CN106687621B - 粉体供给器、成膜装置、及成膜方法 - Google Patents
粉体供给器、成膜装置、及成膜方法 Download PDFInfo
- Publication number
- CN106687621B CN106687621B CN201580048026.6A CN201580048026A CN106687621B CN 106687621 B CN106687621 B CN 106687621B CN 201580048026 A CN201580048026 A CN 201580048026A CN 106687621 B CN106687621 B CN 106687621B
- Authority
- CN
- China
- Prior art keywords
- raw material
- powder feeder
- mixing part
- aerosolized
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000843 powder Substances 0.000 title claims abstract description 85
- 238000000034 method Methods 0.000 title claims description 41
- 230000015572 biosynthetic process Effects 0.000 title claims description 30
- 239000002994 raw material Substances 0.000 claims abstract description 131
- 238000003756 stirring Methods 0.000 claims abstract description 84
- 238000002156 mixing Methods 0.000 claims abstract description 76
- 239000000443 aerosol Substances 0.000 claims abstract description 50
- 239000012159 carrier gas Substances 0.000 claims abstract description 37
- 238000005192 partition Methods 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims description 41
- 239000007921 spray Substances 0.000 claims description 4
- 238000005507 spraying Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 21
- 230000007246 mechanism Effects 0.000 description 17
- 239000000463 material Substances 0.000 description 15
- 239000007789 gas Substances 0.000 description 13
- 239000011521 glass Substances 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 239000002245 particle Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008676 import Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000005693 optoelectronics Effects 0.000 description 3
- 238000009987 spinning Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- BGOFCVIGEYGEOF-UJPOAAIJSA-N helicin Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=CC=CC=C1C=O BGOFCVIGEYGEOF-UJPOAAIJSA-N 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- -1 Polyethylene terephthalate Polymers 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 230000001112 coagulating effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Mixers Of The Rotary Stirring Type (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Accessories For Mixers (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Nozzles (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014189134 | 2014-09-17 | ||
| JP2014-189134 | 2014-09-17 | ||
| PCT/JP2015/076484 WO2016043269A1 (ja) | 2014-09-17 | 2015-09-17 | 粉体供給器、成膜装置、及び、成膜方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106687621A CN106687621A (zh) | 2017-05-17 |
| CN106687621B true CN106687621B (zh) | 2019-04-05 |
Family
ID=55533305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580048026.6A Expired - Fee Related CN106687621B (zh) | 2014-09-17 | 2015-09-17 | 粉体供给器、成膜装置、及成膜方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6568535B2 (ja) |
| KR (1) | KR20170055479A (ja) |
| CN (1) | CN106687621B (ja) |
| TW (1) | TWI657865B (ja) |
| WO (1) | WO2016043269A1 (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107876338B (zh) * | 2017-12-22 | 2023-08-01 | 镇江贝斯特新材料股份有限公司 | 受话器自动化柔性生产线的上盖双层涂覆装置 |
| JP7279077B2 (ja) * | 2018-11-29 | 2023-05-22 | 京セラ株式会社 | 撹拌棒および撹拌装置 |
| WO2020111209A1 (ja) * | 2018-11-29 | 2020-06-04 | 京セラ株式会社 | 撹拌棒および撹拌装置 |
| JP7279078B2 (ja) * | 2018-11-29 | 2023-05-22 | 京セラ株式会社 | 撹拌棒および撹拌装置 |
| JP7279076B2 (ja) * | 2018-11-29 | 2023-05-22 | 京セラ株式会社 | 撹拌棒および撹拌装置 |
| CN113769633B (zh) * | 2021-08-27 | 2024-05-03 | 合肥国轩高科动力能源有限公司 | 一种锂离子电池合浆方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042781A (ja) * | 1990-04-20 | 1992-01-07 | Vacuum Metallurgical Co Ltd | エアロゾル製造装置 |
| JP4075716B2 (ja) * | 2003-07-16 | 2008-04-16 | Ｔｏｔｏ株式会社 | 複合構造物作製装置 |
| JP3825455B2 (ja) * | 2003-09-17 | 2006-09-27 | 独立行政法人産業技術総合研究所 | エアロゾル発生装置、複合構造物作製装置及び複合構造物作製方法 |
| US7905196B2 (en) * | 2006-03-28 | 2011-03-15 | Brother Kogyo Kabushiki Kaisha | Aerosol generating apparatus, method for generating aerosol and film forming apparatus |
| CN102008910B (zh) * | 2010-01-27 | 2012-08-01 | 范维林 | 粉尘气溶胶发生装置 |
| CN102008911B (zh) * | 2010-03-31 | 2013-06-12 | 范维林 | 转盘式粉尘气溶胶发生装置 |
-
2015
- 2015-09-17 CN CN201580048026.6A patent/CN106687621B/zh not_active Expired - Fee Related
- 2015-09-17 JP JP2016548942A patent/JP6568535B2/ja not_active Expired - Fee Related
- 2015-09-17 TW TW104130711A patent/TWI657865B/zh not_active IP Right Cessation
- 2015-09-17 WO PCT/JP2015/076484 patent/WO2016043269A1/ja active Application Filing
- 2015-09-17 KR KR1020177006309A patent/KR20170055479A/ko unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016043269A1 (ja) | 2016-03-24 |
| TW201622825A (zh) | 2016-07-01 |
| KR20170055479A (ko) | 2017-05-19 |
| JP6568535B2 (ja) | 2019-08-28 |
| TWI657865B (zh) | 2019-05-01 |
| CN106687621A (zh) | 2017-05-17 |
| JPWO2016043269A1 (ja) | 2017-06-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190405 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |