CN106653773A - 一种显示面板 - Google Patents

一种显示面板 Download PDF

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CN106653773A
CN106653773A CN201611264002.7A CN201611264002A CN106653773A CN 106653773 A CN106653773 A CN 106653773A CN 201611264002 A CN201611264002 A CN 201611264002A CN 106653773 A CN106653773 A CN 106653773A
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layer
section
silicon
insulating medium
constituent
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CN106653773B (zh
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卓恩宗
樊堃
田轶群
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HKC Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
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HKC Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
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Priority to PCT/CN2017/084125 priority patent/WO2018120583A1/zh
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Abstract

本发明公开一种显示面板,包括:基板;若干条第一层导线,所述若干条第一层导线设置在基板上;绝缘介质层,所述绝缘介质层设置在若干条第一层导线上,所述绝缘介质层的介电常数大于氧化硅层和氮化硅层的介电常数,所述绝缘介质层包括组合物,所述组合物包括第一组成物和第二组成物,所述第一组成物的介电常数小于氧化硅层和氮化硅层的介电常数,所述第二组成物的介电常数大于氧化硅层和氮化硅层的介电常数。增大器件存储电荷能力,通过调节第一组成物和第二组成物的比例实现绝缘介质层的介电常数可调。

Description

一种显示面板
技术领域
本发明涉及显示技术领域,更具体的说,涉及一种显示面板。
背景技术
显示器具有机身薄、省电、无辐射等众多优点,得到了广泛的应用。现有市场上的显示器大部分为背光型显示器,其包括显示面板及背光模组(backlight module)。显示面板的工作原理是在两片平行的基板当中放置液晶分子,并在两片基板上施加驱动电压来控制液晶分子的旋转方向,以将背光模组的光线折射出来产生画面。
其中,薄膜晶体管显示器(Thin Film Transistor-Liquid Crystal Display,TFT-LCD)由于具有低的功耗、优异的画面品质以及较高的生产良率等性能,目前已经逐渐占据了显示领域的主导地位。同样,薄膜晶体管显示器包含显示面板和背光模组,显示面板包括彩膜基板(Color Filter Substrate,CF Substrate,也称彩色滤光片基板)和薄膜晶体管阵列基板(Thin Film Transistor Substrate,TFT Substrate),上述基板的相对内侧存在透明电极。两片基板之间夹一层液晶分子(Liquid Crystal,LC)。显示面板是通过电场对液晶分子取向的控制,改变光的偏振状态,并藉由偏光板实现光路的穿透与阻挡,实现显示的目的。
由于集成电路、芯片以及TFT-LCD的尺寸不断的减小,器件的封装密度不停的增大,因此对材料各方面性能的要求不断的提高。由于器件的比例缩小,目前器件的栅氧绝缘层厚度变得非常薄,对于比例小的器件而言,栅氧绝缘层厚度只会越来越薄,这需要有新的高K的栅氧绝缘介电材料。
发明内容
本发明所要解决的技术问题是提供一种绝缘介质层的介电常数大的显示面板。
本发明的目的是通过以下技术方案来实现的:
一种显示面板,包括:
基板;
若干条第一层导线,所述若干条第一层导线设置在基板上;
绝缘介质层,所述绝缘介质层设置在若干条第一层导线上,所述绝缘介质层的介电常数大于氧化硅层和氮化硅层的介电常数,所述绝缘介质层包括组合物,所述组合物包括第一组成物和第二组成物。
其中,所述第一组成物包括纳米多孔硅。
纳米多孔硅可以做的非常薄,可以减小绝缘介电层的厚度,可以满足集成电路、芯片以及TFT-LCD的尺寸不断的减小的需求,纳米多孔硅本身具有疏水性。
其中,所述第二组成物包括锗纳米颗粒。
锗的介电常数为16,通过调节锗的比例提高绝缘介质层的介电常数,当然也可以采用其他介电常数高的金属和其他材料。
其中,所述第一组成物包括纳米多孔硅,所述第二组成物包括锗纳米颗粒。
纳米多孔硅可以做的非常薄,可以减小绝缘介电层的厚度,可以满足集成电路、芯片以及TFT-LCD的尺寸不断的减小的需求,纳米多孔硅本身具有疏水性,锗的介电常数为16,纳米多孔硅本身具有很多硅孔,锗纳米颗粒可以存入硅孔内,不会增加通过纳米多孔硅的厚度,通过调节锗纳米颗粒Ge的负载量实现介电系数可控调节。
其中,所述绝缘介质层包括纳米多孔硅,所述纳米多孔硅包括多个彼此连接的空心柱状的子组件,所述子组件切面为六边形,所述子组件中间具有圆形通孔,所述子组件的圆形通孔上设有多个硅孔,所述硅孔内设有锗纳米颗粒。
多孔硅的子部件切面六边形方便多个子部件拼接排列,硅孔内设有多个锗纳米颗粒,不影响多孔硅厚度。
其中,所述绝缘介质层上对应栅极导线段设有非晶硅层,所述非晶硅层上设有与非晶硅层对应的欧姆接触层,所述欧姆接触层上设有分隔的源极导线段和漏极导线段,所述源极导线段和漏极导线段之间设有沟道,所述沟道穿过欧姆接触层,所述沟道底部为非晶硅层,所述源极导线段和漏极导线段宽度大于非晶硅层的宽度,所述源极导线段和漏极导线段上设有第二绝缘层,所述第二绝缘层上设有像素电极层,所述第二绝缘层对应漏极导线段设有过孔,所述像素电极层通过过孔与漏极导线段连接。
使用5Mask可以获取更好性能的薄膜晶体管TFT。
其中,所述绝缘介质层上对应栅极导线段设有非晶硅层,所述非晶硅层上设有与非晶硅层对应的欧姆接触层,所述欧姆接触层上设有分隔的源极导线段和漏极导线段,所述源极导线段和漏极导线段之间设有沟道,所述沟道穿过欧姆接触层,所述沟道底部为非晶硅层,所述源极导线段和漏极导线段宽度等于与其接触的欧姆接触层的宽度,所述源极导线段和漏极导线段上设有第二绝缘层,所述第二绝缘层上设有像素电极层,所述第二绝缘层对应漏极导线段设有过孔,所述像素电极层通过过孔与漏极导线段连接。
使用4Mask可以获取更好性能的薄膜晶体管TFT,而且节省一步Mask。
其中,所述第二绝缘层的相对介电常数小于氮化硅和氧化硅的相对介电常数。
采用低介电常数保护层可以提高薄膜晶体管TFT器件性能,改善信号串扰问题和RC电路延时问题。
其中,所述低介电常数保护层包括介孔氧化硅
介孔氧化硅的相对介电常数εr=1.4~2.4,低介电常数保护层采用介孔氧化硅取代5-mask与4-mask工艺TFT器件中的保护层材料SiNx(相对介电常数εr=7~8),介孔氧化硅比一般氧化硅(相对介电常数εr=3.9~4.1)的εr更低,可以提高TFT器件性能,改善信号串扰问题和RC电路延时问题,减小低介电常数保护层的厚度,当然低介电常数保护层也可以采用其他低介电常数的材料,如纳米多孔硅等。
其中,所述介孔氧化硅包括多个子单元,所述子单元包括成三行排列的子部件,所述子单元的中间一行包括并排的三个子部件,所述子单元的第一行和第三行分别包括并排的两个子部件,所述第一行和第三行的两个子部件分别设置在中间一行三个子部件的任意两个子部件之间,所述子部件切面为六边形,所述子部件中间具有圆形通孔。
子单元具有排列规则有序的子部件,具有较高的比表面积,较好的热稳定性和水热稳定性,子部件通孔大小均匀,子部件切面为六边形,方便多个子部件拼接排列。
与现有技术相比,本发明的技术效果是:
第一层导线上设置的绝缘介质层介电常数大于氧化硅层和氮化硅层的介电常数,增大器件存储电荷能力,绝缘介质层包括组合物,组合物包括第一组成物和第二组成物,第一组成物的介电常数小于氧化硅层和氮化硅层的介电常数,第二组成物的介电常数大于氧化硅层和氮化硅层的介电常数,通过调节第一组成物和第二组成物的比例实现绝缘介质层的介电常数可调。
附图说明
所包括的附图用来提供对本申请实施例的进一步的理解,其构成了说明书的一部分,用于例示本申请的实施方式,并与文字描述一起来阐释本申请的原理。显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。在附图中:
图1是本发明实施例一种5道工艺TFT器件示意图;
图2是本发明实施例一种4道工艺TFT器件示意图;
图3是本发明实施例一种5道工艺TFT器件另一示意图;
图4是本发明实施例纳米多孔硅示意图;
图5是本发明实施例纳米多孔硅和锗纳米颗粒示意图;
图6是本发明实施例介孔氧化硅示意图。
其中:10、基板,21、第一层导线,211、栅极导线段,22、绝缘介质层,231、子组件,23、非晶硅层,24、欧姆接触层,25、源极导线段,26、漏极导线段,27、沟道,28、过孔,30第二绝缘层,40、低介电常数保护层,41、介孔氧化硅,42、子部件,43、子单元,50、像素电极层。
具体实施方式
这里所公开的具体结构和功能细节仅仅是代表性的,并且是用于描述本发明的示例性实施例的目的。但是本发明可以通过许多替换形式来具体实现,并且不应当被解释成仅仅受限于这里所阐述的实施例。
在本发明的描述中,需要理解的是,术语“中心”、“横向”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,除非另有说明,“多个”的含义是两个或两个以上。另外,术语“包括”及其任何变形,意图在于覆盖不排他的包含。
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。
这里所使用的术语仅仅是为了描述具体实施例而不意图限制示例性实施例。除非上下文明确地另有所指,否则这里所使用的单数形式“一个”、“一项”还意图包括复数。还应当理解的是,这里所使用的术语“包括”和/或“包含”规定所陈述的特征、整数、步骤、操作、单元和/或组件的存在,而不排除存在或添加一个或更多其他特征、整数、步骤、操作、单元、组件和/或其组合。
下面结合附图和较佳的实施例对本发明作进一步说明。
下面参考图1至图6描述本发明实施例的显示面板。
如图1所示,在图1的实施例中显示面板包括基板10,所述基板10上设有若干条第一层导线21,所述第一层导线21上设有绝缘介质层22,所述绝缘介质层22采用氮化硅或氧化硅,所述绝缘介质层22上对应第一层导线21的栅极导线段211设有非晶硅层23,所述非晶硅层23上设有与非晶硅层23对应的欧姆接触层24,所述欧姆接触层24上设有分隔的源极导线段25和漏极导线段26,所述源极导线段25和漏极导线段26之间设有沟道27,所述沟道27穿过欧姆接触层24,所述沟道27底部为非晶硅层23,所述源极导线段25和漏极导线段26的宽度大于非晶硅层23的宽度,所述源极导线段25和漏极导线段26上设有保护层30,所述保护层30上设有像素电极层50,所述保护层30对应漏极导线段26设有过孔28,所述像素电极层50通过过孔28与漏极导线段26连接。其中,所述源极导线段25超出非晶硅层23部分一侧直接连接绝缘介质层22另一侧直接连接保护层30,所述绝缘介质层22对应过孔28部分与漏极导线段26之间连接。使用5Mask获取的薄膜晶体管TFT,具有较好的性能。
如图2所示,在图2的实施例中显示面板包括基板10,所述基板10上设有若干条第一层导线21,所述第一层导线21上设有绝缘介质层22,所述绝缘介质层22采用氮化硅或氧化硅,所述绝缘介质层22上对应第一层导线21的栅极导线段211设有非晶硅层23,所述非晶硅层23上设有与非晶硅层23对应的欧姆接触层24,所述欧姆接触层24上设有分隔的源极导线段25和漏极导线段26,所述源极导线段25和漏极导线段26之间设有沟道27,所述沟道27穿过欧姆接触层24,所述沟道27底部为非晶硅层23,所述源极导线段25和漏极导线段26宽度大于非晶硅层23的宽度,所述源极导线段25和漏极导线段26上设有保护层30,所述保护层30上设有像素电极层50,所述保护层30对应漏极导线段26设有过孔28,所述像素电极层50通过过孔28与漏极导线段26连接。其中,所述源极导线段25外侧的保护层30直接与绝缘介质层22连接,所述绝缘介质层22对应过孔28上方依次设有非晶硅层23、欧姆接触层24和漏极导线段26。使用4Mask获取的薄膜晶体管TFT具有较好的性能,而且可以节省一步Mask工艺。
目前工业界正在进行高K介电常数材料作为薄膜晶体的栅氧介电层材料。在过去的几十年中,由于工艺和设计的进步,集成电路、芯片以及TFT-LCD的尺寸不断的减小,器件的封装密度不停的增大,因此对材料各方面性能的要求不断的提高。由于器件的比例缩小,目前器件的栅氧绝缘层厚度变得非常薄,对于未来比例小的器件而言,栅氧绝缘层厚度只会越来越薄,这需要有新的高K的栅氧绝缘介电材料。上述实施例采用的四道工艺或五道工艺TFT-Array阵列,在TFT晶体管中,栅介电极与上级的绝缘保护层之间存在很高的电压。栅氧层会受到隧穿电流的影响,当栅极的绝缘介质层很薄时,电子会在薄膜晶体管中隧穿通过绝缘介质层。这将导致晶体管阀值电压的漂移,无法切换开关状态导致电路失效。传统的栅氧绝缘介电材料(如SiO2、SiNx)已不满足当前TFT-LCD器件高封装密度发展的需要。
如图3、图4和图5所示,在图3、图4和图5的实施例中显示面板包括:基板10;若干条第一层导线21,所述若干条第一层导线21设置在基板10上;绝缘介质层22,所述绝缘介质层22设置在若干条第一层导线21上,所述绝缘介质层22的介电常数大于氧化硅层和氮化硅层的介电常数,所述绝缘介质层22包括组合物,所述组合物包括第一组成物和第二组成物。
第一层导线21上设置的绝缘介质层22介电常数大于氧化硅层和氮化硅层的介电常数,增大器件存储电荷能力,绝缘介质层22包括组合物,组合物包括第一组成物和第二组成物,第一组成物的介电常数小于氧化硅层和氮化硅层的介电常数,第二组成物的介电常数大于氧化硅层和氮化硅层的介电常数,通过调节第一组成物和第二组成物的比例实现绝缘介质层22的介电常数可调。
可选的,其中,所述第一组成物包括纳米多孔硅。纳米多孔硅可以做的非常薄,可以减小绝缘介电层的厚度,可以满足集成电路、芯片以及TFT-LCD的尺寸不断的减小的需求,纳米多孔硅本身具有疏水性。
可选的,其中,所述第二组成物包括锗纳米颗粒。锗的介电常数为16,通过调节锗的比例提高绝缘介质层22的介电常数,当然也可以采用其他介电常数高的金属和其他材料。
可选的,其中,所述第一组成物包括纳米多孔硅,所述第二组成物包括锗纳米颗粒。纳米多孔硅可以做的非常薄,可以减小绝缘介电层的厚度,可以满足集成电路、芯片以及TFT-LCD的尺寸不断的减小的需求,纳米多孔硅本身具有疏水性,锗的介电常数为16,纳米多孔硅本身具有很多硅孔,锗纳米颗粒可以存入硅孔内,不会增加通过纳米多孔硅的厚度,通过调节锗纳米颗粒Ge的负载量实现介电系数可控调节。
其中,所述绝缘介质层22包括纳米多孔硅,所述纳米多孔硅包括多个彼此连接的空心柱状的子组件221,所述子组件221切面为六边形,所述子组件221中间具有圆形通孔,所述子组件221的圆形通孔上设有多个硅孔,所述硅孔内设有锗纳米颗粒。多孔硅的子部件42切面六边形方便多个子部件42拼接排列,硅孔内设有多个锗纳米颗粒,不影响多孔硅厚度。
其中,所述绝缘介质层22上对应栅极导线段211设有非晶硅层23,所述非晶硅层23上设有与非晶硅层23对应的欧姆接触层24,所述欧姆接触层24上设有分隔的源极导线段25和漏极导线段26,所述源极导线段25和漏极导线段26之间设有沟道27,所述沟道27穿过欧姆接触层24,所述沟道27底部为非晶硅层23,所述源极导线段25和漏极导线段26宽度大于非晶硅层23的宽度,所述源极导线段25和漏极导线段26上设有第二绝缘30,所述第二绝缘30上设有像素电极层50,所述第二绝缘30对应漏极导线段26设有过孔28,所述像素电极层50通过过孔28与漏极导线段26连接。其中,所述源极导线段25超出非晶硅层23部分一侧直接连接绝缘介质层22另一侧直接连接低介电常数保护层40,所述绝缘介质层22对应过孔28部分与漏极导线段26之间连接。使用5Mask可以获取更好性能的薄膜晶体管TFT。
如图2、图4和图5所示,在图2、图4和图5的实施例中显示面板包括:基板10;若干条第一层导线21,所述若干条第一层导线21设置在基板10上;绝缘介质层22,所述绝缘介质层22设置在若干条第一层导线21上,所述绝缘介质层22的介电常数大于氧化硅层和氮化硅层的介电常数,所述绝缘介质层22包括组合物,所述组合物包括第一组成物和第二组成物。
第一层导线21上设置的绝缘介质层22介电常数大于氧化硅层和氮化硅层的介电常数,增大器件存储电荷能力,绝缘介质层22包括组合物,组合物包括第一组成物和第二组成物,第一组成物的介电常数小于氧化硅层和氮化硅层的介电常数,第二组成物的介电常数大于氧化硅层和氮化硅层的介电常数,通过调节第一组成物和第二组成物的比例实现绝缘介质层22的介电常数可调。
可选的,其中,所述第一组成物包括纳米多孔硅。纳米多孔硅可以做的非常薄,可以减小绝缘介电层的厚度,可以满足集成电路、芯片以及TFT-LCD的尺寸不断的减小的需求,纳米多孔硅本身具有疏水性。
可选的,其中,所述第二组成物包括锗纳米颗粒。锗的介电常数为16,通过调节锗的比例提高绝缘介质层22的介电常数,当然也可以采用其他介电常数高的金属和其他材料。
可选的,其中,所述第一组成物包括纳米多孔硅,所述第二组成物包括锗纳米颗粒。纳米多孔硅可以做的非常薄,可以减小绝缘介电层的厚度,可以满足集成电路、芯片以及TFT-LCD的尺寸不断的减小的需求,纳米多孔硅本身具有疏水性,锗的介电常数为16,纳米多孔硅本身具有很多硅孔,锗纳米颗粒可以存入硅孔内,不会增加通过纳米多孔硅的厚度,通过调节锗纳米颗粒Ge的负载量实现介电系数可控调节。
其中,所述绝缘介质层22包括纳米多孔硅,所述纳米多孔硅包括多个彼此连接的空心柱状的子组件221,所述子组件221切面为六边形,所述子组件221中间具有圆形通孔,所述子组件221的圆形通孔上设有多个硅孔,所述硅孔内设有锗纳米颗粒。多孔硅的子部件42切面六边形方便多个子部件42拼接排列,硅孔内设有多个锗纳米颗粒,不影响多孔硅厚度。
其中,所述绝缘介质层22上对应栅极导线段211设有非晶硅层23,所述非晶硅层23上设有与非晶硅层23对应的欧姆接触层24,所述欧姆接触层24上设有分隔的源极导线段25和漏极导线段26,所述源极导线段25和漏极导线段26之间设有沟道27,所述沟道27穿过欧姆接触层24,所述沟道27底部为非晶硅层23,所述源极导线段25和漏极导线段26宽度等于与其接触的欧姆接触层24的宽度,所述源极导线段25和漏极导线段26上设有第二绝缘30,所述第二绝缘30上设有像素电极层50,所述第二绝缘30对应漏极导线段26设有过孔28,所述像素电极层50通过过孔28与漏极导线段26连接。其中,所述源极导线段25外侧的低介电常数保护层40直接与绝缘介质层22连接,所述绝缘介质层22对应过孔28上方依次设有非晶硅层23、欧姆接触层24和漏极导线段26。使用4Mask可以获取更好性能的薄膜晶体管TFT,而且节省一步Mask。
如图2、图3和图6所示,在图2、图3和图6的实施例中显示面板包括:基板10;若干条第一层导线21,所述若干条第一层导线21设置在基板10上;绝缘介质层22,所述绝缘介质层22设置在若干条第一层导线21上,所述绝缘介质层22的介电常数大于氧化硅层和氮化硅层的介电常数,所述绝缘介质层22包括组合物,所述组合物包括第一组成物和第二组成物。
其中,所述第二绝缘30的相对介电常数小于氮化硅和氧化硅的相对介电常数。采用低介电常数保护层可以提高薄膜晶体管TFT器件性能,改善信号串扰问题和RC电路延时问题。
可选的,其中,所述绝缘介质层22上对应栅极导线段211设有非晶硅层23,所述非晶硅层23上设有与非晶硅层23对应的欧姆接触层24,所述欧姆接触层24上设有分隔的源极导线段25和漏极导线段26,所述源极导线段25和漏极导线段26之间设有沟道27,所述沟道27穿过欧姆接触层24,所述沟道27底部为非晶硅层23,所述源极导线段25和漏极导线段26宽度大于非晶硅层23的宽度,所述源极导线段25和漏极导线段26上设有第二绝缘30,所述第二绝缘30上设有像素电极层50,所述第二绝缘30对应漏极导线段26设有过孔28,所述像素电极层50通过过孔28与漏极导线段26连接。其中,所述源极导线段25超出非晶硅层23部分一侧直接连接绝缘介质层22另一侧直接连接低介电常数保护层,所述绝缘介质层22对应过孔28部分与漏极导线段26之间连接。
可选的,其中,所述绝缘介质层22上对应栅极导线段211设有非晶硅层23,所述非晶硅层23上设有与非晶硅层23对应的欧姆接触层24,所述欧姆接触层24上设有分隔的源极导线段25和漏极导线段26,所述源极导线段25和漏极导线段26之间设有沟道27,所述沟道27穿过欧姆接触层24,所述沟道27底部为非晶硅层23,所述源极导线段25和漏极导线段26宽度等于与其接触的欧姆接触层24的宽度,所述源极导线段25和漏极导线段26上设有第二绝缘30,所述第二绝缘30上设有像素电极层50,所述第二绝缘30对应漏极导线段26设有过孔28,所述像素电极层50通过过孔28与漏极导线段26连接。其中,所述源极导线段25外侧的低介电常数保护层直接与绝缘介质层22连接,所述绝缘介质层22对应过孔28上方依次设有非晶硅层23、欧姆接触层24和漏极导线段26。
其中,所述低介电常数保护层包括介孔氧化硅。介孔氧化硅的相对介电常数εr=1.4~2.4,低介电常数保护层采用介孔氧化硅取代5-mask与4-mask工艺TFT器件中的保护层材料SiNx(相对介电常数εr=7~8),介孔氧化硅比一般氧化硅(相对介电常数εr=3.9~4.1)的εr更低,可以提高TFT器件性能,改善信号串扰问题和RC电路延时问题,减小低介电常数保护层的厚度,当然低介电常数保护层也可以采用其他低介电常数的材料,如纳米多孔硅等。
其中,所述介孔氧化硅包括多个子单元43,所述子单元43包括成三行排列的子部件42,所述子单元43的中间一行包括并排的三个子部件42,所述子单元43的第一行和第三行分别包括并排的两个子部件42,所述第一行和第三行的两个子部件42分别设置在中间一行三个子部件42的任意两个子部件42之间,所述子部件42切面为六边形,所述子部件42中间具有圆形通孔。子单元43具有排列规则有序的子部件42,具有较高的比表面积,较好的热稳定性和水热稳定性,子部件42通孔大小均匀,子部件42切面为六边形,方便多个子部件42拼接排列。
在上述实施例中,非晶硅层采用a-Si材料,当然也可以采用其他半导体层材料。
在上述实施例中,所述基板的材料可以选用玻璃、塑料等。
在上述实施例中,显示面板包括液晶面板、OLED面板、曲面面板、等离子面板等,以液晶面板为例,液晶面板包括阵列基板和彩膜基板(CF),所述阵列基板与彩膜基板相对设置,所述阵列基板与彩膜基板之间设有液晶和间隔单元(photo spacer,PS),所述阵列基板上设有薄膜晶体管(TFT),彩膜基板上设有彩色滤光层。
在上述实施例中,彩膜基板可包括TFT阵列,彩膜及TFT阵列可形成于同一基板上,阵列基本可包括彩色滤光层。
在上述实施例中,本发明的显示面板可为曲面型面板。
以上内容是结合具体的优选实施方式对本发明所作的进一步详细说明,不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干简单推演或替换,都应当视为属于本发明的保护范围。

Claims (10)

1.一种显示面板,其特征在于,包括:
基板;
若干条第一层导线,所述若干条第一层导线设置在基板上;
绝缘介质层,所述绝缘介质层设置在若干条第一层导线上,所述绝缘介质层的介电常数大于氧化硅层和氮化硅层的介电常数,所述绝缘介质层包括组合物,所述组合物包括第一组成物和第二组成物,所述第一组成物的介电常数小于氧化硅层和氮化硅层的介电常数,所述第二组成物的介电常数大于氧化硅层和氮化硅层的介电常数。
2.如权利要求1所述的一种显示面板,其特征在于,所述第一组成物包括纳米多孔硅。
3.如权利要求1所述的一种显示面板,其特征在于,所述第二组成物包括锗纳米颗粒。
4.如权利要求1所述的一种显示面板,其特征在于,所述第一组成物包括纳米多孔硅,所述第二组成物包括锗纳米颗粒。
5.如权利要求1所述的一种显示面板,其特征在于,所述绝缘介质层包括纳米多孔硅,所述纳米多孔硅包括多个彼此连接的空心柱状的子组件,所述子组件切面为六边形,所述子组件中间具有圆形通孔,所述子组件的圆形通孔上设有多个硅孔,所述硅孔内设有锗纳米颗粒。
6.如权利要求1所述的一种显示面板,其特征在于,所述绝缘介质层上对应栅极导线段设有非晶硅层,所述非晶硅层上设有与非晶硅层对应的欧姆接触层,所述欧姆接触层上设有分隔的源极导线段和漏极导线段,所述源极导线段和漏极导线段之间设有沟道,所述沟道穿过欧姆接触层,所述沟道底部为非晶硅层,所述源极导线段和漏极导线段宽度大于非晶硅层的宽度,所述源极导线段和漏极导线段上设有第二绝缘层,所述第二绝缘层上设有像素电极层,所述第二绝缘层对应漏极导线段设有过孔,所述像素电极层通过过孔与漏极导线段连接。
7.如权利要求1所述的一种显示面板,其特征在于,所述绝缘介质层上对应栅极导线段设有非晶硅层,所述非晶硅层上设有与非晶硅层对应 的欧姆接触层,所述欧姆接触层上设有分隔的源极导线段和漏极导线段,所述源极导线段和漏极导线段之间设有沟道,所述沟道穿过欧姆接触层,所述沟道底部为非晶硅层,所述源极导线段和漏极导线段宽度等于与其接触的欧姆接触层的宽度,所述源极导线段和漏极导线段上设有第二绝缘层,所述第二绝缘层上设有像素电极层,所述第二绝缘层对应漏极导线段设有过孔,所述像素电极层通过过孔与漏极导线段连接。
8.如权利要求6或7所述的一种显示面板,其特征在于,所述第二绝缘层的相对介电常数小于氮化硅和氧化硅的相对介电常数。
9.如权利要求8所述的一种显示面板,其特征在于,所述低介电常数保护层包括介孔氧化硅。
10.如权利要求9所述的一种显示面板,其特征在于,所述介孔氧化硅包括多个子单元,所述子单元包括成三行排列的子部件,所述子单元的中间一行包括并排的三个子部件,所述子单元的第一行和第三行分别包括并排的两个子部件,所述第一行和第三行的两个子部件分别设置在中间一行三个子部件的任意两个子部件之间,所述子部件切面为六边形,所述子部件中间具有圆形通孔。
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