CN108407115B - Centering detection mechanism and method for monocrystalline silicon rod - Google Patents
Centering detection mechanism and method for monocrystalline silicon rod Download PDFInfo
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- CN108407115B CN108407115B CN201810048097.1A CN201810048097A CN108407115B CN 108407115 B CN108407115 B CN 108407115B CN 201810048097 A CN201810048097 A CN 201810048097A CN 108407115 B CN108407115 B CN 108407115B
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- screw rod
- trapezoidal screw
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- 238000001514 detection method Methods 0.000 title claims abstract description 50
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims description 13
- 238000005520 cutting process Methods 0.000 claims description 12
- 238000003754 machining Methods 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 13
- 229910052710 silicon Inorganic materials 0.000 abstract description 13
- 239000010703 silicon Substances 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The present invention relates to the field of semiconductor processing technology, aims to provide a centering detection mechanism for a monocrystalline silicon rod. The device comprises a vertical mounting bracket fixed on a base, a main scale and a guide rail which are vertical and parallel; two sliding seats are movably arranged on the guide rail, a cross rod guide block is fixedly arranged on each sliding seat, and the detection cross rod is embedded in a sliding groove of the cross rod guide block and can move along the horizontal direction; a secondary scale mounting seat is movably arranged on the guide rail between the two sliding seats, and a secondary scale is fixedly arranged and is adjacent to the primary scale; a driving mechanism is arranged at one end of the vertical left-right spiral trapezoidal screw rod, the trapezoidal screw rod penetrates through two sliding seats and an auxiliary ruler mounting seat, the two sliding seats are respectively located in the range of two sections of reverse threads of the trapezoidal screw rod, and the auxiliary ruler mounting seat is located in a thread-free area in the middle of the trapezoidal screw rod. The detection result of the invention is accurate and reliable; the silicon rod can be timely detected when being adjusted, the disassembly is convenient, and the production efficiency is improved; simple structure, easy and simple to handle, the cost is lower, can save a large amount of manufacturing cost.
Description
Technical Field
The invention belongs to the semiconductor processing technology, and particularly relates to a mechanism and a method for detecting centering of a crystal bar in cutting processing of a monocrystalline silicon bar.
Background
Typical manufacturing process flows of chips in the semiconductor industry are: 1. pulling the single crystal: manufacturing a monocrystalline silicon rod; 2. cutting: cutting off the monocrystalline silicon rod to a proper length; 3. flattening: grinding the surface of the crystal by a grinding or milling method; 4. and (3) corrosion: chemically removing machining damage of the wafer; 5. polishing: obtaining a mirror surface of the wafer; 6. pattern manufacture: manufacturing an integrated circuit; 7. back grinding: thinning the wafer to a desired thickness; 8. scribing: dividing the complete wafer into chips; 9. and (3) packaging: and (5) completing connection and protection encapsulation of the IC.
In the process of cutting the monocrystalline silicon rod, when the center of the silicon rod is not perpendicular to the diamond cutting line, certain surface inclination of the cut silicon rod can be caused, and the subsequent processing procedures and the final processing quality are directly affected. At present, in order to reduce the surface inclination of a cut surface of a silicon rod after cutting, the machining precision of a mounting surface on a silicon rod mounting frame is guaranteed, and the machining difficulty is high due to high machining precision, so that the machining cost of a silicon rod cutting machine is increased.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects in the prior art and providing a centering detection mechanism and a detection method for a monocrystalline silicon rod.
In order to solve the technical problems, the invention provides the following solutions:
the centering detection mechanism for the monocrystalline silicon rod comprises a vertical mounting bracket fixed on a base; a vertical and parallel main graduated scale and a guide rail are arranged on the mounting bracket; two sliding seats are movably arranged on the guide rail, each sliding seat is fixedly provided with a cross rod guide block, and the detection cross rod is embedded in a sliding groove of the cross rod guide block and can move along the horizontal direction; an auxiliary scale mounting seat is movably arranged on the guide rail between the two sliding seats, and an auxiliary scale is fixed on the auxiliary scale mounting seat and is adjacent to the main scale; the mechanism also comprises a vertical left-right spiral trapezoidal screw rod, and one end of the screw rod is provided with a driving mechanism; the trapezoidal screw rod passes through the two sliding seats and the auxiliary ruler mounting seat, the two sliding seats are respectively positioned in the range of two sections of reverse threads of the trapezoidal screw rod, and the auxiliary ruler mounting seat is positioned in the unthreaded area in the middle of the trapezoidal screw rod.
In the invention, the auxiliary scale alignment block is arranged on the main scale, and when the auxiliary scale is contacted with the auxiliary scale alignment block, the 0 scale of the auxiliary scale is opposite to the 0 scale of the main scale.
In the invention, the driving mechanism is a rotary handle or an electric driving mechanism consisting of a motor and a connecting part.
In the invention, the cross rod guide block is fixed on the sliding seat through the screw.
In the invention, the trapezoidal screw rod is a left-right spiral trapezoidal screw rod, and the distance between two detection cross bars can be changed when the left-right spiral trapezoidal screw rod rotates.
In the invention, two ends of the main graduated scale are arranged on the mounting bracket through screws.
The invention further provides a method for realizing the centering detection of the monocrystalline silicon rod by using the mechanism, which comprises the following steps:
(1) Rotating the left-right spiral trapezoidal screw rod to enlarge the distance between the upper detection cross rod and the lower detection cross rod, and then placing the monocrystalline silicon rod to be detected between the two detection cross rods; the distance L between the center of the monocrystalline silicon rod, namely the middle position of the two detection cross bars and the base is recorded through the readings of the main graduated scale and the auxiliary graduated scale 1 ；
(2) The left-right spiral trapezoidal screw rod is rotated to enlarge the distance between the upper detection cross rod and the lower detection cross rod, and the base is moved by a certain distance L along the axial direction of the monocrystalline silicon rod in the horizontal direction 2 The method comprises the steps of carrying out a first treatment on the surface of the Then re-measuring the distance L between the center of the monocrystalline silicon rod and the base by using the centering detection mechanism according to the step (1) 3 ；
(3) According to the trigonometric function formula tanθ= (L 3 -L 1 )/L 2 Obtaining the inclination angle theta of the monocrystalline silicon rod; and adjusting the installation position of the monocrystalline silicon rod according to the inclination angle theta until the machining requirement of the cutting surface of the monocrystalline silicon rod is met.
Description of the inventive principles:
according to the invention, the center of the silicon rod is detected by the centering detection mechanism, the inclination angle between the center of the silicon rod and the diamond cutting line during the installation of the silicon rod is detected, the installation position of the silicon rod is adjusted according to the inclination angle, and the cutting quality after the silicon rod is cut is improved.
Compared with the prior art, the invention has the beneficial effects that:
1. the detection result is accurate and reliable;
2. the silicon rod can be timely detected when being adjusted, the disassembly is convenient, and the production efficiency is improved;
3. simple structure, easy and simple to handle, the cost is lower, can save a large amount of manufacturing cost.
Drawings
Fig. 1 is a front view of a centering detection mechanism.
Fig. 2 is a left side view of the detection mechanism of fig. 1.
FIG. 3 is a schematic illustration of the secondary scale and the primary scale.
FIG. 4 is a schematic diagram of the center detection of a single crystal silicon rod.
Reference numerals in the drawings: a guide rail 1; a trapezoidal screw rod 2; a secondary ruler mounting base 3; a sub scale 4; a main scale 5; a cross bar guide block 6; a detection cross bar 7; a mounting bracket 8; a slide 9; a mounting hole 10; a sub-scale alignment block 11; a single crystal silicon rod 12; a base upper surface 13.
Detailed Description
The invention is further described below with reference to the drawings and working examples.
The centering detection mechanism for the monocrystalline silicon rod comprises a vertical mounting bracket 8 fixed on a base; the mounting bracket 8 is provided with a vertical main graduated scale 5 and a guide rail 1 which are arranged in parallel; mounting holes 10 are formed at two ends of the main graduated scale 5 and are fixed on the mounting bracket 8 by screws. Two sliding seats 9 are movably arranged on the guide rail 1, a cross rod guide block 6 is fixedly arranged on each sliding seat 9 by bolts, and a detection cross rod 7 is embedded in a chute of the cross rod guide block 6 and can move back and forth along the horizontal direction; a secondary scale mounting seat 3 is movably arranged on the guide rail 1 between the two sliding seats 9, and a secondary scale 4 is fixed on the secondary scale mounting seat 3 and is adjacent to the primary scale 5; the auxiliary scale alignment block 11 is arranged on the main scale, and when the auxiliary scale 4 is contacted with the auxiliary scale alignment block 11, the 0 scale of the auxiliary scale is opposite to the 0 scale of the main scale.
The mechanism also comprises a vertical left-right trapezoidal screw rod 2, and one end of the trapezoidal screw rod is provided with a driving mechanism; the trapezoidal screw rod 2 passes through two sliding seats 9 and the auxiliary ruler mounting seat 3, the two sliding seats 9 are respectively positioned in the range of two sections of reverse threads of the trapezoidal screw rod 2, and the auxiliary ruler mounting seat 3 is positioned in a thread-free area in the middle of the trapezoidal screw rod 2. The left-handed and right-handed trapezoidal screw 2 is driven by the driving mechanism to rotate, and at the moment, the distance between the two detection cross bars 7 can be changed. The driving mechanism can be a rotary handle or an electric driving mechanism consisting of a motor and a connecting component.
The method for detecting the centering of the monocrystalline silicon rod by using the mechanism comprises the following steps:
(1) The left-right trapezoidal screw rod 2 is rotated to enlarge the distance between the upper detection cross rod 7 and the lower detection cross rod 7, and then a monocrystalline silicon rod 12 to be detected is arranged between the two detection cross rods 7; the distance L between the center of the monocrystalline silicon rod, namely the middle position of the two detection cross bars and the base is recorded through the readings of the main graduated scale and the auxiliary graduated scale 1 ；
The specific operation is as follows: firstly, rotating the left-right trapezoidal screw rod 2 until any one detection cross rod 7 contacts the edge of the monocrystalline silicon rod 12; then adjusting the position of the auxiliary ruler mounting seat 3 and the distance between the detection cross bars 7 until the upper detection cross bars 7 and the lower detection cross bars 7 are contacted with the edges of the monocrystalline silicon rods 12, and then reading the graduated scale;
(2) The left-right-handed trapezoidal screw 2 is rotated to expand the distance between the upper and lower detection cross bars 7, and the base is moved by a certain distance L along the axial direction of the monocrystalline silicon rod in the horizontal direction 2 The method comprises the steps of carrying out a first treatment on the surface of the Then re-measuring the distance L between the center of the monocrystalline silicon rod and the base by using the centering detection mechanism according to the step (1) 3 ；
(3) According to the trigonometric function formula tanθ= (L 3 -L 1 )/L 2 Obtaining the inclination angle theta of the monocrystalline silicon rod; and adjusting the installation position of the monocrystalline silicon rod according to the inclination angle theta until the machining requirement of the cutting surface of the monocrystalline silicon rod is met.
Because the diameter of the silicon rod is larger and the horizontal inclination degree is smaller, the angle theta is smaller, and can be approximately equal to the angle theta, namely, theta= (L) 3 -L 1 )/L 2 . This can simplify the calculation and save time.
Finally, it should be noted that the above list is only specific embodiments of the present invention. Obviously, the invention is not limited to the above embodiments, but many variations are possible. All modifications directly derived or suggested to one skilled in the art from the present disclosure should be considered as being within the scope of the present invention.
Claims (3)
1. A centering detection method for a single crystal silicon rod, characterized in that the method is realized based on the following centering detection mechanism:
the centering detection mechanism comprises a vertical mounting bracket fixed on the base, and a vertical and parallel main graduated scale and a guide rail are arranged on the mounting bracket; two sliding seats are movably arranged on the guide rail, each sliding seat is fixedly provided with a cross rod guide block, and the detection cross rod is embedded in a sliding groove of the cross rod guide block and can move along the horizontal direction; an auxiliary scale mounting seat is movably arranged on the guide rail between the two sliding seats, and an auxiliary scale is fixed on the auxiliary scale mounting seat and is adjacent to the main scale; the mechanism also comprises a vertical left-right spiral trapezoidal screw rod, and one end of the screw rod is provided with a driving mechanism; the trapezoidal screw rod passes through the two sliding seats and the auxiliary ruler mounting seat, the two sliding seats are respectively positioned in the range of two sections of reverse threads of the trapezoidal screw rod, and the auxiliary ruler mounting seat is positioned in a thread-free area in the middle of the trapezoidal screw rod; the cross rod guide block is fixed on the sliding seat through a screw; the trapezoidal screw rod is a left-right spiral trapezoidal screw rod, and the distance between two detection cross bars can be changed when the left-right spiral trapezoidal screw rod rotates; an auxiliary scale alignment block is arranged on the main graduated scale, and when the auxiliary graduated scale is contacted with the auxiliary scale alignment block, the 0 scale of the auxiliary graduated scale is opposite to the 0 scale of the main graduated scale;
the centering detection method specifically comprises the following steps:
(1) Rotating the left-right spiral trapezoidal screw rod to enlarge the distance between the upper detection cross rod and the lower detection cross rod, and then placing the monocrystalline silicon rod to be detected between the two detection cross rods; the distance L between the center of the monocrystalline silicon rod, namely the middle position of the two detection cross bars and the base is recorded through the readings of the main graduated scale and the auxiliary graduated scale 1 ；
(2) The left-right spiral trapezoidal screw rod is rotated to enlarge the distance between the upper detection cross rod and the lower detection cross rod, and the base is moved by a certain distance L along the axial direction of the monocrystalline silicon rod in the horizontal direction 2 The method comprises the steps of carrying out a first treatment on the surface of the Then re-measuring the center of the single crystal silicon rod from the base by using the centering detection mechanism according to the step (1)Distance L 3 ；
(3) According to the trigonometric function formula tanθ= (L 3 -L 1 )/L 2 Obtaining the inclination angle theta of the monocrystalline silicon rod; and adjusting the installation position of the monocrystalline silicon rod according to the inclination angle theta until the machining requirement of the cutting surface of the monocrystalline silicon rod is met.
2. The method of claim 1, wherein the drive mechanism is a rotary handle or an electric drive mechanism consisting of a motor and a connecting member.
3. The method of claim 1 wherein the primary scale is mounted on the mounting bracket by screws at both ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810048097.1A CN108407115B (en) | 2018-01-18 | 2018-01-18 | Centering detection mechanism and method for monocrystalline silicon rod |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810048097.1A CN108407115B (en) | 2018-01-18 | 2018-01-18 | Centering detection mechanism and method for monocrystalline silicon rod |
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| Publication Number | Publication Date |
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| CN108407115A CN108407115A (en) | 2018-08-17 |
| CN108407115B true CN108407115B (en) | 2024-04-16 |
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| CN201810048097.1A Active CN108407115B (en) | 2018-01-18 | 2018-01-18 | Centering detection mechanism and method for monocrystalline silicon rod |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109461352A (en) * | 2018-12-21 | 2019-03-12 | 刘家铮 | A kind of high school physics experiment with falling objects simulator |
| CN110497545B (en) * | 2019-08-13 | 2021-06-08 | 安徽晶天新能源科技有限责任公司 | Production and processing technology of solar silicon wafer |
| CN110749302B (en) * | 2019-10-31 | 2024-11-08 | 福州天瑞线锯科技有限公司 | Monocrystalline silicon rod cutting surface angle detection device and squarer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06126735A (en) * | 1992-10-21 | 1994-05-10 | Toyo A Tec Kk | Method for cutting ingot and its device |
| CN102032857A (en) * | 2010-10-20 | 2011-04-27 | 常州有则科技有限公司 | Radial verticality detection platform |
| CN201903313U (en) * | 2010-12-21 | 2011-07-20 | 重庆江利圣特机械制造有限责任公司 | Verticality measuring tool |
| CN203083477U (en) * | 2013-01-10 | 2013-07-24 | 常州亿晶光电科技有限公司 | A roundness calibrator of a monocrystalline silicon stick |
| CN203396296U (en) * | 2013-04-26 | 2014-01-15 | 中国农业大学 | Combined-type profile parameter measuring scale |
| CN105841592A (en) * | 2016-04-19 | 2016-08-10 | 中铁上海工程局集团有限公司 | Jacking axis offset measuring device and application method thereof |
| CN207972154U (en) * | 2018-01-18 | 2018-10-16 | 浙江晶盛机电股份有限公司 | Centering testing agency for silicon single crystal rod |
-
2018
- 2018-01-18 CN CN201810048097.1A patent/CN108407115B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06126735A (en) * | 1992-10-21 | 1994-05-10 | Toyo A Tec Kk | Method for cutting ingot and its device |
| CN102032857A (en) * | 2010-10-20 | 2011-04-27 | 常州有则科技有限公司 | Radial verticality detection platform |
| CN201903313U (en) * | 2010-12-21 | 2011-07-20 | 重庆江利圣特机械制造有限责任公司 | Verticality measuring tool |
| CN203083477U (en) * | 2013-01-10 | 2013-07-24 | 常州亿晶光电科技有限公司 | A roundness calibrator of a monocrystalline silicon stick |
| CN203396296U (en) * | 2013-04-26 | 2014-01-15 | 中国农业大学 | Combined-type profile parameter measuring scale |
| CN105841592A (en) * | 2016-04-19 | 2016-08-10 | 中铁上海工程局集团有限公司 | Jacking axis offset measuring device and application method thereof |
| CN207972154U (en) * | 2018-01-18 | 2018-10-16 | 浙江晶盛机电股份有限公司 | Centering testing agency for silicon single crystal rod |
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| CN108407115A (en) | 2018-08-17 |
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