings, in which:
Fig. 1 is the near-infrared displacement sensing dress based on broadband light spectral domain Microscopic inteferometry for illustrating certain embodiments of the invention
The schematic diagram set.
Fig. 2 a-2d is the schematic diagram for illustrating the displacement extraction process of certain embodiments of the invention.
Specific embodiment
In order to better understand the technical content of the present invention, special to lift specific embodiment and institute's accompanying drawings is cooperated to be described as follows.
Various aspects with reference to the accompanying drawings to describe the present invention in the disclosure, shown in the drawings of the embodiment of many explanations.
It is not intended to cover all aspects of the invention for embodiment of the disclosure.It should be appreciated that a variety of designs and reality presented hereinbefore
Those of apply example, and describe in more detail below design and embodiment can in many ways in any one come it is real
It applies, this is because conception and embodiment disclosed in this invention are not limited to any embodiment.In addition, disclosed by the invention one
A little aspects can be used alone, or otherwise any appropriately combined use with disclosed by the invention.
In conjunction with the signal of the near-infrared displacement sensing apparatus based on broadband light spectral domain Microscopic inteferometry of Fig. 1, according to this hair
Bright embodiment, a kind of near-infrared displacement sensing apparatus based on broadband light spectral domain Microscopic inteferometry, which is characterized in that this is close red
Outer displacement sensing device include wideband light source 1, Kohler illumination system 2, microscope tube 3, interference objective 4, precise electric control platform 6,
Short wavelength cutoff optical filter 7, SMA905 fibre-optical splice 8, optical fiber 9, spectrometer 10, computer 11 and CCD12.
As shown in Figure 1, light channel structure is successively wideband light source 1, Kohler illumination system 2, microscope along optical path direction of travel
Cylinder 3 enters interference objective 4 later, is divided into reference beam and test beams by the semi-transparent semi-reflecting film of object lens, the two is passed through respectively
The reference plate of interference objective 4 and 5 surface reflection of measured piece in precise electric control platform 6, along backtracking and interfere,
Imaging len and short wavelength cutoff optical filter 7 of the interference signal Jing Guo microscope tube 3 project image planes, and SMA905 fibre-optical splice 8 will
Optical fiber 9 is fixed on the image planes of microscope tube 3, and interference signal imports spectrometer 10 by optical fiber 9.
Spectrometer is connect with computer 11, exports spectral domain interference fringe.
The precise electric control platform 6 is used to adjust the spatial position of measured piece 5 to meet measurement demand.
The CCD12 is for finding airspace striped in measurement process.
The near-infrared displacement sensing apparatus (as shown in Figure 1) of previous embodiment is operable near infrared band, and can eliminate
The crosstalk of different-waveband striped increases displacement sensing range.
In some instances, the wideband light source 1 is high power wideband light source, and light intensity magnitude is adjustable.
Preferably, the spectral region of spectrometer 10 is near infrared band.
Short wavelength cutoff optical filter 7 is for filtering out the crosstalk striped occurred in near-infrared spectral domain interference fringe.
The interference objective 4 is preferably Michaelson interference objective.
In some specific examples, in earlier figures 1, in near-infrared displacement sensing apparatus, optical texture includes: broadband
Light source (1) is 150W quartz tungsten halogen lamp, and light intensity is continuously adjustable；Kohler illumination system (2)；Microscope tube (3)；Michaelson is dry
Relate to object lens (4)；Three-D displacement adjustment and orthogonal direction tilt adjustments can be achieved in precise electric control platform (6)；Short wavelength cutoff filters
The cut-off wave band of piece (7) is 200-630nm；SMA905 fibre-optical splice (8), optical fiber (9) core diameter 600um, spectrometer (10)
Spectral bandwidth is 700-1100nm, computer (11) and CCD (12).
Illustratively, measured piece (5) is the standard stepped plate of height 7.8um.
Some embodiments of the present invention also propose a kind of micro-displacement measurement based on aforementioned near-infrared displacement sensing apparatus
Method includes following steps:
Step 1, the SMA905 fibre-optical splice 8 by Fig. 1, optical fiber 9, spectrometer 10 change CCD12 into, and adjustment precise electric control is flat
The inclination and height of platform 6, so that occurring several airspace interference fringes in CCD12 visual field；
CCD12 is changed into SMA905 fibre-optical splice 8, optical fiber 9, spectrometer 10 by step 2, and adjustment precise electric control platform 6 is high
Degree, so that occurring the moderate spectral domain interference fringe of carrier frequency number on spectrometer 10；
Step 3, the wavelength band for crosstalk occur according to the spectral domain interference fringe that spectrometer 10 records select suitable shortwave
System is added in edge filter 7；
Step 4, adjustment 1 light intensity of wideband light source and 10 time of integration of spectrometer, integral number of times, the good spectrum of Record Comparison degree
Domain interference fringe；
Step 5 extracts displacement using fourier transform method to the single width spectral domain interference pattern of acquisition.
Due to the variation that the reacting condition of micro-displacement amount is spectral domain interference fringe carrier frequency amount, the information of carrier frequency amount is included in dry
It relates in the phase change of striped.Therefore, the spectral domain interference fringe that certain displacement amount is corresponded to by spectrometer record, using in Fu
Leaf transformation algorithm extracts the purpose that the sensing of displacement can be realized in phase.
Fourier Transform Algorithm come by way of extracting phase information, can using mode commonly known in the art into
Row, details are not described herein.
Below with reference to the realization for shown in Fig. 1, more specifically describing aforementioned micro-displacement measuring method.
Step 1: adjustment airspace interference fringe.SMA905 fibre-optical splice 8, optical fiber 9, spectrometer 10 in Fig. 1 is changed into
CCD12, adjusts the inclination and height of electric control platform, so that occurring 1-5 root airspace interference fringe in CCD12 visual field；
Step 2: first adjustment spectral domain interference fringe.Change CCD12 into SMA905 fibre-optical splice 8, optical fiber 9, spectrometer 10,
Make the P of gauge head alignment stepped plate1Point, 6 height of adjustment precise electric control platform, so that occurring the moderate spectrum of carrier frequency number on spectrometer 10
Domain interference fringe；
Step 3: system is added in short wavelength cutoff optical filter 7.The infrared band spectral domain interference fringe that spectrometer 10 records goes out
The crosstalk of existing visible light wave range selects cut-off wave band that system is added for the short wavelength cutoff optical filter 7 of 200-630nm；
Step 4: adjusting and record P1Point test result.Adjust 1 light intensity of wideband light source and 10 time of integration of spectrometer
100ms, integral number of times 5 times record spectral domain interference signal S1；
Step 5: adjustment measured piece.It controls precise electric control platform 6 and translates measured piece, so that gauge head is directed at P2；
Step 6: repeating step 4, record spectral domain interference signal S2；
Step 7: displacement is extracted by spectral domain interference signal.
In conjunction with Fig. 2 a-2d, displacement method is extracted by spectral domain interference signal in abovementioned steps 7, comprising the following steps:
Step 1: wavelength domain interference signal (Fig. 2 a) conversion that spectrometer 10 is recorded such as is schemed to wave-number domain interference signal
2b；
Step 2: fourier transform method is used, extracts spectral domain interference signal phase, such as Fig. 2 c, process is shown in formula (1):
Z is displacement in formula, and k is wave number, F-1Expression takes inverse Fourier transform, and Im () and Re () are respectively indicated and taken plural number
Imaginary part and real part, B (f-f0) indicate spectral domain interference signal Fourier spectrum level-one secondary lobe.
Step 3: linear fit is carried out to extract the displacement measured twice to the phase of extraction, such as Fig. 2 d, sees formula (2):
Step 4: step height being calculated by micro-displacement amount twice, sees formula (3).
hstep=z1-z2 (3)
Wherein hstepIndicate step height, z1、z2The micro-displacement amount measured twice respectively obtained by step 3.
The spectral domain interference fringe corresponding to certain displacement amount that can be recorded as a result, by spectrometer, using Fourier transformation
Algorithm extracts phase, realizes the purpose of the sensing of displacement.
Although the present invention has been disclosed as a preferred embodiment, however, it is not to limit the invention.Skill belonging to the present invention
Has usually intellectual in art field, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations.Cause
This, the scope of protection of the present invention is defined by those of the claims.
Claims (6)
1. a kind of micro-displacement measuring method of the near-infrared displacement sensing apparatus based on broadband light spectral domain Microscopic inteferometry, special
Sign is that the near-infrared displacement sensing apparatus includes wideband light source (1), Kohler illumination system (2), microscope tube (3), interferences
Mirror (4), precise electric control platform (6), short wavelength cutoff optical filter (7), SMA905 fibre-optical splice (8), optical fiber (9), spectrometer (10),
Computer (11) and CCD (12), in which: light channel structure is successively wideband light source (1), Kohler illumination system along optical path direction of travel
(2), microscope tube (3) enter interference objective (4) later, are divided into reference beam and test light by the semi-transparent semi-reflecting film of object lens
Beam, measured piece (5) surface reflection that the two is passed through the reference plate of interference objective (4) respectively and is located on precise electric control platform (6),
It along backtracking and interferes, interference signal is projected by the imaging len and short wavelength cutoff optical filter (7) of microscope tube (3)
To image planes, optical fiber (9) is fixed on the image planes of microscope tube (3) by SMA905 fibre-optical splice (8), and interference signal passes through optical fiber (9)
It imports spectrometer (10), spectrometer is connect with computer (11), exports spectral domain interference fringe, and the precise electric control platform (6) is used
In the spatial position of adjustment measured piece (5) to meet measurement demand, the CCD (12) is for finding airspace item in measurement process
Line；
The spectral region of the spectrometer (10) is near infrared band；
The micro-displacement measuring method of near-infrared displacement sensing apparatus based on broadband light spectral domain Microscopic inteferometry, including following step
It is rapid:
Step 1 changes SMA905 fibre-optical splice (8), optical fiber (9), spectrometer (10) CCD (12) into, adjusts precise electric control platform
(6) inclination and height, so that there are several airspace interference fringes in CCD (12) visual field；
CCD (12) is changed into SMA905 fibre-optical splice (8), optical fiber (9), spectrometer (10) by step 2, adjusts precise electric control platform
(6) height, so that occurring the moderate spectral domain interference fringe of carrier frequency number on spectrometer (10)；
Step 3, the wavelength band for crosstalk occur according to the spectral domain interference fringe that spectrometer (10) record select suitable shortwave to cut
Only system is added in optical filter (7)；
Step 4, adjustment wideband light source (1) light intensity and spectrometer (10) time of integration, integral number of times, record the spectrum of multiple contrasts
Domain interference fringe；
Step 5 extracts displacement using fourier transform method to the single width spectral domain interference pattern of acquisition.
2. the micro-displacement of the near-infrared displacement sensing apparatus according to claim 1 based on broadband light spectral domain Microscopic inteferometry
Measuring method, which is characterized in that the wideband light source (1) is high power wideband light source, and light intensity magnitude is adjustable.
3. the micro-displacement of the near-infrared displacement sensing apparatus according to claim 1 based on broadband light spectral domain Microscopic inteferometry
Measuring method, which is characterized in that the short wavelength cutoff optical filter (7) is used to filter out to occur in near-infrared spectral domain interference fringe
Crosstalk striped.
4. the micro-displacement of the near-infrared displacement sensing apparatus according to claim 1 based on broadband light spectral domain Microscopic inteferometry
Measuring method, which is characterized in that the interference objective (4) is Michaelson interference objective.
5. micro-displacement measuring method according to claim 1, which is characterized in that in preceding method, become using Fourier
Method processing single width spectral domain interference pattern is changed, displacement sensing can be realized.
6. micro-displacement measuring method according to claim 1, which is characterized in that in abovementioned steps 5, extract displacement
Realization includes:
The wavelength domain interference signal that spectrometer records is converted to wave-number domain interference signal；
Using fourier transform method, spectral domain interference signal phase is extracted, process is shown in formula (1):
Z is displacement in formula, and k is wave number, F-1Expression takes inverse Fourier transform, and Im () and Re () respectively indicate the void for taking plural number
Portion and real part, B (f-f0) indicate spectral domain interference signal Fourier spectrum level-one secondary lobe；
Linear fit is carried out to extract the displacement measured twice to the phase of extraction, sees formula (2):
Step height is calculated by micro-displacement amount twice, sees formula (3):
hstep=z1-z2 (3)
Wherein hstepIndicate step height, z1、z2The micro-displacement amount measured twice respectively obtained by abovementioned steps.
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| CN107917676B (en) * | 2017-10-24 | 2020-04-10 | 南京理工大学 | Interference measurement method based on fringe image spectrum analysis |
| CN109211934B (en) * | 2018-08-29 | 2021-01-26 | 南京理工大学 | Micro-sphere surface defect detection device and method based on interference microscopy |
| CN111521130B (en) * | 2020-05-09 | 2022-02-18 | 南京理工大学 | Microstructure optical detection method for rapidly judging and eliminating batwing effect |
| GB2594980A (en) * | 2020-05-14 | 2021-11-17 | Agilent Tech Lda Uk Limited | Spectral analysis of a sample |
| CN113218517B (en) * | 2021-04-28 | 2022-07-22 | 南京理工大学 | Method and device for decomposing computational imaging coaxial holographic optical fiber mode |
| CN113405486B (en) * | 2021-05-26 | 2022-06-21 | 天津大学 | Film morphology detection system and method based on white light interference time-frequency domain analysis |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101266139A (en) * | 2008-04-30 | 2008-09-17 | 中北大学 | Microstructure appearance test method based on infrared white light interference technique |
| US7773232B2 (en) * | 2007-05-30 | 2010-08-10 | Qimonda Ag | Apparatus and method for determining trench parameters |
| CN101806585A (en) * | 2010-04-09 | 2010-08-18 | 中北大学 | Method for measuring appearance of MEMS (Micro Electro Mechanical System) device based on infrared light interference technique |
| CN103900493A (en) * | 2014-04-18 | 2014-07-02 | 中国科学院光电技术研究所 | Micro-nano structure and morphology measurement device and method based on digital scanning and white light interference |
| US8817268B2 (en) * | 2011-05-25 | 2014-08-26 | Seiko Epson Corporation | Optical filter, optical filter module, and photometric analyzer |
| CN104748855A (en) * | 2013-12-25 | 2015-07-01 | 南京理工大学 | Dual-channel high-throughput interference imaging spectral device and method |
-
2015
- 2015-07-31 CN CN201510463961.0A patent/CN106705856B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7773232B2 (en) * | 2007-05-30 | 2010-08-10 | Qimonda Ag | Apparatus and method for determining trench parameters |
| CN101266139A (en) * | 2008-04-30 | 2008-09-17 | 中北大学 | Microstructure appearance test method based on infrared white light interference technique |
| CN101806585A (en) * | 2010-04-09 | 2010-08-18 | 中北大学 | Method for measuring appearance of MEMS (Micro Electro Mechanical System) device based on infrared light interference technique |
| US8817268B2 (en) * | 2011-05-25 | 2014-08-26 | Seiko Epson Corporation | Optical filter, optical filter module, and photometric analyzer |
| CN104748855A (en) * | 2013-12-25 | 2015-07-01 | 南京理工大学 | Dual-channel high-throughput interference imaging spectral device and method |
| CN103900493A (en) * | 2014-04-18 | 2014-07-02 | 中国科学院光电技术研究所 | Micro-nano structure and morphology measurement device and method based on digital scanning and white light interference |
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