CN106435742B - 退火设备及其退火工艺 - Google Patents
退火设备及其退火工艺 Download PDFInfo
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- CN106435742B CN106435742B CN201610921638.8A CN201610921638A CN106435742B CN 106435742 B CN106435742 B CN 106435742B CN 201610921638 A CN201610921638 A CN 201610921638A CN 106435742 B CN106435742 B CN 106435742B
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- insulated cavity
- heat
- protective element
- heated protective
- pedestal
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
Abstract
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CN201610921638.8A CN106435742B (zh) | 2016-10-21 | 2016-10-21 | 退火设备及其退火工艺 |
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CN201610921638.8A CN106435742B (zh) | 2016-10-21 | 2016-10-21 | 退火设备及其退火工艺 |
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CN106435742A CN106435742A (zh) | 2017-02-22 |
CN106435742B true CN106435742B (zh) | 2019-06-28 |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111463154B (zh) * | 2020-05-18 | 2023-02-14 | 浙江大学 | 一种高温臭氧氧化退火装置 |
Citations (11)
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CN200996030Y (zh) * | 2006-11-29 | 2007-12-26 | 中国第一重型机械集团公司 | 大型立式单侧开合热处理炉 |
CN201016120Y (zh) * | 2007-02-02 | 2008-02-06 | 厦门钨业股份有限公司 | 连续式三室气冷真空退火炉 |
CN201359446Y (zh) * | 2008-12-31 | 2009-12-09 | 北京七星华创电子股份有限公司 | 300mm立式氧化炉石英舟升降装置 |
CN101907397A (zh) * | 2010-09-21 | 2010-12-08 | 山东大学 | 可移动对开垂直管式气氛炉装置 |
CN201962403U (zh) * | 2011-01-11 | 2011-09-07 | 西安华恒新能科技有限公司 | 移动式出料多晶硅铸锭炉 |
CN103000496A (zh) * | 2013-01-08 | 2013-03-27 | 河南诺巴迪材料科技有限公司 | 快速升降温退火炉 |
CN103014257A (zh) * | 2012-12-12 | 2013-04-03 | 肇庆宏旺金属实业有限公司 | 连续式退火炉 |
CN203231642U (zh) * | 2013-04-25 | 2013-10-09 | 安徽贝意克设备技术有限公司 | 一种滑轨式快速升降温炉 |
CN103436682A (zh) * | 2013-09-09 | 2013-12-11 | 江苏华旺科技有限公司 | 一种多规格管式连续退火炉的智能控制系统和方法 |
CN205313629U (zh) * | 2016-01-20 | 2016-06-15 | 郭金锋 | 一种用于金属表面热处理的连续退火炉 |
CN206204484U (zh) * | 2016-10-21 | 2017-05-31 | 珠海鼎泰芯源晶体有限公司 | 退火设备 |
-
2016
- 2016-10-21 CN CN201610921638.8A patent/CN106435742B/zh active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN200996030Y (zh) * | 2006-11-29 | 2007-12-26 | 中国第一重型机械集团公司 | 大型立式单侧开合热处理炉 |
CN201016120Y (zh) * | 2007-02-02 | 2008-02-06 | 厦门钨业股份有限公司 | 连续式三室气冷真空退火炉 |
CN201359446Y (zh) * | 2008-12-31 | 2009-12-09 | 北京七星华创电子股份有限公司 | 300mm立式氧化炉石英舟升降装置 |
CN101907397A (zh) * | 2010-09-21 | 2010-12-08 | 山东大学 | 可移动对开垂直管式气氛炉装置 |
CN201962403U (zh) * | 2011-01-11 | 2011-09-07 | 西安华恒新能科技有限公司 | 移动式出料多晶硅铸锭炉 |
CN103014257A (zh) * | 2012-12-12 | 2013-04-03 | 肇庆宏旺金属实业有限公司 | 连续式退火炉 |
CN103000496A (zh) * | 2013-01-08 | 2013-03-27 | 河南诺巴迪材料科技有限公司 | 快速升降温退火炉 |
CN203231642U (zh) * | 2013-04-25 | 2013-10-09 | 安徽贝意克设备技术有限公司 | 一种滑轨式快速升降温炉 |
CN103436682A (zh) * | 2013-09-09 | 2013-12-11 | 江苏华旺科技有限公司 | 一种多规格管式连续退火炉的智能控制系统和方法 |
CN205313629U (zh) * | 2016-01-20 | 2016-06-15 | 郭金锋 | 一种用于金属表面热处理的连续退火炉 |
CN206204484U (zh) * | 2016-10-21 | 2017-05-31 | 珠海鼎泰芯源晶体有限公司 | 退火设备 |
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Effective date of registration: 20170407 Address after: 519085 Guangdong province Zhuhai city road two Jinding Industrial Area high-tech zone on the south side of A1 building, Rui Applicant after: Zhuhai Ding Tai Xinyuan crystal Ltd Address before: 100080 Haidian District street, Haidian, building B, block 10, level 340, level 3, Applicant before: Beijing Ding Tai Xinyuan Technology Development Co. Ltd. |
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Effective date of registration: 20170808 Address after: 100080 Haidian District street, Haidian, building B, block 10, level 340, level 3, Applicant after: Beijing Ding Tai Xinyuan Technology Development Co. Ltd. Address before: 519085 Guangdong province Zhuhai city road two Jinding Industrial Area high-tech zone on the south side of A1 building, Rui Applicant before: Zhuhai Ding Tai Xinyuan crystal Ltd |
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Effective date of registration: 20170823 Address after: 519085 Guangdong province Zhuhai city road two Jinding Industrial Area high-tech zone on the south side of A1 building, Rui Applicant after: Zhuhai Ding Tai Xinyuan crystal Ltd Address before: 100080 Haidian District street, Haidian, building B, block 10, level 340, level 3, Applicant before: Beijing Ding Tai Xinyuan Technology Development Co. Ltd. |
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