CN201783761U - Scribing device with two laser heads - Google Patents
Scribing device with two laser heads Download PDFInfo
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- CN201783761U CN201783761U CN 201020507167 CN201020507167U CN201783761U CN 201783761 U CN201783761 U CN 201783761U CN 201020507167 CN201020507167 CN 201020507167 CN 201020507167 U CN201020507167 U CN 201020507167U CN 201783761 U CN201783761 U CN 201783761U
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- laser
- slide rail
- laser head
- control system
- light path
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Abstract
The utility model provides a scribing device with two laser heads. The scribing device comprises a light path system, a slide rail regulating mechanism, a worktable mechanism and a control system; the light path system comprises a laser transmitter and two laser heads connected with the laser transmitter; the two laser heads are respectively fixed on the slide rail regulating mechanism; the slide rail regulating mechanism is connected with the worktable mechanism; the worktable mechanism is arranged under the two laser heads; and the light path system, the worktable mechanism and the slide rail regulating mechanism are respectively connected with the control system. As the slide rail regulating mechanism is combined with the two laser heads, the two laser heads can be adjusted, the scribing efficiency is greatly improved while the scribing needs are met, and the scribing operation is more flexible. The scribing device has the advantages of simple and reasonable structure, complicated curve or shape scribing, and the like.
Description
Technical field
The utility model relates to dicing device, particularly a kind of pair of laser head dicing device.
Background technology
Laser is as finishing tool, can be used for scribing, cutting, compare other processing mode, it is little to have secant, cutting speed is fast, slot edge-perpendicular degree is good, there are not advantages such as mechanical stress during cutting, be based on the basis of Ultra-Violet Laser " cold " processing as existing advanced scribing/cutting machine research, so-called " cold " is to cut different by fuel factor with YAG and CO2 laser, Ultra-Violet Laser directly destroys the chemical bond of machined material, thereby reach the cutting purpose, its heat-affected zone is little, slot is littler, and also improves a lot on the flatness of cut surface and cut quality.Therefore laser is approved in precision cutting and little manufacture field, and greatly develops.
Yet, require effect even for precision cutting lines, clear-cut margin should be selected flat top beam for use, and best square flat top beam.But present most of laser instruments can't provide flat top beam at present, generally by Gaussian beam is shaped as flat top beam through beam shaping.And " effectively flat-top distance " (being the operating distance scope that output beam keeps flat-top to distribute) of beam shaping is limited usually, therefore bring a lot of inconvenience for the design of application system, as needs design one-to-two system (laser instrument is told two-way light and raised the efficiency) or one minute four system's (laser instrument is told four road light and raised the efficiency) etc.In actual applications, the flat top beam that obtains by shaping is when focusing on, and the depth of focus of flat top beam is less than the depth of focus of Gaussian beam, leaves after the focus effect of flat-top slightly and promptly has a greatly reduced quality, and this makes and the non-constant of effect of laser dicing makes problem more serious.
Some laser instrument output laser pattern can be adjusted to square flat-top, rectangle flat-top, Gauss's flat-top in the prior art, its " effectively flat-top distance " reaches " flat-top depth of focus " and all is bigger than the light beam that beam shaping produces, INNOSLAB laser instrument as German Edge Wave company, be a kind of laser technology based on " lath " notion, the pumping volume that combines traditional end-face pump solid laser structure and effective coincidence of fundamental mode volume and thin-sheet laser combine with traditional lath.The concrete laser parameter of this laser instrument is: beam quality is M
2＜2, high impulse energy is 60mJ, and pulse width is for can reach 4ns, and peak-peak power is 4MW, and high pulse repetition frequency is 100kHz, and high-average power is 600W, and wavelength is 1064nm, 532nm, 355nm, 266nm.Reach the requirement that " flat-top depth of focus " all is bigger than the light beam of beam shaping generation though this laser instrument can satisfy " effectively flat-top distance ", dicing device matching used with it can not effectively satisfy the scribing processing request of complicated track in the prior art.
In the practical application that the scribing quality requirement is improved constantly, complexity to the scribing shape has also proposed new requirement, though at present propose different scribing process modes at the scribing of complicated track, these technology all exist following defective: the mode or the technology mode that have reduced the scribing working range and increase idle running have reduced scribing efficient to a certain extent.Therefore, in the face of complicated technological requirement, the high-quality scribing mode of high efficiency must constantly be improved dicing device, to satisfy the demand of processing.
The utility model content
The shortcoming that the purpose of this utility model is to overcome above-mentioned prior art provides a kind of simple and reasonable for structure with not enough, can carry out two laser head dicing devices of complex curve or complicated shape scribing.
For reaching above-mentioned purpose, the utility model adopts following technical scheme: two laser head dicing devices, comprise light path system, adjust sliding track mechanism, table mechanism and control system, two laser heads that described light path system comprises laser beam emitting device and is connected with described laser beam emitting device, two laser heads are separately fixed to be adjusted on the sliding track mechanism, adjust sliding track mechanism and be connected with table mechanism, table mechanism is arranged at the below of two laser heads; Described light path system, table mechanism and adjustment sliding track mechanism are connected with control system respectively.
Described laser beam emitting device comprises laser instrument, beam expanding lens, reflective mirror and the acousto-optic modulator of light path connection successively, and described acousto-optic modulator is connected by light path respectively with two laser heads.Described laser instrument is preferably INNOSLAB laser instrument etc.The INNOSLAB laser instrument, be the hybrid chamber slab laser of the part end pumping that proposed of German Edge Wave company, the pumping volume that this structure combines traditional end-face pump solid laser structure and effective coincidence of fundamental mode volume and thin-sheet laser combine with traditional lath.
Described laser head comprises speculum, galvanometer and the f-θ scanning lens of light path connection successively, and described speculum is connected by light path with acousto-optic modulator, and f-θ scanning lens is connected with the adjustment sliding track mechanism.
Described adjustment sliding track mechanism comprises the horizontal adjusting slide rail that be arranged in parallel with table mechanism and adjusts slide rail up and down with vertically disposed two of table mechanism that two slide blocks have been slidingly connected on the horizontal adjusting slide rail; Adjust slide rail up and down for two and be slidingly connected with two slide blocks respectively, and be connected with two laser heads respectively, promptly adjust slide rail up and down and be connected with the f-θ scanning lens of two laser heads respectively for two; The horizontal adjusting slide rail is fixed in the table mechanism top by support.
Described table mechanism comprises rotation platform, feeding platform and the pedestal that from top to bottom sets gradually, and described rotation platform is arranged on the below of two laser heads accordingly; The horizontal adjusting slide rail is fixed in the pedestal top by support.Rotation platform is preferably accurate rotation platform.
Described control system comprises laser head controlling organization, workstation control system, CCD navigation system and galvanometer control system, described laser head controlling organization all is connected with the adjustment sliding track mechanism with the CCD navigation system, workstation control system is connected with table mechanism, the galvanometer control system is connected with laser head, as preferably, the galvanometer control system is connected with galvanometer in the laser head.
Described laser head controlling organization is three servomotors, three servomotors respectively be embedded in the horizontal adjusting slide rail in screw mandrel and be embedded in two screw mandrels of adjusting up and down in the slide rail and be connected; Two slide blocks are connected with screw mandrel in the horizontal adjusting slide rail, and are connected with two screw mandrels of adjusting up and down in the slide rail respectively.Driven by servomotor screw mandrel, and under the drive of screw mandrel, realize between horizontal adjusting slide rail and the slide block horizontal relative motion, adjust relative motion up and down between slide rail and the slide block up and down, thereby adjust the distance on laser head and table mechanism plane.
Described workstation control system comprises motion control card, servo-driver and the workbench servomotor that connects successively, and described workbench servomotor is connected with table mechanism.Described motion control card is controlled servomotor by servo-driver, changes the rotation and the feed motion of table mechanism.
Described CCD navigation system comprises image processing module and two CCD cameras; Described image processing module is connected with two CCD cameras respectively, and two CCD cameras are arranged at two lower ends of adjusting slide rail up and down respectively.Described two CCD cameras are transferred to the operating mode image in the image processing module respectively; Described image processing module calculates workpiece translational motion amount, rotation amount, obtains the position of workpiece, to realize the location to workpiece.
Described galvanometer control system comprises successively motion controller, digital to analog converter and the motor that connects, and motor is connected with two laser heads respectively, and as preferably, motor is connected with galvanometer in the laser head.Described motion controller transfers signals in the motor by digital to analog converter, with the swing of control galvanometer.
Operation principle of the present utility model: the light that laser instrument emits expands bundle by beam expanding lens, changes light path by reflective mirror again, enters acousto-optic modulator; Acousto-optic modulator is divided into two light beam, enters two laser heads respectively; Speculum receives acousto-optic modulator institute emitted light beams, and changes its light path, arrives galvanometer, the swing of control system control galvanometer, and galvanometer changes light path by swing, thereby realizes scribing among a small circle, the focusing of f-θ scanning lens calibration of laser; Rotation platform is changed workpiece by rotation, and feeding platform driven rotary platform is realized scribing on a large scale; Control system is controlled respectively and is adjusted slide rail and horizontal adjusting slide rail up and down and realize up and down or horizontal movement, the laser head position of adjusting, thus adjust the distance on laser head and table mechanism plane.
The utility model can carry out the scribing of complex curve, complicated shape, is particularly suitable for the scribing of thin-film solar cells, LED substrate, flexible PCB and the various glass materials of small size.
Compared with prior art, the utlity model has following advantage and beneficial effect:
1, the utility model adopts adjustment sliding track mechanism and two laser head to be used in combination, and makes two laser heads to regulate, and when satisfying the scribing needs, has also improved scribing efficient greatly, makes that simultaneously scribing is more flexible.
2, the utility model adopts the laser head that is provided with galvanometer, by the scribing of galvanometer focusing scanning, is particularly suitable for the line requirement of complex curve.
3, the utility model adopts rotation platform to carry out scribing processing, has not only improved scribing efficient, and is fit to very much the processing of small size workpiece.
4, the utility model can adopt have multi-wavelength, laser instrument (as: INNOSLAB laser instrument etc.) that light beam need not shaping, have extraordinary compatibility.
Description of drawings
Fig. 1 is the general structure schematic diagram of the utility model device.
The specific embodiment
Below in conjunction with embodiment and accompanying drawing the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment 1
As shown in Figure 1, this pair of laser head dicing device comprises light path system, adjusts sliding track mechanism, table mechanism and control system 1, two laser heads that described light path system comprises laser beam emitting device and is connected with described laser beam emitting device, two laser heads are separately fixed to be adjusted on the sliding track mechanism, adjust sliding track mechanism and be connected with table mechanism, table mechanism is arranged at the below of two laser heads; Described light path system, table mechanism and adjustment sliding track mechanism are connected with control system 1 respectively.
Described laser beam emitting device comprises laser instrument 2, beam expanding lens 3, reflective mirror 9 and the acousto-optic modulator 10 of light path connection successively, and described acousto-optic modulator 10 is connected by light path respectively with two laser heads.Described laser instrument 2 is INNOSLAB laser instrument (be the hybrid chamber slab laser of the part end pumping that proposed of German Edge Wave company, the pumping volume that this structure combines traditional end-face pump solid laser structure and effective coincidence of fundamental mode volume and thin-sheet laser combine with traditional lath).
As shown in Figure 1, the laser head that is positioned at the right side comprises speculum 6, galvanometer 5 and the f-θ scanning lens 4 of light path connection successively, the laser head that is positioned at the left side comprises speculum 14, galvanometer 15 and the f-θ scanning lens 16 of light path connection successively, described speculum 6 and speculum 14 all are connected by light path with acousto-optic modulator 10 respectively, f-θ scanning lens 4 and f-θ scanning lens 16 all respectively with adjust sliding track mechanism and be connected.
Described adjustment sliding track mechanism comprises the horizontal adjusting slide rail 11 that be arranged in parallel with table mechanism and adjusts slide rail up and down with vertically disposed two of table mechanism, adjusting slide rail up and down for two is respectively and adjusts slide rail 7 up and down and adjust slide rail 13 up and down, two slide blocks that have been slidingly connected on horizontal adjusting slide rail 11 are respectively slide block 8 and slide block 12; Adjust slide rail 7 and slide block 8 be slidingly connected (promptly being slidably mounted on the slide block 8) up and down, adjust slide rail 13 up and down and be slidingly connected (promptly being slidably mounted on the slide block 12), and adjust slide rail 7 up and down and adjust slide rail 13 up and down and be connected with f-θ scanning lens 16 with the f-θ scanning lens 4 of laser head respectively with slide block 12; Horizontal adjusting slide rail 11 is fixed in the table mechanism top by support.
Described table mechanism comprises rotation platform 17, feeding platform 18 and the pedestal 19 that from top to bottom sets gradually, and described rotation platform 17 is arranged on the below of two laser heads accordingly; Horizontal adjusting slide rail 11 is fixed in pedestal 19 tops by support.Rotation platform 17 is accurate rotation platform.
Described control system 1 comprises laser head controlling organization, workstation control system, CCD navigation system and galvanometer control system, described laser head controlling organization all is connected with the adjustment sliding track mechanism with the CCD navigation system, workstation control system is connected with table mechanism, and the galvanometer control system is connected with galvanometer 15 with galvanometer 5 in the laser head.
Described laser head controlling organization is three servomotors, three servomotors respectively be embedded in horizontal adjusting slide rail 11 in screw mandrel and be embedded in to adjust slide rail 7 up and down and adjust the interior screw mandrel of slide rail 13 up and down and be connected; Slide block 8 and slide block 12 all are connected with screw mandrel in the horizontal adjusting slide rail 11, and slide block 8 and slide block 12 are connected with adjusting slide rail 7 up and down and adjust the interior screw mandrel of slide rail 13 up and down respectively.The driven by servomotor screw mandrel, and under the drive of screw mandrel, realize between horizontal adjusting slide rail 11 and slide block 8 and the slide block 12 horizontal relative motion, up and down adjust relative motion up and down between slide rail 7 and the slide block 8, adjust relative motion up and down between slide rail 13 and the slide block 12 up and down, thereby the distance on adjustment laser head and table mechanism plane.
Described workstation control system comprises motion control card, servo-driver and the workbench servomotor that connects successively, and described workbench servomotor is connected with table mechanism.Described motion control card is controlled servomotor by servo-driver, to change the rotation and the feed motion of table mechanism.
Described CCD navigation system comprises image processing module and two CCD cameras; Described image processing module is connected with two CCD cameras respectively, and two CCD cameras are arranged at two lower ends of adjusting slide rail up and down respectively.Two CCD cameras are transferred to the operating mode image in the image processing module respectively; Described image processing module calculates workpiece translational motion amount, rotation amount, obtains the position of workpiece, to realize the location of workpiece.
The galvanometer control system comprises motion controller, digital to analog converter and motor, motor respectively with laser head in galvanometer 5 be connected with galvanometer 15; Described motion controller transfers signals in the motor by digital to analog converter, the swing of control galvanometer.
The operation principle of present embodiment: the light that laser instrument 2 emits expands bundle by beam expanding lens 3, changes light path by reflective mirror 9 again, enters acousto-optic modulator 10; Acousto-optic modulator 10 is divided into two light beam, enters two laser heads respectively; Speculum 6 and speculum 14 receive 10 emitted light beams of acousto-optic modulator, and change its light path, arrive galvanometer 5 and galvanometer 15, control system control galvanometer 5 and galvanometer 15 swings, galvanometer 5 and galvanometer 15 change light path by swing, thereby realize scribing among a small circle, the focusing of f-θ scanning lens 4 and f-θ scanning lens 16 calibration of laser; Rotation platform 17 is changed workpiece by rotation, and feeding platform 18 driven rotary platforms 17 are realized scribing on a large scale; Control system 1 controls respectively and adjust slide rail 7 up and down, adjust slide rail 13 and horizontal adjusting slide rail 11 up and down realizes up and down or horizontal movement, the laser head position of adjusting, thus adjust the distance on laser head and table mechanism plane.
Present embodiment can carry out the scribing of complex curve, complicated shape, is particularly suitable for the scribing of thin-film solar cells, LED substrate, flexible PCB and the various glass materials of small size.
Embodiment 2
Present embodiment except that following characteristics other structures with embodiment 1: described laser instrument is an optical fiber laser.
The foregoing description is the utility model preferred implementation; but embodiment of the present utility model is not restricted to the described embodiments; other any do not deviate from change, the modification done under spiritual essence of the present utility model and the principle, substitutes, combination, simplify; all should be the substitute mode of equivalence, be included within the protection domain of the present utility model.
Claims (10)
1. two laser head dicing devices, comprise light path system, adjust sliding track mechanism, table mechanism and control system, it is characterized in that: two laser heads that described light path system comprises laser beam emitting device and is connected with described laser beam emitting device, two laser heads are separately fixed to be adjusted on the sliding track mechanism, adjust sliding track mechanism and be connected with table mechanism, table mechanism is arranged at the below of two laser heads; Described light path system, table mechanism and adjustment sliding track mechanism are connected with control system respectively.
2. according to claim 1 pair of laser head dicing device, it is characterized in that: described laser beam emitting device comprises laser instrument, beam expanding lens, reflective mirror and the acousto-optic modulator of light path connection successively, and described acousto-optic modulator is connected by light path respectively with two laser heads.
3. according to claim 2 pair of laser head dicing device, it is characterized in that: described laser head comprises speculum, galvanometer and the f-θ scanning lens of light path connection successively, described speculum is connected by light path with acousto-optic modulator, and f-θ scanning lens is connected with the adjustment sliding track mechanism.
4. according to claim 1,2 or 3 described pairs of laser head dicing devices, it is characterized in that: described adjustment sliding track mechanism comprises the horizontal adjusting slide rail that be arranged in parallel with table mechanism and adjusts slide rail up and down with vertically disposed two of table mechanism that two slide blocks have been slidingly connected on the horizontal adjusting slide rail; Adjust slide rail up and down for two and be slidingly connected with two slide blocks respectively, and be connected with two laser heads respectively; The horizontal adjusting slide rail is fixed in the table mechanism top by support.
5. according to claim 4 pair of laser head dicing device is characterized in that: described table mechanism comprises rotation platform, feeding platform and the pedestal that from top to bottom sets gradually, and described rotation platform is arranged on the below of two laser heads accordingly; The horizontal adjusting slide rail is fixed in the pedestal top by support.
6. according to claim 4 pair of laser head dicing device, it is characterized in that: described control system comprises laser head controlling organization, workstation control system, CCD navigation system and galvanometer control system, described laser head controlling organization all is connected with the adjustment sliding track mechanism with the CCD navigation system, workstation control system is connected with table mechanism, and the galvanometer control system is connected with laser head.
7. according to claim 6 pair of laser head dicing device, it is characterized in that: described laser head controlling organization is three servomotors, three servomotors respectively be embedded in the horizontal adjusting slide rail in screw mandrel and be embedded in two screw mandrels of adjusting up and down in the slide rail and be connected; Two slide blocks are connected with screw mandrel in the horizontal adjusting slide rail, and are connected with two screw mandrels of adjusting up and down in the slide rail respectively.
8. according to claim 6 pair of laser head dicing device is characterized in that: described workstation control system comprises motion control card, servo-driver and the workbench servomotor that connects successively, and described workbench servomotor is connected with table mechanism.
9. according to claim 6 pair of laser head dicing device is characterized in that: described CCD navigation system comprises image processing module and two CCD cameras; Described image processing module is connected with two CCD cameras respectively, and two CCD cameras are arranged at two lower ends of adjusting slide rail up and down respectively.
10. according to claim 6 pair of laser head dicing device is characterized in that: described galvanometer control system comprises motion controller, digital to analog converter and the motor that connects successively, and motor is connected with two laser heads respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020507167 CN201783761U (en) | 2010-08-26 | 2010-08-26 | Scribing device with two laser heads |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020507167 CN201783761U (en) | 2010-08-26 | 2010-08-26 | Scribing device with two laser heads |
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| CN201783761U true CN201783761U (en) | 2011-04-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201020507167 Expired - Fee Related CN201783761U (en) | 2010-08-26 | 2010-08-26 | Scribing device with two laser heads |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102886607A (en) * | 2011-07-18 | 2013-01-23 | 南京通孚轻纺有限公司 | Seamless cutting method |
| CN104191043A (en) * | 2014-08-04 | 2014-12-10 | 东莞市桦徽电子科技有限公司 | Double-shaft precise dicing saw |
| CN105798469A (en) * | 2016-05-16 | 2016-07-27 | 广州广源激光科技有限公司 | Multi-laser-head laser cutting machine |
| CN106001920A (en) * | 2016-06-06 | 2016-10-12 | 成都市松川金属材料有限公司 | Laser cutting machine |
| CN106475688A (en) * | 2015-08-25 | 2017-03-08 | 安徽省鸿庆精机有限公司 | Laser cutting device |
| CN107030397A (en) * | 2017-05-19 | 2017-08-11 | 东莞市盛雄激光设备有限公司 | The cutter device and cutting method of a kind of composite substrate |
| CN107127458A (en) * | 2017-05-26 | 2017-09-05 | 东莞市盛雄激光设备有限公司 | The full-automatic double-ended ultraviolet cutting machine of double |
| CN107442951A (en) * | 2017-09-28 | 2017-12-08 | 张家港市旭华激光有限公司 | A kind of laser-beam drilling machine with swivel head |
| CN109262136A (en) * | 2018-11-05 | 2019-01-25 | 耿世超 | A kind of mobile laser welder of included weld polishing grinding |
| CN111481171A (en) * | 2020-04-03 | 2020-08-04 | 上海交通大学 | Multi-mode monitoring system and method for brain surgery |
| CN112622403A (en) * | 2020-12-11 | 2021-04-09 | 九江鑫星绝缘材料有限公司 | Cutting device for producing glass cloth laminated board |
-
2010
- 2010-08-26 CN CN 201020507167 patent/CN201783761U/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102886607B (en) * | 2011-07-18 | 2016-02-03 | 南京通孚轻纺有限公司 | seamless cutting method |
| CN102886607A (en) * | 2011-07-18 | 2013-01-23 | 南京通孚轻纺有限公司 | Seamless cutting method |
| CN104191043A (en) * | 2014-08-04 | 2014-12-10 | 东莞市桦徽电子科技有限公司 | Double-shaft precise dicing saw |
| CN106475688A (en) * | 2015-08-25 | 2017-03-08 | 安徽省鸿庆精机有限公司 | Laser cutting device |
| CN106475688B (en) * | 2015-08-25 | 2018-09-14 | 安徽省鸿庆精机有限公司 | Laser cutting device |
| CN105798469A (en) * | 2016-05-16 | 2016-07-27 | 广州广源激光科技有限公司 | Multi-laser-head laser cutting machine |
| CN105798469B (en) * | 2016-05-16 | 2017-09-05 | 广州广源激光科技有限公司 | A kind of many head laser cutting machine tools |
| CN106001920B (en) * | 2016-06-06 | 2018-04-03 | 浙江珊瑚机械有限公司 | A kind of laser cutting machine |
| CN106001920A (en) * | 2016-06-06 | 2016-10-12 | 成都市松川金属材料有限公司 | Laser cutting machine |
| CN107030397A (en) * | 2017-05-19 | 2017-08-11 | 东莞市盛雄激光设备有限公司 | The cutter device and cutting method of a kind of composite substrate |
| CN107127458A (en) * | 2017-05-26 | 2017-09-05 | 东莞市盛雄激光设备有限公司 | The full-automatic double-ended ultraviolet cutting machine of double |
| CN107442951A (en) * | 2017-09-28 | 2017-12-08 | 张家港市旭华激光有限公司 | A kind of laser-beam drilling machine with swivel head |
| CN109262136A (en) * | 2018-11-05 | 2019-01-25 | 耿世超 | A kind of mobile laser welder of included weld polishing grinding |
| CN111481171A (en) * | 2020-04-03 | 2020-08-04 | 上海交通大学 | Multi-mode monitoring system and method for brain surgery |
| CN112622403A (en) * | 2020-12-11 | 2021-04-09 | 九江鑫星绝缘材料有限公司 | Cutting device for producing glass cloth laminated board |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110406 Termination date: 20130826 |