CN106482758B - 旋转角度检测器 - Google Patents

旋转角度检测器 Download PDF

Info

Publication number
CN106482758B
CN106482758B CN201610765401.5A CN201610765401A CN106482758B CN 106482758 B CN106482758 B CN 106482758B CN 201610765401 A CN201610765401 A CN 201610765401A CN 106482758 B CN106482758 B CN 106482758B
Authority
CN
China
Prior art keywords
signal
rotation angle
frequency
calculates
rotary shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610765401.5A
Other languages
English (en)
Other versions
CN106482758A (zh
Inventor
西冈辉
尾高俊
尾高俊一
今井圭介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of CN106482758A publication Critical patent/CN106482758A/zh
Application granted granted Critical
Publication of CN106482758B publication Critical patent/CN106482758B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24457—Failure detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24457—Failure detection
    • G01D5/24461—Failure detection by redundancy or plausibility
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)

Abstract

提供一种旋转角度检测器。本发明的旋转角度检测器具备：旋转体，其包含用于检测旋转轴的旋转角度的轨迹部；探测部，其与轨迹部相对应地配置；旋转角度计算部，其基于由探测部生成的信号来计算旋转轴的旋转角度；转速计算部，其基于信号来计算旋转轴的转速；以及异常检测部，其基于信号来探测异常，其中，异常检测部具有：频率分析部，其计算信号的频率特性；存储部，其存储旋转体每旋转一圈的信号的个数；信号频率计算部，其计算将该存储部中存储的信号的个数乘以由转速计算部计算出的转速而得到的信号频率；以及判定部，其在频率特性中存在信号频率以上的高次成分的情况下检测为检测器的异常。

Description

旋转角度检测器
技术领域
本发明涉及一种旋转角度检测器，特别涉及一种具有根据信号的频率特性来探测异物侵入的功能的旋转角度检测器。
背景技术
为了测定电动机、平台的输出轴的角度，而使用具有多个信号轨迹的光学式检测器、磁式检测器。作为探测这些检测器的故障的方法，已知在各信号的振幅低于指定的阈值时探测为检测器的故障(警告)的方法(例如，日本特开2010-266260号公报)、在相位不同的信号的电压值相同且此时的电角度与预先存储的“正常时的电角度”不同时探测为检测器的故障(警告)的方法(例如，日本特开2005-147733号公报)。
然而，在这些方式中，只有在搭载有检测器的电动机、机床停止动作之后，才能发现异常。因此，若在发现异常之后准备维护部件，则机床的修复花费时间，因此也存在预先准备维护部件的情况。然而，在该情况下，需要大量的工时、收纳场所来管理维护部件。
作为解决上述问题的手段，已知如下方法：针对各信号的振幅设置多个阈值来检测异常，以在检测器完全故障而停止动作之前预知发生异常的可能性(例如，日本特开平6-66594号公报)。然而，作为检测器的故障原因，存在线缆的断线、电噪声、切削液/润滑油或切屑侵入检测器的异物侵入等各种各样的情况，难以确定故障原因，从而难以实施适当的维护。
发明内容
如上述那样，在现有技术中，难以区分故障原因，难以实施适当的维护而使得有时在维护后再次发生故障。因此，为了区分故障，需要提前发现故障。特别是，关于向检测器的异物侵入，例如存在引发由切削液导致的部件的腐食、由切屑导致的部件的破损之类的致命的故障的危险性，因此提前发现故障是很重要的。
本发明的一个实施例所涉及的旋转角度检测器的特征在于，具备：旋转体，其包含用于检测旋转轴的旋转角度的轨迹部；探测部，其与轨迹部相对应地配置；旋转角度计算部，其基于由探测部生成的信号来计算旋转轴的旋转角度；转速计算部，其基于信号来计算旋转轴的转速；以及异常检测部，其基于信号来探测异常，其中，异常检测部具备：频率分析部，其计算信号的频率特性；存储部，其存储从轨迹部生成的旋转体每旋转一圈的信号的个数；信号频率计算部，其计算将该存储部中存储的信号的个数乘以由转速计算部计算出的转速而得到的信号频率；以及判定部，其在频率特性中存在信号频率以上的高次成分的情况下，检测为检测器的异常。
附图说明
通过与附图相关联的以下的实施方式的说明，本发明的目的、特征以及优点会变得更明确。在该附图中，
图1是本发明的实施例所涉及的旋转角度检测器的结构图，
图2是从本发明的实施例所涉及的旋转角度检测器中的探测部输出的A相、B相以及Z相的信号波形图，
图3是表示从本发明的实施例所涉及的旋转角度检测器中的探测部输出的输出信号的频率成分的大小与频率的关系的图，以及
图4是用于说明本发明的实施例所涉及的旋转角度检测器的动作过程的流程图。
具体实施方式
下面，参照附图并使用附图来说明本发明所涉及的旋转角度检测器。在图1中示出本发明的实施例所涉及的旋转角度检测器的结构图。本发明的实施例所涉及的旋转角度检测器100具有旋转体1、探测部2、旋转角度计算部3、转速计算部4以及异常检测部5。并且，异常检测部5具有频率分析部6、存储部7、信号频率计算部8以及判定部9。
旋转体1包含用于检测旋转轴C的旋转角度的轨迹部10。旋转体1设置于电动机等的轴30，以旋转轴C为中心进行旋转。轨迹部10具有Z相用轨迹11、A相用轨迹12以及B相用轨迹13。在A相用轨迹12和B相用轨迹13上，分别以相等的间距且在相位在空间上错开90度的位置处连续地形成有A相图案的放射状的狭缝和B相图案的放射状的狭缝来作为检测图案。在Z相用轨迹11上，以不相等的间距形成有Z相图案的狭缝。并且，以在旋转体1上附着有切削液等异物50的情况为例来进行说明。
在旋转体1的下部设置有包括LED等的发光部40。发光部40朝向旋转体1照射光L0。
探测部2与轨迹部10相对应地配置。探测部2具有包括光电晶体管、光电二极管等受光元件的检测元件21～23。21是Z相用检测元件，检测从发光部40照射的光L0中的、透过设置于Z相用轨迹11的狭缝的光L1。包含与检测出的光L1有关的信息的Z相信号被输出到旋转角度计算部3。22是A相用检测元件，检测从发光部40照射的光L0中的、透过设置于A相用轨迹12的狭缝的光L2。包含与检测出的光L2有关的信息的A相信号被输出到旋转角度计算部3、转速计算部4以及频率分析部6。23是B相用检测元件，检测从发光部40照射的光L0中的、透过设置于B相用轨迹13的狭缝的光L3。包含与检测出的光L3有关的信息的B相信号被输出到旋转角度计算部3、转速计算部4以及频率分析部6。
旋转角度计算部3基于由探测部2生成的信号来计算旋转轴C的旋转角度。在此，A相信号与B相信号具有90度的相位差。因而，旋转角度计算部3基于A相信号和B相信号来计算旋转体1的旋转方向和旋转量(角度)。
转速计算部4检测A相信号和B相信号的频率来计算旋转轴C的转速。
异常检测部5基于A相信号和B相信号，如以下那样探测旋转角度检测器100的异常。首先，频率分析部6计算A相信号和B相信号的频率特性。作为进行频率分析的手段，例如能够进行FFT分析，但是不限于此。
存储部7存储从轨迹部10生成的旋转体1每旋转一圈的信号的个数。旋转体1旋转一圈的时间如图2的下部所示那样作为相邻的Z相信号之间的时间而被求出。在图2示出的例子中，一个Z相信号在时刻t1出现，下一个Z相信号在时刻t2出现，因此以t2-t1求出旋转体1旋转一圈的时间。然后，对在时刻t1与t2之间出现的A相信号或B相信号的个数进行计数，并将计数的结果存储到存储部7中。
信号频率计算部8计算将存储部7中存储的A相信号或B相信号的个数乘以由转速计算部4计算出的转速而得到的信号频率。例如，如图3所示，计算出信号频率为f1。
然后，判定部9判断在频率特性中是否存在计算出的信号频率f1以上的高次成分。例如，在图2的上部的表示A相信号或B相信号的随时间的变化的曲线图中，在时刻t0，观测到由于在狭缝亮部附着有异物而引起的曲线的变形(虚线部分)。在由于异物所引起的曲线的变形而对A相信号或B相信号进行FFT分析、结果是在信号频率f1以上的频率f2处观测到高次成分的情况下，检测为异常。
也可以是，在判定部9检测出异常的情况下，将判定结果输出到外部装置60。外部装置60能够基于发生了异常来发出警告。
此外，在观测到与信号频率f1相比低次的频率成分的情况下，该频率成分是由于轴30的振动、旋转体1的椭圆运动等的与异物在旋转体1上的附着不同的原因而出现的。因而，能够判断为并非在旋转体1上附着有异物。
此外，在图3中例示了附着有一个异物的情况，但是即使在附着有多个异物的情况下也能够探测异常。
接着，关于本发明的实施例所涉及的旋转角度检测器的动作过程，使用图4示出的流程图来进行说明。首先，在步骤S101中，通过对电动机等进行驱动，来使设置于电动机的轴30且包含用于检测旋转轴C的旋转角度的轨迹部10的旋转体1(参照图1)以旋转轴C为中心进行旋转。
接着，在步骤S102中，使用与轨迹部10相对应地配置的探测部2，基于从发光部40发出并透过设置于轨迹部10的A相用轨迹12和B相用轨迹13的狭缝的光L2、L3，来生成A相信号和B相信号。
接着，在步骤S103中，转速计算部4根据A相信号和B相信号计算旋转轴C的转速。
接着，在步骤S104中，信号频率计算部8计算将存储部7中预先存储的每旋转一圈的信号的个数乘以转速而得到的信号频率。
接着，在步骤S105中，频率分析部6根据A相信号和B相信号计算信号的频率特性。
接着，在步骤S106中，判定部9判定频率特性中是否存在信号频率以上的高次成分。
在频率特性中存在信号频率以上的高次成分的情况下，在步骤S107中，判定为旋转角度检测器100发生了异常。
另一方面，在频率特性中不存在信号频率以上的高次成分的情况下，在步骤S108中，判定为旋转角度检测器100正常。
如以上说明的那样，通过检测由轨迹部的狭缝数引起的频率以上的频率成分并输出警告信号，能够进行异物侵入的提前发现。此外，步骤S103～S104与步骤S105同时进行、以相反顺序进行也不存在问题。
在以上的说明中，以使用光学式的检测器来作为旋转角度检测器的情况为例进行了说明，但是在使用磁式检测器的情况下，也能够同样地实施本发明。
根据本发明的实施例所涉及的旋转角度检测器，能够在检测器发生故障之前探测出异物(切削液等)的侵入，从而能够进行检测器的预防保全。

Claims (1)

1.一种旋转角度检测器，其特征在于，具备：
旋转体，其包含用于检测旋转轴的旋转角度的轨迹部；
探测部，其与所述轨迹部相对应地配置；
旋转角度计算部，其基于由所述探测部生成的信号来计算旋转轴的旋转角度；
转速计算部，其基于所述信号来计算旋转轴的转速；以及
异常检测部，其基于所述信号来探测异常，
其中，所述异常检测部具备：
频率分析部，其计算所述信号的频率特性；
存储部，其存储从所述轨迹部生成的旋转体每旋转一圈的信号的个数；
信号频率计算部，其计算将该存储部中存储的所述信号的个数乘以由所述转速计算部计算出的所述转速而得到的信号频率；以及
判定部，其在所述频率特性中存在所述信号频率以上的高次成分的情况下检测为异常。
CN201610765401.5A 2015-08-31 2016-08-30 旋转角度检测器 Active CN106482758B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015171154A JP6193938B2 (ja) 2015-08-31 2015-08-31 信号の周波数特性から異物浸入を検知する機能を有する回転角度検出器
JP2015-171154 2015-08-31

Publications (2)

Publication Number Publication Date
CN106482758A CN106482758A (zh) 2017-03-08
CN106482758B true CN106482758B (zh) 2018-10-26

Family

ID=58010626

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610765401.5A Active CN106482758B (zh) 2015-08-31 2016-08-30 旋转角度检测器

Country Status (4)

Country Link
US (1) US10066971B2 (zh)
JP (1) JP6193938B2 (zh)
CN (1) CN106482758B (zh)
DE (1) DE102016010298B4 (zh)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633423A (en) * 1984-03-27 1986-12-30 Storage Technology Corporation Coherent error suppression in digital tachometers and the like
JPH0666594A (ja) * 1992-08-14 1994-03-08 Matsushita Electric Ind Co Ltd 位置検出器
US5302944A (en) * 1991-07-22 1994-04-12 Curtis Stephen J Method and apparatus for the monitoring of the operation of linear and rotary encoders
JPH09280891A (ja) * 1996-04-09 1997-10-31 Matsushita Electric Ind Co Ltd ロータリーエンコーダ
JP2005147733A (ja) * 2003-11-12 2005-06-09 Favess Co Ltd 異常検出装置、異常検出方法、車両用操舵装置
US7184930B2 (en) * 2002-08-30 2007-02-27 Nsk Ltd. Method and device for monitoring status of mechanical equipment and abnormality diagnosing device
CN101114171A (zh) * 2006-07-27 2008-01-30 发那科株式会社 减速器异常诊断方法及减速器异常诊断装置
JP2009063412A (ja) * 2007-09-06 2009-03-26 Koyo Electronics Ind Co Ltd ロータリエンコーダの寿命予知方法、ロータリエンコーダおよび電子制御システム
JP2010203903A (ja) * 2009-02-09 2010-09-16 Fuji Electric Systems Co Ltd 異常監視装置
CN102472769A (zh) * 2009-06-26 2012-05-23 三菱电机株式会社 检测设备
CN103308078A (zh) * 2012-03-15 2013-09-18 欧姆龙株式会社 旋转编码器以及旋转编码器的异常检测方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4400482A1 (de) * 1993-04-23 1994-10-27 Bosch Gmbh Robert Korrekturverfahren zwischen dem elektrischen Phasenwinkel und dem mechanischen Abtriebswinkel eines Schrittmotors
JP3278361B2 (ja) * 1996-10-25 2002-04-30 オークマ株式会社 光学式エンコーダ
US6029363A (en) 1998-04-03 2000-02-29 Mitutoyo Corporation Self-calibrating position transducer system and method
DE19944004A1 (de) * 1999-09-14 2001-03-15 Kostal Leopold Gmbh & Co Kg Optoelektronischer Drehwinkelsensor
JP2001116760A (ja) * 1999-10-19 2001-04-27 Nisshinbo Ind Inc パルス歯欠け検出方法及び装置
DE10041096A1 (de) * 2000-08-22 2002-03-07 Bosch Gmbh Robert Verfahren zur Korrektur von Winkelmessungen mittels wenigstens zweier Codespuren
DE102004038621B3 (de) 2004-08-09 2006-02-16 Siemens Ag Ermittlungsverfahren für ein Lagesignal
JP2007064771A (ja) * 2005-08-31 2007-03-15 Japan Servo Co Ltd エンコーダの誤差補正装置
JP5111031B2 (ja) * 2007-09-14 2012-12-26 キヤノン株式会社 変位検出方法及びモータ制御装置
JP5163963B2 (ja) 2009-05-13 2013-03-13 富士電機株式会社 異常監視装置
JP5436477B2 (ja) * 2011-03-03 2014-03-05 三菱電機株式会社 エンコーダ解析装置
US9075370B2 (en) 2011-06-30 2015-07-07 Canon Kabushiki Kaisha Color image forming apparatus
JP2013190327A (ja) * 2012-03-14 2013-09-26 Omron Corp ロータリーエンコーダの監視装置および監視方法

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633423A (en) * 1984-03-27 1986-12-30 Storage Technology Corporation Coherent error suppression in digital tachometers and the like
US5302944A (en) * 1991-07-22 1994-04-12 Curtis Stephen J Method and apparatus for the monitoring of the operation of linear and rotary encoders
JPH0666594A (ja) * 1992-08-14 1994-03-08 Matsushita Electric Ind Co Ltd 位置検出器
JPH09280891A (ja) * 1996-04-09 1997-10-31 Matsushita Electric Ind Co Ltd ロータリーエンコーダ
US7184930B2 (en) * 2002-08-30 2007-02-27 Nsk Ltd. Method and device for monitoring status of mechanical equipment and abnormality diagnosing device
JP2005147733A (ja) * 2003-11-12 2005-06-09 Favess Co Ltd 異常検出装置、異常検出方法、車両用操舵装置
CN101114171A (zh) * 2006-07-27 2008-01-30 发那科株式会社 减速器异常诊断方法及减速器异常诊断装置
JP2009063412A (ja) * 2007-09-06 2009-03-26 Koyo Electronics Ind Co Ltd ロータリエンコーダの寿命予知方法、ロータリエンコーダおよび電子制御システム
JP2010203903A (ja) * 2009-02-09 2010-09-16 Fuji Electric Systems Co Ltd 異常監視装置
CN102472769A (zh) * 2009-06-26 2012-05-23 三菱电机株式会社 检测设备
CN103308078A (zh) * 2012-03-15 2013-09-18 欧姆龙株式会社 旋转编码器以及旋转编码器的异常检测方法

Also Published As

Publication number Publication date
DE102016010298B4 (de) 2019-08-08
JP2017049062A (ja) 2017-03-09
DE102016010298A1 (de) 2017-03-02
US20170059366A1 (en) 2017-03-02
US10066971B2 (en) 2018-09-04
CN106482758A (zh) 2017-03-08
JP6193938B2 (ja) 2017-09-06

Similar Documents

Publication Publication Date Title
JP4874406B2 (ja) 軸受の診断システム
US11105712B2 (en) Integrated vibe/ODM fusion and trending analysis for prognostic health management of engine bearing
CA2010097C (en) Method and apparatus for detecting gear defects
CN105765361B (zh) 轴承监测装置和方法
US9400229B2 (en) Apparatus and method for monitoring the state of a roller bearing
US20200284690A1 (en) Abnormality diagnostic device for power transmission mechanism and abnormality diagnostic method for power transmission mechanism
JP6508017B2 (ja) 機械設備の評価方法
JP6714806B2 (ja) 状態監視装置及び状態監視方法
EP2073019A2 (en) Method and apparatus for monitoring gas turbine blades
KR102040179B1 (ko) 제조 설비의 이상 감지 및 진단 방법
JP6899109B2 (ja) 回転駆動装置における診断対象部の異常診断方法と、それに用いる異常診断装置
CN103998775A (zh) 用于确定风能源设备的转子叶片的机械损坏的方法
JP2018179735A (ja) 回転部品の異常診断方法及び異常診断装置
EP3168583A1 (en) Apparatus and method for diagnosing abnormal operation of a rotor
CN114755239B (zh) 刀片破损检测方法及系统
KR20140033743A (ko) 해양구조물의 회전체 상태진단 모니터링 시스템
CN106482758B (zh) 旋转角度检测器
US11493404B2 (en) Method and system for estimating the wear of a rotating machine including a bearing
JP4253104B2 (ja) 回転機械の異常診断方法
Zhang et al. Condition monitoring and fault detection of a compressor using signal processing techniques
JP4955316B2 (ja) エスカレーター診断装置
JP7040920B2 (ja) 軸受の状態監視装置及び異常診断方法
JP2019203753A (ja) 転がり軸受の診断方法、及び転がり軸受の診断装置
US11585718B2 (en) Method and device for imbalance detection
KR101976460B1 (ko) 모터의 보호 및 상태진단이 가능한 모터기동장치 및 이를 이용하는 수자원 관제시스템

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant