CN106549082B - 合金靶与硫化物靶共溅射制备铜锌锡硫薄膜吸收层的方法 - Google Patents
合金靶与硫化物靶共溅射制备铜锌锡硫薄膜吸收层的方法 Download PDFInfo
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- WILFBXOGIULNAF-UHFFFAOYSA-N copper sulfanylidenetin zinc Chemical compound [Sn]=S.[Zn].[Cu] WILFBXOGIULNAF-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims abstract description 18
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 15
- 239000000956 alloy Substances 0.000 title claims abstract description 15
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 title claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000004544 sputter deposition Methods 0.000 claims abstract description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 11
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000008367 deionised water Substances 0.000 claims abstract description 10
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910017755 Cu-Sn Inorganic materials 0.000 claims abstract description 8
- 229910017927 Cu—Sn Inorganic materials 0.000 claims abstract description 8
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000011733 molybdenum Substances 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 5
- 238000013461 design Methods 0.000 claims abstract description 4
- 239000005361 soda-lime glass Substances 0.000 claims description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 16
- 238000002360 preparation method Methods 0.000 claims description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 229910002804 graphite Inorganic materials 0.000 claims description 10
- 239000010439 graphite Substances 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 9
- 229910052786 argon Inorganic materials 0.000 claims description 8
- 229910052718 tin Inorganic materials 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 7
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 6
- 239000005864 Sulphur Substances 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 6
- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims description 5
- 238000010792 warming Methods 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 239000007888 film coating Substances 0.000 claims 1
- 238000009501 film coating Methods 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 4
- 229910052793 cadmium Inorganic materials 0.000 abstract description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 abstract 1
- 239000002253 acid Substances 0.000 abstract 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 239000011591 potassium Substances 0.000 abstract 1
- 229910052700 potassium Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 36
- 239000010949 copper Substances 0.000 description 12
- 239000011701 zinc Substances 0.000 description 9
- 229910052733 gallium Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052738 indium Inorganic materials 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 229910052711 selenium Inorganic materials 0.000 description 3
- 239000011669 selenium Substances 0.000 description 3
- 238000006467 substitution reaction Methods 0.000 description 3
- QLOKJRIVRGCVIM-UHFFFAOYSA-N 1-[(4-methylsulfanylphenyl)methyl]piperazine Chemical compound C1=CC(SC)=CC=C1CN1CCNCC1 QLOKJRIVRGCVIM-UHFFFAOYSA-N 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 2
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910017518 Cu Zn Inorganic materials 0.000 description 1
- 229910017752 Cu-Zn Inorganic materials 0.000 description 1
- 229910002475 Cu2ZnSnS4 Inorganic materials 0.000 description 1
- 229910017943 Cu—Zn Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical group [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
- YGSCHSPBVNFNTD-UHFFFAOYSA-N [S].[Sn].[Zn] Chemical compound [S].[Sn].[Zn] YGSCHSPBVNFNTD-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- NQDAZSFONLAYGS-UHFFFAOYSA-L hydroxy-(hydroxy(dioxo)chromio)oxy-dioxochromium;potassium Chemical compound [K].O[Cr](=O)(=O)O[Cr](O)(=O)=O NQDAZSFONLAYGS-UHFFFAOYSA-L 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 125000004436 sodium atom Chemical group 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005118 spray pyrolysis Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 231100000701 toxic element Toxicity 0.000 description 1
- 238000004073 vulcanization Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
Abstract
本发明公开了一种制备铜锌锡硫薄膜吸收层的方法,包括以下步骤:将衬底依次用去污粉、丙酮、酒精、去离子水超声清洗、并用重镉酸钾浸泡,再用去离子水超声清洗,并吹干备用;将清洗好的衬底放入磁控溅射系统沉积1μm的多层钼背电极;以Cu‑Sn合金靶和ZnS靶共溅射,预置层厚度设计为600~800nm,原子比例设计为:Cu/Zn+Sn=0.58;Zn/Sn=1.47;将制备好的预制层在氮气低温热处理,随后在高温硫化处理,自然冷却后得到铜锌锡硫薄膜吸收层。相比于传统的多靶分步溅射优点在于:只需Cu‑Sn合金靶和ZnS靶一步共溅射制备预置层,后将预置层硫化得到铜锌锡硫薄膜吸收层。
Description
技术领域
本发明涉及一种铜锌锡硫薄膜吸收层的制备方法,用于制备薄膜太阳电池吸收层,属于光电材料新能源技术领域。
背景技术
目前,无毒、环境友好和原材料丰富的薄膜材料成为光伏领域的研究热点。基于Cu(In,Ga)Se2(CIGS)和CdTe的薄膜太阳电池虽然已经商业化,但由于组成元素中Se和Cd有毒,而In、Ga和Te属于稀缺元素,在自然界中的含量分别为In: 0.05ppm, Ga: 0.04ppm,Te: 0.009ppm,基于此制约着他们进一步大规模的生产。而对于新型四元化合物半导体Cu2ZnSnS4(CZTS),组成CZTS的四种素中不仅不含有毒元素和稀贵元素,而且四中元素在自然界中的含量很丰富,Cu: 50ppm, Zn: 75ppm, Sn: 2.2ppm, S: 260ppm,相对于In、Ga和Te非常丰富,且Zn、Sn和S的价格远远低于Ga和Se等元素。CZTS具有稳定的锌黄锡矿结构,是一种Ⅰ2-Ⅱ-Ⅳ-Ⅵ4族p型半导体材料,它以锡和锌替代铜铟镓硒中的镓和铟,以硫替代硒而构成。作为直接带隙半导体材料CZTS的禁带宽度为1.4~1.5 eV,接近单节太阳电池所需的最佳带隙宽度(1.45 eV),此外,该材料的吸收系数大于104 cm-1。基于此,CZTS薄膜的太阳电池其理论效率可达32.2 %,是一种有替代Cu(In,Ga)Se2(CIGS)和CdTe的新型薄膜太阳电池。
目前制备CZTS薄膜的方法主要有磁控溅射法,热蒸发法,脉冲激光沉积,溶胶凝胶法,电化学法,喷雾热解法,旋涂法等。而基于磁控溅射化合物靶制备CZTS的相对较少,2013年日本丰田研发中心分步溅射ZnS-Sn-Cu后在H2S气氛下硫化制备出7.6 %的纯CZTS薄膜太阳电池,7.6 %的效率也是目前磁控溅射纯CZTS薄膜太阳电池之最。而世界纪录纯的CZTS薄膜吸收层的太阳电池的效率为8.4%,由IBM用共蒸发法制备,同时IBM用涂覆法制备的基于CZTSSe薄膜吸收层的太阳电池效率达到12.6%,也为世界之最,虽然如此,基于CZTS薄膜吸收层的太阳电池效率距离32.2 %的理论效率还有很大的差距。本发明简化工艺步骤、降低生产成本、制备出成分可控的铜锌锡硫薄膜吸收层,且易于大规模生产,有利于该材料在薄膜太阳能电池工业中的推广与应用。
发明内容
有鉴于现有技术的上述缺陷,本发明所要解决的技术问题是提供一种工艺简便、成分可控、工艺流程短和可重现性好的制备方法,制备出贫铜富锌的铜锌锡硫薄膜吸收层符合高效率太阳能电池的要求。
本发明所涉及的一种铜锌锡硫薄膜吸收层的制备方法按以下步骤实施:
(1)衬底清洗:将钠钙玻璃依次用去污粉、丙酮、酒精、去离子水超声清洗、并用重铬酸钾溶液浸泡30~60min后,再用去离子水超声清洗浸泡过重铬酸钾溶液的钠钙玻璃,并用氮气吹干备用;
(2)将清洗好的钠钙玻璃放入磁控溅射系统里抽真空后升温至100~150℃烘烤30~60min,随后在钠钙玻璃上沉积1μm的多层钼背电极薄膜;
(3)铜锌锡硫预置层的制备:利用磁控溅射系统,采用射频磁控溅射技术以Cu-Zn合金靶和二元ZnS化合物靶进行共溅射,沉积600~800nm的铜锌锡硫薄膜预置层;
(4)铜锌锡硫薄膜吸收层的制备:将步骤(3)所制备铜锌锡硫薄膜预制层在氮气或氩气保护下260℃热处理30min,将其与硫粉一起放入石墨舟,然后将石墨舟放入硫化炉中,以 20 ~30℃ /min 升温速率加热硫化炉,从室温升到 560 ~ 580℃,维持 20~30 分钟,自然冷却至室温后得到铜锌锡硫薄膜吸收层。
本发明采用合金靶和化合物靶射频共溅射制备铜锌锡硫薄膜吸收层的方法中如步骤(3)所述的Cu-Sn合金靶中Cu与Sn的原子比为1.8~1.9。
本发明采用Cu-Sn合金靶和二元ZnS化合物靶射频共溅射制备铜锌锡硫薄膜吸收层的方法中如步骤(3)所述,预置层设计厚度为600~800nm,Cu、Zn和Sn的摩尔原子比例设计为:Cu/Zn+Sn=0.58;Zn/Sn=1.47;
本发明采用合金靶和化合物靶射频共溅射制备铜锌锡硫薄膜吸收层的方法中如步骤(4)所述,铜锌锡硫薄膜预制层在氮气或氩气保护下260℃热处理30min,随后将热处理过的预置层与硫粉一起放入石墨舟,最后将石墨舟放入硫化炉中,以 20~30℃ /min 升温速率加热硫化炉,从室温升到 560 ~ 580℃,维持 20~30 分钟,自然冷却至室温后得到铜锌锡硫薄膜吸收层。
附图说明
图1为实施例1和例2所制备的铜锌锡硫薄膜吸收层的XRD图;
图2为实施例1和例2所制备的铜锌锡硫薄膜吸收层的Raman图;
图3为实施例1和例2所制备的铜锌锡硫薄膜吸收层的SEM图。
表一
实施例 | Cu(at%) | Zn(at%) | Sn(at%) | S(at%) | Cu/(Zn+Sn) | Zn/Sn |
1 | 22.85 | 13.79 | 11.85 | 51.51 | 0.89 | 1.16 |
2 | 21.96 | 13.42 | 12.78 | 51.84 | 0.84 | 1.05 |
具体实施方式
实施例1
(1)衬底清洗:将钠钙玻璃依次用去污粉、丙酮、酒精、去离子水超声清洗、重铬酸钾溶液浸泡40min,再用去离子水超声清洗浸泡过重铬酸钾溶液的钠钙玻璃,并用氮气吹干备用;
(2)将清洗好的钠钙玻璃放入磁控溅射系统里升温至150℃烘烤30min,钼靶作为靶材进行直流溅射,本底真空为5.0*10-4pa,衬底温度为160℃,起辉气压为1.6pa,功率为180W,在氩气为1.6pa时溅射15min,1.0Pa 时溅射20min,随后调节氩气为0.3pa溅射45min,按上述要求操作在钠钙玻璃上得到1μm的多层钼背电极薄膜,最后将温度升至220℃对Mo背电极进行烘烤30min;目的是让钠钙玻璃中的一部分钠原子扩散进入Mo层中。
(3)铜锌锡硫薄膜预置层的制备:以Cu-Sn合金靶(Cu和Sn原子比为1.8~1.9)和二元ZnS化合物靶作为靶材进行射频共溅射,溅射功率分别为80W和60W,本底真空为5.0*10- 4pa,衬底温度为160℃,起辉气压为1.6pa,工作压强为0.3pa,溅射时间为90min,样品台转速为7转每分钟,按上述要求操作在步骤(2)的基础上得到 600nm的铜锌锡硫薄膜预置层。
(4)铜锌锡硫薄膜吸收层的制备:将步骤3)所制备的铜锌锡硫薄膜预制层在氮气或氩气保护下260℃低温热处理30min,随后将热处理过的预置层与0.5g硫粉一起放入石墨舟,最后将石墨舟放入硫化炉中,在氮气保护下以20℃/min从室温升至580℃进行30min的高温硫化处理,自然冷却至室温将样品取出得到铜锌锡硫薄膜吸收层。
实施例2
(1)衬底清洗:将钠钙玻璃依次用去污粉、丙酮、酒精、去离子水超声清洗,并用重铬酸钾溶液浸泡40min,再用去离子水超声清洗浸泡过重铬酸钾溶液的钠钙玻璃,并用氮气吹干备用;
(2)将清洗好的钠钙玻璃放入磁控溅射系统里升温至150℃烘烤30min,钼靶作为靶材进行直流溅射,本底真空为5.0*10-4pa,衬底温度为160℃,起辉气压为1.6pa,功率为180W,在氩气为1.6pa时溅射15min,1.0Pa 时溅射20min,随后调节氩气为0.3pa溅射45min,按上述要求操作在钠钙玻璃上得到1μm的多层钼背电极薄膜,最后将温度升至220℃将Mo背电极烘烤30min;
(3)铜锌锡硫薄膜预置层的制备:以Cu-Sn合金靶(Cu和Sn原子比为1.8:1.2)和二元ZnS化合物靶作为靶材进行射频共溅射,溅射功率分别为80W和60W,本底真空为5.0*10- 4pa,衬底温度为160℃,起辉气压为1.6pa,工作压强为0.3pa,溅射时间为90min,样品台转速为7转每分钟,按上述要求操作在步骤(2)的基础上得到 600nm的铜锌锡硫薄膜预置层。
(4)铜锌锡硫薄膜吸收层的制备:将步骤3)所制备的铜锌锡硫薄预置层与0.5g硫粉一起放入石墨舟,最后将石墨舟放入硫化炉中,在氮气保护下以20℃/min从室温升至580℃进行30min的高温硫化处理,自然冷却至室温将样品取出得到铜锌锡硫薄膜吸收层。
Claims (2)
1.合金靶与硫化物共溅射制备铜锌锡硫薄膜吸收层的方法,其特征在于,包括以下步骤:
1)衬底清洗:将钠钙玻璃依次用去污粉、丙酮、酒精、去离子水超声清洗、重铬酸钾溶液浸泡30~60min,再用去离子水超声清洗浸泡过重铬酸钾溶液的钠钙玻璃,并用氮气吹干备用;
2)将清洗好的钠钙玻璃放入磁控溅射系统里升温至100~150℃烘烤30~60min,随后在钠钙玻璃上沉积1μm的多层钼背电极薄膜;
3)铜锌锡硫薄膜预制层的制备:利用磁控溅射系统,以Cu-Sn合金靶和ZnS化合物靶进行射频共溅射,沉积600~800nm的铜锌锡硫薄膜预制层;
4)铜锌锡硫薄膜吸收层的制备:将步骤3)所制备的铜锌锡硫薄膜预制层在氮气或氩气保护下260℃热处理30min,随后将热处理过的预置层与硫粉一起放入石墨舟,最后将石墨舟放入硫化炉中,以20-30℃/min升温速率加热硫化炉,从室温升到560-580℃,维持20-30分钟,自然冷却至室温后得到铜锌锡硫薄膜吸收层;
所述的Cu-Sn合金靶中Cu与Sn的原子比为1.8~1.9。
2.如权利要求1所述的合金靶与硫化物共溅射制备铜锌锡硫薄膜吸收层的方法,其特征在于所述的铜锌锡硫薄膜预制层中,所述的铜锌锡硫薄膜预置层厚度设计为600~800nm;所述的铜锌锡硫薄膜预制层中Cu、Zn和Sn摩尔原子比设计为:Cu/Zn+Sn=0.58;Zn/Sn=1.47。
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