CN106575660B - 光电子模块及制造该模块的方法 - Google Patents

光电子模块及制造该模块的方法 Download PDF

Info

Publication number
CN106575660B
CN106575660B CN201580044781.7A CN201580044781A CN106575660B CN 106575660 B CN106575660 B CN 106575660B CN 201580044781 A CN201580044781 A CN 201580044781A CN 106575660 B CN106575660 B CN 106575660B
Authority
CN
China
Prior art keywords
adhesive
image sensor
module
region
curing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201580044781.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN106575660A (zh
Inventor
西蒙·古布斯尔
索尼娅·汉泽尔曼
于启川
克里斯·凯瑟娜
吴国雄
哈特穆特·鲁德曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Sensors Singapore Pte Ltd
Original Assignee
Heptagon Micro Optics Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heptagon Micro Optics Pte Ltd filed Critical Heptagon Micro Optics Pte Ltd
Publication of CN106575660A publication Critical patent/CN106575660A/zh
Application granted granted Critical
Publication of CN106575660B publication Critical patent/CN106575660B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8057Optical shielding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/026Wafer-level processing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/804Containers or encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/809Constructional details of image sensors of hybrid image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/811Interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
CN201580044781.7A 2014-07-25 2015-07-22 光电子模块及制造该模块的方法 Active CN106575660B (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201462028893P 2014-07-25 2014-07-25
US62/028,893 2014-07-25
US201462053294P 2014-09-22 2014-09-22
US62/053,294 2014-09-22
US201562156416P 2015-05-04 2015-05-04
US62/156,416 2015-05-04
PCT/SG2015/050224 WO2016013977A1 (en) 2014-07-25 2015-07-22 Optoelectronic modules including an image sensor having regions optically separated from one another

Publications (2)

Publication Number Publication Date
CN106575660A CN106575660A (zh) 2017-04-19
CN106575660B true CN106575660B (zh) 2019-07-09

Family

ID=55163393

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580044781.7A Active CN106575660B (zh) 2014-07-25 2015-07-22 光电子模块及制造该模块的方法

Country Status (8)

Country Link
US (1) US10199412B2 (https=)
EP (1) EP3172767B1 (https=)
JP (1) JP6689817B2 (https=)
KR (1) KR102455919B1 (https=)
CN (1) CN106575660B (https=)
SG (1) SG11201700235QA (https=)
TW (1) TWI685126B (https=)
WO (1) WO2016013977A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109155258B (zh) 2016-04-08 2022-04-26 赫普塔冈微光有限公司 具有孔径的薄光电模块及其制造
CN114137672A (zh) * 2016-04-15 2022-03-04 赫普塔冈微光有限公司 具有对准间隔件的光电子模块和用于组装所述光电子模块的方法
CN107786784B (zh) * 2016-08-29 2020-06-30 光宝电子(广州)有限公司 镜头组件及其制作方法
JP6620176B2 (ja) * 2018-01-29 2019-12-11 アオイ電子株式会社 半導体装置
US12169315B2 (en) 2018-03-07 2024-12-17 Ams Sensors Singapore Pte. Ltd. Optoelectronic modules and wafer-level methods for manufacturing the same
EP3620813A1 (en) * 2018-09-04 2020-03-11 ams AG Optical sensor arrangement, device and method of manufacturing an optical sensor arrangement
CN111463293B (zh) * 2019-01-17 2022-05-17 光宝光电(常州)有限公司 支架结构、光传感器结构及制造光传感器结构的方法
CN114339000B (zh) * 2021-12-31 2024-04-23 昆山丘钛微电子科技股份有限公司 一种摄像头模组及制备方法
WO2025012223A1 (en) * 2023-07-10 2025-01-16 Sensibel As Optical readout module

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103124912A (zh) * 2010-10-04 2013-05-29 罗伯特·博世有限公司 用于分离光学路径的光学屏蔽装置
CN103247647A (zh) * 2012-02-09 2013-08-14 全视科技有限公司 背侧照明成像传感器中的侧向光屏蔽物
WO2013161722A1 (ja) * 2012-04-25 2013-10-31 京セラ株式会社 受発光素子モジュールおよびこれを用いたセンサ装置
CN103620779A (zh) * 2011-07-19 2014-03-05 赫普塔冈微光有限公司 光电模块及其制造方法
CN103839840A (zh) * 2012-11-22 2014-06-04 光宝新加坡有限公司 感应器单元的制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3880278B2 (ja) * 2000-03-10 2007-02-14 オリンパス株式会社 固体撮像装置及びその製造方法
TW513558B (en) 2000-10-27 2002-12-11 Fuji Electric Co Ltd Range finder for automatic focusing
JP2002350129A (ja) 2001-05-23 2002-12-04 Canon Inc 計測装置
JP4016275B2 (ja) 2003-06-25 2007-12-05 富士電機デバイステクノロジー株式会社 測距装置
EP1812968B1 (en) * 2004-08-25 2019-01-16 Callahan Cellular L.L.C. Apparatus for multiple camera devices and method of operating same
JP2007110588A (ja) * 2005-10-17 2007-04-26 Funai Electric Co Ltd 複眼撮像装置
JP4492533B2 (ja) * 2005-12-27 2010-06-30 船井電機株式会社 複眼撮像装置
KR100809277B1 (ko) 2006-07-05 2008-03-03 삼성전기주식회사 어레이 렌즈를 갖는 카메라 모듈
JP2010021283A (ja) * 2008-07-09 2010-01-28 Panasonic Corp 固体撮像装置およびその製造方法
TWM363080U (en) * 2009-01-21 2009-08-11 Pixart Imaging Inc Packaging structure
JP5857399B2 (ja) 2010-11-12 2016-02-10 ソニー株式会社 固体撮像装置及び電子機器
US8492181B2 (en) * 2011-12-22 2013-07-23 Stmicroelectronics Pte Ltd. Embedded wafer level optical package structure and manufacturing method
US9543354B2 (en) * 2013-07-30 2017-01-10 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules
US9094593B2 (en) * 2013-07-30 2015-07-28 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103124912A (zh) * 2010-10-04 2013-05-29 罗伯特·博世有限公司 用于分离光学路径的光学屏蔽装置
CN103620779A (zh) * 2011-07-19 2014-03-05 赫普塔冈微光有限公司 光电模块及其制造方法
CN103247647A (zh) * 2012-02-09 2013-08-14 全视科技有限公司 背侧照明成像传感器中的侧向光屏蔽物
WO2013161722A1 (ja) * 2012-04-25 2013-10-31 京セラ株式会社 受発光素子モジュールおよびこれを用いたセンサ装置
CN103839840A (zh) * 2012-11-22 2014-06-04 光宝新加坡有限公司 感应器单元的制造方法

Also Published As

Publication number Publication date
TWI685126B (zh) 2020-02-11
JP6689817B2 (ja) 2020-04-28
SG11201700235QA (en) 2017-02-27
US10199412B2 (en) 2019-02-05
KR20170036020A (ko) 2017-03-31
JP2017523612A (ja) 2017-08-17
KR102455919B1 (ko) 2022-10-17
TW201611319A (zh) 2016-03-16
US20170229505A1 (en) 2017-08-10
WO2016013977A1 (en) 2016-01-28
EP3172767A4 (en) 2018-06-27
CN106575660A (zh) 2017-04-19
EP3172767A1 (en) 2017-05-31
EP3172767B1 (en) 2022-01-05

Similar Documents

Publication Publication Date Title
CN106575660B (zh) 光电子模块及制造该模块的方法
CN108780820B (zh) 具有带有用于接纳光学组件的开口的双重包封的光电模块
US9543354B2 (en) Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules
CN104781721B (zh) 包括焦距调整结构的光学模块和光学模块的制造
TWI651561B (zh) 具有屏蔽以減少光漏或漫射光的光電模組及此模組之製造方法
TWI661241B (zh) 包括用於焦距長度調整和/或減少傾斜的自訂間隔物之光學模組及光學模組的製造
CN109155258B (zh) 具有孔径的薄光电模块及其制造
US9976894B2 (en) Optical device
TW201526217A (zh) 用於晶圓級製造之模組之部分間隔物
EP3341974B1 (en) Optical assemblies including a spacer adhering directly to a substrate
US12015115B2 (en) Optoelectronic modules having fluid permeable channels and methods for manufacturing the same
JP2017523612A5 (https=)
CN106573460B (zh) 装置、特别是光学装置的晶片级制造
TWI695200B (zh) 光學模組及其製造方法
US10190908B2 (en) Optical devices and methods of making same
TW201626021A (zh) 光學元件堆疊組件
TWI782897B (zh) 光學元件堆疊組件

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant