CN106206335B - 具有悬垂部分的半导体封装及其制造方法 - Google Patents

具有悬垂部分的半导体封装及其制造方法 Download PDF

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CN106206335B
CN106206335B CN201510243509.3A CN201510243509A CN106206335B CN 106206335 B CN106206335 B CN 106206335B CN 201510243509 A CN201510243509 A CN 201510243509A CN 106206335 B CN106206335 B CN 106206335B
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joint sheet
virtual
joint
conducting wire
engagement
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CN106206335A (zh
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朴廷修
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SK Hynix Inc
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Hynix Semiconductor Inc
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Abstract

本发明提供具有悬垂部分的半导体封装及其制造方法。一种用于制造半导体封装的方法包括:在基板的形成有多个接合指和多个虚拟接合指的一个表面上设置结构体;通过在所述结构体之上堆叠邻近一个边缘形成有多个接合垫和多个虚拟接合垫的半导体芯片,使得所述一个边缘从所述结构体的侧表面伸出,来形成悬垂部分;形成多条虚拟引线,所述多条虚拟引线将虚拟接合垫与虚拟接合指电连接;以及在形成虚拟引线之后,形成多条导线,所述多条导线将接合垫与接合指电连接。

Description

具有悬垂部分的半导体封装及其制造方法
相关申请的交叉参考
本申请要求于2014年11月19日提交到韩国知识产权局的韩国专利申请No.10-2014-0161293的优先权,该韩国专利申请通过引用整体并入本文。
技术领域
多种实施方式通常涉及半导体技术,并且更特别地,涉及具有悬垂部分的半导体封装及其制造方法。
背景技术
目前,电子工业倾向于以实现轻重量、微型化、高速操作、多功能性以及高性能的方式,以降低的成本、高度可靠地制造产品。一种封装组装技术被认为是用于实现设计这样的产品的目的的重要技术之一。
封装组装技术是为了保护具有在其中形成集成电路的半导体芯片不受外部环境影响,并且为了容易地将半导体芯片安装到基板上,使得可以保证半导体芯片的操作可靠性。
在封装组装技术中,作为用于电连接半导体芯片和基板的方案之一,使用一种引线接合方案,其中,半导体芯片和基板使用导线彼此电连接。
发明内容
在一个实施方式中,一种用于制造半导体封装的方法可以包括:在基板的形成有多个接合指(bond fingure)和多个虚拟接合指的一个表面上设置结构体。该方法还可以包括:通过在所述结构体之上堆叠邻近一个边缘形成有多个接合垫(bonding pads)和多个虚拟接合垫的半导体芯片,使得所述一个边缘从所述结构体的侧表面伸出,来形成悬垂部分。此外,该方法可以包括:形成多条虚拟引线,该多条虚拟引线将虚拟接合垫与虚拟接合指电连接。另外,该方法可以包括:在形成虚拟引线之后,形成电连接接合垫与接合指的多条导线。
在一个实施方式中,半导体封装可以包括基板,该基板在一个表面上具有多个接合指和多个虚拟接合指。半导体封装还可以包括设置在所述一个表面上的结构体。半导体封装还可以包括的半导体芯片,该半导体芯片堆叠在结构体上并且具有从结构体的侧表面伸出的悬垂部分。半导体封装还可以包括多个接合垫和配置在悬垂部分上的多个虚拟接合垫。半导体封装还可以包括电连接虚拟接合垫和虚拟接合指的多条虚拟引线。此外,半导体封装还可以包括电连接接合垫和接合指的多条导线。
附记:
附记1、一种用于制造半导体封装的方法,该方法包括:
在基板的形成有多个接合指和多个虚拟接合指的一个表面之上设置结构体;
通过在所述结构体之上堆叠邻近一个边缘形成有多个接合垫和多个虚拟接合垫的半导体芯片,使得所述一个边缘从所述结构体的侧表面伸出,来形成悬垂部分;
形成多条虚拟引线,所述多条虚拟引线将所述虚拟接合垫与所述虚拟接合指电连接;以及
在形成所述虚拟引线之后,形成多条导线,所述多条导线将所述接合垫与所述接合指电连接。
附记2、根据附记1所述的方法,其中,所述虚拟接合垫被连续地布置在所述悬垂部分上。
附记3、根据附记1所述的方法,其中,所述虚拟接合垫与所述半导体芯片断开电连接。
附记4、根据附记1所述的方法,其中,每个所述虚拟接合垫与所述接合垫中的用于电源电压的一个或更多个接合垫以及用于地电压的一个或更多个接合垫中的任一个电连接。
附记5、根据附记1所述的方法,其中,所述虚拟接合垫被连续地布置在所述接合垫的一端的外侧。
附记6、根据附记1所述的方法,其中,执行所述多条导线的形成,使得从所述多个接合垫中的紧挨着所述虚拟接合垫定位的所述接合垫中的一个开始,在背离所述虚拟接合垫的方向上连续地形成所述导线。
附记7、根据附记1所述的方法,其中,所述虚拟接合垫被连续地布置在所述接合垫之间。
附记8、根据附记7所述的方法,其中,执行所述多条导线的形成,使得从最接近所述虚拟接合垫的一侧定位的接合垫中的一个开始,根据设置在所述虚拟接合垫的所述一侧的接合垫的布置顺序,连续地形成所述导线,并且从最接近所述虚拟接合垫的另一侧定位的接合垫中的一个开始,根据设置在所述虚拟接合垫的所述另一侧的接合垫的另一个布置顺序,连续地形成所述导线。
附记9、根据附记1所述的方法,其中,布置2至4个所述虚拟接合垫。
附记10、根据附记1所述的方法,其中,所述结构体包括附加半导体芯片、虚拟芯片以及绝缘体中的至少任一个。
附记11、根据附记1所述的方法,其中,每个所述虚拟接合指与用于地电压的一个或更多个接合指和用于电源电压的一个或更多个接合指中的任一个电连接。
附记12、根据附记1所述的方法,其中,所述虚拟接合指是电浮置的。
附记13、根据附记1所述的方法,其中,所述虚拟引线由与所述导线相同的材料形成。
附记14、一种半导体封装,所述半导体封装包括:
基板,所述基板在一个表面上具有多个接合指和多个虚拟焊接指;
结构体,所述结构体被设置在所述一个表面之上;
半导体芯片,所述半导体芯片被堆叠在所述结构体之上,并且具有从所述结构体的侧表面伸出的悬垂部分;
多个接合垫和多个虚拟接合垫,所述多个接合垫和多个虚拟接合垫被配置在所述悬垂部分上;
多条虚拟引线,所述多条虚拟引线将所述虚拟接合垫与所述虚拟接合指电连接;以及
多条导线,所述多条导线将所述接合垫与所述接合指电连接。
附记15、根据附记14所述的半导体封装,其中,所述虚拟接合垫被连续地布置在所述悬垂部分上。
附记16、根据附记14所述的半导体封装,其中,所述虚拟接合垫与所述半导体芯片断开电连接。
附记17、根据附记14所述的半导体封装,其中,每个所述虚拟接合垫与所述接合垫中的用于电源电压的一个或更多个接合垫以及用于地电压的一个或更多个接合垫中的任一个电连接。
附记18、根据附记14所述的半导体封装,其中,所述虚拟接合垫被连续地布置在所述接合垫的一端的外侧。
附记19、根据附记14所述的半导体封装,其中,所述虚拟接合垫被连续地布置在所述接合垫之间。
附记20、根据附记14所述的半导体封装,其中,布置有2至4个所述虚拟接合垫。
附记21、根据附记14所述的半导体封装,其中,所述结构体包括附加半导体芯片、虚拟芯片以及绝缘体中的至少任一个。
附记22、根据附记14所述的半导体封装,其中,每个所述虚拟接合指与所述基板的用于地电压的一个或更多个接合指以及用于电源电压的一个或更多个接合指中的任一个电连接。
附记23、根据附记14所述的半导体封装,其中,所述虚拟接合指是电浮置的。
附记24、根据附记14所述的半导体封装,其中,所述虚拟引线由与所述导线相同的材料形成。
附图说明
图1到图3是按照制造顺序示出根据实施方式的半导体封装的示例的表示的立体图。
图4是示出根据实施方式的半导体封装的示例的表示的立体图。
图5是示出根据实施方式的半导体封装的示例的表示的立体图。
图6A是例如通过测量和记录在引线接合处理期间发生的半导体芯片的悬垂部分的偏转值获得的曲线图。
图6B是示出在图6A的测试中使用的半导体芯片的示例的表示的平面图。
图7是示出根据多种实施方式的包括半导体封装的电子系统的示例的表示的框图。
图8是示出根据多种实施方式的包括半导体封装的存储卡的示例的表示的框图。
具体实施方式
在下文中,以下将通过多种实施方式,参考附图,描述具有悬垂部分的半导体封装及其制造方法。
参考图1,制备基板10,其中,在一个表面10A上形成多个接合指11和多个虚拟接合指12。
基板10可以是印刷电路板(PCB)。基板10的接合指11可以包括用于数据的一个或更多个接合指、用于地址的一个或更多个接合指、用于时钟信号的一个或更多个接合指、用于控制信号的一个或更多个接合指、用于电源电压的一个或更多个接合指、用于地电压的一个或更多个接合指等。每个虚拟接合指12可以与用于电源电压的接合指和用于地电压的接合指中的任一个接合指电连接。还可以从用于电源电压的接合指或用于地电压的接合指,给每个虚拟接合指12提供电源电压或地电压。虚拟接合指12可以不与接合指11电连接,而是电浮置的。
尽管未示出,但是可以在基板10的背离一个表面10A的另一表面上,形成多个电极垫。基板10可以包括电路布线线路,该电路布线线路将在一个表面10A上形成的接合指11与在另一表面上形成的电极垫电连接。
尽管实施方式示出了基板10由印刷电路板构造的示例,但是应注意,实施方式的技术精神不限于这样的示例。例如,基板10可以是引线框(lead frame)、柔性基板以及中介层(interposer)中的任一种。
结构体20被设置在基板10的一个表面10A上。
结构体20可以是绝缘体(诸如,阻焊膜)、半导体芯片以及虚拟芯片中的至少任一个。在一个实施方式中,示出了结构体20由阻焊膜构造。
尽管未示出,但是当结构体20是半导体芯片时,半导体芯片可以与基板10电连接。为了与基板10电连接,半导体芯片在上面设置有接合垫的前表面上可以具有多个凸块。此外,半导体芯片可以以凸块为媒介,被倒装接合到基板10的一个表面10A上。半导体芯片可以以粘接构件为媒介,被附着到基板10的一个表面10A上。半导体芯片还可以以导线为媒介,与基板10电连接。当结构体20是虚拟芯片时,虚拟芯片可以以粘接构件为媒介,被附着到基板10的一个表面10A上。
半导体芯片30的后表面30B被形成有多个接合垫31和与半导体芯片30的前表面30A上的一个边缘邻近的多个虚拟接合垫32,半导体芯片30的后表面30B以粘接构件40为媒介被附着到结构体20上,使得半导体芯片30的一个边缘部分在图1中定义的(+)y方向上,从结构体20的侧表面伸出。下面,从结构体20的侧表面伸出的半导体芯片30的一个边缘部分将被定义为悬垂部分OP。
可以在半导体芯片30中形成由集成电路配置的电路块,其中,芯片的操作所需要的各个元件(诸如,晶体管、电阻器、电容器、熔丝等)彼此电连接。作为电路块的外部触点的用于与外部电连接的接合垫31可以与电路块电连接。半导体芯片30的接合垫31可以包括用于数据的一个或更多个接合垫、用于地址的一个或更多个接合垫、用于时钟信号的一个或更多个接合垫、用于控制信号的一个或更多个接合垫、用于电源电压的一个或更多个接合垫、用于地电压的一个或更多个接合垫等。
虚拟接合垫32可以形成在悬垂部分OP上并且由2至4个接合垫配置。在一个实施方式中,接合垫31可以偏向(+)x方向上被布置在悬垂部分OP上。此外,虚拟接合垫32可以紧挨着接合垫31中的、当在(-)x方向上查看时位于最外面的接合垫31,在(-)x方向上连续地布置在悬垂部分OP上。图1还示出(-)y方向。
如下面将描述的,虚拟接合垫32被形成用于虚拟引线51的接合。此外,虚拟接合垫32被构造成不对半导体芯片30的操作以及使用半导体芯片30的产品施加实质性影响。为此,虚拟接合垫32可以与半导体芯片30(并且准确地为半导体芯片30的电路块)断开电连接。在一个实施方式中,每个虚拟接合垫32都可以被形成为与半导体芯片30的接合垫31中的用于电源电压的一个或更多个接合垫或用于地电压的一个或更多个接合垫电连接。
尽管在实施方式中示出,接合垫31和虚拟接合垫32被布置在一行中,但是应注意,可以将接合垫31和虚拟接合垫32布置在至少两行中。
参考图2,使用接合工具的毛细管(未示出),通过引线接合处理,形成将虚拟接合垫32和虚拟接合指12电连接的虚拟引线51。
参考图3,在形成虚拟引线51之后,使用毛细管,通过引线接合处理,形成将接合垫31和接合指11电连接的导线52。可以从紧挨着虚拟接合垫32定位的接合垫31开始,在背离虚拟接合垫32的方向上,执行用于形成导线52的引线接合处理。在实施方式中,可以按照(+)x方向上的接合垫31的布置顺序或者根据由图3中示出的箭头指示的方向的顺序,连续地执行引线接合处理。
虚拟引线51和导线52可以由相同材料形成。该材料可以是例如铝(Al)、铜(Cu)、银(Ag)、金(Au)、以及其合金中的任一种。
当执行用于形成虚拟引线51的引线接合处理时,偏转(deflection)现象可能出现,其中,半导体芯片30的悬垂部分OP通过毛细管的压制力上下偏转。因此,一个或更多个虚拟引线51可能不被接合到虚拟接合垫32。然而,虚拟接合垫32不对半导体芯片30的操作以及使用半导体芯片30的产品施加实质性影响。
在形成导线52的引线接合处理中,由于毛细管的压制力被接合到虚拟接合垫32的虚拟引线51的张力抵消,偏转被抑制。因此,可以将导线52牢固地接合到接合垫31上。简言之,结果可以抑制由于偏转导致的导线52接合失败的发生。
在基板10的一个表面10A上形成模塑部件60,以覆盖结构体20、半导体芯片30、虚拟引线51、以及导线52。此外,在基板10的另一表面上形成的电极垫上,可以形成外部连接电极(诸如,焊料球)。
在下文中,将描述由上述方法制造的半导体封装的结构。
再次参考图3,根据实施方式的半导体封装可以包括基板10、结构体20、半导体芯片30、多个接合垫31、多个虚拟接合垫32、虚拟接合线51、接合线52。根据实施方式的半导体封装还可以包括模塑部件60。
基板10可以是印刷电路板(PCB)。基板10在它的一个表面10A上可以具有多个接合指11、以及多个虚拟接合指12。接合指11可以包括用于数据的一个或更多个接合指、用于地址的一个或更多个接合指、用于时钟信号的一个或更多个接合指、用于控制信号的一个或更多个接合指、用于电源电压的一个或更多个接合指、用于地电压的一个或更多个接合指等。每个虚拟接合指12都可以与用于电源电压的一个或更多个接合指以及用于地电压的一个或更多个接合指中的任一个电连接。此外,可以从用于电源电压的一个或更多个接合指或从用于地电压的一个或更多个接合指给每个虚拟接合指12提供电源电压或地电压。虚拟接合指12可以不与接合指11电连接,而是电浮置的。
可以在基板10的背离一个表面10A的另一表面上形成多个电极垫。基板10可以包括电路布线线路,其电连接在一个表面10A上形成的接合指11与在另一表面上形成的电极垫。
尽管实施方式示出了基板10是印刷电路板的示例,但是应该注意,实施方式的技术精神不限于这样的示例。例如,基板10可以是引线框、柔性基板以及中介层等中的任一种。
结构体20可以设置在基板10的一个表面10A上。
结构体20可以是绝缘体(诸如,阻焊膜)、半导体芯片以及虚拟芯片中的至少任一个。在实施方式中,示出了结构体20由阻焊膜构造。尽管未示出,但是当结构体20是半导体芯片时,半导体芯片可以与基板10电连接。为了与基板10电连接,半导体芯片可以在上面设置有接合垫的前表面上具有多个凸块。此外,半导体芯片可以以凸块为媒介,被倒装接合到基板10的一个表面10A上。半导体芯片可以是以粘接构件为媒介,被附着到基板10的一个表面10A上。此外,半导体芯片还可以以导线为媒介,与基板10电连接。当结构体20是虚拟芯片时,虚拟芯片可以以粘接构件为媒介,被附着到基板10的一个表面10A上。
半导体芯片30可以具有前表面30A和背离前表面30A的后表面30B,在前表面30A上设置有电路块。
可以从半导体芯片30的前表面30A到半导体芯片30的部分深度处形成电路块。电路块还可以包括半导体存储器器件或/和半导体逻辑器件。电路块还可以由集成电路配置,其中,芯片的操作所必需的各个元件(诸如,晶体管、电阻器、电容器、熔丝等)彼此电连接。
可以邻近并沿着半导体芯片30的前表面30A上的一个边缘形成接合垫31。接合垫31作为用于与外部电连接的电路块的外部触点的可以与电路块电连接。
可以在半导体芯片30的后表面30B上形成粘接构件40。半导体芯片30可以以粘接构件40为媒介被附着到结构体20上,使得半导体芯片30的、在上面设置有多个接合垫31的一个边缘部分在图3中定义的(+)y方向上从结构体20的侧表面伸出。特别地,半导体芯片30可以具有从结构体20的侧表面伸出的悬垂部分OP。此外,可以在悬垂部分OP上设置多个接合垫31。
虚拟接合垫32可以形成在悬垂部分OP上,并且由2至4个接合垫构造。在实施方式中,接合垫31可以偏向(+)x方向被布置在悬垂部分OP上。此外,虚拟接合垫32可以紧挨着接合垫31中的当在(-)x方向上查看时位于最外面的接合垫31,在(-)x方向上连续地布置在悬垂部分OP上。
虚拟接合垫32被形成用于虚拟引线51的接合。虚拟接合垫32还被构造成不对半导体芯片30的操作以及使用半导体芯片30的产品施加实质性影响。为此,虚拟接合垫32可以与半导体芯片30(并且准确地为半导体芯片30的电路块)断开电连接。每个虚拟接合垫32都可以被形成为与半导体芯片30的接合垫31中的用于电源电压的一个或更多个接合垫或用于地电压的一个或更多个接合垫中的任一个电连接。
可以将虚拟引线51电连接在虚拟接合垫32和虚拟接合指12之间。此外,导线52可以被电连接在接合垫31和接合指11之间,以将接接合垫31和接合指11电连接。虚拟引线51和导线52可以由相同材料形成。可以使用例如铝(Al)、铜(Cu)、银(Ag)、金(Au)以及其合金中的任一种作为该材料。
可以在基板10的一个表面10A上形成模塑部件60,以覆盖结构体20、半导体芯片30、虚拟引线51以及导线52。尽管未示出,但是可以在基板10的另一表面上形成的电极垫上形成外部连接电极(诸如,焊料球)。
以上参考图1到图3描述的实施方式示出了一个示例,其中,接合垫31可以偏向(+)x方向被布置在悬垂部分OP上,并且虚拟接合垫32可以紧挨着接合垫31中的当在(-)x方向上查看时位于最外面的接合垫31,在(-)x方向上连续地布置在悬垂部分OP上。然而,应该注意,实施方式不限于这样的示例,并且可以对多种形状作出改变。这样的经修改的实施方式从参考图4和图5作出的以下说明将变得明显。
在以下说明中,将省略对与以上参考图1到图3描述的实施方式中的组成元件相同的组成元件的重复描述。此外,将使用相同的术语和相同的参考标号指示相同或相似的组成元件。
参考图4,接合垫31可以偏向(-)x方向被布置在悬垂部分OP上。此外,虚拟接合垫32可以紧挨着接合垫31中的、当在(+)x方向上查看时位于最外面的接合垫31,在(+)x方向上连续地布置在悬垂部分OP上。在该情况下,在形成电连接虚拟接合垫32和虚拟接合指12的虚拟引线51之后,可以从紧挨着虚拟接合垫32定位的接合垫31开始,在背离虚拟接合垫32的(-)x方向上,执行形成导线52的引线接合处理。在一个实施方式中,可以从最接近虚拟接合垫32定位的接合垫31开始,按照接合垫31在(-)x方向上的布置顺序,或者根据由图4中示出的箭头指示的方向限定的顺序,连续地执行引线接合处理。
参考图5,虚拟接合垫32可以被布置在接合垫31之间。详细地,虚拟接合垫32可以被连续地布置在悬垂部分OP的中央部分。此外,接合垫31可以被布置在在悬垂部分OP上虚拟接合垫32的两侧。在该情况下,在形成电连接虚拟接合垫32和虚拟接合指12的虚拟引线51之后,可以执行用于形成导线52的引线接合处理,使得从紧挨着虚拟接合垫32定位的接合垫31开始,根据接合垫31在背离虚拟接合垫32的每个方向上的布置顺序,连续地形成导线52。在一个实施方式中,在形成电连接虚拟接合垫32和虚拟接合指12的虚拟引线51之后,可以从在(+)x方向上最接近虚拟接合垫32定位的接合垫31开始,按照根据(+)x方向的接合垫31的布置顺序,或者按照根据由图5中所示的箭头①指示的方向的顺序,连续地执行用于形成导线52的引线接合处理。此外,然后可以从在(-)x方向上最接近虚拟接合垫32定位的接合垫31开始,按照根据(-)x方向的接合垫31的布置顺序,或者按照根据由图5中所示的箭头②指示的方向的顺序,连续地执行引线接合处理。反之,在一个实施方式中,在形成电连接虚拟接合垫32和虚拟接合指12的虚拟引线51之后,可以从在(-)x方向上最接近虚拟接合垫32定位的接合垫31开始,按照根据(-)x方向的接合垫31的布置顺序,或者按照根据由图5中所示的箭头②指示的方向的顺序,连续地执行用于形成导线52的引线接合处理。此外,然后可以从在(+)x方向上最接近虚拟接合垫32定位的接合垫31开始,按照根据(+)x方向的接合垫31的布置顺序,或者按照根据由图5中所示的箭头①指示的方向的顺序,连续地执行引线接合处理。
尽管在以上参考图1到图5描述的实施方式中,作为示例示出了虚拟接合垫32被连续地布置,但是应该注意,实施方式不限于这样的示例。换言之,虚拟接合垫32可以不被连续地布置。此外,在虚拟接合垫32之间可以插入1或2个接合垫31。
根据多种实施方式,在形成电连接半导体芯片和基板的导线之前,形成连接半导体芯片和基板的虚拟引线。结果,由于当将导线接合到半导体芯片时,毛细管的压制力被虚拟引线的张力抵消,可以防止半导体芯片的悬垂部分上下偏转。因此,可以抑制由于偏转导致的导线接合失败的发生。此外,可以提高制造产量。
参考图6A,示出了例如通过测量和记录在用于测试的引线接合处理期间发生的半导体芯片的悬垂部分的偏转值获得的曲线图。参考图6B,还示出了例示在测试中使用的半导体芯片的示例的表示的平面图。
在测试中使用的半导体芯片30的厚度是42μm。此外,半导体芯片30的悬垂部分OP的伸出宽度W是900μm。
Leg1是当按照从邻近悬垂部分OP的一端定位的第一个接合垫到邻近悬垂部分OP的另一端定位的第五十个接合垫的接合垫布置顺序连续地执行引线接合处理时,通过测量和记录偏转值获得的曲线图。Leg2是当按照从第五十个接合垫到第一个接合垫的接合垫布置顺序连续地执行引线接合处理时,通过测量和记录偏转值获得的曲线图。此外,Leg3是当按照从位于悬垂部分OP的中心处的第二十四个接合垫到第一个接合垫的接合垫布置顺序连续地执行引线接合处理,并且然后按照从第二十五个接合垫到第五十个接合垫的接合垫布置顺序连续地执行引线接合处理时,通过测量和记录偏转值获得的曲线图。
在Leg1的情况下,可以看出,偏转主要发生在最初执行引线接合的第一个接合垫到第三个接合垫中,然后逐步地减少,并且基本不发生在第五个接合垫到第五十个接合垫中。在Leg2的情况下,可以看出,偏转主要发生在最初执行引线接合的第五十个接合垫到第四十八个接合垫中,然后逐步地减少,并且基本不发生在第四十五个接合垫到第一个接合垫中。在Leg3的情况下,可以看出,偏转主要发生在最初执行引线接合的第二十四个接合垫到第二十一个接合垫中,然后逐步地减少,并且基本不发生在第十九个接合垫到第一个接合垫以及第二十五个接合垫到第五十个接合垫中。简言之,可以看出,虽然偏转主要发生在最初执行引线接合的1到4个接合垫中时,但当随后执行引线接合时,偏转通过先前形成的引线的张力被抑制。通过这样的实验结果,可以看出,虽然在上述实施方式中,当形成虚拟引线51时在半导体芯片30中发生了偏转,但是当形成导线52时,偏转通过虚拟引线51的张力受到抑制。
上述半导体封装可以被应用于多种半导体装置以及封装模块等。
参考图7,根据上述多种实施方式的半导体封装可以被应用于电子系统710。电子系统710可以包括控制器711、输入/输出单元712、以及存储器713。控制器711、输入/输出单元712、以及存储器713可以通过提供数据传送路径的总线715彼此电连接。
例如,控制器711可以包括至少一个微处理器、至少一个数字信号处理器、至少一个微控制器、以及能够执行与这些组件相同功能的至少一个逻辑电路。存储器713可以包括根据多种实施方式的半导体封装中的至少一个。输入/输出单元712可以包括选自小键盘、键盘、显示装置、触摸屏等中的至少一个。作为存储数据的装置的存储器713可以存储数据或/和将由控制器711等执行的指令。
存储器713可以包括易失性存储装置(诸如,DRAM)或/和非易失性存储装置(诸如,闪存)。例如,闪存可以被安装到信息处理系统(诸如,移动终端或台式计算机)。闪存可以被配置为固态硬盘(SSD)。在该情况下,电子系统710可以在闪存系统中稳定地存储大量数据。
电子系统710可以进一步包括被设定为能够向通信网络发送数据并且从通信网络接收数据的接口714。接口714可以是有线或无线类型的。例如,接口714可以包括天线、有线收发器或无线收发器。
电子系统710可以被理解为移动系统、个人计算机、用于工业用途的计算机或执行多种功能的逻辑系统。例如,移动系统可以是个人数字助理(PDA)、便携式计算机、平板电脑、移动电话、智能电话、无线电话、膝上型计算机、存储卡、数字音乐系统以及信息发送/接收系统等中的任一个。
其中,电子系统710是能够执行无线通信的装置,电子系统710可以在通信系统中使用,诸如,CDMA(码分多址)、GSM(全球移动通信系统)、NADC(北美数字蜂窝)、E-TDMA(增强的时分多址)、WCDMA(宽带码分多址)、CDMA2000、LTE(长期演进)以及Wibro(无线宽带因特网)。
参考图8,可以以存储卡800的形式,提供根据多种实施方式的半导体封装。例如,存储卡800可以包括存储器810(诸如,非易失性存储装置)以及存储器控制器820。存储器810和存储器控制器820可以存储数据或读取所存储的数据。
存储器810可以包括应用根据实施方式的半导体封装的非易失性存储装置中的至少任一种。此外,存储器控制器820可以响应于来自主机832的读取/写入请求,控制存储器810读取所存储的数据或存储数据。
尽管以上描述了多种实施方式,但是本领域的技术人员将理解,所描述的实施方式仅作为举例。因此,描述的具有悬垂部分的半导体封装及其制造方法不应该基于上述实施方式被限制。

Claims (11)

1.一种用于制造半导体封装的方法,该方法包括:
在基板的一个表面之上设置结构体,所述基板形成有多个接合指和多个虚拟接合指;
通过在所述结构体之上堆叠半导体芯片使得一个边缘从所述结构体的侧表面伸出来形成悬垂部分,所述半导体芯片形成有位于所述悬垂部分上且临近所述一个边缘的多个接合垫和多个虚拟接合垫;
形成多条虚拟引线,所述多条虚拟引线将所述多个虚拟接合垫与所述多个虚拟接合指分别电连接;以及
在形成所述多条虚拟引线之后,形成多条导线,所述多条导线将所述多个接合垫与所述多个接合指分别电连接,并且
其中,所述多个虚拟接合垫被连续地布置在所述多个接合垫之间,并且执行所述多条导线的形成,使得从最接近第一多个虚拟接合垫的一侧定位的多个接合垫中的一个开始,根据设置在所述多个虚拟接合垫的一侧的第一多个接合垫的布置顺序,连续地形成多条各导线,并且从最接近第二多个虚拟接合垫的另一侧定位的多个接合垫中的一个开始,根据设置在所述多个虚拟接合垫的另一侧的第二多个接合垫的另一布置顺序,连续地形成所述多条各导线。
2.根据权利要求1所述的方法,其中,所述多个虚拟接合垫被连续地布置在所述悬垂部分上。
3.根据权利要求1所述的方法,其中,所述多个虚拟接合垫与所述半导体芯片断开电连接。
4.根据权利要求1所述的方法,其中,所述多个虚拟接合垫中的每一个与所述多个接合垫的用于电源电压的一个或更多个接合垫中的任一个电连接或与所述多个接合垫的用于地电压的一个或更多个接合垫中的任一个电连接。
5.根据权利要求1所述的方法,其中,所述多个虚拟接合垫被连续地布置在位于所述多个接合垫的一端处的接合垫的外侧。
6.根据权利要求1所述的方法,其中,执行所述多条导线的形成,使得从所述多个接合垫中的与在所述多个虚拟接合垫的一端处定位的虚拟接合垫相邻的接合垫中的一个开始,在背离所述多个虚拟接合垫的方向上连续地形成所述多条导线。
7.根据权利要求1所述的方法,其中,所述多个虚拟接合垫被布置为2至4个。
8.根据权利要求1所述的方法,其中,所述结构体包括附加半导体芯片、虚拟芯片以及绝缘体中的至少任一个。
9.根据权利要求1所述的方法,其中,所述多个虚拟接合指中的每一个与所述多个接合指中的用于地电压的一个或更多个接合指中的任一个电连接或与所述多个接合指中的用于电源电压的一个或更多个接合指中的任一个电连接。
10.根据权利要求1所述的方法,其中,所述多个虚拟接合指是电浮置的。
11.根据权利要求1所述的方法,其中,所述多条虚拟引线由与所述多条导线的材料相同的材料形成。
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CN103066052A (zh) * 2011-10-21 2013-04-24 爱思开海力士有限公司 半导体封装体和堆叠半导体封装体
CN103383928A (zh) * 2012-05-03 2013-11-06 爱思开海力士有限公司 半导体芯片及半导体封装体

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