CN106313353A - Online monitoring device and method for wire bow of wire mesh of multi-wire sawing machine - Google Patents
Online monitoring device and method for wire bow of wire mesh of multi-wire sawing machine Download PDFInfo
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- CN106313353A CN106313353A CN201510383966.2A CN201510383966A CN106313353A CN 106313353 A CN106313353 A CN 106313353A CN 201510383966 A CN201510383966 A CN 201510383966A CN 106313353 A CN106313353 A CN 106313353A
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Abstract
The invention discloses an online monitoring device and method for a wire bow of a wire mesh of a multi-wire sawing machine. The wire bow is an important factor influencing the quality of slices of the multi-wire sawing machine, but cutting areas are severe in environment and lack effective means for conducting online monitoring on the wire bow. The monitoring device and method involve a distance sensor, a shell, a protection gas inlet pipe, a support and a wire bow display module, the distance by which the mortar plane on the wire mesh deviates from the balance position during processing can be monitored online, and therefore the angle of the wire bow of the wire mesh is calculated. By means of the online monitoring device and method, online monitoring of the wire bow in the sawing process is achieved, and important application value for improving the slice quality and evaporating adjustment process parameters is achieved.
Description
Technical field
The present invention relates to a kind of multi-line cutting machine gauze line bow on-Line Monitor Device and method, during realizing multi-wire saw, the on-line monitoring of gauze line bow, belongs to quasiconductor hard brittle material slice processing field.
Background technology
Crystalline material, such as, include but not limited to that monocrystal silicon, polysilicon, sapphire etc. are the important backing materials such as IC chip, solar battery sheet and light emitting diode, its thin slice to be processed into, and ensures the highest size and dimension precision.Because the feature that crystalline material hardness is high, fragility is big, slice processing difficulty is big.At present, the slice processing major part of substrate slice uses multi-line cutting machine to be processed.Multi-line cutting machine is the new types of cutting devices of a kind of high-efficiency high-precision, it is called for short scroll saw, moved back and forth by high speed wiry, the machining area mortar being mixed into abrasive material being brought into crystal ingot is ground, crystal ingot is fixed on the workbench of wire cutting machine to lower feeding, and crystal ingot is progressively cut into the thin slice of hundreds of thousands of simultaneously.Multi-line cutting machine is high with its production efficiency, precision height is widely used in crystalline material slice processing.
In the multi-wire saw course of processing, because its cutting parameter once sets, whole process is uncontrollable, once occurs that parameter arranges the unreasonable broken string etc. that is easily caused and extremely causes scrapping of whole crystal ingot.The key factor that broken string occurs is in line cutting process, and excessive or mortar the cutting power of table feed speed is low, causes line bow excessive, and the tension force that line bears causes greatly disconnection fault.Line bow angular dimension is also the key factor affecting cutting force, mortar cutting power, directly influences the quality of section.But, the mortar of mortar spray pipe ejection forms plane the most on the net and is then entered during cutting area cuts by tape, and mortar is splash in cutting chamber, and the environment of whole cutting area is the most severe.And will be in such rugged environment, sensor often causes because being stained with mortar losing efficacy.Free abrasive particle multi-wire saw lacks effective online line bow monitoring device and method, makes cutting process be difficult to effectively and controls, directly affects chipping qualities and even occur that broken string causes heavy losses.
Summary of the invention
The present invention is directed in the multi-wire saw course of processing because cutting area bad environments line bow is difficult to monitor in real time affects the problem that chipping qualities even crystal ingot is scrapped because of broken string, it is provided that a kind of multi-line cutting machine gauze line bow on-Line Monitor Device and method.
Realize purpose of the present invention technical scheme as follows: a kind of multi-line cutting machine gauze line bow on-Line Monitor Device, it is structurally characterized in that, including range sensor；Described range sensor is fixed on enclosure by locking nut；Described shell is connected with protection gas air inlet pipe；The detectable signal of described distance sensor signal sending and receiving end correspond to move the plane mortar formed on gauze；Described mortar is sprayed by mortar spray pipe；Described range sensor one end runs wires to line bow display module.
Described shell is connected with retainer ring, and described retainer ring is connected with horizontal support bar；Described horizontal support bar is through the hole on contiguous block；Described contiguous block is connected to vertical support bar；Described vertical support bar is fixed on magnetic and fixes on seat；Described magnetic is fixed seat magnetic force and is inhaled on cutting on line machine body.
Described protection gas air inlet pipe is connected with wire cutting machine protection source of the gas, and its air pressure is 0.1-0.16 megapascal (MPa).
Described shell upper end is equipped with rubber blanket；Described casing ends has the hole of detectable signal process；The protective gas that described protection gas air inlet pipe enters flows out with certain speed in the hole from shell, enters shell for the mortar preventing cutting area from splashing, is bonded on the probe of range sensor.
Described electric wire passes from the centre bore of rubber blanket, reaches the effect preventing gas leakage and mortar from entering.
Described gauze moves with the speed of 8-30 meter per second under the rotarily driving of guide wheel；Described gauze deviates horizontal level under the effect downwards of cutting crystal ingot and forms an alignment bow；Described cutting crystal ingot is connected with crystal holder by glue；Described crystal holder is fixed in the line cut station of wire cutting machine；Described line cut station with the speed of 0.1-1 mm/min to lower feeding.
Described range sensor is 100-400 millimeter with the plane mortar distance of the formation on gauze；Described range sensor detects the size of gauze deviation horizontal level.
Use between described rubber blanket and shell, electric wire and closely cooperate.
Described contiguous block can rotate around vertical support bar and move up and down, and uses lock-screw from side surface locking；The distance stretched out of described contiguous block adjustable horizontal support bar, uses lock-screw side surface locking；Range sensor position in gauze can be adjusted by described horizontal support bar, vertical support bar, contiguous block.
One multi-line cutting machine gauze line of the present invention bow on-Line Monitor Device online line bow monitoring method, comprises the steps:
1) workpiece is installed: cutting crystal ingot sticks with glue to be tied in crystal holder, and integral installation is in line cut station；
2) multi-line cutting machine gauze line bow on-Line Monitor Device is installed: ensure that the center of shell is perpendicular to gauze; range sensor to the distance of gauze in sensor tolerance band; protection gas air inlet pipe connects the protection source of the gas of cutting; measurement housing center is to guide wheel central axis distance L, and is input to by L-value in line bow display module；
3) reference zero is set: when setting does not starts to cut, the distance of the horizontal mortar that range sensor to horizontal line is online is reference zero；
4) detection offset distance: start cutting, gauze is under cutting crystal ingot effect, and at an angle, on range sensor detection gauze, screed offsets equilbrium position distance D to shape；
5) according to trigonometric function relation, line bow angle is calculated: angle, θ is
(1)；
6) real-time angles of display θ value: line bow display module real-time angles of display value.
A kind of multi-line cutting machine gauze line that the present invention provides bends on-Line Monitor Device and method.By the introducing of protective gas, make the mortar of splashing will not enter into inside device under the effect of protection gas, make sensor adapt to rugged environment in cutting process, thus realize the monitoring of online line bow.If line bow angle is excessive, can shut down in time and adjust the generation that parameter prevents from breaking；Adjust cutting technique after whole process center line bow can be recorded, make line bow fluctuate to ensure cut quality in a little scope, for the data support that the Reasonable adjustment offer of cutting parameter is necessary.
Accompanying drawing explanation
Fig. 1 is apparatus of the present invention sectional views；
Fig. 2 is apparatus of the present invention structure charts；
Fig. 3 is apparatus of the present invention schematic diagrams.
In the drawings:
1-guide wheel；2-mortar；3-mortar spray pipe；4-crystal holder；5-line cut station；6-cuts crystal ingot；7-gauze；8-retainer ring；9-shell；10-electric wire；11-line bow display module；12-wire cutting machine body；13-magnetic fixes seat；The vertical support bar of 14-；15-horizontal support bar；16-contiguous block；17-lock-screw；18-rubber blanket；19-range sensor；20-locking nut；21-glue；22-protects gas air inlet pipe；23-detectable signal.
Detailed description of the invention
Below in conjunction with the accompanying drawings and embodiment, the present invention is described in detail.It is emphasized that following example are merely to illustrate the application, but scope of the present application is not defined.This embodiment is the section Example of the application and not all embodiments, all other embodiments that those of ordinary skill in the art are obtained under not making creative work premise, broadly falls into the scope of the application protection.Fig. 1 is invention device sectional view, and Fig. 2 is invention structure drawing of device, and Fig. 3 is that invention device line bends monitoring principle figure.
A kind of multi-line cutting machine gauze line bow on-Line Monitor Device, including range sensor 19；It is internal that described range sensor 19 is fixed on shell 9 by locking nut 20；Described shell 9 is connected with protection gas air inlet pipe 22；The detectable signal 23 of described range sensor 19 signal transmitting and receiving end correspond to move the plane mortar 2 formed on gauze 7；Described range sensor 19 one end electric wire 10 is connected to line bow display module 11.
Described shell 9 is connected with retainer ring 8, and described retainer ring 8 is connected with horizontal support bar 15；Described horizontal support bar 15 is through the hole on contiguous block 16；Described contiguous block 16 is connected to vertical support bar 14；Described vertical support bar 14 fixes seat 13 with magnetic；Described magnetic is fixed seat 13 magnetic force and is inhaled on cutting on line machine body 12.
Described protection gas air inlet pipe 22 is connected with wire cutting machine protection source of the gas, and its air pressure is 0.1-0.16 megapascal (MPa).
Described shell 9 upper end is equipped with rubber blanket 18；Described shell 9 end has the hole of detectable signal 23 process；The protective gas that described protection gas air inlet pipe 22 enters flows out with certain speed in the hole from shell 9, and it is internal that effluent air stops the mortar splashed to enter shell 9, prevents from being bonded on range sensor 19, makes sensor can not send and receive detectable signal 23.
Described electric wire 10 passes from the centre bore of rubber blanket 18；Use between described rubber blanket 18 and shell 9, electric wire 10 and closely cooperate, prevent mortar from entering and the spilling of protective gas.
Described gauze 7 is with the speed motion of 8-30 meter per second under the rotarily driving of guide wheel 1, and the mortar 2 that the gauze 7 of motion makes mortar spray pipe 3 spray is formed and covers the plane of gauze；Described gauze 7 deviates horizontal level under the effect downwards of cutting crystal ingot 6 and forms an alignment bow；Described cutting crystal ingot 6 is connected with crystal holder 4 by glue 21；Described crystal holder is fixed in the line cut station 5 of wire cutting machine；Described line cut station 5 with the speed of 0.1-1 mm/min to lower feeding.
The plane mortar 2 of described range sensor 19 and the formation on gauze 7 is apart from for 100-400 millimeter；Described range sensor 19 can detect gauze 7 and deviate value D of horizontal level.
Described contiguous block 16 can rotate around vertical support bar 14 and move up and down, and uses lock-screw 17 from side surface locking；The distance stretched out of described contiguous block 16 adjustable horizontal support bar 15, uses lock-screw 17 side surface locking；Hole on described contiguous block 16 and horizontal support bar 15 and vertical support bar 14 use matched in clearance, the convenient adjustment range sensor 19 relative position in gauze 7.
Below as a example by certain type multi-line cutting machine, in conjunction with apparatus of the present invention and method, introduce concrete step:
1) workpiece is installed: cutting crystal ingot 6 glue 21 is bonded in crystal holder 4, and integral installation is in line cut station 5；
2) multi-line cutting machine gauze line bow on-Line Monitor Device is installed: ensure that the center of shell 9 is perpendicular to gauze 7; range sensor 19 arrives the distance of gauze in sensor tolerance band; the protection source of the gas of protection gas air inlet pipe 22 connecting line cutting machine; measurement shell 9 center is to guide wheel central axis distance L, and L is 150 millimeters；As it is shown on figure 3, and value is input to line bow display module 11 in initial value set in；
3) reference zero is set: when setting does not starts to cut, on range sensor 19 to horizontal gauze 7, the distance of plane mortar 2 is reference zero；
4) detection offset distance: after cutting starts, gauze 7 is under cutting crystal ingot 6 effect, and at an angle, range sensor 19 detects planar offset equilbrium position distance D that on gauze 7, mortar 2 is formed to shape, and it is 5 millimeters that D measures distance；
5) as it is shown on figure 3, according to formula (1), calculate line bow angle, θ: gauze 7 angle, θ is
；
6) real-time angles of display θ value: the line bow display real-time angles of display value of module 11 is 1.91 degree.
In one multi-line cutting machine gauze line of the present invention bow on-Line Monitor Device and method, described range sensor 19 can use ultrasonic distance sensor or laser distance sensor；Ultrasonic distance sensor can select model to be S18UUA, and it is LKH157 that laser distance sensor may select model；In described embodiment, multi-line cutting machine is the online line bow monitoring of the multi-line cutting machine of equally applicable three or four guide wheels of two guide wheels, apparatus of the present invention and method.
Above in conjunction with accompanying drawing, embodiments of the present invention are described in detail, but the present invention is not limited to above-mentioned embodiment, those of ordinary skill in the art makes many variations on the premise of can also be without departing from present inventive concept after the content understanding such scheme.
Claims (10)
1. a multi-line cutting machine gauze line bow on-Line Monitor Device, is characterized in that, including range sensor (19)；Described range sensor (19) is fixed on shell (9) by locking nut (20)；Described shell (9) is connected with protection gas air inlet pipe (22)；The detectable signal (23) of described range sensor (19) signal transmitting and receiving end is facing to the upper plane mortar (2) formed of the gauze (7) that moves；Described range sensor (19) one end electric wire (10) is connected to line bow display module (11).
A kind of multi-line cutting machine gauze line bow on-Line Monitor Device the most according to claim 1, it is characterised in that described shell (9) is connected with retainer ring (8), and described retainer ring (8) is connected with horizontal support bar (15)；Described horizontal support bar (15) is through the hole on contiguous block (16)；Described contiguous block (16) is connected to vertical support bar (14)；Described vertical support bar (14) and magnetic fix seat (13)；Described magnetic is fixed seat (13) magnetic force and is inhaled on cutting on line machine body (12).
A kind of multi-line cutting machine gauze line bow on-Line Monitor Device the most according to claim 1, it is characterised in that described protection gas air inlet pipe (22) is connected with wire cutting machine protection source of the gas, and its air pressure is 0.1-0.16 megapascal (MPa).
A kind of multi-line cutting machine gauze line bow on-Line Monitor Device the most according to claim 1, it is characterised in that described shell (9) upper end is equipped with rubber blanket (18)；Described shell (9) end has the hole of detectable signal (23) process；The protective gas that described protection gas air inlet pipe (22) enters hole from shell (9) is flowed out with certain speed.
A kind of multi-line cutting machine gauze line bow on-Line Monitor Device the most according to claim 1, it is characterised in that described electric wire (10) passes from the centre bore of rubber blanket (18).
A kind of multi-line cutting machine gauze line bow on-Line Monitor Device the most according to claim 1, it is characterised in that described gauze (7) speed with 8-30 meter per second under the rotarily driving of guide wheel (1) is moved；Described gauze (7) deviates horizontal level under the effect downwards of cutting crystal ingot (6) and forms an alignment bow；Described cutting crystal ingot (6) is connected with crystal holder (4) by glue (21)；Described crystal holder is fixed on line cut station (5) of wire cutting machine；Described line cut station (5) with the speed of 0.1-1 mm/min to lower feeding.
A kind of multi-line cutting machine gauze line bow on-Line Monitor Device the most according to claim 1, it is characterised in that described range sensor (19) is 100-400 millimeter with plane mortar (2) distance of the formation on gauze (7)；Described range sensor (19) detects the size of gauze (7) deviation horizontal level.
8. bend on-Line Monitor Device according to a kind of multi-line cutting machine gauze line described in claim 3 and claim 4, it is characterised in that use between described rubber blanket (18) and shell (9), electric wire (10) and closely cooperate.
A kind of multi-line cutting machine gauze line bow on-Line Monitor Device the most according to claim 2, it is characterised in that described contiguous block (16) can rotate around vertical support bar (14) and move up and down, and uses lock-screw (17) from side surface locking；The distance stretched out of described contiguous block (16) adjustable horizontal support bar (15), uses lock-screw (17) side surface locking.
A kind of multi-line cutting machine gauze line bow on-Line Monitor Device online line bow monitoring method the most according to claims 1 to 10, it is characterised in that comprise the steps:
1) workpiece is installed: cutting crystal ingot (6) glue (21) is bonded to the upper rear integral installation of crystal holder (4) on line cut station (5)；
2) multi-line cutting machine gauze line bow on-Line Monitor Device is installed: ensure that the center of shell (9) is perpendicular to gauze (7); range sensor (19) arrives the distance of gauze in sensor tolerance band; protection gas air inlet pipe (22) connects the protection source of the gas of multi-line cutting machine, measures shell (9) center to guide wheel 1 central axis distance L；
3) setting reference zero: when setting does not starts to cut, the distance of the upper plane mortar (2) of range sensor (19) to horizontal gauze (7) is reference zero；
4) detection offset distance: start cutting processing, gauze (7) is under cutting crystal ingot (6) effect, and at an angle, range sensor (19) detects gauze (7) skew equilbrium position distance D to shape；
5) according to trigonometric function relation, line bow angle is calculated: gauze (7) angle, θ is
；
6) real-time angles of display θ value: line bow display module (11) angles of display value in real time.
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| CN201510383966.2A CN106313353B (en) | 2015-07-03 | 2015-07-03 | A kind of multi-line cutting machine gauze line bow on-Line Monitor Device and method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107672071A (en) * | 2017-10-25 | 2018-02-09 | 杨凌美畅新材料有限公司 | The method and apparatus of photovoltaic silicon wafer cutting process detection line bow |
| CN111923261A (en) * | 2020-07-17 | 2020-11-13 | 苏州赛万玉山智能科技有限公司 | Control method and control system for cutting crystal bar by diamond wire |
| CN112078040A (en) * | 2020-07-30 | 2020-12-15 | 长治高测新材料科技有限公司 | Method for automatically adjusting technological parameters during cutting of silicon single crystal rod |
| CN113665009A (en) * | 2021-08-30 | 2021-11-19 | 燕山大学 | Wire bow parameter monitoring device for multi-wire cutting machine |
| CN115464790A (en) * | 2022-09-26 | 2022-12-13 | 华侨大学 | Control method for wire bow angle of wire mesh of multi-wire cutting machine |
| CN115464530A (en) * | 2022-09-26 | 2022-12-13 | 华侨大学 | Online monitoring device and monitoring method for wire bow in mechanical cutting of flexible abrasive particles |
| WO2024046000A1 (en) * | 2022-08-31 | 2024-03-07 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | Monitoring mechanism, application thereof, and slicing machine with the monitoring mechanism |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020174861A1 (en) * | 2001-05-10 | 2002-11-28 | Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag | Method for cutting slices from a workpiece |
| CN101284402A (en) * | 2008-05-30 | 2008-10-15 | 大连连城数控机器有限公司 | Multi-line cutting machine |
| CN201685349U (en) * | 2010-05-07 | 2010-12-29 | 沈阳科晶自动化设备有限公司 | Numerically controlled diamond micro-line cutting machine tool |
| CN202428570U (en) * | 2011-04-07 | 2012-09-12 | 苏州协鑫光伏科技有限公司 | Multi-wire cutting machine with wire arc detectors |
| CN102744796A (en) * | 2012-06-20 | 2012-10-24 | 常州天合光能有限公司 | Silicon ingot slicing quality monitoring system and monitoring method |
| CN203204380U (en) * | 2012-09-14 | 2013-09-18 | 应用材料瑞士有限责任公司 | Wire bending monitoring system and wire saw device |
| CN203357708U (en) * | 2013-07-31 | 2013-12-25 | 中国电子科技集团公司第四十八研究所 | Cutting line tension meter protecting device of multi-line cutting machine |
-
2015
- 2015-07-03 CN CN201510383966.2A patent/CN106313353B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020174861A1 (en) * | 2001-05-10 | 2002-11-28 | Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag | Method for cutting slices from a workpiece |
| CN101284402A (en) * | 2008-05-30 | 2008-10-15 | 大连连城数控机器有限公司 | Multi-line cutting machine |
| CN201685349U (en) * | 2010-05-07 | 2010-12-29 | 沈阳科晶自动化设备有限公司 | Numerically controlled diamond micro-line cutting machine tool |
| CN202428570U (en) * | 2011-04-07 | 2012-09-12 | 苏州协鑫光伏科技有限公司 | Multi-wire cutting machine with wire arc detectors |
| CN102744796A (en) * | 2012-06-20 | 2012-10-24 | 常州天合光能有限公司 | Silicon ingot slicing quality monitoring system and monitoring method |
| CN203204380U (en) * | 2012-09-14 | 2013-09-18 | 应用材料瑞士有限责任公司 | Wire bending monitoring system and wire saw device |
| CN203357708U (en) * | 2013-07-31 | 2013-12-25 | 中国电子科技集团公司第四十八研究所 | Cutting line tension meter protecting device of multi-line cutting machine |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107672071A (en) * | 2017-10-25 | 2018-02-09 | 杨凌美畅新材料有限公司 | The method and apparatus of photovoltaic silicon wafer cutting process detection line bow |
| CN111923261A (en) * | 2020-07-17 | 2020-11-13 | 苏州赛万玉山智能科技有限公司 | Control method and control system for cutting crystal bar by diamond wire |
| CN112078040A (en) * | 2020-07-30 | 2020-12-15 | 长治高测新材料科技有限公司 | Method for automatically adjusting technological parameters during cutting of silicon single crystal rod |
| CN113665009A (en) * | 2021-08-30 | 2021-11-19 | 燕山大学 | Wire bow parameter monitoring device for multi-wire cutting machine |
| WO2024046000A1 (en) * | 2022-08-31 | 2024-03-07 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | Monitoring mechanism, application thereof, and slicing machine with the monitoring mechanism |
| CN115464790A (en) * | 2022-09-26 | 2022-12-13 | 华侨大学 | Control method for wire bow angle of wire mesh of multi-wire cutting machine |
| CN115464530A (en) * | 2022-09-26 | 2022-12-13 | 华侨大学 | Online monitoring device and monitoring method for wire bow in mechanical cutting of flexible abrasive particles |
| CN115464790B (en) * | 2022-09-26 | 2024-08-27 | 华侨大学 | Control method for wire net wire bow angle of multi-wire cutting machine |
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