CN106573831B - 用于减少显示器玻璃静电放电的有机表面处理 - Google Patents

用于减少显示器玻璃静电放电的有机表面处理 Download PDF

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Publication number
CN106573831B
CN106573831B CN201580043135.9A CN201580043135A CN106573831B CN 106573831 B CN106573831 B CN 106573831B CN 201580043135 A CN201580043135 A CN 201580043135A CN 106573831 B CN106573831 B CN 106573831B
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Prior art keywords
glass substrate
organic film
glass
less
coefficient
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Expired - Fee Related
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CN201580043135.9A
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English (en)
Chinese (zh)
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CN106573831A (zh
Inventor
J·P·汉米尔顿
R·G·曼利
J·M·米斯
W·J·瓦尔扎克
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Corning Inc
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Corning Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00—Shaping glass in contact with the surface of a liquid
    • C03B18/02—Forming sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/30—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00—Arrangements for protection of devices
    • H10W42/60—Arrangements for protection of devices protecting against electrostatic charges or discharges, e.g. Faraday shields
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/111—Deposition methods from solutions or suspensions by dipping, immersion
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/365—Coating different sides of a glass substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/411—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by materials, geometry or structure of the substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Power Engineering (AREA)
CN201580043135.9A 2014-08-12 2015-08-07 用于减少显示器玻璃静电放电的有机表面处理 Expired - Fee Related CN106573831B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462036166P 2014-08-12 2014-08-12
US62/036,166 2014-08-12
PCT/US2015/044226 WO2016025320A1 (en) 2014-08-12 2015-08-07 Organic surface treatments for display glasses to reduce esd

Publications (2)

Publication Number Publication Date
CN106573831A CN106573831A (zh) 2017-04-19
CN106573831B true CN106573831B (zh) 2020-04-21

Family

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CN201580043135.9A Expired - Fee Related CN106573831B (zh) 2014-08-12 2015-08-07 用于减少显示器玻璃静电放电的有机表面处理

Country Status (6)

Country Link
US (1) US10153268B2 (https=)
JP (1) JP6734842B2 (https=)
KR (1) KR20170041248A (https=)
CN (1) CN106573831B (https=)
TW (1) TWI687378B (https=)
WO (1) WO2016025320A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI778019B (zh) * 2017-02-14 2022-09-21 美商康寧公司 併入積層基板的電子組件及其製造方法
JP2019081124A (ja) * 2017-10-30 2019-05-30 横浜油脂工業株式会社 ガラス基板に蓄積する静電気を低減させる洗浄方法
WO2019173374A1 (en) * 2018-03-07 2019-09-12 Corning Incorporated Textured glass surfaces for reduced electrostatic charging
JP2020101616A (ja) * 2018-12-20 2020-07-02 日本電気硝子株式会社 電子デバイスの製造方法及びガラス基板
CN113527743B (zh) * 2021-07-26 2022-12-23 马鞍山东毅新材料科技有限公司 一种防静电转移的显示屏保护膜及其生产工艺

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5985700A (en) * 1996-11-26 1999-11-16 Corning Incorporated TFT fabrication on leached glass surface
CN1445187A (zh) * 2002-03-14 2003-10-01 碧悠国际光电股份有限公司 平面显示器用的基板玻璃组成物
TWI225938B (en) * 2000-07-31 2005-01-01 Tomoegawa Paper Co Ltd Anti-static anti-reflective film
CN102414140A (zh) * 2009-05-07 2012-04-11 日本电气硝子株式会社 玻璃基板及其制造方法

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US3338696A (en) 1964-05-06 1967-08-29 Corning Glass Works Sheet forming apparatus
BE757057A (fr) 1969-10-06 1971-04-05 Corning Glass Works Procede et appareil de controle d'epaisseur d'une feuille de verre nouvellement etiree
US4102664A (en) 1977-05-18 1978-07-25 Corning Glass Works Method for making glass articles with defect-free surfaces
US4214886A (en) 1979-04-05 1980-07-29 Corning Glass Works Forming laminated sheet glass
US4880453A (en) 1988-12-19 1989-11-14 Corning Incorporated Method for making glass articles with defect-free surfaces and soluble glasses therefor
US5119258A (en) 1990-02-06 1992-06-02 Hmt Technology Corporation Magnetic disc with low-friction glass substrate
JP2720612B2 (ja) * 1991-02-27 1998-03-04 日本電気株式会社 薄膜トランジスタアレイ基板の製造方法
JPH0753948A (ja) * 1993-08-19 1995-02-28 Kao Corp 帯電防止材料およびこれを含む光記録媒体
US5792327A (en) 1994-07-19 1998-08-11 Corning Incorporated Adhering metal to glass
JP2001500467A (ja) 1996-09-17 2001-01-16 コーニング インコーポレイテッド きめのある表面およびきめを出す方法
US6099971A (en) 1998-09-09 2000-08-08 Plaskolite, Inc. Polysiloxane abrasion and static resistant coating
JP2002072922A (ja) 2000-06-13 2002-03-12 Asahi Glass Co Ltd ディスプレイ用ガラス基板およびその選別方法
JP2002308643A (ja) * 2001-02-01 2002-10-23 Nippon Electric Glass Co Ltd 無アルカリガラス及びディスプレイ用ガラス基板
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JP4752725B2 (ja) 2005-11-17 2011-08-17 株式会社ニコン ガラス基板およびその製造方法
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KR20090123540A (ko) * 2008-05-28 2009-12-02 삼성전자주식회사 유기 광전 변환막, 이를 구비하는 광전 변환 소자 및이미지 센서
CN103151266B (zh) * 2009-11-20 2016-08-03 株式会社半导体能源研究所 用于制造半导体器件的方法
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US8857216B2 (en) 2012-05-31 2014-10-14 Corning Incorporated Burner modules, methods of forming glass sheets, and glass sheets formed thereby
JP2016522144A (ja) 2013-04-30 2016-07-28 コーニング インコーポレイテッド 低静電放電フュージョンドローガラスのための表面処理

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US5985700A (en) * 1996-11-26 1999-11-16 Corning Incorporated TFT fabrication on leached glass surface
TWI225938B (en) * 2000-07-31 2005-01-01 Tomoegawa Paper Co Ltd Anti-static anti-reflective film
CN1445187A (zh) * 2002-03-14 2003-10-01 碧悠国际光电股份有限公司 平面显示器用的基板玻璃组成物
CN102414140A (zh) * 2009-05-07 2012-04-11 日本电气硝子株式会社 玻璃基板及其制造方法

Also Published As

Publication number Publication date
JP2017524644A (ja) 2017-08-31
KR20170041248A (ko) 2017-04-14
TW201612128A (en) 2016-04-01
CN106573831A (zh) 2017-04-19
WO2016025320A1 (en) 2016-02-18
US20170222025A1 (en) 2017-08-03
JP6734842B2 (ja) 2020-08-05
US10153268B2 (en) 2018-12-11
TWI687378B (zh) 2020-03-11

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Granted publication date: 20200421