CN104191043B - Double-shaft precise dicing saw - Google Patents

Double-shaft precise dicing saw Download PDF

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Publication number
CN104191043B
CN104191043B CN201410377542.0A CN201410377542A CN104191043B CN 104191043 B CN104191043 B CN 104191043B CN 201410377542 A CN201410377542 A CN 201410377542A CN 104191043 B CN104191043 B CN 104191043B
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Prior art keywords
cutter
cutting
twin shaft
scribing machine
workbench
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CN201410377542.0A
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CN104191043A (en
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郭东辉
王文斌
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Guangdong Changxing Semiconductor Technology Co., Ltd
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DONGGUAN HUAHUI ELECTRONIC TECHNOLOGY Co Ltd
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Abstract

The embodiment of the invention discloses a double-shaft precise dicing saw. The double-shaft precise dicing saw comprises a rack. A master controller, a working platform, a feeding and discharging device, a cooling device, a tool set and a positioning device are arranged on the rack. The master controller is electrically connected with the feeding and discharging device, the tool set and the positioning device. The working platform comprises a cutting platform, a material supporting platform and a finished product supporting platform. The feeding and discharging device is located above the finished product supporting platform, and the tool set is located above the cutting platform. The positioning device is located in the rack. The cooling device is located at the bottom of the tool set. The positioning device comprises a visual controller and a visual alignment system, the visual controller is located below the working platform, and the visual alignment system is located above the cutting platform. By means of the double-shaft precise dicing saw, manual feeding and discharging are not needed. Meanwhile, the double-shaft precise dicing saw has the advantages that the production efficiency of the double-shaft precise dicing saw is high, is five times higher than the production efficiency of domestic products and is three times higher than the production efficiency of foreign products, and cutting is precise.

Description

Twin shaft precision scribing machine
Technical field
The present invention relates to scribing machine field, more particularly, to a kind of twin shaft precision scribing machine.
Background technology
Scribing machine is the epoxy resin of cutting solidification and the compounding substances of glass fibre or semiconductor silicon wafer is guaranteed replacement chip The machinery of the semiconductor precise electronic product part such as LED, sheet capacitor, plate resistor, glass, quartz, organizes with hard ring Oxygen tree fat or other materials are supported, often cut and once borrow slice thickness device automatically forward(Direction to knife)Propulsion required separation distance is thick The gradient of degree device is usually 1 micron.During the tissue of epoxy resin embedding of cutting solidification, due to the epoxy of glass fibre and solidification The physical characteristic of resin is it is necessary to each unit cuts through to ensure the Pingdu surface roughness of corner.It is all single due to adopt Piece cuts, and efficiency is low, the domestic like product yield of at most 160-360 per hour, and abroad domestic like product is per hour The yield cutting 600 more.It is all manual loading and unloading simultaneously, waste time and energy, also inconvenient.
Content of the invention
The technical problem to be solved is, provides a kind of twin shaft precision scribing machine, need not manually loading and unloading, together High, cutting accurately feature that when has production efficiency.
In order to solve above-mentioned technical problem, embodiments provide a kind of twin shaft precision scribing machine, including frame, institute State frame and be provided with main controller, workbench, handling equipment, cooling device, cutter group, positioner;Described main controller divides Do not electrically connect with described handling equipment, cutter group and positioner;Described workbench includes cutting bed, pendulum material platform and finished product Material platform;Described handling equipment is located above described finished product material platform, and described cutter group is located above described cutting bed;Described Positioner is located in described frame;Described cooling device is located at described cutter group bottom,;Described positioner includes vision control Device processed and visual-alignment system;Described vision controller is located at below described workbench;Described visual-alignment system is located at institute State above cutting bed.
For the improvement of technique scheme, described handling equipment include manipulator, pusher cylinder, material folding cylinder and on Blanking cylinder;Described manipulator is located above described workbench, and moves with described loading and unloading cylinders;Described pusher gas Cylinder is located at the end of described material folding cylinder;Described loading and unloading cylinder is located at the top of described material folding cylinder.
For the improvement further of technique scheme, described cooling device include cyclic water tank and by water pipe with described The hole for water spraying of cyclic water tank connection;Described cyclic water tank is located at the lower section of described workbench;Described hole for water spraying is located at described knife The bottom of tool group.
For the improvement further of technique scheme, described cutter group include switch main shaft, be mutually perpendicular to but from Longitudinally cutting cutter and transverse cuts cutter;Described switching main shaft respectively with described longitudinally cutting cutter and transverse cuts cutter phase Interlock.
For the improvement further of technique scheme, described longitudinally cutting cutter and transverse cuts cutter are all that coating surpasses Thin diamant.
For the improvement further of technique scheme, the outer wall of described longitudinally cutting cutter or transverse cuts cutter is provided with Protective cover.
For the improvement further of technique scheme, described protection is covered with transparent window.
For the improvement further of technique scheme, below described workbench, it is additionally provided with frame garbage collection frame.
Implement the embodiment of the present invention, have the advantages that:
(1)Need not manually loading and unloading, save manpower and materials;
(2)Cutter group using twin shaft design is cut, and substantially increases the efficiency of cutting;
(3)The positioner of numerical control, improves the precision in cutting process.
Brief description
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, not Constitute inappropriate limitation of the present invention, in the accompanying drawings:
Fig. 1 is a kind of perspective view of twin shaft precision scribing machine provided in an embodiment of the present invention;
Fig. 2 is a kind of top view of twin shaft precision scribing machine provided in an embodiment of the present invention;
Fig. 3 is the structural representation of the single cutter in a kind of twin shaft precision scribing machine provided in an embodiment of the present invention.
Specific embodiment
To describe the present invention, the illustrative examples of the here present invention below in conjunction with accompanying drawing and specific embodiment in detail And explanation is used for explaining the present invention, but not as a limitation of the invention.
As shown in Figure 1, Figure 2 and Figure 3, twin shaft precision scribing machine of the present invention, including frame 1, described frame 1 sets There are main controller 2, workbench, handling equipment, cooling device, cutter group and positioner;Described main controller 2 respectively with described Handling equipment, cutter group and positioner electrical connection;Described workbench includes cutting bed 3, pendulum material platform 4 and finished product material platform 9, described pendulum material platform 4 by product placement OK to be cut, is just admitted to described cutting bed 3 and is cut by described handling equipment Cut.Described finished product material platform 9 is used for placing the finished product of cutting OK.Described handling equipment is located at the upper of described finished product material platform 9 Side, for neatly, accurately setting band cutting products, for subsequently preferably cutting.Described cutter group is located at described cutting bed 3 Top.Described positioner is located in described frame 1, for accurately transposing so as to accurately to be cut to cutter group Product cuts.Described cooling device is located at described cutter group bottom, and it can carry out cold well to the cutter group in cutting process But cooling is so as to service life greatly prolongs.
Wherein, described handling equipment includes manipulator 5, pusher cylinder 6, material folding cylinder 7 and loading and unloading cylinder 8, described Manipulator 5, as the executor of loading and unloading, positioned at the top of described workbench, and is mutually interlocked with described loading and unloading cylinder 8. It is the end of material folding cylinder 7 that described pusher cylinder 6 is located at, and described loading and unloading cylinder 8 is located at the top of described material folding cylinder 7.
Described cooling device includes cyclic water tank 10 and hole for water spraying 11, and described cyclic water tank 10 passes through water pipe and described water spray Hole 11 is connected, and after cutter group is cooled down by the water that described hole for water spraying 11 flows out, then flows back into described cyclic water tank 10 again In such that it is able to reuse.Described cyclic water tank 10 is located at the lower section of described workbench, and described hole for water spraying is located at described knife The bottom of tool group.
Described cutter group includes switching main shaft 12, longitudinally cutting cutter 13 and transverse cuts cutter 14, described switching main shaft 12 are mutually interlocked with described longitudinally cutting cutter 13 and transverse cuts cutter 14 respectively, and described longitudinally cutting cutter 13 is horizontal with described Cutting tool 14 is mutually perpendicular to, but from.Described longitudinally cutting cutter 13 or transverse cuts cutter 14 enter through switching main shaft 12 Row substitutes cutting, not only increases cutting efficiency, also extends the service life of the two.Described longitudinally cutting cutter 13 and laterally What cutting tool 14 adopted is all the ultra-thin diamant of coating, and it has the characteristics that cutting hardness is strong, thus ensure that the effect of cutting Really.Meanwhile, the outer wall of described longitudinally cutting cutter 13 or transverse cuts cutter 14 is provided with protective cover 15, and this protective cover 15 ensure that Security in cutting process and avoid cutting clout and splash in equipment thus leading to the damage of equipment, and it is provided with Photopic vision window is it can be seen that the cutting process of cutter.
Described positioner includes vision controller 16 and visual-alignment system 17, and described vision controller 16 is located at described Below workbench;Described visual-alignment system 17 is located above described cutting bed 3.Described visual-alignment system 17 can be passed through The position to cutting bed 3 of taking pictures carries out precise positioning, then passes through the default position coordinates of vision controller 16 to described cutting Platform 3 is adjusted in X-axis or Y-axis, to reach the most accurate cutting position, thus ensure that on described cutting bed 3 Product to be cut accurately cut.
It is additionally provided with frame garbage collection frame 18 below described workbench, for the waste material after cutting is effectively collected, Avoid the accumulation of waste material under workbench it is ensured that environment in mechanical processing process is clean, it also avoid damaging machine because of waste material The hidden danger of tool occurs.
It is more than the structure explanation to twin shaft of the present invention precision scribing machine, its course of work is done simply retouch below State:
Switch on power first, in described pendulum material platform 4, the good product to be cut of discharge is released through described pusher cylinder 6, Ran Houzai Stepped up through described material folding cylinder 7, then pass through manipulator 5 feeding in the presence of loading and unloading cylinder 8 and deliver to described cutting On platform 3, manipulator 5 resets simultaneously.Meanwhile described cutter group is opened, after its rotating speed reaches preset rotation speed, described cutter Group can decline, and the hole for water spraying 11 in described cooling system can spray water, carries out cooling treatment to cutter group.Then described regard Feel that alignment system is accurately positioned to described cutting bed 3, thus ensureing the longitudinally cutting cutter 13 in described cutter group or horizontal stroke Accurately cut to cutting tool 14.After cutting finishes, then described cutter group stops operating, and resets, and cooling system also stops Sealing stream sprays.Should during, longitudinally cutting cutter 13 and transverse cuts cutter 14 replace cutting it is known that band cutting products X, Till being all cut in Y-axis.Cut material, finished product is then taken out by described manipulator 5, is placed in finished product material platform 9.
Using twin shaft of the present invention precision scribing machine because need not manually loading and unloading, thus saving manpower and materials; Cut using the cutter group of twin shaft design simultaneously, substantially increased the efficiency of cutting, as many as domestic high five times of ratio, than external Product is as many as three times higher;In addition, its NC positioning devices of adopting, improve the precision in cutting process.
The technical scheme above embodiment of the present invention being provided is described in detail, specific case used herein The principle and embodiment of the embodiment of the present invention is set forth, the explanation of above example is only applicable to help understand this The principle of inventive embodiments;Simultaneously for one of ordinary skill in the art, according to the embodiment of the present invention, in specific embodiment party All will change in formula and range of application, in sum, this specification content should not be construed as limitation of the present invention.

Claims (8)

1. a kind of twin shaft precision scribing machine, including frame it is characterised in that:
Described frame is provided with main controller, workbench, handling equipment, cooling device, cutter group, positioner;
Described main controller is electrically connected with described handling equipment, cutter group and positioner respectively;
Described workbench includes cutting bed, pendulum material platform and finished product material platform;
Described handling equipment is located above described finished product material platform, and described cutter group is located above described cutting bed;
Described positioner is located in described frame;
Described cooling device is located at described cutter group bottom,
Described positioner includes vision controller and visual-alignment system;
Described vision controller is located at below described workbench;
Described visual-alignment system is located above described cutting bed
Described visual-alignment system can carry out precise positioning by the position to cutting bed of taking pictures, and then passes through vision controller Default position coordinates is adjusted in X-axis or Y-axis to described cutting bed.
2. twin shaft according to claim 1 precision scribing machine it is characterised in that:
Described handling equipment includes manipulator, pusher cylinder, material folding cylinder and loading and unloading cylinder;
Described manipulator is located above described workbench, moves with described loading and unloading cylinders;
Described pusher cylinder is located at the end of described material folding cylinder;
Described loading and unloading cylinder is located at the top of described material folding cylinder.
3. twin shaft according to claim 1 precision scribing machine it is characterised in that:
Described cooling device includes cyclic water tank and the hole for water spraying connecting by water pipe with described cyclic water tank;
Described cyclic water tank is located at the lower section of described workbench;
Described hole for water spraying is located at the bottom of described cutter group.
4. twin shaft according to claim 1 precision scribing machine it is characterised in that:
Described cutter group include switch main shaft, be mutually perpendicular to but from longitudinally cutting cutter and transverse cuts cutter;
Described switching main shaft is interlocked with described longitudinally cutting cutter and transverse cuts cutter phase respectively.
5. twin shaft according to claim 4 precision scribing machine it is characterised in that:
Described longitudinally cutting cutter and transverse cuts cutter are all the ultra-thin diamant of coating.
6. twin shaft according to claim 4 precision scribing machine it is characterised in that:
The outer wall of described longitudinally cutting cutter or transverse cuts cutter is provided with protective cover.
7. twin shaft according to claim 6 precision scribing machine it is characterised in that:
Described protection is covered with transparent window.
8. twin shaft according to claim 1 precision scribing machine it is characterised in that:
It is additionally provided with frame garbage collection frame below described workbench.
CN201410377542.0A 2014-08-04 2014-08-04 Double-shaft precise dicing saw Active CN104191043B (en)

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Application Number Priority Date Filing Date Title
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106217214B (en) * 2016-09-13 2018-02-06 长沙华腾智能装备有限公司 A kind of automatic loading/unloading scribing machine
CN106404800B (en) * 2016-11-02 2019-08-30 北京中电科电子装备有限公司 A kind of scribing machine vision handover control system and scribing machine
CN113492468B (en) * 2021-07-07 2021-12-07 湖南艾凯瑞斯智能科技有限公司 Automatic feeding and discharging double-shaft grinding wheel scribing machine for semiconductor wafer processing
CN114178628B (en) * 2022-02-14 2022-05-13 沈阳和研科技有限公司 Rapid modification method for full-automatic scribing machine

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6637302B2 (en) * 2001-03-22 2003-10-28 Toshiharu Tom Miyano Machining system and method of machining a workpiece using the machining system
CN2529385Y (en) * 2002-02-01 2003-01-01 上海市激光技术研究所 Continuous laser ceramic cutting machine
JP5385675B2 (en) * 2009-05-08 2014-01-08 株式会社森精機製作所 Machine tools for turning
CN201783761U (en) * 2010-08-26 2011-04-06 华南理工大学 Scribing device with two laser heads
CN102601620B (en) * 2012-03-06 2014-05-28 昆山巨林科教实业有限公司 Machining system and machining method thereof

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Address after: 523000 Building 1, No. 8, Qinlin Road, Tangxia Town, Dongguan City, Guangdong Province

Patentee after: Guangdong Changxing Semiconductor Technology Co., Ltd

Address before: 523000 No. 10 Qin Lin Road, Tangxia Town, Guangdong, Dongguan

Patentee before: DONGGUAN HUAHUI ELECTRONIC TECHNOLOGY CO., LTD.

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Address after: Room 101, 201, 301, building 2, No. 2, Keji jiulu, Songshan Lake Park, Dongguan City, Guangdong Province 523000

Patentee after: Guangdong Changxing Semiconductor Technology Co.,Ltd.

Address before: 523000 Building 1, No. 8, Qinlin Road, Tangxia Town, Dongguan City, Guangdong Province

Patentee before: Guangdong Changxing Semiconductor Technology Co.,Ltd.